CN207636799U - A kind of micro- air-gap optical element - Google Patents
A kind of micro- air-gap optical element Download PDFInfo
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- CN207636799U CN207636799U CN201721555995.3U CN201721555995U CN207636799U CN 207636799 U CN207636799 U CN 207636799U CN 201721555995 U CN201721555995 U CN 201721555995U CN 207636799 U CN207636799 U CN 207636799U
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Abstract
The utility model discloses a kind of micro- air-gap optical element, the prism being oppositely arranged including two pieces, metal film at least three is coated with by technique for vacuum coating on the apparent surface of two pieces of prisms, the thickness of metal film on two pieces of prisms is identical and position, quantity are arranged in a one-to-one correspondence；Correspondence metal film on two pieces of prisms is linked together by heating in vacuum process for sealing, to fix the relative position of two pieces of prisms.The metal film with sealing property is arranged by technique for vacuum coating on prism for the utility model, then use heating in vacuum process for sealing that the metal film on both sides is made to seal securely, and then the optical element with air-gap is made, thickness by accurately controlling metal film realizes accurately controlling for optical element air-gap gap size, have the advantages that air-gap gap size precision is high and gap size can be adjusted arbitrarily, is suitable for the Optical element manufacturing in arbitrary very thin gap.
Description
Technical field
The utility model is related to technical field of optical instrument, and in particular to a kind of micro- air-gap optical element.
Background technology
In contemporary optics instrument, one of which optical element is to realize incident ray using optical total-reflection principle
All reflections.Specifically, light is made to be incident on air by glass side, after being more than certain angle (Brewster's angle), incident ray
It will all reflect away, be achieved in the deviation to light and reflection.
Above-mentioned optical element generally includes two pieces of prisms, is connected by glue-line gluing between two pieces of prisms, and glue-line only divides
Small part region (three point or more of regions) of the cloth between two pieces of prism mating surfaces, remaining most of region form an air
Gap.
Glue-line is generally formed using optical cement or light-sensitive emulsion, and the gap size of air-gap is controlled by dispensing amount size and application
Pressure determine, or mix the micro- stick of glass of certain diameter in glue, with the diameter of the micro- stick of glass to form sky to control
The gap size of air gap.
The former is larger to the control error of bondline thickness, can not achieve accurately controlling for air-gap gap size；The latter is only
Limited several gap specifications can be formed, and the micro- stick of glass is of high cost, the kind of diameter is limited, therefore limits using model
It encloses.Especially to the Optical element manufacturing in arbitrary very thin gap, above two method is not suitably to select.
Utility model content
The purpose of this utility model is to provide a kind of micro- air-gap optical elements.
To realize one of above-mentioned purpose of utility model, the utility model adopts the following technical solution：
A kind of micro- air-gap optical element, including two pieces of prisms being oppositely arranged, on the apparent surface of two pieces of prisms
Metal film at least three is coated with by technique for vacuum coating, the thickness of metal film on two pieces of prisms is identical and position, number
Amount is arranged in a one-to-one correspondence；
Correspondence metal film on two pieces of prisms is linked together by heating in vacuum process for sealing, to fix two pieces of prisms
Relative position.
As the further improved technical solution of the utility model, the metal film is included in the direction far from the prism
On be cascading metallic chromium layer, metal nickel layer, metal indium layer.
As the further improved technical solution of the utility model, the thickness of the metallic chromium layer is 10-30 nanometers, institute
The thickness for stating metal nickel layer is 1-4 microns, and the thickness of the metal indium layer is 1-4 microns.
As the further improved technical solution of the utility model, the apparent surface of two pieces of prisms is rectangular surfaces,
Metal film on every piece of prism is everywhere and to be distributed in the edge of prism apparent surface.
Compared with the existing technology, the utility model has technical effect that：
The metal film with sealing property is arranged by technique for vacuum coating on prism for the utility model, then uses true
Sky heating process for sealing makes the metal film on both sides seal securely, and then the optical element with air-gap is made, and leads to
Accurately controlling for the thickness realization optical element air-gap gap size for accurately controlling metal film is crossed, there is air-gap gap size
The advantages of precision is high and gap size can be adjusted arbitrarily is suitable for the Optical element manufacturing in arbitrary very thin gap.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of micro- air-gap optical element in the utility model embodiment；
Fig. 2 is the partial enlargement structural representation at A in Fig. 1.
Specific implementation mode
The utility model is described in detail below with reference to specific implementation mode.But these embodiments are not intended to limit
The utility model, structure that those skilled in the art are made according to these embodiments, method or change functionally
It changes and is all contained in the scope of protection of the utility model.
A kind of embodiment of the utility model presented below：
Refer to Fig. 1 to 2, a kind of micro- air-gap optical element, including two pieces of prisms 1 being oppositely arranged, two pieces of ribs
Metal film 2 at least three, the metal film thickness on two pieces of prisms are coated with by technique for vacuum coating on the apparent surface of mirror
Spend identical and position, quantity is arranged in a one-to-one correspondence；
Correspondence metal film on two pieces of prisms is linked together by heating in vacuum process for sealing, to fix two pieces of prisms
Relative position.
It should be noted that the method for connecting two pieces of prisms by glue-line gluing in the prior art, attainable air-gap
Gap size precision is tens microns, and the bad control of area size of glued point；And it uses and is controlled in the micro- stick incorporation glue of glass
The method of thickness processed, the air-gap gap size that can be made are extremely limited.
Using can sealing-in metal film, the gap size of air-gap can be controlled to sub-micrometer scale, minimum can be controlled
Nanometer scale is made, and gap size range can arbitrarily be set；Using accurate mask technique, sealing region can control
It is required that the characteristics of region in.
Further, the metal film includes the metallic chromium layer being cascading on the direction far from the prism
21, metal nickel layer 22, metal indium layer 23.
Further, the thickness of the metallic chromium layer is 10-30 nanometers, and the thickness of the metal nickel layer is 1-4 microns,
The thickness of the metal indium layer is 1-4 microns.
Further, the apparent surface of two pieces of prisms is rectangular surfaces, the metal film on every piece of prism be everywhere and
It is distributed in the edge of prism apparent surface.
A kind of manufacturing method of micro- air-gap optical element, includes the following steps successively：
S1, two pieces of prisms are taken, metal film at least three is plated using technique for vacuum coating respectively on the prism, two pieces
Thickness of metal film on prism is identical and position, quantity are arranged in a one-to-one correspondence；
S2, the prism for having plated metal film is oppositely arranged, so that the metal film on two pieces of prisms corresponds to fitting contact, and is adopted
The relative position of two pieces of prisms is fixed with sealing-in fixture；
S3, the correspondence metal film on two pieces of prisms is linked together to get optical element using heating in vacuum process for sealing.
Further, metal film described in step S1 includes sequentially stacking gradually the metallic chromium layer plated, metal
Nickel layer, metal indium layer.
Further, the thickness of the metallic chromium layer is 10-30 nanometers, and the thickness of the metal nickel layer is 1-4 microns,
The thickness of the metal indium layer is 1-4 microns.
Further, the apparent surface of two pieces of prisms is rectangular surfaces, the metal film on every piece of prism be everywhere and
It is distributed in the edge of prism apparent surface.
Further, the thickness of the metal film is controlled in step S1 using quartz crystal concussion thicknesses of layers controller,
Reachable ± 1 nanometer of precision.
Further, the distributed areas of the metal film are controlled in step S1 by mask method.
Embodiment 1
1, the metal film for having sealing property is coated with using technique for vacuum coating：
It will wait for that the prism surface of sealing-in is clean, uses mask clamping fixture using the method for manual wipping and ultrasonic cleaning
Clamping is carried out, coating clamp is placed into, is then placed in vacuum coating system and carries out plated film.
Metal film is by one layer 10 nanometers of metallic chromium layer, one layer 1 micron of metal nickel layer and one layer 1 micron of metal indium layer
Composition.Reach 2x10-3After the vacuum pressure of Pa, it is coated with first layer metal layers of chrome first, vibrates thicknesses of layers control with quartz crystal
The evaporation rate and thickness of instrument control metallic chromium layer processed so that its thickness reaches 10 nanometers；Secondly it is equally vibrated with quartz crystal
Thicknesses of layers controller controls metal nickel layer, is coated with one layer 1 micron thick of metal nickel layer；Finally it is coated with one layer of 1 micron of thick gold
Belong to indium layer.The total thickness of metal film is equal to the half of optical element finished product overhead air gap clearance size.
Wherein, the coating film area control of metal film uses masking method, mask photo etched mask or machinery can be used to cover
The method of film so that metal film is coated on the peripheral regions of prism.This method can accurately control the region being coated with so that envelope
Metal film when connecing on two pieces of prisms can be bonded correspondingly, to make prism seal securely.
2, it is shelved before sealing-in：
The prism for having plated sealing of metal film is taken out and is oppositely arranged from coating machine, rib is fixed using sealing-in fixture clamping
Mirror generates relative displacement to avoid two pieces of prisms during follow-up sealing-in.
3, heating in vacuum sealing-in：
The prism fixed is put into heating in vacuum sealing-in system, is evacuated down to less than 5x10-3The vacuum pressure of Pa, adds
Heat keeps the temperature 30 minutes to 175 DEG C, then stops heating, and after being cooled to room temperature, deflation is taken out up to optical element.
Using heating in vacuum process for sealing so that the metal indium layer on both sides seals securely, to make two pieces of ribs
Mirror is firmly combined together.
Embodiment 2
Relative to embodiment 1, the metallic chromium layer thickness in the present embodiment is 30 nanometers, and metal nickel layer thickness is 4 microns, gold
It is 4 microns to belong to indium layer thickness, rest part all same.
Embodiment 3
Relative to embodiment 1, the metallic chromium layer thickness in the present embodiment is 20 nanometers, and metal nickel layer thickness is 2 microns, gold
It is 3 microns to belong to indium layer thickness, rest part all same.
Compared with the existing technology, the utility model has technical effect that：
The metal film with sealing property is arranged by technique for vacuum coating on prism for the utility model, then uses true
Sky heating process for sealing makes the metal film on both sides seal securely, and then the optical element with air-gap is made, and leads to
Accurately controlling for the thickness realization optical element air-gap gap size for accurately controlling metal film is crossed, there is air-gap gap size
The advantages of precision is high and gap size can be adjusted arbitrarily is suitable for the Optical element manufacturing in arbitrary very thin gap.
Finally it should be noted that：Embodiment of above is only to illustrate the technical solution of the utility model, rather than limits it
System；Although the utility model is described in detail with reference to aforementioned embodiments, those skilled in the art should
Understand：It can still modify to the technical solution recorded in aforementioned each embodiment, or special to which part technology
Sign carries out equivalent replacement；And these modifications or replacements, each reality of the utility model that it does not separate the essence of the corresponding technical solution
Apply the spirit and scope of mode technical solution.
Claims (4)
1. a kind of micro- air-gap optical element, which is characterized in that the prism being oppositely arranged including two pieces, the phase of two pieces of prisms
To being coated with metal film at least three by technique for vacuum coating on surface, the thickness of metal film on two pieces of prisms it is identical and
Position, quantity are arranged in a one-to-one correspondence；
Correspondence metal film on two pieces of prisms is linked together by heating in vacuum process for sealing, to fix the phase of two pieces of prisms
To position.
2. a kind of micro- air-gap optical element according to claim 1, which is characterized in that the metal film is included in separate
The metallic chromium layer that is cascading on the direction of the prism, metal nickel layer, metal indium layer.
3. a kind of micro- air-gap optical element according to claim 2, which is characterized in that the thickness of the metallic chromium layer is
10-30 nanometers, the thickness of the metal nickel layer is 1-4 microns, and the thickness of the metal indium layer is 1-4 microns.
4. a kind of micro- air-gap optical element according to claim 1, which is characterized in that the opposite table of two pieces of prisms
Face is rectangular surfaces, and the metal film on every piece of prism is everywhere and to be distributed in the edge of prism apparent surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721555995.3U CN207636799U (en) | 2017-11-20 | 2017-11-20 | A kind of micro- air-gap optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721555995.3U CN207636799U (en) | 2017-11-20 | 2017-11-20 | A kind of micro- air-gap optical element |
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| Publication Number | Publication Date |
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| CN207636799U true CN207636799U (en) | 2018-07-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107748403A (en) * | 2017-11-20 | 2018-03-02 | 苏州晶鼎鑫光电科技有限公司 | A kind of micro- air-gap optical element and its manufacture method |
-
2017
- 2017-11-20 CN CN201721555995.3U patent/CN207636799U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107748403A (en) * | 2017-11-20 | 2018-03-02 | 苏州晶鼎鑫光电科技有限公司 | A kind of micro- air-gap optical element and its manufacture method |
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Address after: 2-1-b, 2-2-b, phase III, Zhongxin Technology Industrial Park, no.6, Louyang Road, Suzhou Industrial Park, Jiangsu Province Patentee after: Suzhou Houpu Sensing Technology Co.,Ltd. Address before: 2-1-b, 2-2-b, phase III, Zhongxin Technology Industrial Park, no.6, Louyang Road, Suzhou Industrial Park, Jiangsu Province Patentee before: SUZHOU JINGXING PHOTOELECTRIC TECHNOLOGY CO.,LTD. |