CN209633063U - A kind of suction means in semiconductor test - Google Patents

A kind of suction means in semiconductor test Download PDF

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Publication number
CN209633063U
CN209633063U CN201821711244.0U CN201821711244U CN209633063U CN 209633063 U CN209633063 U CN 209633063U CN 201821711244 U CN201821711244 U CN 201821711244U CN 209633063 U CN209633063 U CN 209633063U
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China
Prior art keywords
sealing frame
fixing seat
frame
suction means
semiconductor test
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CN201821711244.0U
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Chinese (zh)
Inventor
王浩
王刚
孙益生
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JIANGSU ACETEC SEMICO-NDUCTOR Co Ltd
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JIANGSU ACETEC SEMICO-NDUCTOR Co Ltd
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Abstract

The utility model discloses a kind of suction means in semiconductor test;Fixing seat is drawn including one;The center position of the absorption fixing seat is provided with a sucker;The upper end of the sucker is connected and installed with suction pipe;The suction pipe is connected on vacuum equipment;And draw the sealing frame for being then gradually provided with several layers on the lower end surface of fixing seat outward centered on sucker;The lower end of the sealing frame is opening design, and the adjacent sealing frame in its inside is integrally included by each sealing frame;And the sealing frame is set as detachably installing with the lower end surface for drawing fixing seat.The vacsorb range of suction means is adjustable in the present apparatus.

Description

A kind of suction means in semiconductor test
Technical field
The utility model relates to field of semiconductor devices, specifically a kind of suction means in semiconductor test.
Background technique
In semiconductor test, the position of mechanical arm transfer various products is often used, mechanical arm is logical in the prior art It is often the transfer that the position of product is completed using two kinds of forms, first is that its structure of this form is logical by the crawl of mechanical arm The complexity often compared, another is exactly to generate negative pressure absorbing product by vacuum equipment to carry out position transfer;Such as semiconductor The transfer of the products such as charging tray, pallet, which passes through after suction device is drawn, to be shifted;It and is usually logical in existing suction means Cross setting sucker structure cooperation vacuum equipment and draw and fix, as soon as but existing sucker structure there is a biggish defect, Be the size dimension of the products such as existing charging tray pallet be it is unfixed, vary;And the absorption range of sucker be it is fixed, It can not adjust, biggish product is not easy to be drawn fixation if the vacsorb range of sucker is smaller;And such as Fruit product size is smaller, equally can not normal extraction, be merely able to draw range product just;It is very inconvenient.
Utility model content
Purpose of utility model: in view of the deficiency of the prior art, a kind of suction in semiconductor test is provided Take device.
Technical solution: in order to realize that above-mentioned purpose of utility model, the technical solution adopted in the utility model are as follows: Yi Zhongyong Suction means in semiconductor test;Fixing seat is drawn including one;The center position of the absorption fixing seat is arranged There is a sucker;The upper end of the sucker is connected and installed with suction pipe;The suction pipe is connected on vacuum equipment;And it draws Then gradually it is provided with the sealing frame of several layers on the lower end surface of fixing seat outward centered on sucker;The lower end of the sealing frame It is opening design, and the adjacent sealing frame in its inside is integrally included by each sealing frame;And the sealing frame It is set as detachably installing with the lower end surface for drawing fixing seat;Draw on the lower end surface of fixing seat in its innermost sealing frame with And filled with ventilative material between adjacent sealing frame;The upper end of the ventilative material of each layer is installed in the lower end surface for drawing fixing seat On, and the avris position of the ventilative material of each layer is then unfixed separate installment structure with sealing frame, is located at innermost close The ventilative material filled in envelope frame covers the sucker for drawing fixing seat.
Preferably, the height of all sealing frames is all the same;And the thickness of the ventilative material is then greater than sealing frame Highly, the height expected of breathing freely is stretched out from sealing frame.
Preferably, the thickness that the end of the ventilative material is stretched out from sealing frame is set as 2-6mm.
Preferably, the sealing frame is set as square frame structure, and installed entirely through four frame sides, And the linear distance between adjacent seals frame is identical.
It preferably, the sealing frame is provided in round frame structure, and is the mounting structure of integral type, and phase Linear distance between adjacent sealing frame is identical.
Preferably, the ventilative material is set as sponge, and the ventilative material is fixed on absorption admittedly by glue The lower end surface of reservation.
Preferably, the lower end surface of the absorption fixing seat is provided with card slot corresponding with sealing frame position;And institute Then there is the fixture block being used cooperatively with card slot in the upper end for the sealing frame stated;The sealing frame is removable by the cooperation of card slot and fixture block Unload installation.
Preferably, being also provided with magnet on the card slot and fixture block, pass through the corresponding detachable installation of magnet.
The utility model has the advantages that the utility model compared with prior art, has the advantage that
(1) the vacsorb range of suction means is adjustable in the present apparatus;It draws and is provided with several layers in fixing seat Sealing frame, be provided in these sealing frames and draw sponge, draw sponge and be mounted on the lower end for drawing fixing seat, it is most interior Sucker is included by the absorption sponge of side, and the present apparatus mainly adjusts different vacuum by the way that the setting position of sealing frame is different Draw range, when only innermost sealing frame be mounted on draw fixing seat on when, by vacuum equipment generate negative pressure via The conduction of suction pipe and sucker can only generate negative pressure in the sponge in the sealing frame, because the region in outside is stopped by the sealing frame Firmly, outside will not generate negative pressure, and the absorption sponge which generates negative pressure can draw charging tray fixation after charging tray; And for some larger-size charging trays, lesser vacsorb region, which is not easy to draw, to be fixed, as long as at this time in sealing frame Outermost sealing frame is only retained, whole absorption sponges of inside so can produce negative under the action of vacuum equipment Pressure, vacsorb region becomes larger, the large-sized charging tray of absorption that can be more convenient, therefore the present apparatus can be adjusted very easily The region of vacsorb adapts to various sizes of product;
(2) disassembly of the sealing frame in the present apparatus is by drawing the card slot in fixing seat and the fixture block of sealing frame upper end It is detachably installed to realize, by the different sealing area of mountable setting respectively after disassembly, realizes different vacsorbs Region, it may be said that very convenient;And in order to further seal the comfort level of the position of fixing seal frame and disassembly, together When magnet is set, installing and dismounting sealing frame can be facilitated by magnetic force;And it is fixed in order to more smoothly draw sponge Product, therefore a distance is stretched out into sponge protrusion setting from sealing frame, make the absorption of product more smoothly.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model;
Fig. 2 is the bottom view of Fig. 1.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the utility model is furtherd elucidate, the present embodiment is with the utility model Implemented under premised on technical solution, it should be understood that these embodiments are merely to illustrate the utility model rather than limit this reality With novel range.
As depicted in figs. 1 and 2, a kind of suction means in semiconductor test;Fixing seat 1 is drawn including one;This institute The center position for the absorption fixing seat 1 stated is provided with a sucker 2;The upper end of the sucker 2 is connected and installed with suction pipe 3; The suction pipe 3 is connected on vacuum equipment;And draw on the lower end surface of fixing seat 1 then centered on sucker 2 outward by Gradually it is provided with the sealing frame 4 of several layers;The lower end of the sealing frame 4 is opening design, and each sealing frame 4 will be in it The adjacent sealing frame 4 in side is whole to be included;And the sealing frame 4 is set as detachable with the lower end surface for drawing fixing seat 1 Installation;It draws on the lower end surface of fixing seat 1 in its innermost sealing frame 4 and is filled between adjacent sealing frame 4 saturating Gas material 5;The upper end of the ventilative material 5 of each layer is installed on the lower end surface for drawing fixing seat 1, and the avris of the ventilative material 5 of each layer Position is then unfixed separate installment structure with sealing frame 4, and the ventilative material 5 filled in innermost sealing frame 4 will The sucker 2 for drawing fixing seat 1 covers.
The height of all sealing frames 4 is all the same;And the thickness of the ventilative material 5 is then greater than the height of sealing frame 4, The height of ventilative material 5 is stretched out from sealing frame 4;The thickness that the end of the ventilative material 5 is stretched out from sealing frame 4 is set as 2-6mm;The sealing frame 4 is set as square frame structure, and installs entirely through four frame sides, and adjacent close The linear distance sealed between frame 4 is identical.
The sealing frame 4 is provided in round frame structure, and is the mounting structure of integral type, and adjacent seals frame Linear distance between 4 is identical;The ventilative material 5 is set as sponge, and the ventilative material 5 is fixed on by glue Draw the lower end surface of fixing seat 1.
The lower end surface of the absorption fixing seat 1 is provided with card slot 6 corresponding with 4 position of sealing frame;And it is described close Then there is the fixture block 7 being used cooperatively with card slot 6 in the upper end of envelope frame 4;The sealing frame 4 can by the cooperation of card slot 6 and fixture block 7 Disassembly installation;It is also provided with magnet 9 on the card slot 6 and fixture block 7, passes through the corresponding detachable installation of magnet 9.
The vacsorb range of suction means is adjustable in the present apparatus;It draws and is provided with the close of several layers in fixing seat Frame is sealed, is provided in these sealing frames and draws sponge, sponge is drawn and is mounted on the lower end for drawing fixing seat, it is innermost It draws sponge sucker is included, the present apparatus mainly adjusts different vacsorbs by the way that the setting position of sealing frame is different Range, when only innermost sealing frame, which is mounted on, to be drawn in fixing seat, the negative pressure generated by vacuum equipment is via suction pipe Conduction with sucker can only generate negative pressure in the sponge in the sealing frame, because the region in outside is stopped by the sealing frame , outside will not generate negative pressure, and the absorption sponge which generates negative pressure can draw charging tray fixation after charging tray;And For some larger-size charging trays, lesser vacsorb region, which is not easy to draw, to be fixed, as long as at this time in sealing frame only Outermost sealing frame is retained, whole absorption sponges of inside so can produce negative pressure under the action of vacuum equipment, Vacsorb region becomes larger, the large-sized charging tray of absorption that can be more convenient, therefore the present apparatus can be adjusted very easily very The region that suction takes adapts to various sizes of product.
The disassembly of sealing frame in the present apparatus be by draw fixing seat on card slot and sealing frame upper end fixture block come What realization was detachably installed, different sealing areas is set by mountable respectively after disassembly, realizes different vacsorb areas Domain, it may be said that very convenient;And in order to further seal the comfort level of the position of fixing seal frame and disassembly, simultaneously Magnet is set, installing and dismounting sealing frame can be facilitated by magnetic force;And production is fixed in order to more smoothly draw sponge Product, therefore a distance is stretched out into sponge protrusion setting from sealing frame, make the absorption of product more smoothly.
Specific embodiment is a preferred embodiment of the utility model, is not for limiting the utility model Implement and scope of the claims, all equivalence changes made according to content described in present utility model application scope of patent protection And modification, it should be included in the utility model patent application range.

Claims (8)

1. a kind of suction means in semiconductor test;It is characterized by comprising one to draw fixing seat (1);This is described The center position for drawing fixing seat (1) is provided with a sucker (2);The upper end of the sucker (2) is connected and installed with suction pipe (3);The suction pipe (3) is connected on vacuum equipment;And in drawing on the lower end surface of fixing seat (1) and being then with sucker (2) The heart is gradually provided with the sealing frame (4) of several layers outward;The lower end of the sealing frame (4) is opening design, and each The adjacent sealing frame (4) in its inside is integrally included by sealing frame (4);And the sealing frame (4) and draw fixing seat (1) lower end surface is set as detachably installing;Draw on the lower end surface of fixing seat (1) in its innermost sealing frame (4) and Filled with ventilative material (5) between adjacent sealing frame (4);The upper end of the ventilative material (5) of each layer is installed in absorption fixing seat (1) on lower end surface, and the avris position of the ventilative material (5) of each layer is then unfixed separate installment knot with sealing frame (4) Structure is located at the ventilative material (5) filled in innermost sealing frame (4) and covers the sucker (2) for drawing fixing seat (1).
2. a kind of suction means in semiconductor test according to claim 1;It is characterized by: all sealings The height of frame (4) is all the same;And the thickness of the ventilative material (5) is then greater than the height of sealing frame (4), the height for material (5) of breathing freely Degree is stretched out from sealing frame (4).
3. a kind of suction means in semiconductor test according to claim 2;It is characterized by: described is ventilative The thickness for expecting that the end of (5) is stretched out from sealing frame (4) is set as 2-6mm.
4. a kind of suction means in semiconductor test according to claim 1;It is characterized by: the sealing Frame (4) is set as square frame structure, and installs entirely through four frame sides, and between adjacent seals frame (4) Linear distance is identical.
5. a kind of suction means in semiconductor test according to claim 1;It is characterized by: the sealing Frame (4) is provided in round frame structure, and is the mounting structure of integral type, and the straight line between adjacent seals frame (4) away from From identical.
6. a kind of suction means in semiconductor test according to claim 1;It is characterized by: described is ventilative Material (5) is set as sponge, and the ventilative material (5) is fixed on the lower end surface for drawing fixing seat (1) by glue.
7. a kind of suction means in semiconductor test according to claim 1;It is characterized by: the absorption The lower end surface of fixing seat (1) is provided with card slot (6) corresponding with sealing frame (4) position;And the upper end of the sealing frame (4) Then there is the fixture block (7) being used cooperatively with card slot (6);The sealing frame (4) is removable by the cooperation of card slot (6) and fixture block (7) Unload installation.
8. a kind of suction means in semiconductor test according to claim 7;It is characterized by: the card slot (6) and on fixture block (7) it is also provided with magnet (9), passes through magnet (9) corresponding detachable installation.
CN201821711244.0U 2018-10-22 2018-10-22 A kind of suction means in semiconductor test Active CN209633063U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821711244.0U CN209633063U (en) 2018-10-22 2018-10-22 A kind of suction means in semiconductor test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821711244.0U CN209633063U (en) 2018-10-22 2018-10-22 A kind of suction means in semiconductor test

Publications (1)

Publication Number Publication Date
CN209633063U true CN209633063U (en) 2019-11-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110355778A (en) * 2018-10-22 2019-10-22 江苏艾科半导体有限公司 A kind of semiconductor suction means

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110355778A (en) * 2018-10-22 2019-10-22 江苏艾科半导体有限公司 A kind of semiconductor suction means

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