CN209542654U - A kind of scattering formula low-temperature scanning near-field optical microscope - Google Patents
A kind of scattering formula low-temperature scanning near-field optical microscope Download PDFInfo
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- CN209542654U CN209542654U CN201920096744.6U CN201920096744U CN209542654U CN 209542654 U CN209542654 U CN 209542654U CN 201920096744 U CN201920096744 U CN 201920096744U CN 209542654 U CN209542654 U CN 209542654U
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Abstract
The utility model discloses a kind of scattering formula low-temperature scanning near-field optical microscopes, including cold bench, it is set to Sample Scan platform and probe scanning platform, the paraboloidal mirror platform and pedestal of cold bench bottom, the Sample Scan platform includes scan table, elastic clip and specimen holder are provided on scan table, specimen holder is pluggable to be sandwiched between scan table and elastic clip in order to replace sample；The probe scanning platform is located at Sample Scan platform opposite side, needle point including being connected to cold bench bottom couples extraction platform and needle point support, it is fixed with probe in needle point support, needle point support is connected to needle point coupling extraction platform and opposite with scan table is scanned in order to replace probe to sample with magnetic-type；The paraboloidal mirror platform is set on pedestal to assemble external laser at probe and collect the scattering light with sample message in outer locator.The utility model can be realized simultaneously original position and change probe and vary product, and compatibility easy to operate is strong.
Description
Technical field
The utility model belongs near field optic Instrument technology field, and in particular to a kind of scattering formula low temperature scanning near field optic
Microscope.
Background technique
With being constantly progressive for modern micro-nano technology technology and scanning probe microscopy, near-field optical microscope is not yet
There is the near-field optical microscope of various feedback forms and working method in disconnected development, these near-field optical microscope obtain closely
For the resolution ratio of field optics image compared with being difficult to break through the diffraction limit of light, obtained resolution ratio is lower.In order to by resolution ratio into
One step improves, scientists by the AFM probe of metallization, obtained in the way of scattering resolution ratio in~10nm or so or
Better near field optic image, thus the research in the near field optic field pushed, meanwhile, the breakthrough of high vacuum and liquid helium region
The near field imaging system of diffraction limit also has important application in fields such as physics, chemistry, material, biology, national defence, information.
But currently, the scattering formula that can obtain liquid helium region is infrared or far infrared near field imaging system only has a company
It is making, product cannot achieve needle exchange in situ or vary product, and its scattering formula near field imaging system cannot be according to the actual situation
Each platform is positioned, working environment and vacuum degree do not reach the requirement of ultrahigh vacuum yet, in research application and reality
It is all very inconvenient in the operation of border, adverse effect is also generated to experimental data.
Therefore, it is necessary to propose expansible, compatible scattering under easy to operate, the extremely low mild ultra-high vacuum environment of one kind
Formula low-temperature scanning near-field optical microscope.
Utility model content
The utility model is directed to the situation of the prior art, overcomes drawbacks described above, proposes a kind of scattering formula low temperature scanning near field
Optical microscopy.
The utility model use following technical scheme, a kind of scattering formula low-temperature scanning near-field optical microscope, including
Cold bench, Sample Scan platform, probe scanning platform, paraboloidal mirror platform and pedestal, in which:
The Sample Scan platform is set to cold bench bottom, and the Sample Scan platform includes scan table, the scan table
On be provided with elastic clip and specimen holder, the specimen holder is pluggable to be sandwiched between scan table and elastic clip in order to replace
Sample；
The probe scanning platform is set to cold bench bottom and is located at Sample Scan platform opposite side, the probe scanning
Platform includes the needle point coupling extraction platform and needle point support for being connected to cold bench bottom, is fixed with probe in the needle point support, described
Needle point support is connected to needle point coupling extraction platform and opposite with the scan table in order to replacing probe pair with magnetic-type
Sample is scanned；
The paraboloidal mirror platform is set on pedestal, and the paraboloidal mirror platform is for assembling external laser at probe
And the scattering light with sample message is collected in outer locator.
As a further improvement of the above technical scheme, the Sample Scan platform further includes having to be fixed on cold bench bottom
First XYZ mobile mechanism, the scan table are connected to the first XYZ mobile mechanism and are driven and move in XYZ space.
As a further improvement of the above technical scheme, the probe scanning platform further includes be fixed on cold bench bottom
Two XYZ mobile mechanisms, the needle point coupling extraction platform are connected to the 2nd XYZ mobile mechanism and are driven in XYZ space
Interior movement is to adjust needle point support in the position of XYZ space.
As a further improvement of the above technical scheme, the paraboloidal mirror platform includes the 3rd XYZ mobile mechanism and throwing
Object plane mirror, the 3rd XYZ mobile mechanism are fixed on pedestal, and the paraboloidal mirror is connected to the 3rd XYZ mobile mechanism
And it is driven and is moved in XYZ space to assemble external laser at probe and collect the scattering light with sample message in outside
Detector.
As a further improvement of the above technical scheme, the paraboloidal mirror preferred dimension is off-axis no more than 1 inch
Paraboloidal mirror.
As a further improvement of the above technical scheme, the cold bench is fixed on external cryostat.
As a further improvement of the above technical scheme, shock-absorbing arms is also set up between the cold bench and pedestal.
A kind of scattering formula low-temperature scanning near-field optical microscope disclosed by the utility model, the beneficial effect is that, this reality
It is fixed in a manner of magnetic with novel middle needle point support, it can be achieved that needle exchange in situ and being applicable to various types of probes, specimen holder
It is fixed on scan table by elastic clip, while original position may be implemented and vary product, compatibility easy to operate is strong；The utility model knot
Structure simple configuration is small and exquisite, can be placed directly in the intracavitary use of ultrahigh vacuum, strong applicability；Three XYZ are used in the utility model
Mobile mechanism carries out spatial position adjustment to each platform and paraboloidal mirror is dissipated using off axis paraboloidal mirror convergent laser and collection
Light is penetrated, near-field signals, signal-to-noise ratio with higher can be effectively extracted；Shock-absorbing arms is also set up between cold bench and pedestal, so that
For utility model works in low vibration environment, experimental result is reliable.
Detailed description of the invention
Fig. 1 is the general structure schematic diagram of the preferred embodiment in the utility model.
Fig. 2 is a visual angle schematic diagram of Sample Scan platform in the utility model.
Fig. 3 is the partial enlarged view of part A in Fig. 1.
Appended drawing reference includes: 1- cold bench, 2- Sample Scan platform, 22- scan table, the first XYZ mobile mechanism of 21-, 23- bullet
Property intermediate plate, 24- specimen holder, 25- lug, 3- probe scanning platform, the 2nd XYZ mobile mechanism of 31-, the coupling of 32- needle point is extracted flat
Platform, 33- needle point support, 34- magnet, 4- paraboloidal mirror platform, the 3rd XYZ mobile mechanism of 41-, 42- paraboloidal mirror, 5- pedestal, 51-
Shock-absorbing arms.
Specific embodiment
The utility model discloses a kind of scattering formula low-temperature scanning near-field optical microscope, below with reference to preferred embodiment,
Specific embodiment of the present utility model is further described.
The specific structure of the utility model is shown to Fig. 3, Fig. 1 to Fig. 3 referring to Figure 1 of the drawings.A kind of scattering formula
Low-temperature scanning near-field optical microscope, including cold 1, Sample Scan platform 2, probe scanning platform 3, paraboloidal mirror platform 4 and
Pedestal 5, in which:
The Sample Scan platform 2 is set to 1 bottom of cold bench, and the Sample Scan platform 2 includes scan table 22, described to sweep
It retouches and is provided with elastic clip 23 and specimen holder 24 on platform 22, the specimen holder 24 is pluggable to be sandwiched in scan table 22 and elastic clip
In order to replacing sample between 23；
The probe scanning platform 3 is set to 1 bottom of cold bench and is located at 2 opposite side of Sample Scan platform, the probe
Scanning platform 3 includes the needle point coupling extraction platform 32 and needle point support 33 for being connected to 1 bottom of cold bench, is fixed in the needle point support 33
Have a probe, the needle point support 33 with it is magnetic-type be connected to the needle point coupling extraction platform 32 and with the scan table 22 it is opposite
It is scanned in order to replace probe to sample；
The paraboloidal mirror platform 4 is set on pedestal 5, and the paraboloidal mirror platform 4 is for assembling external laser in spy
At needle and the scattering light with sample message is collected in outer locator.
Cold bench 1 provides low temperature environment for near-field optical microscope in the utility model, can use various forms of refrigeration
Platform, versatile, scan table 22 provides placement platform for sample, and elastic clip 23 and specimen holder are provided on scan table 22
24, sample is to be affixed on specimen holder 24 in a manner of gluing, and specimen holder 24 is pluggable to be sandwiched in scanning in practical applications
Between platform 22 and elastic clip 23, only specimen holder 24 need to be extracted the insertion more renewed when needing replacing sample, more into one
Specimen holder 24 far from the side of elastic clip 23 is additionally provided with a lug 25 in the present embodiment on step ground, which conveniently exchanges for
Specimen holder, probe scanning platform 3 are used to obtain the optical imagery of sample, are wherein provided with magnet in needle point coupling extraction platform 32
34, needle point support 33 is pulled in needle point coupling extraction platform 32 in a manner of magnetic, and probe is mounted in needle point support 33, with
What this can be convenient, which remove needle point support 33, carries out the replacement of probe and can according to need hyperphoric various probes (no in practice
Only it is replaced by AFM probe and is also replaced by STM probe), paraboloidal mirror platform 4 can converge to external laser at probe to make
Probe effectively extracts near-field signals (laser include visible light, infrared and terahertz wave band light) and collects with sample
The scattering light of information is in outer locator.The replacement of progress sample and probe that the utility model can be convenient, it is easy to operate simultaneous
Capacitive is strong.
Further, the Sample Scan platform 2 further includes having the first XYZ mobile mechanism 21 for being fixed on 1 bottom of cold bench,
The scan table 22 is connected to the first XYZ mobile mechanism 21 and is driven and moves in XYZ space.
Further, the probe scanning platform 3 further includes the 2nd XYZ mobile mechanism 31 for being fixed on 1 bottom of cold bench, institute
Needle point coupling extraction platform 32 is stated to be connected to the 2nd XYZ mobile mechanism 31 and be driven in XYZ space movement to adjust
Needle point support 33 is in the position of XYZ space.
Further, the paraboloidal mirror platform 4 includes the 3rd XYZ mobile mechanism 41 and paraboloidal mirror 42, the third
XYZ mobile mechanism 41 is fixed on pedestal 5, and the paraboloidal mirror 42 is connected in the 3rd XYZ mobile mechanism 41 and by band
It moves and is moved in XYZ space to assemble external laser at probe and collect the scattering light with sample message in external detection
Device.
Specifically, the first XYZ mobile mechanism 21, the 2nd XYZ mobile mechanism 31 and the 3rd XYZ mobile mechanism 41 adopt
With the prior art known in those skilled in the art, the first XYZ mobile mechanism 21, the 2nd XYZ mobile mechanism 31 and the 3rd XYZ
Mobile mechanism 41 itself is not the utility model point of the utility model, and the first XYZ mobile mechanism 21, the 2nd XYZ are mobile
Mechanism 31 and the 3rd XYZ mobile mechanism 41 include X to stepper motor, Y-direction stepping motor and Z-direction stepping motor, and the X is to step
It is respectively used to control the X-direction displacement, Y-direction displacement and the side Z of each platform into motor, Y-direction stepping motor and Z-direction stepping motor
To displacement.It is flat to Sample Scan platform 2, probe scanning respectively by three XYZ mobile mechanisms (21,31,41) in the present embodiment
The spatial position of platform 3 and paraboloidal mirror platform 4 is adjusted, so as to high-precision adjusting probe at a distance from sample,
The orientation that laser is assembled, enables the utility model effectively to extract near-field signals, signal-to-noise ratio with higher.
Further, 42 preferred dimension of paraboloidal mirror is the off axis paraboloidal mirror no more than 1 inch.
Further, the cold bench 1 is fixed on external cryostat, so that the utility model can be applicable in
It is applied widely in various forms of cryostats.
Further, shock-absorbing arms 51 is also set up between the cold bench 1 and pedestal 5.
Specifically, since each platform that will drive of each XYZ mobile mechanism carries out motion scan, in order to prevent each
Vibration influence experimental result is generated during platform motion scan, and shock-absorbing arms 51 is provided between cold bench 1 and pedestal 5, so that
For utility model works in low shake environment, experimental result is true and reliable.
It is noted that the metal material for the scattering formula low-temperature scanning near-field optical microscope that the utility model is proposed
Part is using oxygen-free copper or aluminium alloy (such as pedestal, shock-absorbing arms, Sample Scan platform) and its metal material part is by surface
Polishing is gold-plated, since oxygen-free copper and aluminium alloy are that the high metal of thermal conductivity (also can be selected other thermally conductive in practical applications
The high metal of rate), polishing or gold-plated, enhances the thermal isolation effect of the utility model on metal material, so that this is practical new
Type can be subjected to high-temperature baking, be suitable for ultra-high vacuum environment.
For a person skilled in the art, technical solution documented by foregoing embodiments can still be repaired
Change or equivalent replacement of some of the technical features, it is within the spirit and principle of the utility model, made any
Modification, equivalent replacement, improvement etc., should be included in the protection scope of the utility model.
Claims (7)
1. a kind of scattering formula low-temperature scanning near-field optical microscope, which is characterized in that including cold bench, Sample Scan platform, probe
Scanning platform, paraboloidal mirror platform and pedestal, in which:
The Sample Scan platform is set to cold bench bottom, and the Sample Scan platform includes scan table, sets on the scan table
It is equipped with elastic clip and specimen holder, the specimen holder is pluggable to be sandwiched between scan table and elastic clip in order to more vary
Product；
The probe scanning platform is set to cold bench bottom and is located at Sample Scan platform opposite side, the probe scanning platform
Needle point including being connected to cold bench bottom couples extraction platform and needle point support, is fixed with probe, the needle point in the needle point support
Support is connected to needle point coupling extraction platform and opposite with the scan table in order to replacing probe to sample with magnetic-type
It is scanned；
The paraboloidal mirror platform is set on pedestal, and the paraboloidal mirror platform is for assembling external laser at probe and receiving
Collect the scattering light with sample message in outer locator.
2. a kind of scattering formula low-temperature scanning near-field optical microscope according to claim 1, which is characterized in that the sample
Scanning platform further includes having the first XYZ mobile mechanism for being fixed on cold bench bottom, and the scan table is connected to the first XYZ moving machine
Structure and being driven moves in XYZ space.
3. a kind of scattering formula low-temperature scanning near-field optical microscope according to claim 1, which is characterized in that the probe
Scanning platform further includes the 2nd XYZ mobile mechanism for being fixed on cold bench bottom, and the needle point coupling extraction platform is connected to described
2nd XYZ mobile mechanism is simultaneously driven in XYZ space movement to adjust needle point support in the position of XYZ space.
4. a kind of scattering formula low-temperature scanning near-field optical microscope according to claim 1, which is characterized in that the parabolic
Face mirror platform includes the 3rd XYZ mobile mechanism and paraboloidal mirror, and the 3rd XYZ mobile mechanism is fixed on pedestal, the throwing
Object plane mirror is connected to the 3rd XYZ mobile mechanism and is driven and moves in XYZ space to assemble external laser at probe
And the scattering light with sample message is collected in outer locator.
5. a kind of scattering formula low-temperature scanning near-field optical microscope according to claim 4, which is characterized in that the parabolic
Face mirror preferred dimension is the off axis paraboloidal mirror no more than 1 inch.
6. a kind of scattering formula low-temperature scanning near-field optical microscope according to claim 1, which is characterized in that the cold bench
It is fixed on external cryostat.
7. according to claim 1 or a kind of scattering formula low-temperature scanning near-field optical microscope described in 6 any claims, special
Sign is, also sets up shock-absorbing arms between the cold bench and pedestal.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920096744.6U CN209542654U (en) | 2019-01-21 | 2019-01-21 | A kind of scattering formula low-temperature scanning near-field optical microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920096744.6U CN209542654U (en) | 2019-01-21 | 2019-01-21 | A kind of scattering formula low-temperature scanning near-field optical microscope |
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| CN209542654U true CN209542654U (en) | 2019-10-25 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109682995A (en) * | 2019-01-21 | 2019-04-26 | 仪晟科学仪器(嘉兴)有限公司 | A kind of scattering formula low-temperature scanning near-field optical microscope |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
-
2019
- 2019-01-21 CN CN201920096744.6U patent/CN209542654U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109682995A (en) * | 2019-01-21 | 2019-04-26 | 仪晟科学仪器(嘉兴)有限公司 | A kind of scattering formula low-temperature scanning near-field optical microscope |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
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