CN209626183U - Cleaning device and its liquid supply equipment - Google Patents
Cleaning device and its liquid supply equipment Download PDFInfo
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- CN209626183U CN209626183U CN201822035668.6U CN201822035668U CN209626183U CN 209626183 U CN209626183 U CN 209626183U CN 201822035668 U CN201822035668 U CN 201822035668U CN 209626183 U CN209626183 U CN 209626183U
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- liquid
- liquid level
- supply equipment
- heating compartment
- thermal
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Abstract
The utility model discloses cleaning device and its liquid supply equipment, the liquid supply equipment includes heater box, incubator, connecting pipe and connection valve.Wherein, the heater box includes heating compartment, liquid-in pipe road and is set to the intracorporal primary heater of heater box.The liquid-in pipe road is for being connected to heating compartment with liquid source；Incubator includes thermal-insulating body and liquid outlet pipe, and the liquid outlet pipe is for being connected to thermal-insulating body with by liquid equipment；The connecting pipe connection heating compartment and thermal-insulating body；The connection valve is set on connecting pipe, and the connection valve opens or closes so that connecting pipe circulation or cut-off.While the liquid supply equipment can be by liquid equipment conveying liquid temporary in advance using incubator, heated using the liquid that heater box introduces liquid source.Therefore, it the process to be heated such as may not need to carrying out feed flow as the cleaning equipment by liquid equipment using the liquid supply equipment, the time of consuming to be heated such as save, improve production efficiency.
Description
Technical field
The utility model relates to the technical fields of the cleaning of semiconductor material, more particularly to cleaning device and its feed flow to set
It is standby.
Background technique
Currently, the surface of the semiconductor materials such as silicon wafer is easy in semiconductor materials such as silicon wafers in cutting and scouring processes
The residual of other objects such as a large amount of cutting liquid, defective material and collodion silk is adhered to, these remaining objects can seriously affect the product of product
Therefore matter must use the liquid of the higher temperatures such as the pure water after heating to carry out the cleaning process of the semiconductor materials such as silicon wafer
Cleaning just can satisfy production requirement.
In the prior art, often pure water is added in the potcher of cleaning machine, then passes through adding inside groove body again
After hot device heats pure water, it could start to be cleaned for object to be cleaned, which needs to expend the regular hour, no
Conducive to raising production efficiency.
Utility model content
In view of the deficiencies in the prior art, the utility model provides cleaning device and its liquid supply equipment, to solve above-mentioned ask
Topic.
To achieve the goals above, the utility model takes technical solution below:
A kind of liquid supply equipment, the liquid supply equipment include heater box, incubator, connecting pipe and connection valve, wherein
The heater box includes heating compartment, liquid-in pipe road and is set to the intracorporal primary heater of the heater box, the liquid-in pipe
Road is for being connected to the heating compartment with liquid source；The incubator includes thermal-insulating body and liquid outlet pipe, the liquid outlet pipe
For being connected to the thermal-insulating body with by liquid equipment；The connecting pipe is connected to the heating compartment and the thermal-insulating body；
The connection valve, is set on the connecting pipe, and the connection valve opens or closes, so that the connecting pipe circulates
Or cut-off.
Preferably, the heater box further includes being set to intracorporal first temperature sensor of the heater box；The connection
The intracorporal fluid temperature of the heater box that valve is detected according to first temperature sensor whether reach preset temperature come
It opens or closes.
Preferably, the heater box further includes being set to the intracorporal first low liquid level detection sensor of the heater box and
One high liquid level detection sensor, the first low liquid level detection sensor are less than described in height locating in the heating compartment
First high liquid level detection sensor in height locating in the heating compartment, the liquid supply equipment further include be set to it is described enter
Liquid-inlet valve door on liquid pipe road, the liquid-inlet valve door is according to the first low liquid level detection sensor or the first high liquid level detection sensor
The intracorporal liquid level of the heater box that detects opens or closes.
Preferably, the intracorporal liquid of the heater box that the connection valve is detected according to the first low liquid level detection sensor
Position opens or closes.
Preferably, the incubator further includes being set to the intracorporal secondary heater of the incubator.
Preferably, the incubator further includes being set to the intracorporal second temperature sensor of the incubator；
The liquid supply equipment further include: controller, the controller according to the second temperature sensor for detecting
The incubator intracorporal fluid temperature control the secondary heater and heated when being lower than preset temperature.
Preferably, the incubator further includes being set to the intracorporal second low liquid level detection sensor of the incubator and
Two high liquid level detection sensors, the second low liquid level detection sensor are less than described in height locating in the thermal-insulating body
Second high liquid level detection sensor is in height locating in the thermal-insulating body.The liquid supply equipment further include be set to it is described go out
Liquid valve door on liquid pipe road, the liquid valve door is according to the second low liquid level detection sensor or the second high liquid level detection sensor
The intracorporal liquid level of the incubator that detects opens or closes.
Preferably, the connection valve is detected according to the second low liquid level detection sensor or the second high liquid level detection sensor
To the incubator intracorporal liquid level open or close.
Preferably, liquid spill-way is provided on the heating compartment and/or the thermal-insulating body.
The utility model additionally provides a kind of cleaning device, including cleaning equipment and liquid supply equipment as described above, described
Cleaning equipment is to be connected to the liquid supply equipment by the liquid outlet pipe by liquid equipment.
Cleaning device and its liquid supply equipment provided by the utility model, by heater box and heat preservation that liquid supply equipment is arranged
Case is heated to preset temperature to liquid with the primary heater in heater box and is temporarily stored into incubator.When as by liquid equipment
Cleaning equipment when needing using liquid after heating, the incubator can in real time for its conveying heating temporary in advance after
Liquid, at the same time, the liquid to be heated that the heater box can introduce liquid source heat, and preparing again will be after heating
Liquid is stored in the incubator, with by the incubator again to the liquid after being heated by the conveying of liquid equipment.Therefore, it utilizes
The liquid supply equipment carries out feed flow to as the cleaning equipment by liquid equipment, the process to be heated such as may not need, saves
The time that thermal process to be added expends, improve production efficiency.
Detailed description of the invention
Fig. 1 is that liquid supply equipment provided by the embodiment of the utility model is respectively communicated with liquid source and the schematic diagram by liquid equipment；
Fig. 2 is the structural schematic diagram of the heater box in the liquid supply equipment；
Fig. 3 is the structural schematic diagram of the incubator in the liquid supply equipment.
Description of symbols:
Heater box 1, heating compartment 11, liquid-in pipe road 12, liquid-inlet valve door 121, first manual valve 122, primary heater
13, the first low liquid level detection sensor 141, the first high liquid level detection sensor 142, the first temperature sensor 15；
Incubator 2, thermal-insulating body 21, liquid outlet pipe 22, liquid valve door 221, the second manually-operated gate 222, secondary heater
23, the second low liquid level detection sensor 241, the second high liquid level detection sensor 242, second temperature sensor 25；
Connecting pipe 3 is connected to valve 31, third manually-operated gate 32；
Liquid spill-way 4；
Variable frequency pump 5；
Liquid source 100, by liquid equipment 200.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, with reference to the accompanying drawing to the utility model
Specific embodiment be described in detail.The example of these preferred embodiments is illustrated in the accompanying drawings.Institute in attached drawing
The embodiments of the present invention shown and described with reference to the accompanying drawings is only exemplary, and the utility model is not limited to this
A little embodiments.
Here, it should also be noted that, in order to avoid having obscured the utility model because of unnecessary details, in the accompanying drawings
It illustrate only the structure and/or processing step closely related with scheme according to the present utility model, and be omitted practical with this
The little other details of new relationship.
Shown in referring to Fig.1, the utility model embodiment provides a kind of liquid supply equipment, and the liquid supply equipment includes heater box
1, incubator 2, connecting pipe 3 and connection valve 31.
Wherein, as shown in Fig. 2, the heater box 1 is including heating compartment 11, liquid-in pipe road 12 and is set to the heater box
Primary heater 13 in body 11, the liquid-in pipe road 12 is for being connected to the heating compartment 11 with liquid source 100.
As shown in figure 3, the incubator 2 includes thermal-insulating body 21 and liquid outlet pipe 22, the liquid outlet pipe 22 is for making
The thermal-insulating body 21 is connected to by liquid equipment 200.
The connecting pipe 3 is connected to the heating compartment 1 and the thermal-insulating body 21.
The connection valve 31 is set on the connecting pipe 3, and the connection valve 31 opens or closes, so that described
The circulation of connecting pipe 3 or cut-off.
Liquid supply equipment provided by the utility model, by setting heater box 1 and incubator 2, first from liquid-in pipe road 12 to institute
State heating compartment 11 and introduce a certain amount of liquid to be heated, using the primary heater 13 in the heating compartment 11 to liquid into
Row heating；After preset temperature to be heated to required, the connection valve 31 is opened, the liquid being heated in heating compartment 11 is made
It flows into the thermal-insulating body 21 and is kept in；After storing the desired amount of liquid being heated in the thermal-insulating body 21, close
The connection valve 31 is closed, liquid is introduced from liquid-in pipe road 12 to the heating compartment 11 again and is heated, is utilized on one side
While the heater box 1 heats liquid, first the liquid being heated in thermal-insulating body 21 can be mentioned in real time on one side
Supply is by liquid equipment 200.When being applied in cleaning device, the liquid supply equipment is connected by its liquid outlet pipe 22 and cleaning equipment
Logical, the rinse bath of cleaning equipment can be obtained in real time by the thermal-insulating body 21 is heated the hot water after cabinet 11 heats, cleaning
Process synchronous can be carried out with the heating process in the heating compartment 11, can start to carry out without waiting for the process for heating water
Cleaning saves the time for waiting heating process to expend, improves production efficiency.
Referring to figs. 1 and 2, specifically, the heater box 1 further includes first be set in the heating compartment 11
Temperature sensor 15；In the heating compartment 11 that the connection valve 31 is detected according to first temperature sensor 15
Whether fluid temperature reaches preset temperature to open or close.When first temperature sensor 15 detects the heating compartment
Fluid temperature in 11 is not up to preset temperature, and the connection valve 31 is closed, when confirmation reaches preset temperature, the communicating valve
Door 31 is opened.Illustratively, it is the precision for improving temperature detection, multiple first can be arranged in the bottom of the heating compartment 11
Temperature sensor 15 is respectively to detect fluid temperature.
Further, in the present embodiment, the primary heater 13 is detected according to first temperature sensor 15
The heating compartment 11 in fluid temperature whether reach preset temperature to be started or stoped, to realize automatically to liquid
It is heated.When introducing liquid to be heated to the heating compartment 11 from liquid-in pipe road 12, first temperature sensor
Fluid temperature in 15 heating compartments 11 detected is not up to preset temperature, and the primary heater 13 starts, to liquid
Body is heated；Reach preset temperature to fluid temperature, the primary heater stops working, and saves first heating with this
The energy consumption of device 13 simultaneously avoids liquid from being heated to excessively high temperature.
When the liquid supply equipment is applied to the water supply of silicon wafer cleaner, to meet the cleaning requirement to silicon wafer, in this reality
It applies in example, the water introduced from the liquid-in pipe road 12 is pure water, moreover, being added the hot water of the heating compartment 11 to described
When in thermal-insulating body 21, therefore, to assure that hot water cannot be mixed with the unheated water introduced from liquid-in pipe road 12, with prevent into
Specified numerical value cannot be reached by entering the hot water temperature in thermal-insulating body 21, influence cleaning effect.The hot water temperature is for silicon wafer
Specified numerical value is 40~55 DEG C, and the temperature difference being necessary to ensure that between the hot water provided every time to the cleaning machine is no more than 2 DEG C.
Therefore, when hot water is inputted into the thermal-insulating body 21 from the heating compartment 11, need stop from it is described enter liquid
Pipeline 12 introduces the low pure water of temperature, alternatively, specifically, the heater box 1 further includes being set in the heating compartment 11
First low liquid level detection sensor 141 and the first high liquid level detection sensor 142.In the heating compartment 11, described first
Height of the low liquid level detection sensor 141 in present position in the heating compartment 11 is less than first high liquid level detection sensing
Device 142 is in the height of present position in the heating compartment 11.The liquid supply equipment further includes being set to the liquid-in pipe road 12
On liquid-inlet valve door 121, the liquid-inlet valve door 121 according to the first low liquid level detection sensor 141 or the first high liquid level detection pass
The liquid level in the heating compartment 11 that sensor 142 detects opens or closes.When the first low liquid level detection sensor
141 are not detected liquid, i.e. liquid level in heating compartment 11 is lower than the locating height of the first low liquid level detection sensor 141,
Judge that liquid level is too low in heating compartment 11 at this time, controls the liquid-inlet valve door 121 and open, to introduce hot liquid to be added；When described
First high liquid level detection sensor 141 detects that liquid, i.e. liquid level in heating compartment 11 are detected higher than the first high liquid level
The locating height of sensor 141 judges that liquid level is excessively high in heating compartment 11 at this time, controls the liquid-inlet valve door 121 and close, stop drawing
Enter hot liquid to be added.After infusion to be done to the thermal-insulating body 21, liquid level drops to the first low liquid level detection sensor 141
Height hereinafter, while the connection valve 31 is closed, the liquid-inlet valve door 121 is opened, and is introduced again from liquid-in pipe road 12
Hot liquid to be added.
Further, the heater box that the connection valve 31 is detected according to the first low liquid level detection sensor 141
Liquid level in body 11 opens or closes.Illustratively, the first low liquid level detection sensor 141 is passed with first temperature
Valve 31 is connected to described in 15 Collaborative Control of sensor, when the first low liquid level detection sensor 141 detects liquid and described the
The fluid temperature in the heating compartment 11 that one temperature sensor 15 detects has reached preset temperature, the connection valve 31
It opens, otherwise, the connection valve 31 is closed.It is of course also possible to by the way that two connection valves are arranged on the connecting pipe 3
31, control is performed in accordance with by the first low liquid level detection sensor 141 and first temperature sensor 15 respectively.
In conjunction with shown in Fig. 1 and Fig. 3, further, the incubator 2 further includes be set in the thermal-insulating body 21
Two heaters 23.It can use the secondary heater 23 and heated at any time for the liquid in the incubator 2, make liquid temperature
Degree is maintained in preset temperature range.
Further, the incubator 2 further includes the second temperature sensor 25 being set in the thermal-insulating body 21；
The liquid supply equipment further includes controller, and the controller is used for the guarantor detected according to the second temperature sensor 25
Fluid temperature in incubator body 21 controls the secondary heater 23 when being lower than preset temperature and is heated.Illustratively, to mention
Multiple second temperature sensors 25 can be arranged respectively to liquid in the bottom of the thermal-insulating body 21 in the precision of high-temperature detection
Temperature is detected.
In the present embodiment, the incubator 2 further includes the second low liquid level detection being set in the thermal-insulating body 21
Sensor 241 and the second high liquid level detection sensor 242, the second low liquid level detection sensor 241 is in the thermal-insulating body
The height of present position is less than the second high liquid level detection sensor 242 in present position in the thermal-insulating body 21 in 21
Highly.The liquid supply equipment further includes the liquid valve door 221 being set in the liquid outlet pipe 22,221, the liquid valve door
In the thermal-insulating body 21 detected according to the second low liquid level detection sensor 241 or the second high liquid level detection sensor 242
Liquid level opens or closes.When liquid is not detected in the second low liquid level detection sensor 241, the liquid in thermal-insulating body 21
Deficiency, the liquid valve door 221 are closed.When the second high liquid level detection sensor 241 detects liquid, in thermal-insulating body 21
Liquid it is sufficient, control the liquid valve door 221 and open, to be provided the liquid being heated by liquid equipment 200.
Wherein, the connection valve 31 is according to the second low liquid level detection sensor 241 or the second high liquid level detection sensor
Liquid level in 242 thermal-insulating bodies 21 detected opens or closes.When second low liquid level sensor 241 does not detect
To liquid, the fluid low in thermal-insulating body 21 is judged, the connection valve 31 is opened, by what is be heated in heating compartment 11
Liquid is delivered in the thermal-insulating body 21.When the second high liquid level sensor 242 detects liquid, thermal-insulating body 21 is judged
Interior liquid is excessive, and the connection valve is closed.It similarly, can be by the second low liquid level detection sensor 241 and described the
Valve 31 is connected to described in one temperature sensor, 15 Collaborative Control, when liquid is not detected in the second low liquid level detection sensor 241
The fluid temperature in the heating compartment 11 that body and first temperature sensor 15 detect has reached preset temperature, described
It is connected to valve 31 to open, otherwise, the connection valve 31 is closed.
In the present embodiment, the liquid-inlet valve door 121, liquid valve door 221 and connection valve 31 be may be configured as by described
The pneumatic ball valve that control unit control carries out automatic shutter further can be respectively by the liquid-in pipe road 12, outlet pipe
Setting first manual valve 122, the second manually-operated gate 222 and third hand-operated valve are respectively corresponded on road 22 and connecting pipe 3
Progress people is opened or closed to door 32 when facilitating each pneumatic ball valve to break down, to each pipeline using manually-operated gate
Industry control system.
Specifically, the surface of the heating compartment 11 and the thermal-insulating body 21 is covered with thermal insulation layer, illustratively, selects
Heat-preservation cotton is coated as surface of the thermal insulation layer to the heating compartment and the thermal-insulating body, with preferred 1.2mm
The galvanized sheet cover of thickness encapsulates the thermal insulation layer of the heating compartment and thermal-insulating body.
Further, liquid spill-way 4 is provided on the heating compartment 11 and/or the thermal-insulating body 21.It prevents in cabinet
Liquid it is excessive, and when each pneumatic ball valve breaks down, liquid can be by flowing out, and for recycling in liquid spill-way.
Illustratively, the heating water tank 1 needs disposably to heat enough liquid, therefore the heating compartment
11 volume is set greater than the thermal-insulating body 21, and the volume of the heating compartment 11 is preferably 20m3, the thermal-insulating body 2
Volume be preferably 2.5m3.The heating compartment 11, which stacks, to be set on the thermal-insulating body 21.Therefore, it need to only open described
It is connected to valve 31, the liquid after being heated in the heating compartment 11 can automatically flow into the thermal-insulating body 21 under gravity
In.The bottom of the heating compartment 11 may be configured as funnel-form, and the liquid after being conveniently heated injects thermal-insulating body 21.Also because
This, is provided with variable frequency pump 5 in the liquid outlet pipe 22, using the variable frequency pump 5 by the hot water in thermal-insulating body from described
Liquid outlet pipe 22 is transported to by liquid equipment 200, and the variable frequency pump 5 can automatically adjust working frequency according to the flow of liquid.
The utility model additionally provides a kind of cleaning device, including cleaning equipment and liquid supply equipment as described above, described
Cleaning equipment is to be connected to the liquid supply equipment by the liquid outlet pipe 22 by liquid equipment 200.
Cleaning device and its liquid supply equipment provided by the utility model, by heater box 1 and heat preservation that liquid supply equipment is arranged
Case 2 is heated to preset temperature to liquid with the primary heater 13 in heater box 1 and is temporarily stored into incubator 2.When as by liquid
When the cleaning equipment of equipment 200 needs to use the liquid after heating, what the incubator 2 can be temporary in advance for its conveying in real time
Liquid after heating, at the same time, the liquid to be heated that the heater box 1 can introduce liquid source 100 heat, quasi- again
It is stored in the incubator 2 for the liquid after heating, to convey heating to by liquid equipment 200 again by the incubator 2
Liquid afterwards.Therefore, feed flow is carried out to cleaning equipment using the liquid supply equipment, the process to be heated such as may not need, saved
The time for waiting heating process to expend, improve production efficiency.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.The terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including institute
State in the process, method, article or equipment of element that there is also other identical elements.
The above is only the specific embodiment of the application, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, for these changes and profit
Decorations, also should be regarded as the protection scope of the application.
Claims (10)
1. a kind of liquid supply equipment, which is characterized in that the liquid supply equipment includes:
Heater box (1), including heating compartment (11), liquid-in pipe road (12) and be set in the heating compartment (11) first plus
Hot device (13), the liquid-in pipe road (12) is for being connected to the heating compartment (11) with liquid source (100)；
Incubator (2), including thermal-insulating body (21) and liquid outlet pipe (22), the liquid outlet pipe (22) is for making the incubator
Body (21) is connected to by liquid equipment (200)；
Connecting pipe (3) is connected to the heating compartment (11) and the thermal-insulating body (21)；
It is connected to valve (31), is set on the connecting pipe (3), the connection valve (31) opens or closes, so that described
Connecting pipe (3) circulation or cut-off.
2. liquid supply equipment according to claim 1, which is characterized in that the heater box (1) further includes being set to described add
The first temperature sensor (15) in hot tank body (11), the connection valve (31) are visited according to first temperature sensor (15)
Whether the fluid temperature in the heating compartment (11) measured reaches preset temperature to open or close.
3. liquid supply equipment according to claim 1 or 2, which is characterized in that the heater box (1) further include be set to it is described
The first low liquid level detection sensor (141) and the first high liquid level detection sensor (142) in heating compartment (11), described first
Locating height is less than first high liquid level detection sensing in low liquid level detection sensor (141) Yu Suoshu heating compartment (11)
Locating height in device (142) Yu Suoshu heating compartment (11)；The liquid supply equipment further includes being set to the liquid-in pipe road
(12) the liquid-inlet valve door (121) on, the liquid-inlet valve door (121) are high according to the first low liquid level detection sensor (141) or first
The liquid level in the heating compartment (11) that liquid level detecting sensor (142) detects opens or closes.
4. liquid supply equipment according to claim 3, which is characterized in that the connection valve (31) is examined according to the first low liquid level
The liquid level surveyed in sensor (141) described heating compartment (11) for detecting opens or closes.
5. liquid supply equipment according to claim 1, which is characterized in that the incubator (2) further includes being set to the guarantor
Secondary heater (23) in incubator body (21).
6. liquid supply equipment according to claim 5, which is characterized in that the incubator (2) further includes being set to the guarantor
Second temperature sensor (25) in incubator body (21)；
The liquid supply equipment further include: controller, the controller according to the second temperature sensor (25) for detecting
The thermal-insulating body (21) in fluid temperature control the secondary heater (23) and heated when being lower than preset temperature.
7. liquid supply equipment described according to claim 1 or 5 or 6, which is characterized in that the incubator (2) further includes being set to
The second low liquid level detection sensor (241) and the second high liquid level detection sensor (242) in the thermal-insulating body (21), it is described
Locating height is detected less than second high liquid level in second low liquid level detection sensor (241) Yu Suoshu thermal-insulating body (21)
Locating height in sensor (242) Yu Suoshu thermal-insulating body (21)；The liquid supply equipment further includes being set to the outlet tube
Liquid valve door (221) on road (22), the liquid valve door (221) is according to the second low liquid level detection sensor (241) or second
The liquid level in the thermal-insulating body (21) that high liquid level detection sensor (242) detects opens or closes.
8. liquid supply equipment according to claim 7, which is characterized in that the connection valve (31) is examined according to the second low liquid level
The liquid level surveyed in the thermal-insulating body (21) that sensor (241) or the second high liquid level detection sensor (242) detect is beaten
On or off is closed.
9. liquid supply equipment according to claim 1, which is characterized in that the heating compartment (11) and/or the incubator
Body is provided with liquid spill-way on (21).
10. a kind of cleaning device, which is characterized in that set including cleaning equipment and feed flow as described in any one of claim 1 to 9
Standby, the cleaning equipment is to be connected to the liquid supply equipment by the liquid outlet pipe (22) by liquid equipment (200).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822035668.6U CN209626183U (en) | 2018-12-05 | 2018-12-05 | Cleaning device and its liquid supply equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822035668.6U CN209626183U (en) | 2018-12-05 | 2018-12-05 | Cleaning device and its liquid supply equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209626183U true CN209626183U (en) | 2019-11-12 |
Family
ID=68445143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822035668.6U Active CN209626183U (en) | 2018-12-05 | 2018-12-05 | Cleaning device and its liquid supply equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209626183U (en) |
-
2018
- 2018-12-05 CN CN201822035668.6U patent/CN209626183U/en active Active
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