CN209619503U - A kind of centralising device when the clamping crystal bar for single crystal growing furnace - Google Patents
A kind of centralising device when the clamping crystal bar for single crystal growing furnace Download PDFInfo
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- CN209619503U CN209619503U CN201920262798.5U CN201920262798U CN209619503U CN 209619503 U CN209619503 U CN 209619503U CN 201920262798 U CN201920262798 U CN 201920262798U CN 209619503 U CN209619503 U CN 209619503U
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- fire door
- range finder
- clamping jaw
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Abstract
To solve the problems, such as that manual operation easily falls stick in the prior art, the utility model provide it is a kind of for single crystal growing furnace clamp crystal bar when centralising device, including shell, the intracorporal control assembly of shell is set, the direction being arranged on shell determines component, position determination component and crawl positioning component；Direction determines that component includes the line marking device for penetrating the auxiliary line that auxiliary clamping jaw levels to fire door side wall upslide；Position determination component includes the left side range finder and right side range finder for measuring distance between the left and right sides of clamping jaw and fire door respectively；Crawl positioning component includes the left locator and besthomer of distance between the left and right sides for measuring clamping jaw respectively and furnace inner wall；The distance between left side range finder and right side range finder are greater than the width of fire door and horizontal are symmetricly set on side of the shell towards fire door.The utility model high reliablity after use, greatly improves reliability, reduces the production cost of enterprise.
Description
Technical field
The utility model relates to silicon single crystal production field, more particularly to it is a kind of in production for single crystal growing furnace clamping crystal bar when
Auxiliary centering centralising device and its clamp crystal bar method.
Background technique
Silicon single crystal is the critical material for manufacturing IC integrated circuit and solar battery, quick with Chinese semiconductor industry
Development, China are only second to the second-biggest-in-the-world semi-conductor market in the U.S. by becoming.
Czochralski crystal growing furnace is the capital equipment for preparing silicon single crystal, by polysilicon heating and melting, obtains list by rotary pulling
Crystal bar is hung on upper furnace chamber by seed crystal by Jingjing stick.Since seed crystal is thinner, material is more crisp, and crystal bar quality is larger, and seed crystal is easy
Fracture, causes crystal bar to fall, and damages crystal bar and lower furnace chamber, causes huge economic losses, therefore it is more demanding that single crystal growing furnace, which takes stick,
And the higher operation of complexity.
It is existing take stick method be usually fork truck install additional mechanical grip, take stick vehicle to carry out taking stick, clamping jaw by manual operation
Positioning difficulty is larger, there are it is biggish fall stick risk.
Utility model content
The purpose of this utility model is that solve the problems, such as that manual operation easily falls stick, the utility model in the prior art
A kind of centralising device when clamping crystal bar for single crystal growing furnace is provided.The utility model installs clamping jaw additional by multiple groups sensor, auxiliary
Mobile carrier, such as fork truck, and fire door centering realizes accurate centering, the effective solution difficult problem of clamping jaw positioning.
To achieve the above object, the technical scheme adopted by the utility model is when one kind is for single crystal growing furnace clamping crystal bar
Centralising device, including with for taking the clamping jaw of crystal bar to be detachably connected shell, be arranged in the intracorporal control assembly of shell, setting
Direction on shell determines component, position determination component and crawl positioning component；Its technical solution is that: direction determines group
Part includes the line marking device for penetrating the auxiliary line that auxiliary clamping jaw levels to fire door side wall upslide；Position determination component includes for dividing
Not Ce Liang between the left and right sides and fire door of clamping jaw distance left side range finder and right side range finder；Grabbing positioning component includes using
The left locator and besthomer of distance between the left and right sides and furnace inner wall for measuring clamping jaw respectively；Wherein, left side range finder
The distance between right side range finder is greater than the width of fire door and horizontal is symmetricly set on side of the shell towards fire door；
Wherein, the distance between left locator and besthomer are equal to the width of fire door and horizontal are symmetricly set on shell
Side towards fire door；Wherein, left side range finder and right side range finder and besthomer are electrically connected with control assembly.
Compared with prior art, the utility model has the following beneficial effects: the utility model determines component according to direction first
Assist operators adjust mobile carrier, guarantee that clamping jaw is parallel to the ground.Then, position determination component, auxiliary operation are recycled
Personnel are parallel with fire door by clamping jaw, finally utilize crawl positioning component by clamping jaw and fire door face.Clamping jaw protrudes into crawl in furnace again
When, the moment pays close attention to clamping jaw at a distance from internal protecting wall, when clamping jaw center is overlapped with crystal bar center, reminds operator that can press from both sides
It holds, to guarantee to clamp accuracy rate.The utility model high reliablity after use, greatly improves reliability, reduces enterprise
Production cost.
Detailed description of the invention
Fig. 1 is the perspective view of the utility model.
Fig. 2 is the partial view of Fig. 1.
Fig. 3 is that the utility model uses schematic diagram.
Fig. 4 is the circuit diagram of the embedded microcontroller in control assembly.
Fig. 5 is the RS232 telecommunication circuit in the component processed in control assembly.
Fig. 6 is the circuit diagram that left locator, the left side range finder in control assembly are connect with embedded microcontroller.
Fig. 7 is the circuit diagram that besthomer, the right side range finder in control assembly are connect with embedded microcontroller.
Fig. 8 is the circuit diagram that the WIFI module in control assembly is connect with embedded microcontroller.
Fig. 9 is power module circuitry figure.
It should be clear that: for sake of clarity, the direction in Fig. 4 determines that component, position determination component and crawl are fixed
Hyte part protrudes surface of shell and shows., in practice in order to measure precisely, direction determines component, position determination component and grabs for it
Positioning component is taken to be fixed on shell by modes such as stickup or bolt fastenings, the flush with shell.
Specific embodiment
With reference to the accompanying drawing and specific embodiment the utility model is described in further detail.
A kind of described centralising device when clamping crystal bar for single crystal growing furnace, including with for taking the clamping jaw 8 of crystal bar 6 removable
The shell 1 for unloading connection, the control assembly 2 being arranged in shell 1, be arranged on shell 1 for assist operators by clamping jaw 8
It adjusts to the direction of degree parallel to the ground and determines component 3.Wherein, clamping jaw 8, which is adjusted to parallel to the ground, refers to institute as shown in figure 1
The clamping jaw 8 shown, two is used for the parallel ground setting of pawl of clamping.Direction determines that component 3 includes for fire door side wall upslide
Penetrate the line marking device of the auxiliary line of auxiliary clamping jaw leveling.
In actual production, line marking device can use a word laser, project the laser beam of width 1mm or so, use
In projecting vertical line respectively on two wall of fire door, two line marking device horizontal spaces are equal to two wall middle line spacing of fire door.Assist clamping jaw 8 fixed
Position.5mW green laser can be selected, laser levels safety is protected without specific safety.Clamping jaw 8 itself is parallel, load with ground
Tool is from distally opening, and first passing through line marking device makes the alignment fire door that 8 direction of clamping jaw is rough, preliminary, if without line marking device,
8 direction of clamping jaw is arbitrary, and operator can not determine whether to be directed at fire door.
The centralising device further includes adjusting clamping jaw 8 to the position parallel with fire door for assist operators to determine group
Part 4.Position determination component 4 includes the left side range finder 401 for measuring distance between the left and right sides of clamping jaw and fire door respectively
With right side range finder 402；Left side range finder 401 and right side range finder 402 arrive the distance of fire door for measuring shell 1, and then sentence
Whether disconnected 8 direction of clamping jaw is consistent with fire door direction.The distance between left side range finder 401 and right side range finder 402 are greater than fire door
Width and horizontal be symmetricly set on side of the shell 1 towards fire door, it is preferred that left side range finder 401 and right side range finder
402 horizontal spaces are equal to two wall middle line spacing of fire door.ZX1-LD600 can be selected in left side range finder 401 and right side range finder 402
Laser displacement sensor, range 20cm ~ 1m, 4 ~ 20mA of corresponding output, series resistance convert voltage signal for current signal, connect
Entering control assembly 2ADC can be completed data acquisition.
The centralising device further includes adjusting clamping jaw 8 to the position of face fire door for assist operators, and crawl is fixed
Hyte part 5 includes the left locator 501 and besthomer of distance between the left and right sides for measuring clamping jaw respectively and furnace inner wall
502；The distance between left locator 501 and besthomer 502 are equal to the width of fire door and horizontal are symmetricly set on 1 face of shell
To the side of fire door；Such as Fig. 6 ~ 7, HG-C1400 laser displacement sensor is can be selected in left locator 501 and besthomer 502,
Data acquisition can be completed in range 20cm ~ 60cm, 0 ~ 5V of corresponding output, series resistance partial pressure, access control assembly 2ADC.
The centralising device further includes control assembly 2, and such as Fig. 4, the control assembly 2 and left side range finder 401 and right side are surveyed
It is electrically connected, is acquired with the range information of upper-part away from device 402 and besthomer 502.
The centralising device further includes display 7；Control assembly 2 is electrically connected with display 7, for showing auxiliary operation
The indication signal of worker operation, such as right arrow " → ", instruction operator move right clamping jaw 8.Display 7 include driver and
LED unit plate, such as Fig. 5, driver are connect by RS232 interface with control assembly 2, are sent and are controlled from control assembly 2 to driver
Word processed, driver refresh information to LED unit plate.
The centralising device further includes communication module 8；Control assembly 2 is electrically connected with communication module 8, for position is true
Determine component 4, the signal of crawl positioning component 5 is wirelessly transmitted to distal end host computer.Such as Fig. 8, communication module 8 can be WIFI, lead to
It crosses antenna 8A to connect with control assembly 2, the data that control assembly 2 is sent is transmitted to host computer.It can be used for remotely monitoring and take stick
State, record take rod motion data.Friend USR-C215 module can be selected, serial data transparent transmission, the module are realized in 3.3V power supply
It can be directly connected to control assembly 2.Certainly, communication module 8 is also possible to bluetooth module.
It should be clear that: such as Fig. 4 ~ 9, control assembly 2 as described herein includes embedded microcontroller, memory and outer
Interface circuit is enclosed, peripheral interface circuit includes the switching circuit that direction determines component 3, the communication interface circuit of display 7, position
The signal acquisition circuit for determining component 4, grabbing positioning component 5, the communication interface circuit of communication module 8.Embedded microcontroller
STM32F103RET6 single-chip microcontroller, 64 pins, 72MHz dominant frequency, 49 GPIO ports, three road USART, 16 channels can be selected
12bit A/D converter.Control assembly 2 further includes determining component 3, position determination component 4 for control assembly 2, direction and grabbing
The power module for taking positioning component 5 to power.
It should be clear that: fire door refers to: furnace chamber fire door on single crystal growing furnace, and crystal bar 6 is located in fire door, takes out crystalline substance by clamping jaw 8
Stick 6.
It should be clear that: clamping jaw 8 is located on mobile carrier such as fork truck, can also be called and take stick vehicle, can carry out a left side up and down
The movement such as move right, hold tightly, unclamping.8 model of clamping jaw described in the utility model are as follows: MiMA (rice Ma) reach truck TFA15-
30 fork trucks reequip mechanical grip by Hangzhou Jin Hongchang new energy equipment Co., Ltd.The shell 1 of the utility model is installed on clamping jaw
8 rears form one with clamping jaw 8, follow clamping jaw 8 to carry out orientation jointly mobile.
For above-mentioned centralising device, the total course of work of the utility model is:
1. initialization program: it powers on every time, power module progress power supply pressure stabilizing is control assembly 2, direction determines component 3,
Position determination component 4 and crawl positioning component 5 are powered；Control assembly 2 is automatically reset, initializes internal register.Just
Beginningization position determination component 4 and frequency acquisition, the acquisition precision for grabbing positioning component 5, enabled direction determine that component 3 exports,
The initial display content of display 7 is set, channel, destination address and the port of communication module 8 are configured and establishes initialization.Control
2 timing reading position of component determines component 4 and grabs the output signal of positioning component 5, converts respective counts for output signal
Value, and numerical value is refreshed to display 7, while sending data to communication module 8.Initialization is completed, approach axis judges journey
Sequence.
2. walking direction program: when the numerical value difference that position determination component 4 measures is larger, i.e., | S1-S2 | > ε, wherein ε
0.1mm is taken, is looped to determine, until:
When the numerical value that position determination component 4 measures | S1-S2 |≤ε, wherein ε takes 0.1mm, and distance S1 is less than clamping jaw 8
When the sum of length L and distance threshold T0, i.e. S1 < L+T0, then device to two wall of fire door is equidistant and before the fire door
Square certain distance, it is believed that clamping jaw direction is consistent with fire door direction at this time, in-position determining program；Wherein, T0 is before clamping jaw 8
The minimum safe distance of fire door is held, 5cm can be set as；
Wherein, the distance between left side range finder 401 and fire door are S1；The distance between right side range finder 402 and fire door
For S2；The length of clamping jaw 8 is product given data.
3. position determining program: when the numerical value difference that left locator 501 and besthomer 502 measure is larger, return side
To determining program, otherwise judged according to following principle work:
When clamping jaw 8 is deviated to the left fire door center, left locator 501 measure numerical value D1 be device to left side fire door away from
From it is distance of the device to certain region inside fire door that besthomer 502, which measures numerical value D2, at this time D1 > D2；
When clamping jaw 8 is deviated to the right fire door center, it is in left locator 501 to fire door that left locator 501, which measures numerical value D1,
The distance in portion region, it is besthomer 502 to the distance of right side fire door that besthomer 502, which measures numerical value D2, at this time D1 < D2；
When clamping jaw 8 is directed at fire door center, left locator 501 measures numerical value D1 as left locator 501 to left side fire door
Distance, it is distance of the besthomer 502 to certain region inside fire door that besthomer 502, which measures numerical value D2, at this time | D1-D2 |≤θ,
θ=0.1mm；
It is indicated according to following rule:
When reading D1 > D2 and D1-D2 > θ, clamping jaw 8 is deviated to the left fire door at this time, then right arrow is indicated in display 7
" → ", instruction operative employee move right clamping jaw 8；
When reading D1<D2 and D2-D1>θ, clamping jaw 8 is deviated to the right fire door at this time, then left arrow is indicated in display 7
" ← ", instruction operative employee are moved to the left clamping jaw 8；
When reading | D1-D2 | when≤θ, clamping jaw 8 is directed at fire door at this time, then indicates horizontal line " -- " in display 7, instruction behaviour
Workmanship's aligned fire door, into center determining program.
4. center determining program: when left side range finder 401 and range finder 402 numerical value in right side is unequal or left locator 501,
When 502 numerical value of besthomer is unequal, return position determining program.
When the locator 501 equal and left with 402 numerical value of right side range finder of left side range finder 401,502 numerical value of besthomer are full
Foot | D1-D2 | when≤θ, continue judgement left side range finder 401 and 402 numerical value of right side range finder, if its center for being equal to clamping jaw 8 is arrived
The distance L1 of shell 1 and fire door center, that is, crystal bar center to the difference of fire door distance L2, i.e. when S1=S2=L1-L2, clamping jaw 8
Center is overlapped with 6 center of crystal bar, shows " OK " in display 7, instruction centering is completed.
The utility model can assist mechanical grip 8 to be accurately positioned, and effectively improve positioning accuracy, can guarantee fast
Speed is stablized, reliably takes stick, reduces stick risk.
The foregoing is merely the preferred embodiment of utility model, oneself, is not intended to limit the utility model, all in this reality
With made any modifications, equivalent replacements, and improvements within novel spirit and principle etc., the utility model should be included in
Within protection scope.
Claims (3)
1. a kind of centralising device when clamping crystal bar for single crystal growing furnace, including with for taking the clamping jaw of crystal bar (6) to be detachably connected
Shell (1), setting in shell (1) control assembly (2), direction on shell (1) be set determine component (3), position
Determine component (4) and crawl positioning component (5)；It is characterized by:
Direction determines that component (3) includes the line marking device for penetrating the auxiliary line that auxiliary clamping jaw levels to fire door side wall upslide；Position
Determine that component (4) includes left side range finder (401) and the right side for measuring distance between the left and right sides of clamping jaw and fire door respectively
Side range finder (402)；Grabbing positioning component (5) includes distance between the left and right sides for measuring clamping jaw respectively and furnace inner wall
Left locator (501) and besthomer (502)；
Wherein, the distance between left side range finder (401) and right side range finder (402) are greater than the width of fire door and horizontal symmetrical
It is arranged in the side of shell (1) towards fire door；
Wherein, the distance between left locator (501) and besthomer (502) are equal to the width of fire door and horizontal are symmetrical arranged
In the side of shell (1) towards fire door；
Wherein, left side range finder (401) and right side range finder (402) and besthomer (502) are electrically connected with control assembly (2)
It connects.
2. centralising device when a kind of clamping crystal bar for single crystal growing furnace according to claim 1, it is characterised in that: further include
Display (7)；Control assembly (2) is electrically connected with display (7), for showing the indication signal of auxiliary operation worker operation.
3. centralising device when a kind of clamping crystal bar for single crystal growing furnace according to claim 1, it is characterised in that: further include
Communication module；Control assembly (2) is electrically connected with communication module, is used for position determination component (4), is grabbed positioning component (5)
Signal is wirelessly transmitted to distal end host computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920262798.5U CN209619503U (en) | 2019-03-01 | 2019-03-01 | A kind of centralising device when the clamping crystal bar for single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920262798.5U CN209619503U (en) | 2019-03-01 | 2019-03-01 | A kind of centralising device when the clamping crystal bar for single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209619503U true CN209619503U (en) | 2019-11-12 |
Family
ID=68455454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920262798.5U Active CN209619503U (en) | 2019-03-01 | 2019-03-01 | A kind of centralising device when the clamping crystal bar for single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209619503U (en) |
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2019
- 2019-03-01 CN CN201920262798.5U patent/CN209619503U/en active Active
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