CN209560211U - Light-beam forming unit - Google Patents
Light-beam forming unit Download PDFInfo
- Publication number
- CN209560211U CN209560211U CN201920376231.0U CN201920376231U CN209560211U CN 209560211 U CN209560211 U CN 209560211U CN 201920376231 U CN201920376231 U CN 201920376231U CN 209560211 U CN209560211 U CN 209560211U
- Authority
- CN
- China
- Prior art keywords
- light
- lens
- axis direction
- light beam
- forming unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The utility model provides a kind of light-beam forming unit, including the interference mechanism that disappears, strength adjustment mechanism and the diaphragm set gradually, the interference mechanism that disappears is used to eliminate the interference between light beam, strength adjustment mechanism is for changing light intensity along the distribution of long axis direction and short-axis direction, shape of the diaphragm for about light beams.Light-beam forming unit provided by the utility model, the interference mechanism that disappears can make incident coherent wave be converted into random phase wave, to eliminate the interference between light beam, to change the irradiation uniformity of light beam, achieve the purpose that even sliding light beam；Strength adjustment mechanism can adjust light beam in the intensity distribution of long axis direction and short-axis direction, avoid light beam uneven by the hot spot formed after strength adjustment mechanism；Diaphragm can about light beams shape, to use the light beam after shaping；Therefore the interference mechanism that disappears and strength adjustment mechanism combine, and can remove interference fringe and diffraction stripe, improve the shaping effect to light beam.
Description
Technical field
The utility model belongs to optical design and applied technical field, is to be related to a kind of beam shaping dress more specifically
It sets.
Background technique
Beam shaping technology refers to the intensity distribution that light beam is altered as desired, while adjusting its phase distribution to control its propagation
Characteristic is to meet particular demands, wherein the even sliding technology (being shaped as being uniformly distributed by light intensity) of laser beam belongs to most widely used
One of beam shaping technology.
The intensity distribution of laser beam is unevenly the basic principle of beam smoothing as caused by the coherence of laser
It is all decoherence processing.The beam distribution that early stage people use diaphragm interception to need mostly, causes the energy loss of laser serious,
Later with the application and development of laser beam reshaping technology, the sliding technology of current laser-beam uniform-light specifically includes that echelon is whole
Shape system, without the incoherent technology of ladder reduced space, diffraction optical element, birefringent lens group etc..
In another laser beam shaping technology, need laser beam reshaping to be equally distributed linear light beam, however
In the apparatus for shaping, lenslet array system is easy to produce interference fringe and diffraction stripe, influences shaping effect；Diffraction optics member
Part can not be changed once completed, and can only carry out shaping to the light beam of special parameter.
Utility model content
The purpose of this utility model is to provide a kind of light-beam forming units, to solve laser light existing in the prior art
There is technical issues that after beam shaping.
In order to achieve the above purposes, the technical solution adopted by the utility model is: provides a kind of light-beam forming unit, including according to
The interference mechanism that disappears, strength adjustment mechanism and the diaphragm of secondary setting, the interference mechanism that disappears is for eliminating the interference between light beam, institute
State distribution of the strength adjustment mechanism for changing light intensity along long axis direction and short-axis direction, shape of the diaphragm for about light beams
Shape.
Further, the strength adjustment mechanism includes corrdinated adjustment light beam along the light intensity of long axis direction and short-axis direction point
The first microlens array and the second microlens array of cloth.
Further, the side of first microlens array and the side of second microlens array are provided with more
A arc convex for being used to divide light beam.
Further, the side equipped with arc convex of first microlens array and second microlens array
Side equipped with arc convex is arranged in the same direction.
Further, the interference mechanism that disappears includes random phase plate.
It further, further include beam-expanding system for stretching width of light beam, the beam-expanding system is set to the interference that disappears
One end far from the strength adjustment mechanism of mechanism.
Further, the beam-expanding system includes that the first lens for stretching width of light beam and second are cooperateed with along long axis direction thoroughly
Mirror；
Second lens be set between first lens and the interference mechanism that disappears, second lens along long axis
The width in direction is greater than the width along long axis direction of first lens.
It further, further include focusing system for focus on light beam, the focusing system is set to the intensity adjustment machine
Between structure and the diaphragm.
Further, the focusing system include respectively along the third lens of long axis direction and short-axis direction focus on light beam and
4th lens；
The axial meridian of the third lens and the axial meridian of the 4th lens are mutually perpendicular to.
It further, further include shell, it is described to disappear interference mechanism and the strength adjustment mechanism is movably connected on the shell
On the bottom wall of body, the diaphragm is set on the side wall of the shell, and the diaphragm is by the inside of the shell and the shell
Outside connection.
The beneficial effect of light-beam forming unit provided by the utility model is: compared with prior art, the utility model
In light-beam forming unit, the interference mechanism that disappears can make incident coherent wave be converted into random phase wave and will not change the biography of light beam
Defeated direction, to change the irradiation uniformity of light beam, achievees the purpose that even sliding light beam to eliminate the interference between light beam；Intensity
Regulating mechanism can adjust light beam in the intensity distribution of long axis direction and short-axis direction, and light beam is avoided to pass through shape after strength adjustment mechanism
At hot spot it is uneven；Diaphragm can about light beams shape, to use the light beam after shaping；
Therefore the interference mechanism that disappears and strength adjustment mechanism combine, and can remove interference fringe and diffraction stripe, improve to light
The shaping effect of beam.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only that this is practical new
Some embodiments of type for those of ordinary skill in the art without any creative labor, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of light-beam forming unit provided by the embodiment of the utility model；
Fig. 2 is the light path schematic diagram along long axis direction of light-beam forming unit in Fig. 1；
Fig. 3 is the light path schematic diagram along short-axis direction of light-beam forming unit in Fig. 1；
Fig. 4 is the structural schematic diagram of random phase plate in Fig. 1；
Fig. 5 is the structural schematic diagram of the first microlens array in Fig. 1.
Wherein, each appended drawing reference in figure:
1, disappear interference mechanism；11, random phase plate；111, position phase element；
2, strength adjustment mechanism；21, the first microlens array；22, the second microlens array；
3, diaphragm；
4, beam-expanding system；41, the first lens；42, the second lens；
5, focusing system；51, the third lens；52, the 4th lens；
6, shell；61, sliding rail.
Specific embodiment
In order to which technical problem to be solved in the utility model, technical solution and beneficial effect is more clearly understood, with
Lower combination accompanying drawings and embodiments, the present invention will be further described in detail.It should be appreciated that specific reality described herein
It applies example to be only used to explain the utility model, is not used to limit the utility model.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or indirectly on another element.When an element is known as " being connected to " another element, it can
To be directly to another element or be indirectly connected on another element.
It is to be appreciated that term " length ", " width ", "upper", "lower", "front", "rear", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "top", "bottom" "inner", "outside" is that orientation based on the figure or position are closed
System, is merely for convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.The meaning of " plurality " is two or two in the description of the present invention,
More than, unless otherwise specifically defined.
It please refers to Fig.1 to Fig.3, now light-beam forming unit provided by the utility model is illustrated.Light-beam forming unit,
Including the interference mechanism 1 that disappears, strength adjustment mechanism 2 and the diaphragm 3 set gradually, the interference mechanism that disappears 1 is for eliminating between light beam
Interference, strength adjustment mechanism 2 is for changing light intensity along the distribution of long axis direction and short-axis direction, and diaphragm 3 is for about light beams
Shape.
Light-beam forming unit provided by the utility model, compared with prior art, the interference mechanism that disappears 1 can make incident phase
Dry wave is converted into random phase wave and will not change the transmission direction of light beam, to eliminate the interference between light beam, to change light
The irradiation uniformity of beam achievees the purpose that even sliding light beam；Strength adjustment mechanism 2 can adjust light beam in long axis direction and short-axis direction
Intensity distribution, avoid light beam uneven by the hot spot formed after strength adjustment mechanism 2；Diaphragm 3 can about light beams shape,
To use the light beam after shaping；
Therefore the interference mechanism 1 that disappears and strength adjustment mechanism 2 combine, and can remove interference fringe and diffraction stripe, improvement pair
The shaping effect of light beam.
It should be understood that the function of disappear interference mechanism 1 and strength adjustment mechanism 2 is independent from each other, therefore the interference machine that disappears
The position of structure 1 and strength adjustment mechanism 2 can be interchanged.
The present embodiment is mainly used for the shaping to laser beam, and the laser beam issued from laser is mostly Gauss light
Beam, it is possible to understand that ground, the interference mechanism that disappears 1, strength adjustment mechanism 2 and diaphragm 3 are sequentially arranged in optical path, laser beam can be made successively to lead to
The interference mechanism 1 that disappears, strength adjustment mechanism 2 and diaphragm 3 are crossed, shaping and outgoing to laser beam is completed, avoids beam energy
Loss.
In the present embodiment, long axis direction is vertical direction, and short-axis direction is horizontal direction.
It please refers to Fig.1 to Fig.3, as a kind of specific embodiment of light-beam forming unit provided by the utility model, by force
Spending regulating mechanism 2 includes first microlens array 21 He of the corrdinated adjustment light beam along the light distribution of long axis direction and short-axis direction
Second microlens array 22.The light beam of first microlens array 21 and the 22 corrdinated adjustment incidence of the second microlens array, can make light
Beam the intensity distribution of long axis direction and short-axis direction more evenly, improve the overall distribution of light intensity, while being also convenient for subsequent prison
Control and adjustment.
It is to be appreciated that the first microlens array 21 and the second microlens array 22 are respectively positioned in optical path.
In the present embodiment, the first microlens array 21 is located at the side away from diaphragm 3 of the second microlens array 22.
Fig. 2, Fig. 3 and Fig. 5 are please referred to, a kind of specific embodiment party as light-beam forming unit provided by the utility model
The side of formula, the side of the first microlens array 21 and the second microlens array 22 is provided with multiple for dividing the arc of light beam
Shape protrusion, each arc convex are equivalent to a micro lens, and arc convex can divide incident light beam, and be superimposed repeatedly,
Improve the overall distribution of light intensity by being superimposed again after segmentation light beam.
Preferably, arc convex array distribution in the first microlens array 21 side and the second microlens array 22 one
Side.
It should be understood that the quantity of arc convex is determined according to situation in actual use.
Please refer to figs. 2 and 3, the side equipped with arc convex of the first microlens array 21 and the second microlens array 22
The side equipped with arc convex be arranged in the same direction, to be superimposed after dividing light beam again, so that the light intensity of light beam is along long axis direction
More evenly with short-axis direction distribution ground, improve the uniformity of light distribution.
Please see Fig. 2 to Fig. 4, as a kind of specific embodiment of light-beam forming unit provided by the utility model, disappear
Interference mechanism 1 includes random phase plate 11, and random phase plate 11 is equipped with multiple phase elements 111, across position phase element 111
Light beam is divided into multiple beamlets, after the diffraction pattern random superposition between beamlet, can eliminate dry between beamlet
It relates to, so that light distribution more evenly, achievees the purpose that even sliding light beam.
Specifically, the selection that each phase element 111 can be random introduces the phase delay of 0 or π to incident light beam, reduces
The whole coherence of light beam.
It please refers to Fig.1 to Fig.3, as a kind of specific embodiment of light-beam forming unit provided by the utility model, also
Including the beam-expanding system 4 for stretching width of light beam, beam-expanding system 4 is set to the separate strength adjustment mechanism 2 for the interference mechanism 1 that disappears
One end.By beam-expanding system 4, change the width of light beam, to obtain the light beam of required width, to make light beam dry by disappearing
Mechanism 1 is related to, the purpose of even sliding light beam is played.
It please refers to Fig.1 to Fig.3, as a kind of specific embodiment of light-beam forming unit provided by the utility model, expands
Beam system 4 includes that the first lens 41 and the second lens 42 that stretch width of light beam are cooperateed with along long axis direction；Second lens 42 are set to
Between first lens 41 and the interference mechanism 1 that disappears, the width along long axis direction of the second lens 42 is greater than the first lens 41 along length
The width of axis direction.Light beam is focused by the first lens 41, is expanded using the second lens 42, is not changed the incidence side of light beam
To simply, conveniently.
Preferably, the first lens 41 and the second lens 42 are cylindrical lens, the cylinder and the second lens of the first lens 41
42 cylinder mutually deviates from setting.
Fig. 1 and Fig. 3 is please referred to, as a kind of specific embodiment of light-beam forming unit provided by the utility model, also
Including the focusing system 5 for focus on light beam, focusing system 5 is set between strength adjustment mechanism 2 and diaphragm 3, after focusing
The light beam of required intensity is obtained, enables and sample is scanned by the light beam of diaphragm 3.
In one embodiment, after by the linear light beam scanning cell phone of diaphragm, for removing the protective film on Mobile phone screen.
It please refers to Fig.1 to Fig.3, as a kind of specific embodiment of light-beam forming unit provided by the utility model, gathers
Burnt system 5 includes respectively along the third lens 51 and the 4th lens 52 of long axis direction and short-axis direction focus on light beam；The third lens
The axial meridian of 51 axial meridian and the 4th lens 52 is mutually perpendicular to.The third lens 51 can make with the cooperation of the 4th lens 52
Light beam is focused along long axis direction and short-axis direction respectively, facilitates focusing to obtain the light beam of required intensity, to sweep to sample
It retouches.
Specifically, the third lens 51 and the 4th lens 52 are cylindrical lens, the cylinder of the third lens 51 and the 4th lens
52 cylinder is arranged in the same direction.
Specifically, axial meridian refers to the meridian parallel with the axis of cylindrical lens.
In the present embodiment, the third lens 51 are located at the side away from diaphragm 3 of the 4th lens 52.
Referring to Fig. 1, a kind of specific embodiment as light-beam forming unit provided by the utility model, further includes shell
Body 6, the interference mechanism that disappears 1 and strength adjustment mechanism 2 are movably connected on the bottom wall of shell 6, and diaphragm 3 is set on the side wall of shell 6,
And the inside of shell 6 is connected to by diaphragm 3 with the outside of shell 6.Shell 6 can protect disappear interference mechanism 1 and strength adjustment mechanism 2,
It is also avoided that the impurity such as extraneous dust enter in the optical path inside shell 6, influences shaping effect, while can also support and fix
The interference mechanism that disappears 1 and strength adjustment mechanism 2.
Specifically, beam-expanding system 4 and focusing system 5 are respectively positioned in shell 6, and are flexibly connected and 6 bottom wall of shell.
Specifically, referring to Fig. 1, the bottom wall of shell 6 is equipped with sliding rail 61, beam-expanding system 4, focusing system 5, disappear interference machine
Structure 1 and strength adjustment mechanism 2 are slidably connected on sliding rail 61, and are connected and supported by optical element, to adjust different machines
The distance between structure.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (10)
1. light-beam forming unit, it is characterised in that: including the interference mechanism that disappears, strength adjustment mechanism and the diaphragm set gradually, institute
The interference mechanism that disappears is stated for eliminating interference between light beam, the strength adjustment mechanism is for changing light intensity along long axis direction and short
The distribution of axis direction, shape of the diaphragm for about light beams.
2. light-beam forming unit according to claim 1, it is characterised in that: the strength adjustment mechanism includes corrdinated adjustment
First microlens array and second microlens array of the light beam along the light distribution of long axis direction and short-axis direction.
3. light-beam forming unit according to claim 2, it is characterised in that: the side of first microlens array and institute
The side for stating the second microlens array is provided with multiple arc convex for being used to divide light beam.
4. light-beam forming unit according to claim 3, it is characterised in that: first microlens array is equipped with arc
The side of protrusion and the side equipped with arc convex of second microlens array are arranged in the same direction.
5. light-beam forming unit according to claim 1, it is characterised in that: the interference mechanism that disappears includes random phase
Plate.
6. light-beam forming unit according to claim 1, it is characterised in that: further include for stretching expanding for width of light beam
System, the beam-expanding system are set to one end far from the strength adjustment mechanism of the interference mechanism that disappears.
7. light-beam forming unit according to claim 6, it is characterised in that: the beam-expanding system includes assisting along long axis direction
With the first lens and the second lens for stretching width of light beam；
Second lens be set between first lens and the interference mechanism that disappears, second lens along long axis direction
Width be greater than first lens the width along long axis direction.
8. light-beam forming unit according to claim 1, it is characterised in that: further include the focusing system for focus on light beam
System, the focusing system are set between the strength adjustment mechanism and the diaphragm.
9. light-beam forming unit according to claim 8, it is characterised in that: the focusing system includes respectively along long axis side
To the third lens and the 4th lens with short-axis direction focus on light beam；
The axial meridian of the third lens and the axial meridian of the 4th lens are mutually perpendicular to.
10. light-beam forming unit according to claim 1, it is characterised in that: further include shell, it is described disappear interference mechanism and
The strength adjustment mechanism is movably connected on the bottom wall of the shell, and the diaphragm is set on the side wall of the shell, and institute
It states diaphragm and is connected to the inside of the shell with the outside of the shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920376231.0U CN209560211U (en) | 2019-03-22 | 2019-03-22 | Light-beam forming unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920376231.0U CN209560211U (en) | 2019-03-22 | 2019-03-22 | Light-beam forming unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209560211U true CN209560211U (en) | 2019-10-29 |
Family
ID=68311440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920376231.0U Active CN209560211U (en) | 2019-03-22 | 2019-03-22 | Light-beam forming unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209560211U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112558312A (en) * | 2020-12-25 | 2021-03-26 | 湖北工业大学 | Light beam shaping control method with high energy utilization rate and high uniformity |
-
2019
- 2019-03-22 CN CN201920376231.0U patent/CN209560211U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112558312A (en) * | 2020-12-25 | 2021-03-26 | 湖北工业大学 | Light beam shaping control method with high energy utilization rate and high uniformity |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110125536A (en) | A kind of laser processing device and method of thin-film material removal | |
| CN104977789B (en) | Illumination optical system and image projection apparatus with the same | |
| CN110174769A (en) | Light irradiation device and method, the optical machining device and method that have light irradiation device | |
| CN209560211U (en) | Light-beam forming unit | |
| CN203149208U (en) | Shaping and beam equalizing device of excimer laser | |
| CN208752314U (en) | A kind of laser zooming collimating and beam expanding system | |
| CN109530913B (en) | Laser processing optimization method and system for Bessel beam | |
| KR102377421B1 (en) | Flying-over beam pattern scanning hologram microscopy using scan mirror and translation stage | |
| US20130107346A1 (en) | Optical system for laser optical rectification and wave front control | |
| CN107290861A (en) | Laser beam homogenization device and method | |
| US11960097B2 (en) | Combined lenses-based apparatus for line laser uniformity generation | |
| CN105615824A (en) | Long-focus deep-dark-field retina OCT system adopting Bessel band lighting mode | |
| US3746427A (en) | Acousto-optical system with simplified optics | |
| CN106291949B (en) | A kind of apparatus for shaping of laser beam | |
| CN204679716U (en) | Polarization characteristic is utilized to generate the apparatus for shaping of parallel flat top beam | |
| CN109683306A (en) | It is a kind of for overcoming the wavefront control method of thermal lensing effect | |
| CN204964888U (en) | Correction type galileo formula becomes times beam expanding lens | |
| CN111061063B (en) | Pupil filtering far-field super-resolution imaging system and pupil filter design method | |
| CN106094226B (en) | One kind is based on two beam splitter prisms and wedge-shaped mirrors combinative optical system | |
| CN103972780B (en) | A kind of method being quickly found out laser pulse temporal overlapping positions by adjustable diaphragm | |
| CN103309050A (en) | Compact slit space filter | |
| US5285223A (en) | Ophthalmic optical apparatus having an alignment optical system | |
| CN108594445A (en) | A method of it realizes and interference optical field is shaped to random geometry | |
| US4657721A (en) | Target illumination | |
| KR102425179B1 (en) | Line beam forming device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220728 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |