CN209622063U - A kind of pneumatic rotary plate valve for vacuum coating - Google Patents
A kind of pneumatic rotary plate valve for vacuum coating Download PDFInfo
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- CN209622063U CN209622063U CN201822136538.1U CN201822136538U CN209622063U CN 209622063 U CN209622063 U CN 209622063U CN 201822136538 U CN201822136538 U CN 201822136538U CN 209622063 U CN209622063 U CN 209622063U
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- valve
- directional control
- rotation shaft
- solenoid directional
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Abstract
The utility model relates to a kind of pneumatic rotary plate valves for vacuum coating, including valve plate, rotation shaft, two sets of pneumatic actuating devices, traction device, solenoid directional control valve and photodetector, valve plate is arranged at the passway of vacuum chamber, the passway of vacuum chamber can be covered all by being set to the closure on the inside of valve plate, it is fixedly connected between rotation shaft by traction device on the outside of valve plate, the side of valve plate is arranged in rotation shaft, two sets of pneumatic actuating devices are respectively arranged in the side wall upper and lower ends of vacuum chamber, the upper and lower side of two sets of pneumatic actuating devices and rotation shaft is rotatably connected, solenoid directional control valve connects the gas source of every set pneumatic actuating device by gas pipeline, photodetector is arranged on vacuum tank body wall, induction closes on the workpiece vehicle of valve plate in the inductive probe alignment vacuum chamber of photodetector, photodetector It is electrically connected with solenoid directional control valve.The structure of this rotary plate valve is simple, can be automatically switched and sealing performance is good.
Description
Technical field
The utility model relates to technique for vacuum coating equipment technical field more particularly to a kind of vacuum for vacuum coating
Pneumatic rotary plate valve under environment.
Background technique
In technique for vacuum coating, there are continuous vacuum coating equipments generally in vacuum coating production line, due to phase
The function of two adjacent equipment cavities is different, required vacuum degree also difference, therefore frame is needed between cavity
If gate valve, for separating cavity, each cavity is avoided to generate the situation interfered with each other in operation.Vacuum coating equipment at present
The valve used between each vacuum chamber is rotary plate valve, i.e., drives valve plate to rotate using rotation shaft, however, in rotating plate valve arrangement
Truly have its inconsiderate place in design, often there is rotary plate valve switch fault or poor sealing, seriously affect production it is smooth into
Row.
Summary of the invention
The purpose of this utility model is to provide a kind of structures simply, can be automatically switched and what sealing performance was good is used for vacuum
The pneumatic rotary plate valve of plated film.
To achieve the goals above, the technical solution adopted in the utility model is a kind of pneumatic turn for vacuum coating
Plate valve, including valve plate, rotation shaft, two sets of pneumatic actuating devices, traction device, solenoid directional control valve and photodetector, valve plate
It is arranged at the passway of vacuum chamber, the channel of vacuum chamber can be covered all by being set to the closure on the inside of valve plate
Mouthful, it is fixedly connected between rotation shaft by traction device on the outside of valve plate, the side of valve plate is arranged in rotation shaft, with vacuum
Cabinet is located at the same side, and two sets of pneumatic actuating devices are respectively arranged in the side wall upper and lower ends of vacuum chamber, two sets of pneumatic actuations
The upper and lower side of device and rotation shaft is rotatably connected, and solenoid directional control valve connects every set pneumatic actuating device by gas pipeline
Gas source, photodetector are arranged on vacuum tank body wall, incude inside the inductive probe alignment vacuum chamber of photodetector
The workpiece vehicle of valve plate is closed on, photodetector is electrically connected with solenoid directional control valve.
As a kind of improvement of the utility model, every set pneumatic actuating device includes driving cylinder, rack, band bearing
Gear, high-pressure air source, the piston of one end connection driving cylinder of rack, other end end are equipped with rack gear, and rack passes through tooth
Item is connect with being meshed with Bearing gear, is equipped with groove in band Bearing gear, rotation shaft is arranged in groove, solenoid directional control valve
High-pressure air source is separately connected by gas pipeline and drives the port of cylinder.
As a kind of improvement of the utility model, the photodetector includes photoelectric sensor and microcontroller, photoelectricity
Inductor connects the input terminal of microcontroller, and the output end of microcontroller connects solenoid directional control valve, and photoelectric sensor is directed at vacuum
The passway of cabinet.
As a kind of improvement of the utility model, the solenoid directional control valve uses two five-way valves, the gas pipeline packet
An air inlet pipe and four escape pipes are included, air inlet pipe and escape pipe are respectively connected to the air inlet and two outlets of solenoid directional control valve
Mouthful, air inlet pipe connects high-pressure air source, other two gas outlet of solenoid directional control valve drives cylinder by two escape pipe connections
Port.
Be equipped with as a kind of improvement of the utility model, in the closure on the inside of the valve plate can covering vacuum cabinet it is logical
Sealing ring around road junction.
As a kind of improvement of the utility model, the closure on the inside of the valve plate is equipped with a circle groove, edge in sealing ring
In groove.
As a kind of improvement of the utility model, the photoelectric sensor uses the light of model Omron E3FA-TN11
Electric transducer.
As a kind of improvement of the utility model, the traction device uses 4-6 root steel structure connecting rod, all steel structure connections
Bar is uniformly distributed along the vertical direction, and one end of steel structure connecting rod is welded on the outside of valve plate, and the other end is welded on rotation shaft
On.
As a kind of improvement of the utility model, the quantity of the rack gear is a pair, is arranged side by side in the end of rack,
It is equipped with the vertical bar parallel with rotation shaft in the side of rack, one of rack gear is located at rotation axis side, with rotation axis
Band Bearing gear on body being meshed, another rack gear is located at vertical bar side, has been fixedly attached gear on vertical bar, and gear can be with
Rack gear positioned at vertical bar side is meshed rotation.
Compared with the existing technology, the overall construction design of the utility model is ingenious, structurally reasonable stabilization, volume compact, leads to
The combined use for crossing solenoid directional control valve and photodetector and pneumatic actuating device realizes the automatic switch operation of valve plate, due to
The use of solenoid directional control valve, so that the switch operation of valve plate is more accurate, the effective guarantee vacuum environment of vacuum chamber, simultaneously
Due to the sealing ring of the closure setting in valve plate Yu vacuum chamber passway make rotary plate valve to the leakproofness of vacuum chamber more
Add well, is also convenient for changing after long-time service.In addition, passing through driving cylinder, rack, band bearing gear in pneumatic actuating device
The structure design of wheel realizes valve plate and moves under the draw of traction device, is also convenient for care and maintenance.
Detailed description of the invention
Fig. 1 is the pneumatic rotary plate valve structural schematic diagram of the utility model.
Fig. 2 is the top structure schematic diagram of pneumatic rotary plate valve of the utility model when omitting pneumatic actuating device.
Fig. 3 is the pneumatic actuating device structural schematic diagram of the utility model.
The rack and the drive mechanism schematic diagram with Bearing gear that Fig. 4 is the utility model.
In figure: 1- vacuum chamber, 2- valve plate, 3- rotation shaft, 4- pneumatic actuating device, 5- traction device, 6- electromagnetism change
To valve, 7- drives cylinder, 8- rack, 9- band Bearing gear, 10- rack gear, 11- sealing ring, 12- gear.
Specific embodiment
In order to deepen to be further described with reference to the accompanying drawing to the utility model to the understanding and cognition of the utility model
And introduction.
As shown in Figure 1-3, a kind of pneumatic rotary plate valve for vacuum coating, including valve plate 2,3, two sets of rotation shaft are pneumatically
Driving device 4, traction device 5, solenoid directional control valve 6 and photodetector, valve plate 2 are arranged at the passway of vacuum chamber 1, if
The closure for being placed in 2 inside of valve plate can cover all the passway of vacuum chamber 1, between 2 outside of valve plate and rotation shaft 3
It is fixedly connected by traction device 5, the side of valve plate 2 is arranged in rotation shaft 3, is located at the same side, two sets of gas with vacuum chamber 1
Dynamic driving device 4 is respectively arranged in the side wall upper and lower ends of vacuum chamber 1, and two sets of pneumatic actuating devices 4 are upper with rotation shaft 3
Lower end is rotatably connected, and solenoid directional control valve 6 connects the gas source of every set pneumatic actuating device 4 by gas pipeline, for adjusting gas
High pressure draught head inside dynamic driving device 4, photodetector are arranged on 1 wall of vacuum chamber, and the induction of photodetector is visited
The workpiece vehicle for closing on valve plate 2 is incuded inside head alignment vacuum chamber 1, and photodetector is electrically connected with solenoid directional control valve 6, passes through
Inductive probe carries out induction detection to workpiece vehicle, then sends a signal to solenoid directional control valve 6 and adjusts inside pneumatic actuating device 4
Draught head drives the Push And Release of valve plate 2 to control the rotation of rotation shaft 3.
Wherein, rotation shaft 3 is driven as power source using two sets of pneumatic actuating devices 4, can effectively ensures rotation axis
Body 3 precisely smoothly drives valve plate 2 to carry out switch operation by traction device 5.Every set pneumatic actuating device 4 includes driving cylinder
7, rack 8, band Bearing gear 9, high-pressure air source, the piston of one end connection driving cylinder 7 of rack 8, other end end is set
There is a rack gear 10, rack 8 connect by rack gear 10 with being meshed with Bearing gear 9, equipped with groove in band Bearing gear 9, is rotated
Axis body 3 is arranged in groove, and rotation shaft 3 can pass through gas pipeline point with 9 one pieces of Bearing gear rotations of band, solenoid directional control valve 6
Not Lian Jie high-pressure air source and driving cylinder 7 port.Optoelectronic induction probe sends electric signal to electromagnetic switch after receiving signal
Valve 6, solenoid directional control valve 6 receive the position of change electromagnetic steering valve inner spool after signal, realize that the switch of solenoid directional control valve 6 is cut
It changes, to change the trend of high pressure gas in air supply channel, changes pressure difference before and after driving 7 inner piston of cylinder, make piston motion,
And then drive 8 straight reciprocating motion of rack.
Preferably, the photodetector includes photoelectric sensor and microcontroller, and photoelectric sensor connects microcontroller
Input terminal, the output end of microcontroller connects solenoid directional control valve 6, by microcontroller to the inductive signal of photoelectric sensor into
The acceptable electric signal of solenoid directional control valve 6 is converted into after row processing, photoelectric sensor is directed at the passway of vacuum chamber 1, right
Workpiece vehicle inside vacuum chamber 1 carries out induction monitoring.Wherein, the photoelectric sensor uses model Omron E3FA-
The photoelectric sensor of TN11.
It is further preferred that the solenoid directional control valve 6 uses two five-way valves, the gas pipeline includes an air inlet pipe
With four escape pipes, air inlet pipe is respectively connected to the air inlet of solenoid directional control valve 6 with escape pipe and two gas outlets, air inlet pipe connect
Connect high-pressure air source, the port that other two gas outlet of solenoid directional control valve 6 passes through two escape pipe connection driving cylinders 7.
Still more preferably, being equipped in the closure of 2 inside of the valve plate can be around 1 passway of covering vacuum cabinet
Sealing ring 11.For the ease of replacing the old sealing ring 11 of poor sealing effect after long-time service, the closure in 2 inside of valve plate is set
There is a circle groove, is embedded in groove in sealing ring 11.By adding sealing ring 11, valve plate 2 and vacuum can be further increased
Sealing performance between 1 passway of cabinet.
Still more preferably, the traction device 5 uses 4-6 root steel structure connecting rod, and hauling ability is good and stable structure
Property is good, and all steel structure connecting rods are uniformly distributed along the vertical direction, and one end of steel structure connecting rod is welded on the outside of valve plate 2, separately
One end is welded on rotation shaft 3.
Still more preferably, as shown in figure 4, in order to ensure rack 8 has stronger driving force to rotation shaft 3,
The quantity of rack gear 10 is set as a pair of, is arranged side by side in the end of rack 8, in addition, being equipped with and rotation in the side of rack 8
The parallel vertical bar of axis body 3, vertical bar and rotation shaft 3 are located at the two sides of rack 8, and one of rack gear 10, which is located at, to be turned
3 side of moving axis body, be meshed transmission with the band Bearing gear 9 on rotation shaft 3, another rack gear 10 is located at vertical bar side, and perpendicular
Gear 12 it has been fixedly attached on bar, gear 12 can be meshed transmission with the rack gear 10 for being located at vertical bar side.
The structure for the pneumatic rotary plate valve that the utility model is proposed is simple, reliable and stable, it can be achieved that 1 passway of vacuum chamber
The automatic Push And Release of valve plate 2 at place, greatly reduces the switch fault of valve plate 2 in use, improves vacuum coating equipment
The degree of automation, also substantially increase the production efficiency of vacuum coating equipment.In addition, passing through photodetector and electromagnetic switch
Valve 6 drives cylinder 7 and rack 8 and the structure design with Bearing gear 9, it can be ensured that the Push And Release movement of valve plate 2 is more smart
It is really controllable, and care and maintenance is also convenient in addition, can have by inlaying setting sealing ring 11 in the closure of 2 inside of valve plate
Effect guarantees the sealing effect of valve plate 2, is also convenient for replacing.
Technological means disclosed in the utility model is not limited only to technological means disclosed in above embodiment, also
Including technical solution consisting of any combination of the above technical features.It should be pointed out that for the ordinary skill of the art
For personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these are improved and profit
Decorations are also considered as the protection scope of the utility model.
Claims (9)
1. a kind of pneumatic rotary plate valve for vacuum coating, it is characterised in that: including valve plate, rotation shaft, two sets of pneumatic actuations
Device, traction device, solenoid directional control valve and photodetector, valve plate are arranged at the passway of vacuum chamber, are set to valve plate
The closure of inside can cover all the passway of vacuum chamber, pass through traction device between rotation shaft on the outside of valve plate
It is fixedly connected, the side of valve plate is arranged in rotation shaft, and two sets of pneumatic actuating devices are respectively arranged on the side wall of vacuum chamber
The upper and lower side of lower both ends, two sets of pneumatic actuating devices and rotation shaft is rotatably connected, and solenoid directional control valve is connected by gas pipeline
The gas source of every set pneumatic actuating device is connect, photodetector is arranged on vacuum tank body wall, the inductive probe pair of photodetector
The workpiece vehicle for closing on valve plate is incuded inside quasi- vacuum chamber, and photodetector is electrically connected with solenoid directional control valve.
2. a kind of pneumatic rotary plate valve for vacuum coating as described in claim 1, which is characterized in that every set pneumatic actuation dress
It sets including driving cylinder, rack, band Bearing gear, high-pressure air source, the piston of one end connection driving cylinder of rack, it is another
End is held to be equipped with rack gear, rack connect by rack gear with being meshed with Bearing gear, with, equipped with groove, rotating in Bearing gear
Axis body is arranged in groove, and solenoid directional control valve is separately connected high-pressure air source by gas pipeline and drives the port of cylinder.
3. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 2, which is characterized in that the photodetector
Including photoelectric sensor and microcontroller, photoelectric sensor connects the input terminal of microcontroller, the output end connection of microcontroller
Solenoid directional control valve, photoelectric sensor are directed at the passway of vacuum chamber.
4. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 3, which is characterized in that the photoelectric sensor
Using the photoelectric sensor of model Omron E3FA-TN11.
5. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 2, which is characterized in that the solenoid directional control valve
Using two five-way valves, the gas pipeline includes that an air inlet pipe and four escape pipes, air inlet pipe are separately connected with escape pipe
To the air inlet of solenoid directional control valve and two gas outlets, air inlet pipe connects high-pressure air source, other two outlet of solenoid directional control valve
The port that mouth passes through two escape pipes connection driving cylinders.
6. a kind of pneumatic rotary plate valve for vacuum coating as described in any one in claim 1-5, which is characterized in that the valve
Closure on plate positioned at the passway of vacuum chamber is equipped with sealing ring.
7. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 6, which is characterized in that on the inside of the valve plate
Closure is equipped with a circle groove, is embedded in groove in sealing ring.
8. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 7, which is characterized in that the traction device is adopted
With 4-6 root steel structure connecting rod, all steel structure connecting rods are uniformly distributed along the vertical direction, and one end of steel structure connecting rod is welded on valve
The outside of plate, the other end are welded on rotation shaft.
9. a kind of pneumatic rotary plate valve for vacuum coating as claimed in claim 2, which is characterized in that the quantity of the rack gear
It for a pair, is arranged side by side in the end of rack, the vertical bar parallel with rotation shaft is equipped in the side of rack, wherein one
A rack gear is located at rotation axis side, is meshed with the band Bearing gear on rotation shaft, another rack gear is located at vertical bar side, perpendicular
Gear it has been fixedly attached on bar, gear can be meshed rotation with the rack gear for being located at vertical bar side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822136538.1U CN209622063U (en) | 2018-12-19 | 2018-12-19 | A kind of pneumatic rotary plate valve for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822136538.1U CN209622063U (en) | 2018-12-19 | 2018-12-19 | A kind of pneumatic rotary plate valve for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209622063U true CN209622063U (en) | 2019-11-12 |
Family
ID=68446148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822136538.1U Active CN209622063U (en) | 2018-12-19 | 2018-12-19 | A kind of pneumatic rotary plate valve for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209622063U (en) |
-
2018
- 2018-12-19 CN CN201822136538.1U patent/CN209622063U/en active Active
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