CN209590378U - A kind of integrated form superhigh precision optical module - Google Patents
A kind of integrated form superhigh precision optical module Download PDFInfo
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- CN209590378U CN209590378U CN201920378739.4U CN201920378739U CN209590378U CN 209590378 U CN209590378 U CN 209590378U CN 201920378739 U CN201920378739 U CN 201920378739U CN 209590378 U CN209590378 U CN 209590378U
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Abstract
The utility model discloses a kind of integrated form superhigh precision optical module, including superhigh precision optical element, frame pedestal, cementing layer flexible portion, frame pedestal includes frame, step surface, inner ring face；Superhigh precision optical element and frame are coaxially placed on step surface, and concentricity is better than 0.005mm；Connection glue is filled up between superhigh precision optical element and inner ring face, and the cementing layer flexible portion of uniform uniform thickness is formed after connection adhesive curing.The integrated form superhigh precision optical module of the utility model, flexible portion complicated in conventional supporting device is replaced by cementing layer flexible portion, not only realize the ability of preferably connection and unloading stress, and cost performance is taken into account, the integrated rear precision zero of high-precision optical element is realized to lose, it can be with mass production.
Description
Technical field
The utility model relates to microcobjective high-precision adjustment field more particularly to a kind of integrated form superhigh precision optics groups
Part.
Background technique
Superhigh precision optical module answering in the fields such as high-precision optical element processing detection, advanced optical system be integrated
With more extensively.Constantly advance to more microcosmic field as the mankind explore field, advanced optical system is proposed more
Carry out higher demand.On the one hand, high to optical element required precision, it such as applies in gene sequencer, litho machine, the inspection of wafer defect
The advanced optical system in the fields such as survey, proposes 1/100~1/500 wavelength (conventional system light to optical element single side face shape
Learn 1/5~1/20 wavelength of element pedion face shape), at least 20 times of the relatively conventional system improving of precision, due to optical element be can not
It separately exists among system, it is necessary to constitute component with frame etc., then go to be attached with other structures, due to conventional system essence
Degree require be not it is very high, element integrates loss of significance caused by link and can not consider in the conventional system, but for upper
The micro- advanced optical system of high-precision is stated, this missing is destructive.On the other hand, high-precision simultaneously in guarantee, also want
Have both high performance-price ratio to be suitable for mass production, therefore the development ever more important of superhigh precision optical module.
Traditional optical module generallys use the modes such as pressing ring and optical element is connected with frame, the pretightning force of pressing ring
The variation that will cause optical element mirror shape, be typically used in system accuracy it is of less demanding in the case where, and high-precision optical
Flexible connection can be generally designed in component between optical element and frame and (uses the compliant mechanisms such as elastic slice or narrow slit, or more
Kind flexible apparatus combination is constituted) device complexity, it is at high cost, it is difficult to apply in mass production manufacture.Therefore, for height
Effect, high performance-price ratio have and can operate and the superhigh precision optical module of implementation proposes urgent need.
Utility model content
The utility model is intended to overcome the flexible joint in existing high-precision optical component between optical element and frame
The device divided is complicated, at high cost, it is difficult to the technical issues of being applied to mass production manufacture.
To achieve the above object, the utility model uses following technical scheme:
A kind of integrated form superhigh precision optical module, including superhigh precision optical element, frame pedestal, cementing layer flexible part
Point, the frame pedestal includes frame, step surface, inner ring face；The superhigh precision optical element is coaxially placed in the frame
On the step surface, concentricity is better than 0.005mm；Connection is filled up between the superhigh precision optical element and the inner ring face
Glue, forms the cementing layer flexible portion after the connection adhesive curing, the uniform uniform thickness of cementing layer flexible portion, for realizing
Unstressed connection between the superhigh precision optical element and the frame.
Further, several fine tuning screw rods are evenly distributed in the circumferencial direction of the frame, fill out connection for driving adjusting to realize
The superhigh precision optical element and the frame are coaxial before and after glue.
Preferably, the quantity of the fine tuning screw rod is 3, is along the circumferential direction evenly arranged on the frame for 120 °.
Further, several hole for injecting glue are evenly distributed in the circumferencial direction of the frame, connection glue is infused by the hole for injecting glue
Enter in the gap between the superhigh precision optical element and the inner ring face.
Preferably, the quantity of the hole for injecting glue is 3, is along the circumferential direction evenly arranged on the frame for 120 °.
Further, the cylindricity in the inner ring face is better than 0.005mm, and the step surface hangs down relative to the inner ring face
Straight degree is better than 0.008mm.
Preferably, the big 0.155mm of radius of superhigh precision optical element described in the radius ratio in the inner ring face, the gluing
Layer flexible portion is with a thickness of 0.155 ± 0.005mm.
Further, the material of the cementing layer flexible portion is GD-414 type silicon rubber.
The integrated form superhigh precision optical module of the utility model replaces conventional supporting device by cementing layer flexible portion
The flexible portion of middle complexity, and the uniform uniform thickness of cementing layer flexible portion not only realize the energy of preferably connection and unloading stress
Power, and cost performance has been taken into account, it realizes the integrated rear precision zero of high-precision optical element and loses, it can be with mass production.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of integrated form superhigh precision optical module in an embodiment of the present invention；
Fig. 2 is the cross-sectional view of integrated form superhigh precision optical module in an embodiment of the present invention；
Description of symbols:
1- superhigh precision optical element；2- frame pedestal；3- finely tunes screw rod；4- frame；5- inner ring face；6- step surface；7-
Hole for injecting glue；8- cementing layer flexible portion.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and specifically
Embodiment, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to solve
The utility model is released, but not to limit the present invention.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiment obtained without making creative work, belongs to the model of the utility model protection
It encloses.
The utility model provides a kind of integrated form superhigh precision optical module, including superhigh precision optical element, frame
Pedestal, cementing layer flexible portion, frame pedestal include frame, step surface, inner ring face；Superhigh precision optical element and frame are coaxial
It is placed on the step surface, concentricity is better than 0.005mm；Connection is filled up between superhigh precision optical element and the inner ring face
Glue forms cementing layer flexible portion, the uniform uniform thickness of cementing layer flexible portion, for realizing the superhigh precision after connecting adhesive curing
Unstressed connection between optical element and the frame.
Existing high-precision optical component generally comprises three parts, high-precision optical element, frame and flexible connection,
Flexible connection generallys use the compliant mechanisms such as elastic slice narrow slit or the combination of a variety of flexible apparatus is constituted, and device is complicated, the present invention
Integrated form superhigh precision optical module complicated flexible portion in conventional supporting device is replaced by cementing layer flexible portion, and
And the uniform uniform thickness of cementing layer flexible portion, not only realize the ability of preferably connection and unloading stress, but also taken into account cost performance,
The integrated rear precision zero of high-precision optical element is realized to lose.
It as shown in Figure 1 and Figure 2, is the three-dimensional signal of integrated form superhigh precision optical module in an embodiment of the present invention
Figure and cross-sectional view, integrated form superhigh precision optical module include superhigh precision optical element 1, frame pedestal 2, cementing layer flexible part
Divide 8, frame pedestal 2 includes frame 4, step surface 6, inner ring face 5；Superhigh precision optical element 1 and frame 4 are coaxially placed in step surface
On 6, concentricity is better than 0.005mm；Connection glue is filled up between superhigh precision optical element 1 and inner ring face 5, connects shape after adhesive curing
At cementing layer flexible portion 8, the uniform uniform thickness of cementing layer flexible portion 8, for realizing between superhigh precision optical element 1 and frame 4
Unstressed connection.
In the present embodiment, it along 120 ° of the circumferencial direction of frame 4 uniformly distributed 3 fine tuning screw rods 3, is filled out for driving adjusting to realize
Superhigh precision optical element 1 is coaxial with frame 4 before and after connecting glue.
In the present embodiment, along 120 ° of the circumferencial direction of frame 4 uniformly distributed 3 hole for injecting glue 7, connection glue passes through 7 quilt of hole for injecting glue
It injects in the gap between superhigh precision optical element 1 and inner ring face 5, forms cementing layer flexible portion 8 after filling up solidification.
In the present embodiment, by Precision Machining, the cylindricity in inner ring face 5 is better than 0.005mm, and step surface 6 is relative to interior
The verticality in circle face 5 is better than 0.008mm.
So that 5 face of inner ring face of frame 4 is reached corresponding precision by Precision Machining, and control the radius size in inner ring face 5, is
Injecting glue gap provides specific outer boundary, and the outer round surface of superhigh precision optical element 1 provided to injecting glue gap it is bright
True inner boundary.Also, the concentricity for controlling superhigh precision optical element 1 and frame 4 is better than 0.005mm, that is, controls injecting glue
The inner and outer boundary in gap is coaxial, so that the uniform uniform thickness of cementing layer flexible portion 8, plays and be connected firmly and do not generate the soft of stress
Property connection function.
Connection glue is generally only as a kind of connection medium, and the more solid be bonded the better.But the nothing of cementing layer flexible portion 8
The planning of stress cementing layer thickness is one of difficult point, too thick, and dry glue stress can lose the precision of superelevation optical element 1, is drawn
Deformation, too thin, attachment force is too low, and superelevation optical element 1 has degumming risk.And if 8 thickness of cementing layer flexible portion it is different,
Unevenly, then after integrating, the stress of superelevation optical element 1 can be uneven, can lose precision.
In the present embodiment, by way of matching processing, so that the radius ratio superhigh precision optical element 1 in inner ring face 5
The big 0.155mm of radius, select the material of cementing layer flexible portion 8 for GD-414 type silicon rubber, the cementing layer flexible part of formation
Divide 8 uniform uniform thickness, with a thickness of 0.155 ± 0.005mm.
The integrated form superhigh precision optical module of the utility model replaces traditional support to fill by cementing layer flexible portion 8
The flexible portion of middle complexity, and the uniform uniform thickness of cementing layer flexible portion 8 are set, not only realize preferably connection and unloads stress
Ability, and cost performance has been taken into account, it realizes the integrated rear precision zero of high-precision optical element 1 and loses, it can be with mass production.
Described specific embodiment of the present utility model does not constitute the restriction to scope of protection of the utility model.It is any
Any other various changes and modifications made by technical concept according to the present utility model, should be included in the utility model
In scope of protection of the claims.
Claims (8)
1. a kind of integrated form superhigh precision optical module, including superhigh precision optical element, frame pedestal, cementing layer flexible part
Point, which is characterized in that the frame pedestal includes frame, step surface, inner ring face；
The superhigh precision optical element and the frame are coaxially placed on the step surface, and concentricity is better than 0.005mm；
Connection glue is filled up between the superhigh precision optical element and the inner ring face, forms the glue after the connection adhesive curing
Close layer flexible portion, the uniform uniform thickness of cementing layer flexible portion, for realizing the superhigh precision optical element and the mirror
Unstressed connection between frame.
2. integrated form superhigh precision optical module according to claim 1, which is characterized in that in the circumference side of the frame
To uniformly several fine tuning screw rods, the connection glue front and back superhigh precision optical element and the frame are filled out for driving adjusting to realize
Coaxially.
3. integrated form superhigh precision optical module according to claim 2, which is characterized in that the quantity of the fine tuning screw rod
It is 3, is along the circumferential direction evenly arranged on the frame for 120 °.
4. integrated form superhigh precision optical module according to claim 1, which is characterized in that in the circumference side of the frame
To uniformly several hole for injecting glue, connect glue by the hole for injecting glue injected the superhigh precision optical element and the inner ring face it
Between gap in.
5. integrated form superhigh precision optical module according to claim 4, which is characterized in that the quantity of the hole for injecting glue is
It 3, is along the circumferential direction evenly arranged on the frame for 120 °.
6. integrated form superhigh precision optical module according to claim 1, which is characterized in that the cylindricity in the inner ring face
Better than 0.005mm, the step surface is better than 0.008mm relative to the verticality in the inner ring face.
7. integrated form superhigh precision optical module according to claim 6, which is characterized in that the radius ratio in the inner ring face
The big 0.155mm of radius of the superhigh precision optical element, the cementing layer flexible portion is with a thickness of 0.155 ± 0.005mm.
8. integrated form superhigh precision optical module according to claim 1, which is characterized in that the cementing layer flexible portion
Material be GD-414 type silicon rubber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920378739.4U CN209590378U (en) | 2019-03-25 | 2019-03-25 | A kind of integrated form superhigh precision optical module |
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| CN201920378739.4U CN209590378U (en) | 2019-03-25 | 2019-03-25 | A kind of integrated form superhigh precision optical module |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884765A (en) * | 2019-03-25 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of integrated form superhigh precision optical module and preparation method thereof |
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2019
- 2019-03-25 CN CN201920378739.4U patent/CN209590378U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884765A (en) * | 2019-03-25 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of integrated form superhigh precision optical module and preparation method thereof |
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