CN209604764U - A kind of lined anti-corrosive apparatus equipped with metallic spacer - Google Patents
A kind of lined anti-corrosive apparatus equipped with metallic spacer Download PDFInfo
- Publication number
- CN209604764U CN209604764U CN201822161645.XU CN201822161645U CN209604764U CN 209604764 U CN209604764 U CN 209604764U CN 201822161645 U CN201822161645 U CN 201822161645U CN 209604764 U CN209604764 U CN 209604764U
- Authority
- CN
- China
- Prior art keywords
- pipe fitting
- corrosion
- layer
- separation layer
- proof lining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Injection Moulding Of Plastics Or The Like (AREA)
- Laminated Bodies (AREA)
Abstract
The utility model relates to a kind of lined anti-corrosive apparatus equipped with metallic spacer, including pipe fitting ontology and corrosion-proof lining layer, separation layer is equipped between corrosion-proof lining layer and the inner wall of pipe fitting ontology, separation layer connect and fixes with the inner wall of pipe fitting ontology, while separation layer connect to form overall structure with corrosion-proof lining layer.Separation layer is made of fluoroplastics, and separation layer is connect and fixed with pipe fitting ontology by injection molding manner；The corrosion-proof lining layer is connect and is fixed with separation layer by injection molding manner.The utility model additional isolation layer between pipe fitting ontology and corrosion-proof lining layer, has completely cut off the infiltration and pollution of metal ion in pipe fitting injection moulding process, so that the corrosion-proof lining layer of injection molding is cleaner, to guarantee that chemical is not contaminated.The utility model solves traditional injection moulding mode metal ion and easily penetrates into injection molding liner layer, and the problem of Pollution Chemistry cleaning agent, so as to the product quality of effective guarantee semiconductor devices.
Description
Technical field
The utility model relates to anti-corrosion pipe technical field, especially a kind of lined anti-corrosion dress equipped with metallic spacer
It sets.
Background technique
In the production of semiconductor devices, silicon wafer is the core material of manufacturing semiconductor devices.Since silicon chip surface exists
The free field of force, thus the contaminant particles contacted with silicon wafer will be sucked by it, for example, some unfavorable impurity (organic impurities and
Inorganic impurity) silicon chip surface is stain, it often changes the property of semiconductor surface, metal ion is stain, it is necessary to use
The method of chemistry could clean its contamination.Therefore, semicon industry is for storing and conveying the container and pipeline of chemical
It is required that it is high, metal ion pollution cannot be generated.
Currently, the pipeline and its pipe fitting of semicon industry, are prevented usually inside metal tube by what injection molding obtained
Rotten liner layer comes isolating metal and chemical, but in the injection molding operation of pipe fitting processing, still suffers from a small amount of
Metal ion penetrates into injection molding liner layer, and when use is possible to Pollution Chemistry cleaning agent, and then influences the production of semiconductor devices
Quality.
Utility model content
The purpose of the utility model is to provide between a kind of pipe fitting ontology and corrosion-proof lining layer additional isolation layer be equipped with gold
Belong to the lined anti-corrosive apparatus of separation layer.
The purpose of this utility model is achieved by the following technical solution:
A kind of lined anti-corrosive apparatus equipped with metallic spacer, including pipe fitting ontology and corrosion-proof lining layer, corrosion-proof lining
Layer connect and fixes with the inner wall of pipe fitting ontology, and separation layer is equipped between the corrosion-proof lining layer and the inner wall of pipe fitting ontology, every
Absciss layer connect and fixes with the inner wall of pipe fitting ontology, while separation layer connect to form overall structure with corrosion-proof lining layer.
As the optimal technical scheme of the utility model, the material of the separation layer includes plastics or coating, and separation layer is logical
It crosses injection molding or spraying method covers the surface of pipe fitting inner body wall.
As the optimal technical scheme of the utility model, the separation layer is made of fluoroplastics, fluoroplastics include PFA,
PTFE、PVDF、FEP、ECTFE、ETFE。
As the optimal technical scheme of the utility model, the separation layer is connect and is consolidated with pipe fitting ontology by injection molding manner
It is fixed.
As the optimal technical scheme of the utility model, the corrosion-proof lining layer is made of fluoroplastics, and fluoroplastics include
PFA、PTFE、PVDF、FEP、ECTFE、ETFE。
As the optimal technical scheme of the utility model, the corrosion-proof lining layer connect with separation layer by injection molding manner and
It is fixed.
As the optimal technical scheme of the utility model, the pipe fitting ontology is made of metal material, and pipe fitting ontology includes
Pipeline, tower section, threeway, four-way, elbow, concentric reducer, pipe cap, pipe fitting, pipe nipple.
The beneficial effects of the utility model are: compared with the existing technology, the utility model is in pipe fitting ontology and corrosion-proof lining
Additional isolation layer between layer, has completely cut off the infiltration and pollution of metal ion in pipe fitting injection moulding process, so that the corrosion-proof lining of injection molding
Layer is cleaner, to guarantee that chemical is not contaminated.It is easy that the utility model solves traditional injection moulding mode metal ion
It penetrates into injection molding liner layer, and the problem of Pollution Chemistry cleaning agent, so as to the product matter of effective guarantee semiconductor devices
Amount.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
In figure: 1, pipe fitting ontology, 2, corrosion-proof lining layer, 3, separation layer, 4, flange.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing:
As shown in Figure 1, a kind of lined anti-corrosive apparatus equipped with metallic spacer, including pipe fitting ontology 1 and corrosion-proof lining
Layer 2, corrosion-proof lining layer 2 connect and fix with the inner wall of pipe fitting ontology 1, set between corrosion-proof lining layer 2 and the inner wall of pipe fitting ontology 1
There is separation layer 3, separation layer 3 connect and fixes with the inner wall of pipe fitting ontology 1, while separation layer 3 connect formation with corrosion-proof lining layer 2
Overall structure.The material of the separation layer 3 includes plastics or coating, and separation layer 3 covers pipe fitting by injection molding or spraying method
The surface of inner body wall.
The both ends of the present embodiment pipe fitting ontology 1 are equipped with flange 4, and the separation layer 3 is made of fluoroplastics, and fluoroplastics include
PFA,PTFE,PVDF,FEP,ECTFE,ETFE；Separation layer 3 is connect and is fixed with pipe fitting ontology 1 by injection molding manner.
Corrosion-proof lining layer 2 described in the present embodiment is made of fluoroplastics, fluoroplastics include PFA, PTFE, PVDF, FEP,
ECTFE,ETFE；The corrosion-proof lining layer 2 is connect and is fixed with separation layer 3 by injection molding manner.The pipe fitting ontology 1 is by metal
Material is made, and pipe fitting ontology 1 includes pipeline, tower section, threeway, four-way, elbow, concentric reducer, pipe cap, pipe fitting, pipe nipple.
By taking flanged (FLGD) pipeline or tower section as an example, pipe fitting ontology is formed in anti-corrosion the utility model above-described embodiment in injection molding
Before lining, in pipe fitting body internal surface additional isolation layer, effectively completely cut off metal ion in pipe fitting traditional injection moulding technical process
Infiltration and pollution, so that corrosion-proof lining layer is cleaner, to ensure that chemical is not contaminated, so as to further
Improve the product quality of semiconductor devices.
Above-described embodiment is only limitted to illustrate the design of the utility model and technical characteristic, and its object is to allow the skill of this field
Art personnel understand the technical solution and embodiment of utility model, can not limit the protection scope of the utility model accordingly.It is all
It is equivalent replacement or equivalence changes according to made by technical solutions of the utility model, should all covers in the utility model claims
Within the protection scope of book.
Claims (7)
1. a kind of lined anti-corrosive apparatus equipped with metallic spacer, including pipe fitting ontology and corrosion-proof lining layer, corrosion-proof lining layer
Connect with the inner wall of pipe fitting ontology and fixed, it is characterized in that: be equipped between the corrosion-proof lining layer and the inner wall of pipe fitting ontology every
Absciss layer, separation layer connect and fixes with the inner wall of pipe fitting ontology, while separation layer connect to form overall structure with corrosion-proof lining layer.
2. the lined anti-corrosive apparatus according to claim 1 equipped with metallic spacer, it is characterized in that: the separation layer
Material includes plastics or coating, and separation layer covers the surface of pipe fitting inner body wall by injection molding or spraying method.
3. the lined anti-corrosive apparatus according to claim 2 equipped with metallic spacer, it is characterized in that: the separation layer by
Fluoroplastics are made, and fluoroplastics include PFA, PTFE, PVDF, FEP, ECTFE, ETFE.
4. the lined anti-corrosive apparatus according to claim 3 equipped with metallic spacer, it is characterized in that: the separation layer is logical
Injection molding manner is crossed to connect and fix with pipe fitting ontology.
5. the lined anti-corrosive apparatus according to claim 1 equipped with metallic spacer, it is characterized in that: the corrosion-proof lining
Layer is made of fluoroplastics, and fluoroplastics include PFA, PTFE, PVDF, FEP, ECTFE, ETFE.
6. the lined anti-corrosive apparatus according to claim 5 equipped with metallic spacer, it is characterized in that: the corrosion-proof lining
Layer is connect and is fixed with separation layer by injection molding manner.
7. the lined anti-corrosive apparatus according to claim 1 equipped with metallic spacer, it is characterized in that: the pipe fitting ontology
It is made of metal material, pipe fitting ontology includes pipeline, tower section, threeway, four-way, elbow, concentric reducer, pipe cap, pipe fitting, pipe nipple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822161645.XU CN209604764U (en) | 2018-12-22 | 2018-12-22 | A kind of lined anti-corrosive apparatus equipped with metallic spacer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822161645.XU CN209604764U (en) | 2018-12-22 | 2018-12-22 | A kind of lined anti-corrosive apparatus equipped with metallic spacer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209604764U true CN209604764U (en) | 2019-11-08 |
Family
ID=68398015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822161645.XU Expired - Fee Related CN209604764U (en) | 2018-12-22 | 2018-12-22 | A kind of lined anti-corrosive apparatus equipped with metallic spacer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209604764U (en) |
-
2018
- 2018-12-22 CN CN201822161645.XU patent/CN209604764U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191108 Termination date: 20211222 |