CN209623234U - Dynamic lithium battery produces second level high vacuum baking control system - Google Patents
Dynamic lithium battery produces second level high vacuum baking control system Download PDFInfo
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- CN209623234U CN209623234U CN201822251317.9U CN201822251317U CN209623234U CN 209623234 U CN209623234 U CN 209623234U CN 201822251317 U CN201822251317 U CN 201822251317U CN 209623234 U CN209623234 U CN 209623234U
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Abstract
The utility model discloses a kind of dynamic lithium batteries to produce second level high vacuum baking control system, including secondary vacuum pump installation, at least two vacuum ovens, ultrasonic heat air dryer and PLC controller, vacuum valve is equipped at the gas outlet of vacuum oven, ultrasonic heat air dryer is set to the bottom of vacuum oven, timer and pressure sensor are equipped at the top of the sky oven, the signal output end of timer and pressure sensor is connected with the signal input part of PLC controller, and the signal output end of PLC controller is connected with vacuum valve.The utility model carries out secondary vacuum pumping using vacuum oven cooperation secondary vacuum pump machine, oven vacuum degree can be made to reach 100Pa or so within 40-60 minutes in a short time, the limit is up to 10Pa, it not take a breath repeatedly, in the case where drying substance originally, temperature-resistant, only with more than 10 hours, it will be able to which the moisture pump of packet pole plate to 150-250PPM is particularly suitable for the production of middle Tang sky iron large capacity, water system battery.
Description
Technical field
The utility model relates to batteries to toast vacuum pumping technology field, in particular to a kind of dynamic lithium battery production second level is high
Vacuum bakeout control system.
Background technique
It is a key technology and technique to the baking of battery pole piece water removal in the production of new energy dynamic lithium battery, it
It is related to the basic performance of battery, is more related to the service life of battery, the moisture in lithium ion battery can not only leads to electrolyte
The decomposition of middle lithium salts, and the solid electrolyte interface film i.e. formation and stability of SEI film is affected, cause battery capacity to decline
Subtract, internal resistance increases, and even results in cell expansion.Lithium battery is inevitable in processing steps such as conjunction slurry, coating, winding and assemblings
To be contacted with air, cause moisture beyond technique requirement, in order to reduce the water content in battery core, needed before fluid injection to battery core into
Row baking.
Currently, the method in industry mainly using heated-air drying is dehydrated lithium ion battery, this roasting mode is dry
Dry efficiency is lower, and energy consumption is larger, and drying temperature is high.
Existing battery pole piece, battery core roasting mode also some be using periodically ventilation, vacuum bakeout.Technology mode requirement
The sense of responsibility of the drawbacks of employee consciously must periodically take a breath by technique requirement, technology mode heavy dependence employee, normal appearance person
Work is not responsible not to be monitored in place by technique requirement operational administrative, battery pole piece battery core Moisture high UCL phenomenon after baking；Traditional
Vacuum tank vacuum degree can only achieve 1000Pa or so, and by baking in nearly 100 hours and multiple ventilation, the moisture of pole plate is difficult to reduce
To within 500PPM, the later period will cause the swollen tripe of battery, and the short 1C charge and discharge cycles of service life only 800 times or so are extremely difficult to
2000 times, these are highly detrimental to the production of similar middle Tang's sky iron large capacity water system battery.
Existing battery vacuum drying oven vacuum degree is not high, and performance would not tend towards stability, and baking time is long, and water removal effect is not
It is fine, while can not achieve multiple ovens and processing together, improves cost and the time of production, while special without configuring
Vacuum plant, the efficiency of baking are not fine.
Utility model content
The purpose of the utility model is to overcome the deficiencies in the prior art, provide a kind of dynamic lithium battery production second level Gao Zhen
Empty baking control system carries out secondary vacuum pumping to lithium battery pole slice using high vacuum oven cooperation secondary vacuum pump machine, can make
Oven vacuum degree reaches 100Pa or so in a short time, not take a breath repeatedly, it will be able to drop the moisture pump of pole plate to 150-
250PPM substantially increases the cured effect of pole piece.
The purpose of this utility model is achieved through the following technical solutions:
Dynamic lithium battery produces second level high vacuum baking control system, including secondary vacuum pump installation, at least two vacuum
Oven, ultrasonic heat air dryer and PLC controller, by true between the secondary vacuum pump installation and the vacuum oven
Blank pipe is in charge of connection, and vacuum valve is equipped at the gas outlet of the vacuum oven, and the ultrasonic heat air dryer is set
Timer and pressure sensor, the timer and pressure are equipped at the top of the bottom of the vacuum oven, the sky oven
The signal output end of force snesor is connected with the signal input part of the PLC controller, the signal output of the PLC controller
End is connected with the vacuum valve.
Further, the secondary vacuum pump installation includes vacuum pump and molecular pump, and the air inlet of institute's molecular pump passes through institute
It states and is connected to the vacuum oven being in charge of for vacuum tube, the air inlet of the gas outlet of the molecular pump and the vacuum pump passes through soft
Pipe connection, is equipped with vacuum flapper valve between the hose and vacuum pump and molecular pump, the vacuum pump is equipped with exhaust valve.
Further, the vacuum oven include oven body, two groups inside the vacuum oven it is parallel to each other
And symmetrical shaft, inner wall heating device and lithium battery pole slice heating device, the shaft is and outside oven body
The driving motor of wall connects, and the signal output end of the PLC controller is connected with the driving motor, and lithium battery pole slice passes through exhausted
It is fastened to the two ends adhesion of edge adhesive tape in the shaft, the lithium battery pole slice heating device is set to two groups of shafts
In the accommodation space surrounded, the periphery of the shaft is enclosed with temperature-resistant insulation layer.
Further, the inner wall heating device is the resistance wire in the inner walls of the oven body.
Further, the lithium battery pole slice heating device is the resistance wire of the spring like of length and shaft cooperation.
Further, multiple overtemperature prote instrument are equipped with inside the vacuum oven, the overtemperature prote instrument and the PLC are controlled
Device signal connection processed.
Further, the ultrasonic heat air dryer includes ultrasonic transducer, supersonic generator and vibrating disk,
The vibrating disk is set to inside vacuum oven, and the supersonic generator is set to outside the vacuum oven, the ultrasonic waves
One end of energy device connects the vibrating disk, and the other end connects the supersonic generator.
Further, the bottom of the vacuum oven is provided with shock-absorbing foot, and the side of the vacuum oven is equipped with electric leakage and protects
Protect device.
Further, high pressure check valve is additionally provided at the gas outlet of the vacuum oven.
Further, the outside of the vacuum oven is equipped with nitrogen cylinder, and the nitrogen cylinder passes through nitrogen feeding pipe road and described true
The inside of empty oven is connected to, and the nitrogen feeding pipe road is equipped with control valve, the signal output end of the PLC controller and the tune
Valve is saved to be connected.
The beneficial effects of the utility model are:
1) the utility model carries out secondary vacuum pumping using vacuum oven cooperation secondary vacuum pump machine, can make oven vacuum degree
Reach within 40-60 minutes 100Pa or so in a short time, the limit realizes high vacuum state up to 10Pa, and high vacuum baking is able to achieve
Extremely low moisture content space, while vacuum oven baking can drive the trace water in pole piece material out of under high vacuum state, solve case
The baking problem of moisture in body；It not take a breath repeatedly, in the case where drying substance originally, temperature-resistant, in original drying object
In the case that matter, temperature etc. are constant, only with more than 10 hours, it will be able to the moisture pump of packet pole plate to 150-250PPM, outside pole plate
Surface, centre and deeper moisture can be completely drawn out, and be vacuumized by second level, under the action of high negative pressure, and can
The impurity molecule of pole piece deep layer is precipitated quickly, is particularly suitable for the production of middle Tang sky iron large capacity, water system battery.
2) single device is controlled by setting PLC, guarantees vacuum pump and molecular pump simultaneously or when not vacuumizing simultaneously only to separate unit
Or more vacuum ovens are vacuumized, and multiple vacuum ovens may be implemented and process together, improve working efficiency and cured effect；
The setting of PLC controller and timer may be implemented to because waiting vacuumize the longest vacuum oven of delay baking time carry out it is excellent
It first vacuumizes, guarantees that baking time is most short, improve baking efficiency.
3) pole piece shaft is equipped in vacuum oven, pole piece shaft drives lithium battery pole slice to toast when turning, pole piece can be made to dry
Roasting uniform, position is equipped with heating device, it can be achieved that the two sides to lithium battery pole slice is same among vacuum oven inner arm and pole piece
Shi Jinhang is uniformly toasted, and accelerates rate of drying, and nitrogen cylinder makes inside vacuum oven for being filled with nitrogen to vacuum oven inside
Oxygen content maintain suitable state, overtemperature prote instrument can carry out stringent control by temperature of the PLC controller to baking oven
System cooperates the use of inner wall heating device and lithium battery pole slice heating device, can achieve the purpose of secondary drying.
4) pressure in vacuum oven can be reduced in vacuum, reduces the boiling point of water, promote moisture vapour in battery material
Change, improves rate of drying, ultrasonic Wave heating battery pole piece material is constantly used while vacuumizing, the moisture in material passes through
Concentration difference is diffused into surface, and inter-molecular attraction is overcome under the action of convection current and is taken away to accelerate moisture by vacuum pump, realizes
Heat air-dry it is dry during reinforcing to lithium battery pole slice heat and mass transfer process, shorten drying time, improve drying efficiency,
Reduce drying temperature.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment 1；
Fig. 2 is the structural schematic diagram of the vacuum oven of the utility model；
Fig. 3 is the structural schematic diagram of the utility model embodiment 2；
In figure, 1- secondary vacuum pump installation, 101- vacuum pump, 102- molecular pump, 103- hose, 104- vacuum flapper valve,
105- exhaust valve, 2- vacuum oven, 201- oven body, 202- shaft, 203- inner wall heating device, 204- lithium battery pole slice add
Thermal, 205- lithium battery pole slice, 206- driving motor, 207- overtemperature prote instrument, 208- shock-absorbing foot, 209- earth leakage protective device,
210-, 3- ultrasonic heat air dryer, 301- ultrasonic transducer, 302- supersonic generator, 303- vibrating disk, 4-PLC
Controller, 5- vacuum tube, 6- vacuum valve, 7- timer, 8- pressure sensor, 9- high pressure check valve, 10- nitrogen cylinder.
Specific embodiment
Below in conjunction with embodiment, the technical solution of the utility model is clearly and completely described, it is clear that retouched
The embodiment stated is only the utility model a part of the embodiment, instead of all the embodiments.Based in the utility model
Embodiment, those skilled in the art's every other embodiment obtained under the premise of not making the creative labor, all belongs to
In the range of the utility model protection.
Refering to fig. 1-3, the utility model provides a kind of technical solution:
Embodiment 1
As shown in Figure 1, dynamic lithium battery produces second level high vacuum baking control system, including secondary vacuum pump installation 1, extremely
Few two vacuum ovens 2, ultrasonic heat air dryer 3 and PLC controller 4, the secondary vacuum pump installation 1 and the vacuum
Connection is in charge of by vacuum tube 5 between oven 2, vacuum valve 6, vacuum tube 5 are equipped at the gas outlet of the vacuum oven 2
For stainless steel tube, the ultrasonic heat air dryer 3 is set to the bottom of the vacuum oven 2, and the top of the sky oven 2 is equal
Equipped with timer 7 and pressure sensor 8, the signal output end of the timer 7 and pressure sensor 8 is controlled with the PLC
The signal input part of device is connected, and the signal output end of the PLC controller is connected with the vacuum valve 6.
The secondary vacuum pump installation 1 includes vacuum pump 101 and molecular pump 102, and the air inlet of institute's molecular pump 102 passes through institute
It states and is connected to the vacuum oven 2 being in charge of for vacuum tube 5, the air inlet of the gas outlet of the molecular pump 102 and the vacuum pump 101
Mouth is connected by hose 103, and vacuum flapper valve 104, institute are equipped between the hose 103 and vacuum pump 101 and molecular pump 102
Vacuum pump 101 is stated equipped with exhaust valve 105, gas bleeding is discharged in atmosphere by exhaust valve 105.The letter of the PLC controller
Number output end is connected with the vacuum flapper valve 104, the temperature heating temperature in the PLC controller control vacuum oven, In
After vacuum pump 101 is evacuated to vacuum to vacuum oven 2, it can also further start molecular pump 102 and vacuumize the circulation of vacuum oven 2
To high vacuum state, the mode that second level vacuumizes can be carried out by vacuumizing, i.e., vacuumize first with vacuum pump 101, be recycled
Molecular pump 102 vacuumizes, and controls the starting or closing of vacuum flapper valve 104 by PLC controller certainly, can also realize vacuum
Pump 101 and molecular pump 102 simultaneously vacuumize the circulation of vacuum oven 2, and import secondary vacuum pump machine can be used in the utility model,
Oven vacuum degree can be made to reach within 40-60 minutes 100Pa or so in a short time, the limit realizes high vacuum state up to 10Pa, no
It repeatedly to take a breath, in the case where drying substance originally, temperature-resistant, in the case where drying substance, temperature etc. are constant originally,
Only with more than 10 hours, it will be able to the moisture pump of packet pole plate to 150-250PPM, pole plate outer surface, centre and deeper water
Dividing can be completely drawn out, and vacuumized by second level, under the action of high negative pressure, and the impurity molecule of pole piece deep layer can be made quick
It is precipitated, is particularly suitable for the production of middle Tang sky iron large capacity, water system battery.
As shown in Fig. 2, the vacuum oven 2 include oven body 201, two groups inside the vacuum oven 2 it is mutual
Parallel and symmetrical shaft 202, inner wall heating device 203 and lithium battery pole slice heating device 204, the shaft 202
It is connect with the driving motor 206 for being set to 201 outer wall of oven body, the signal output end of the PLC controller 4 and the driving
Motor 206 is connected, and lithium battery pole slice 205 is fastened in the shaft 202 by the adhesion of insulating tape two ends, described
Lithium battery pole slice heating device 204 is set in the accommodation space that two groups of shafts 202 surround, the periphery packet of the shaft 202
It is wrapped with temperature-resistant insulation layer.
Preferably, the inner wall heating device 203 is the resistance wire in the inner walls of the oven body 201.
Preferably, the lithium battery pole slice heating device 204 is the resistance of the spring like of length and the shaft 202 cooperation
Silk.The resistance wire is all made of common heating element.
Preferably, inside the vacuum oven 2 be equipped with multiple overtemperature prote instrument 207, the overtemperature prote instrument 207 with it is described
The connection of 4 signal of PLC controller, can the temperature to vacuum oven 2 carry out stringent control, it is ensured that the whole safety of vacuum oven 2
Property.
Vacuum oven 2 makes lithium battery pole slice 205 reach suitable for making battery core for toasting to lithium battery pole slice 205
State；Heating device is the main baking components of vacuum oven 2, is heated using inner wall heating device 203 and lithium battery pole slice
Device 204 is for toasting lithium battery pole slice 205；Shaft 202 makes for driving lithium battery pole slice 205 to toast when turning
Pole piece baking is uniform；Driving motor 206 is opened or closed by PLC controller 4 to control it, dynamic for providing to shaft 202
Power source, inner wall heating device 203 and lithium battery pole slice heating device 204 toast lithium battery pole slice 205 and can make simultaneously
The baking of pole piece two sides uniformly, while being added and being completed under high vacuum state in baking process, is able to achieve the moisture content space of extremely low D,
The trace water in pole piece material has been driven in baking out of simultaneously, solves the problems, such as the baking of moisture in cabinet.
The length of shaft 202 is less than 2 width of vacuum oven, both can guarantee that shaft 202 was enough to install lithium battery pole slice 205,
It is avoided that shaft 202 is interfered with vacuum oven 2 again, 202 periphery of shaft is enclosed with high-temperature insulation rubber mat, anti-for pole piece
It is sliding, rotate lithium battery pole slice 205 effectively with shaft 202.
The outside of the vacuum oven 2 is equipped with nitrogen cylinder 10, and the nitrogen cylinder 10 is roasting by nitrogen feeding pipe road and the vacuum
The inside of case 2 is connected to, and the nitrogen feeding pipe road is equipped with control valve, the signal output end of the PLC controller and the adjusting
Valve is connected, and to nitrogen is filled with inside vacuum oven 2, the oxygen content inside vacuum oven 2 is made to maintain suitable state.
PLC controller can 4 according to the demand control of baking heating set, secondary vacuum pump installation 1,10 nitrogen charging of nitrogen cylinder, drive
Opening or closing for dynamic motor 206, uniformly toasts lithium battery pole slice 205, until baking is completed.
The bottom of the vacuum oven 2 is provided with shock-absorbing foot 208, keeps the stabilization of vacuum oven 2, the vacuum oven 2
Side be equipped with earth leakage protective device 209, guarantee the safety of oven.
High pressure check valve 9 is additionally provided at the gas outlet of the vacuum oven 2, high pressure check valve 9 can prevent air-flow anti-
To flowing, compressed air reverse flow is prevented.
The ultrasonic heat air dryer 3 includes ultrasonic transducer 301, supersonic generator 302 and vibrating disk
303, the vibrating disk 303 is set to inside vacuum oven 2, and the supersonic generator 302 is set to outside the vacuum oven 2,
One end of the ultrasonic transducer 301 connects the vibrating disk 303, and the other end connects the supersonic generator 302.
Ultrasonic wave is the sound wave that frequency is greater than 20kHz, is a kind of mechanical oscillation propagated in medium, and ultrasonic wave, which has, to be passed
High directivity is broadcast, the features such as medium particle vibration acceleration is big.Surpass the direct efficient coupling of ultrasonic wave in power lithium-ion battery
Hot-air drying process in, it can be achieved that heat using the strong fluctuation effect of high-frequency of ultrasound, cavitation effect and the features such as calorifics effect
To the reinforcing of lithium ion battery heat and mass transfer process during wind is dried, and reaches and shorten drying time, reduces the mesh of drying temperature
's.
Open inner wall heating device 203 and lithium battery pole slice heating device 204, be filled with nitrogen, open exhaust valve 105 and
Vacuum flapper valve 104 opens supersonic generator 302, with the frequency effect of the power of 5kW and 30kHz in lithium electricity battery, instead
The vacuum degree that vacuum oven 2 can be realized in multiple operation several times in a short time, can reach 100Pa in ordinary circumstance 40-60 minutes
Left and right, the limit also up to the high vacuum state of 10Pa, are able to achieve extremely low moisture content space, and vacuum oven toasts under high vacuum state
It has driven the trace water in pole piece material out of, has solved the problems, such as the baking of moisture in cabinet；It not take a breath repeatedly, be dried originally
Substance, it is temperature-resistant in the case where, in the case where drying substance, temperature etc. are constant originally, only with more than 10 hours, it will be able to
For the moisture pump of pole plate to 150-250PPM, pole plate outer surface, centre and the deeper moisture of lithium battery pole slice 205 can
It is completely drawn out, is particularly suitable for the production of middle Tang sky iron large capacity, water system battery.
Under normal circumstances, after repeating 10 circulations using intensified by ultrasonic wave heated-air drying, new energy power lithium-ion battery
In battery core average water content be 200 PPM, the used time 8 hours, under conditions of identical vacuum degree, do not use ultrasonic wave dry,
Battery core water content reaches 200 PPM, and drying needs the used time 12 hours, and intensified by ultrasonic wave heated-air drying can be obviously shortened drying time,
In addition the use of cooperation inner wall heating device 203 and lithium battery pole slice heating device 204, can achieve the purpose of secondary drying.
Embodiment 2
As shown in figure 3, the support different from embodiment 1 of embodiment 2 is that the quantity of vacuum oven 2 is different, this is practical new
Type may be implemented more vacuum ovens 2 while operate, can also be with roasting to 4,6,8 high vacuum using a secondary vacuum pump machine
The mode of case carries out.
The utility model using moisture under high vacuum state be easier to evaporation principle, can be very good by lithium battery electric core,
Battery pole piece and other electronic components that need to be dried are toasted, the use cost of the vacuum oven 2 is low, maintenance is simple,
Maintenance cost is low, high-efficient, high reliablity.
The above is only the preferred embodiment of the utility model, it should be understood that the utility model is not limited to herein
Disclosed form, should not be regarded as an exclusion of other examples, and can be used for other combinations, modifications, and environments, and
Can be in contemplated scope described herein, modifications can be made through the above teachings or related fields of technology or knowledge.And this field
The modifications and changes that personnel are carried out do not depart from the spirit and scope of the utility model, then all should be in right appended by the utility model
It is required that protection scope in.
Claims (10)
1. dynamic lithium battery produce second level high vacuum baking control system, it is characterised in that: including secondary vacuum pump installation (1),
At least two vacuum ovens (2), ultrasonic heat air dryer (3) and PLC controller (4), the secondary vacuum pump installation (1)
By connecting being in charge of for vacuum tube (5) between the vacuum oven (2), it is equipped at the gas outlet of the vacuum oven (2)
Vacuum valve (6), the ultrasonic heat air dryer (3) are set to the bottom of the vacuum oven (2), the vacuum oven
(2) timer (7) and pressure sensor (8) are equipped at the top of, the signal of the timer (7) and pressure sensor (8) is defeated
Outlet is connected with the signal input part of the PLC controller, the signal output end of the PLC controller and the vacuum valve
(6) it is connected.
2. dynamic lithium battery according to claim 1 produces second level high vacuum baking control system, it is characterised in that: described
Secondary vacuum pump installation (1) includes vacuum pump (101) and molecular pump (102), and the air inlet of institute's molecular pump (102) passes through described true
Being in charge of for blank pipe (5) is connected to the vacuum oven (2), gas outlet and the vacuum pump (101) of the molecular pump (102)
Air inlet is connected by hose (103), is equipped with vacuum between the hose (103) and vacuum pump (101) and molecular pump (102)
Flapper valve (104), the vacuum pump (101) are equipped with exhaust valve (105).
3. dynamic lithium battery according to claim 1 produces second level high vacuum baking control system, it is characterised in that: described
Vacuum oven (2) includes oven body (201), to be set to the vacuum oven (2) internal two groups parallel to each other and symmetrical
Shaft (202), inner wall heating device (203) and lithium battery pole slice heating device (204), the shaft (202) be set to
The driving motor (206) of oven body (201) outer wall connects, the signal output end of the PLC controller and the driving motor
(206) it is connected, lithium battery pole slice (205) is fastened on the shaft (202) by the adhesion of insulating tape two ends, institute
Lithium battery pole slice heating device (204) are stated in the accommodation space that two groups of shafts (202) surround, the shaft (202)
Periphery be enclosed with temperature-resistant insulation layer.
4. dynamic lithium battery according to claim 3 produces second level high vacuum baking control system, it is characterised in that: described
Inner wall heating device (203) is the resistance wire in the inner walls of the oven body (201).
5. dynamic lithium battery according to claim 3 produces second level high vacuum baking control system, it is characterised in that: described
Lithium battery pole slice heating device (204) is the resistance wire of the spring like of length and the shaft (202) cooperation.
6. dynamic lithium battery according to claim 3 produces second level high vacuum baking control system, it is characterised in that: described
Multiple overtemperature prote instrument (207), the overtemperature prote instrument (207) and the PLC controller signal are equipped with inside vacuum oven (2)
Connection.
7. dynamic lithium battery according to claim 1 produces second level high vacuum baking control system, it is characterised in that: described
Ultrasonic heat air dryer (3) includes ultrasonic transducer (301), supersonic generator (302) and vibrating disk (303), institute
Vibrating disk (303) are stated set on vacuum oven (2) inside, the supersonic generator (302) is set to the vacuum oven (2) outside
Portion, one end of the ultrasonic transducer (301) connect the vibrating disk (303), and the other end connects the supersonic generator
(302).
8. dynamic lithium battery according to claim 1-7 produces second level high vacuum baking control system, feature
Be: the bottom of the vacuum oven (2) is provided with shock-absorbing foot (208), and the side of the vacuum oven (2) is equipped with earth leakage protective
Device (209).
9. dynamic lithium battery according to claim 1-7 produces second level high vacuum baking control system, feature
It is: is additionally provided with high pressure check valve (9) at the gas outlet of the vacuum oven (2).
10. dynamic lithium battery according to claim 1-7 produces second level high vacuum baking control system, feature
Be: the outside of the vacuum oven (2) is equipped with nitrogen cylinder (10), and the nitrogen cylinder (10) passes through nitrogen feeding pipe road and the vacuum
The inside of oven (2) is connected to, and the nitrogen feeding pipe road is equipped with control valve, the signal output end of the PLC controller with it is described
Control valve is connected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822251317.9U CN209623234U (en) | 2018-12-29 | 2018-12-29 | Dynamic lithium battery produces second level high vacuum baking control system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822251317.9U CN209623234U (en) | 2018-12-29 | 2018-12-29 | Dynamic lithium battery produces second level high vacuum baking control system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111219953A (en) * | 2020-01-16 | 2020-06-02 | 长江存储科技有限责任公司 | Wafer drying device, wafer drying method, wafer cleaning system, and wafer cleaning and drying device |
-
2018
- 2018-12-29 CN CN201822251317.9U patent/CN209623234U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111219953A (en) * | 2020-01-16 | 2020-06-02 | 长江存储科技有限责任公司 | Wafer drying device, wafer drying method, wafer cleaning system, and wafer cleaning and drying device |
| CN111219953B (en) * | 2020-01-16 | 2022-04-01 | 长江存储科技有限责任公司 | Wafer drying device, wafer drying method, wafer cleaning system, and wafer cleaning and drying device |
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