CN209542000U - A kind of leakage detection apparatus of vacuum sample normal pressure detection - Google Patents

A kind of leakage detection apparatus of vacuum sample normal pressure detection Download PDF

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Publication number
CN209542000U
CN209542000U CN201920033106.XU CN201920033106U CN209542000U CN 209542000 U CN209542000 U CN 209542000U CN 201920033106 U CN201920033106 U CN 201920033106U CN 209542000 U CN209542000 U CN 209542000U
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CN
China
Prior art keywords
vacuum
normal pressure
switch valve
vacuum tank
detection apparatus
Prior art date
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Expired - Fee Related
Application number
CN201920033106.XU
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Chinese (zh)
Inventor
刘元成
刘乃坤
赵新军
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Qingdao Tesmai Instrument Equipment Co Ltd
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Qingdao Tesmai Instrument Equipment Co Ltd
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Priority to CN201920033106.XU priority Critical patent/CN209542000U/en
Application granted granted Critical
Publication of CN209542000U publication Critical patent/CN209542000U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of leakage detection apparatus of vacuum sample normal pressure detection, belong to performing leak test technical field, it includes vacuum tank, be characterized in that: vacuum tank is connected to probe tube, probe tube connects sampling mechanism, the sample gas taken out from vacuum tank is converted to normal pressure state by vacuum state by sampling mechanism, and sampling mechanism provides the detection sample gas of normal pressure state for detector.The sample gas taken out from vacuum tank can be converted to normal pressure state by vacuum state due to sampling mechanism by this leakage detection apparatus, on the one hand making vacuum tank is quickly to provide the sample gas of higher concentration in a limited space, its vacuum degree no longer depends on the requirement of detector, the pressure limit of vacuum tank is widened, detection accuracy grade is increased;On the other hand existing helium leak test mode can be jumped out, more extensive refrigerant of use etc. detects medium, is equipped with the higher normal pressure detector of cost performance.

Description

A kind of leakage detection apparatus of vacuum sample normal pressure detection
Technical field
The utility model belongs to performing leak test technical field, and in particular to a kind of leak detection dress of vacuum sample normal pressure detection It sets.
Background technique
Currently, there are two types of the air-tightness detection method of pipeline and chamber is usual: positive pressure method and negative pressure method.Positive pressure method is in pipe The detection medium of filling certain pressure in road or chamber, then send the gas of pipeline or exterior thereto into leak detector using pump It is detected, whether to be leaked in gas containing detection medium to determine whether to exist.On the one hand such detection method can not protect The degree of purity of operating environment is demonstrate,proved, the spread in performance of leak detector used in another aspect is uneven, causes there is interference problem, testing result It is not accurate enough, therefore negative pressure method is all made of in high-precision detection.Negative pressure method mostly uses helium as detection medium, in pipeline or It is put into vacuum tank after being filled with a certain amount of helium in chamber, it will be direct after the high vacuum state for being extracted into detector requirement in vacuum tank Sampling is detected.
Chinese invention patent application 201510053704.X on vacuum lead by installing the first shutoff valve and second Shutoff valve makes the vacuum lead between the first shutoff valve and the second shutoff valve form section of shutting off, reaches inspection in vacuum sealing chamber When surveying vacuum degree, by closing the first shutoff valve and the second shutoff valve, the gas that vacuumizes in vacuum sealing room is shut off acquisition In section of shutting off, examined product is taken away, hunt leak to the gas that vacuumizes of sampling.Such detection method needs in vacuum tank Pressure rating is consistent with detector, on the one hand greatly reduces the use pressure limit of vacuum tank in this way;On the other hand due to Higher vacuum level requirements cause the size of cabinet and pipeline and leakproofness and each vacuum pump performance that can all influence to detect As a result repeatability and accuracy, so that structure is complicated, reliability is not high.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of leakage detection apparatus of vacuum sample normal pressure detection, can It is to be detected under normal pressure state by the sample gas shift taken out under vacuum state.
In order to solve the above technical problems, the technical solution of the utility model is: designing a kind of vacuum sample normal pressure detection Leakage detection apparatus, including vacuum tank, it is characterised in that: vacuum tank is connected to probe tube, and probe tube connects sampling mechanism, and sampling mechanism will The sample gas taken out from vacuum tank is converted to normal pressure state by vacuum state, and sampling mechanism provides the inspection of normal pressure state for detector Test sample gas.
Preferably, the sampling mechanism includes the packaging container that volume can be automatically adjusted with air pressure, and packaging container is connected to probe tube, First vacuum pump is set on probe tube.
Preferably, the packaging container is also connected to cleaning air flue and empties the exhaust duct of packaging container, cleans and the is arranged on air flue Second switch valve is arranged on exhaust duct for one switch valve.
Preferably, the cleaning air flue and exhaust duct pass through the shared aspiration pump of switching valve.
Preferably, the sampling mechanism further includes controller, pressure sensor is arranged on packaging container, controller is according to pressure The pressure signal of sensor controls the on-off of first switch valve, second switch valve and switching valve.
Preferably, first vacuum pump is dry vacuum pump.
Preferably, blow-down pipe is connected on the probe tube, blow-down pipe is located at the rear side of the first vacuum pump, is arranged on blow-down pipe Third switch valve also sets up the 4th switch valve on probe tube, and the 4th switch valve is located at the front side of the first vacuum pump.
Preferably, the first bifurcations of the packaging container connected component pipe, branched pipe pass through the connection sampling of the 5th switch valve Second bifurcations of pipe, branched pipe pass through the 6th switch valve communication with detection instrument, the third bifurcations connection cleaning air flue of branched pipe And exhaust duct.
Preferably, the vacuum tank connects the second vacuum pump, and vacuum tank is equipped with pressure gauge, the second vacuum pump and vacuum tank Between form vacuum air-channel, according to the on-off of the Numerical Control vacuum air-channel of pressure gauge.
Preferably, the vacuum tank is also connected to air inlet pipe, and air filter is arranged in air inlet pipe, is arranged the 7th in air inlet pipe Switch valve.
Preferably, the packaging container is air bag.
Preferably, switch valve used and switching valve are solenoid valve.
Compared with prior art, the utility model has the beneficial effects that
1, since the sample gas taken out from vacuum tank can be converted to normal pressure state by vacuum state by sampling mechanism, on the one hand So that vacuum tank is quickly to provide the sample gas of higher concentration in a limited space, vacuum degree no longer depends on wanting for detector It asks, widens the pressure limit of vacuum tank, increase detection accuracy grade;On the other hand existing helium leak test mode can be jumped out, adopted Medium is detected with more extensive refrigerant etc., is equipped with the higher normal pressure detector of cost performance.
2, cooperate the knot of the first vacuum pump using the packaging container that can automatically adjust volume with air pressure due to the sampling mechanism Structure, structure is simple, can change the pressure state change for completing sample gas by own volume.
3, since packaging container is also connected to cleaning air flue and empties the exhaust duct of packaging container, it can be realized the certainly clear of packaging container It is clean, more true sample gas is provided for detector, conducive to the accuracy for improving leak detection.
4, aspiration pump is shared by switching valve due to cleaning air flue and exhaust duct, can improved to packaging container cleaning speed While, the quantity of aspiration pump is reduced, cost is saved.
5, since pressure sensor being arranged on packaging container, controller is opened according to the pressure signal of pressure sensor control first The on-off for closing valve, second switch valve and switching valve, realizes the self-cleaning function of packaging container, accurate and efficient.
6, since the first vacuum pump selects dry vacuum pump to can be improved the accuracy of detection to sample gas without any pollution.
7, due to connecting blow-down pipe on probe tube, blow-down pipe is located at the rear side of the first vacuum pump, third is arranged on blow-down pipe Switch valve also sets up the 4th switch valve on probe tube, and the 4th switch valve is located at the front side of the first vacuum pump, can really sample Before, the gas in probe tube is emptied, to guarantee the authenticity of sample gas.
8, probe tube and detector etc. being connected by branched pipe due to packaging container, the port for reducing packaging container opens up quantity, Conducive to its reliability and stability of maintenance.
9, since packaging container selects air bag, technology maturation and reliable performance.
10, the utility model structure is simple, novel, can carry out the sample gas shift taken out under vacuum after normal pressure Normal pressure detection, widens the Application Range of medium, increases the indexing of detection accuracy grade, convenient in industry promoting and applying.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Marked in the figure: 1, vacuum tank;2, pressure gauge;3, the 7th switch valve;4, air filter;5, detector;6, the 6th Switch valve;7, the 4th switch valve;8, the second vacuum pump;9, dry vacuum pump;10, third switch valve;11, the 5th switch valve;12, Air bag;13, pressure sensor;14, controller;15, second switch valve;16, first switch valve;17, the first switching valve;18, Two switching valves;19, aspiration pump;20, the 8th switch valve.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing.
Circulating direction of the utility model referring to gas from front to back, is defined as front end for its upstream end, correspondingly by it Outlet side defines rear end.
As shown in Figure 1, the utility model connects the second vacuum pump 8 on vacuum tank 1, vacuum tank 1 is equipped with pressure gauge 2, Vacuum air-channel is formed between second vacuum pump 8 and vacuum tank 1, setting controls the 8th switch valve 20 of its on-off, root on vacuum air-channel According to the on-off of the 8th switch valve 20 of Numerical Control the of pressure gauge 2, to realize the on-off control of vacuum air-channel.Vacuum tank 1 is also It is connected to air inlet pipe, air filter 4 is set in air inlet pipe, the 7th switch valve 3 is set in air inlet pipe.Vacuum tank 1 is connected to probe tube, Dry vacuum pump 9 is set on probe tube, and probe tube passes through the first bifurcations of 11 connected component's pipe of the 5th switch valve, branched pipe Second bifurcations summarize mouthful communicated air bags 12 by 6 communication with detection instrument 5 of the 6th switch valve, branched pipe.
For the authenticity for guaranteeing gas sampled, blow-down pipe is connected on probe tube, after blow-down pipe is located at dry vacuum pump 9 Third switch valve 10 is arranged on blow-down pipe, also sets up the 4th switch valve 7 on probe tube, the 4th switch valve 7 is located at dry vacuum for side The front side of pump 9.Air bag 12 also passes through the exhaust duct of the third bifurcations connection cleaning air flue of branched pipe and emptying air bag 12, cleaning First switch valve 16 and the first switching valve 17 are set on air flue, second switch valve 15 and the second switching valve 18 are set on exhaust duct, Cleaning air flue and exhaust duct pass through the first switching valve 17 and the second switching valve 18 shares aspiration pump 19.And pressure is set on air bag 12 Force snesor 13, controller 14 control first switch valve 16, second switch valve 15, the according to the pressure signal of pressure sensor 13 The on-off of one switching valve 17 and the second switching valve 18.
The detection process of the utility model is as follows:
After refrigerant is filled in the cavity of examined workpiece as detection medium, examined workpiece is put into vacuum tank 1, is opened Second vacuum pump 8, vacuumizes vacuum tank 1, and during vacuumizing, the 4th switch valve 7 and the 5th switch valve 11 are closed, and opens Dry vacuum pump 9 and third switch valve 10 are opened, the gas in probe tube is discharged;Open aspiration pump 19,18 and of the second switching valve Second switch valve 15, first switch valve 16 and the first switching valve 17 are still in closed state, by the gas in air bag 12 and pipeline Discharge, when controller 14 detect pressure sensor 13 pressure be reduced to suddenly negative value and be more than limit value when, then determine air bag 12 It has been in emptying state with pipeline, then has closed the second switching valve 18 and second switch valve 15, has opened first switch valve 16 and first Fresh air is filled in air bag 12 and is rinsed by switching valve 17, and device 14 to be controlled detects that the pressure of pressure sensor 13 is steep When rising and being more than limit value, then determine to have been filled with clean gas in air bag 12, then closes first switch valve 16 and the first switching Valve 17 is again turned on the second switching valve 18 and second switch valve 15, and air bag 12 and pipeline are emptied, and the second switching is closed after emptying Valve 18 and second switch valve 15.
When air bag 12 finished by cleaning and vacuum degree in vacuum tank 1 reach 3000Pa or it is following when close the 8th and open Valve 20 is closed, after opening 7 a period of time of the 4th switch valve, closes third switch valve 10, and opening and the 5th switch valve 11, dry type are true Sample gas in vacuum tank 1 is pumped into the air bag 12 cleaned by sky pump 9, and air bag 12 is placed in natural atmosphere, by its bullet Property volume realize inside and outside air pressure balance, so that the sample gas of taking-up is switched to normal pressure state.
Sampling terminates, and closes dry vacuum pump 9, the 4th switch valve 7 and the 5th switch valve 11, opens the 6th switch valve 6, gas Capsule 12 is that detector 5 provides normal pressure sample gas, if testing result, which is shown in sample gas, contains refrigerant, determines that workpiece has leakage; If testing result, which is shown in sample gas, does not have refrigerant, determining workpiece, there is no leakages.The 7th switch valve 3 is opened, air is through sky Air filter 4 enters vacuum tank 1 after filtering, and after vacuum tank 1 restores normal pressure state, opens vacuum tank 1 and takes out workpiece, complete one Secondary detection.
Above-mentioned switch valve used and switching valve are solenoid valve, and air bag 12 used can also be by the storage of other specific structures Body replaces, as long as normal pressure conversion can be completed by automatically adjusting volume with air pressure, does not do specific limit to its specific structure It is fixed.
The above descriptions are merely preferred embodiments of the present invention, is not to make other forms to the utility model Limitation, any person skilled in the art is changed or is modified as possibly also with the technology contents of the disclosure above equivalent The equivalent embodiment of variation.But it is all without departing from the content of the technical scheme of the utility model, the technology according to the utility model is real Matter any simple modification, equivalent variations and remodeling to the above embodiments, still fall within the guarantor of technical solutions of the utility model Protect range.

Claims (10)

1. a kind of leakage detection apparatus of vacuum sample normal pressure detection, including vacuum tank, it is characterised in that: vacuum tank is connected to probe tube, Probe tube connects sampling mechanism, and the sample gas taken out from vacuum tank is converted to normal pressure state by vacuum state, taken by sampling mechanism Model machine structure provides the detection sample gas of normal pressure state for detector.
2. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 1, it is characterised in that: the sampling mechanism packet The packaging container that volume can be automatically adjusted with air pressure is included, packaging container is connected to probe tube, the first vacuum pump is arranged on probe tube.
3. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 2, it is characterised in that: the packaging container also connects Logical cleaning air flue and the exhaust duct for emptying packaging container, clean and first switch valve are arranged on air flue, second switch is arranged on exhaust duct Valve.
4. the leakage detection apparatus of vacuum sample normal pressure according to claim 3 detection, it is characterised in that: the cleaning air flue with Exhaust duct shares aspiration pump by switching valve.
5. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 4, it is characterised in that: the sampling mechanism is also Including controller, pressure sensor is set, controller controls first switch according to the pressure signal of pressure sensor on packaging container The on-off of valve, second switch valve and switching valve.
6. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 5, it is characterised in that: first vacuum pump For dry vacuum pump.
7. the leakage detection apparatus of vacuum sample normal pressure detection according to any one of claims 2 to 6, it is characterised in that: described to take Blow-down pipe is connected on sample pipe, blow-down pipe is located at the rear side of the first vacuum pump, and third switch valve is arranged on blow-down pipe, goes back on probe tube 4th switch valve is set, and the 4th switch valve is located at the front side of the first vacuum pump.
8. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 7, it is characterised in that: the packaging container connection First bifurcations of branched pipe, branched pipe are connected to probe tube by the 5th switch valve, and the second bifurcations of branched pipe pass through the 6th Switch valve communication with detection instrument, the third bifurcations connection cleaning air flue and exhaust duct of branched pipe.
9. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 8, it is characterised in that: the vacuum tank connection Second vacuum pump, vacuum tank are equipped with pressure gauge, vacuum air-channel are formed between the second vacuum pump and vacuum tank, according to the number of pressure gauge The on-off of value control vacuum air-channel.
10. the leakage detection apparatus of vacuum sample normal pressure detection according to claim 9, it is characterised in that: the vacuum tank is also It is connected to air inlet pipe, air filter is set in air inlet pipe, the 7th switch valve is set in air inlet pipe.
CN201920033106.XU 2019-01-09 2019-01-09 A kind of leakage detection apparatus of vacuum sample normal pressure detection Expired - Fee Related CN209542000U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920033106.XU CN209542000U (en) 2019-01-09 2019-01-09 A kind of leakage detection apparatus of vacuum sample normal pressure detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920033106.XU CN209542000U (en) 2019-01-09 2019-01-09 A kind of leakage detection apparatus of vacuum sample normal pressure detection

Publications (1)

Publication Number Publication Date
CN209542000U true CN209542000U (en) 2019-10-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109470418A (en) * 2019-01-09 2019-03-15 青岛泰斯迈仪器设备有限公司 A kind of leakage detection apparatus of vacuum sample normal pressure detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109470418A (en) * 2019-01-09 2019-03-15 青岛泰斯迈仪器设备有限公司 A kind of leakage detection apparatus of vacuum sample normal pressure detection

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20191025

Termination date: 20220109