CN209540022U - A kind of sealing ring and flat plate sealing structure - Google Patents

A kind of sealing ring and flat plate sealing structure Download PDF

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Publication number
CN209540022U
CN209540022U CN201822060202.1U CN201822060202U CN209540022U CN 209540022 U CN209540022 U CN 209540022U CN 201822060202 U CN201822060202 U CN 201822060202U CN 209540022 U CN209540022 U CN 209540022U
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China
Prior art keywords
sealing ring
plate
wire
sealing
flat plate
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CN201822060202.1U
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Chinese (zh)
Inventor
成荣
朱煜
杨开明
刘相波
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Tsinghua University
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Tsinghua University
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Priority to CN201822060202.1U priority Critical patent/CN209540022U/en
Priority to US17/311,341 priority patent/US20220025972A1/en
Priority to PCT/CN2019/112593 priority patent/WO2020119259A1/en
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Publication of CN209540022U publication Critical patent/CN209540022U/en
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Abstract

The utility model relates to a kind of sealing ring and flat plate sealing structure, in particular to a kind of high vacuum or ultrahigh vacuum seal circle and sealing structure for slab construction.The sealing ring includes sealing ring, and from the outwardly extending a plurality of wire of sealing ring.Flat plate sealing structure, including two plates, sealing ring is fixed on a plate by a plurality of wire extended, and sealing ring is accurately positioned, it can be accurately positioned by external force without doing the change in structure to flat panel workpieces, to be not in dislocation after guaranteeing sealing ring installation.

Description

A kind of sealing ring and flat plate sealing structure
Technical field
The utility model relates to a kind of sealing ring and flat plate sealing structure, in particular to a kind of Gao Zhen for slab construction It is empty that (vacuum degree is between 10^-1Pa to 10^-6Pa) or ultrahigh vacuum (vacuum degree is less than 10^-6Pa) sealing ring and sealing structure.
Background technique
In water-tight equipment or high vacuum or ultrahigh vacuum equipment, it is often necessary to be carried out between two slab constructions close Envelope, such as two flat panel workpieces shown in FIG. 1.In Fig. 1, workpiece 101 is vacuum cavity, extracts vacuum, plate by vacuum pump Workpiece 102 is the plate part that aperture 104 is had on workpiece 101, and another flat panel workpieces 103 are a flat surface plate or with electricity Pole, tracheae or the isostructural plate of water pipe.Need to link together the two, and guarantee to reach in vacuum cavity high vacuum or Ultrahigh vacuum.Such case discomfort shares the sealing means of common edge of a knife flange and metal washer, the sealing side generallyd use Formula is that the sealing ring of a fine wire shown in Fig. 2 production is clipped between two flat panel workpieces, is positioned at aperture 104 and peace It fills between hole 105, is squeezed and deformed wire by the pressing force between two flat panel workpieces to prevent the flowing of gas with reality Now seal.But sealing ring shown in Fig. 2 has certain limitation, if in Fig. 1 the mounting plane of plate 102 be it is horizontal, only Sealing ring shown in Fig. 2 need to be lain on mounting plane, then install plate 103, sealing ring is not in sliding Dislocation.And many times the mounting plane of flat panel workpieces 102 is not horizontal, it is likely to inclined or vertical, this When it is how that sealing ring shown in Fig. 2 is fixed just relatively difficult in place because sealing ring can not be fixed by external force. If sealing ring slightly misplaces, there is part the case where not being held down, then will gas leakage, it is impossible to obtain ultrahigh vacuum.
Patent database is looked into, patent document CN1118419A discloses a kind of sealing means, in two flat panel workpieces Sealing ring, is then put into concave structure by the concaveconvex structure of processing step type, then convex configuration is matched installation.This method Although the ultrahigh vacuum seal between the flat panel workpieces of tilt angle may be implemented, there is also disadvantage, one is needed at two Processing step type concaveconvex structure in flat panel workpieces increases process and cost;Secondly being not suitable for large-sized situation, because of sealing ring Diameter is thinner, and the material used is the softer metal of quality, if size is too big, it is impossible to which the support force by itself is kept Shape can not be installed if deforming occurs in sealing ring.
Summary of the invention
The purpose of the utility model is to provide a kind of sealing ring and flat plate sealing structure, which can be used for any angle Slab construction.In use, it can be accurately positioned by external force without doing the change in structure to flat panel workpieces, To guarantee to be not in dislocation after sealing ring is installed.
The technical solution of the utility model is: a kind of sealing ring, which is characterized in that including with flowering structure: sealing ring;From close The outwardly extending a plurality of wire of seal ring.
Further, which is circumferentially uniformly distributed along sealing ring.
Further, a plurality of wire is identical as seal ring material, diameter or not identical.
Further, which seals for high vacuum or ultrahigh vacuum cavity.
Further, a plurality of wire and sealing ring are welded to connect.
Further, sealing ring and/or wire are selected from gold, silver, copper, aluminium or phosphide material.
Further, sealing ring and/or wire diameter are 1~2mm.
Further, sealing ring-shaped is polygon, circle or triangle.
The utility model further relates to a kind of flat plate sealing structure, including the first plate, the second plate, and the first plate includes opening The a plurality of wire in hole, sealing ring is fixed on the first plate, and sealing ring is positioned at the mounting hole of the first plate and is opened On sealing surface between hole, which is fastenedly connected with the second plate.
Further, the length of a plurality of wire exceeds the edge of the second plate.
1) sealing ring provided by the utility model, which has the advantages that, may be implemented sealing ring in plate work at any angle Accurate positionin on part, implementation process is simple and quick, convenient disassembly.2) such sealing ring does not have size and shape limitation.3) it adopts Need to only finishing polish be carried out to sealing surface with such sealing ring, without doing any change in structure.It 4) will not after sealing ring installation Occur revealing due to caused by dislocation, particularly suitable for guaranteeing the vacuum degree of high vacuum or ultrahigh vacuum.
Detailed description of the invention
Fig. 1 is the plate seal schematic diagram of the prior art
Fig. 2 is prior art sealing ring schematic diagram
Fig. 3 is the utility model sealing ring schematic diagram
Fig. 4 is the utility model plate seal scheme of installation
Wherein, the above drawings include the following reference numerals: 101, vacuum cavity;102, flat panel workpieces;103, another plate Workpiece;104, aperture;105, mounting hole;301, sealing ring;302, sealing ring;303, extend wire;401, the first plate; 402, mounting hole;403, aperture;404, the second plate;405, fastening bolt;406, mounting surface;407, vacuum cavity.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical Novel protected range.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.In addition, term " the One ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection;It can be mechanical connection, be also possible to be electrically connected;Can be directly connected, can also indirectly connected through an intermediary, It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition The concrete meaning of language in the present invention.
As shown in the metal o-ring of Fig. 3 the utility model, metal o-ring 301 provided by the utility model can be by thin Wire, preferably gold, silver, copper, aluminium or indium etc., are welded, wire diameter is preferably 1~2mm.Shape as needed first By welded wire at a sealing ring 302, shape can be the arbitrary shapes such as polygon, circle, triangle, welding for shape and size Connector should be protruded without obvious, or the tools such as Welded Joints file are modified after being welded, make it without obvious prominent. Then according to actual condition, position appropriate extends outwardly and welds a plurality of wire 303 on becket, a plurality of wire edge Circumferential reasonable layout, is preferably circumferentially uniformly distributed, a plurality of wire and wire used in sealing ring can it is identical, can also be with It is different, it is proposed that it is identical to weld, also require that welding point without obvious prominent.Above-mentioned welding manner is also substitutable for other companies Connect mode, such as bonding, crimping.
The plate seal scheme of installation of Fig. 4 the utility model shows the mounting means of the utility model:
First plate 401 is the plate on vacuum cavity 407, is equipped with aperture 403, which can be arbitrary shape, excellent It is selected as round or rectangular.It needs for the second plate 404 to be mounted on the first plate 401, and junction is needed to be able to satisfy sealing Chamber or high vacuum or ultrahigh vacuum seal requirement.Specific implementation process: metal o-ring 301 is placed in 401 table of the first plate The suitable position in face, it is desirable that the sealing ring 302 of sealing ring 301 is positioned at mounting hole 402 (preferably threaded hole) and aperture 403 Between sealing surface 406 on.The sealing surface for needing to push down sealing ring on sealing surface 406 and the second plate 404 preferably wants refinement to throw Light, roughness are less than Ra0.05 μm.After the position of sealing ring 302 is selected, by a plurality of of welding that extend outwardly on sealing ring 301 Wire 303 is separately fixed on sealing surface, the modes such as can take bonding, push down, and the length of a plurality of wire 303 is preferably super The edge of second plate 404 out.Since a plurality of wire 303 outwardly extending on sealing ring 301 is fixed on the first plate 401 Surface occurs to slide or misplace so as to avoid sealing ring.Then use fastening bolt 405 or other connectors by the second plate 404 are mounted on the first plate 401, make two flat panel workpieces by sealing ring by the fastening pressing force of bolt or other connectors 302 squeeze generation deformation, to realize sealing.
Above-described embodiment is the preferable embodiment of the utility model, but the embodiments of the present invention is not by above-mentioned The limitation of embodiment, it is made under other any spiritual essence and principles without departing from the utility model to change, modify, replacing In generation, simplifies combination, should be equivalent substitute mode, is included within the protection scope of the utility model.

Claims (10)

1. a kind of sealing ring (301), which is characterized in that including with flowering structure:
Sealing ring (302);
From the outwardly extending a plurality of wire (303) of sealing ring.
2. a kind of sealing ring according to claim 1, which is characterized in that circumferential uniform point along sealing ring of a plurality of wire Cloth.
3. a kind of sealing ring according to claim 1, which is characterized in that a plurality of wire and seal ring material, diameter It is identical or not identical.
4. a kind of sealing ring according to claim 1, which is characterized in that the sealing ring is used for high vacuum or ultrahigh vacuum cavity Body sealing.
5. a kind of sealing ring according to claim 1 or 2 or 3 or 4, which is characterized in that a plurality of wire and sealing ring It is welded to connect.
6. a kind of sealing ring according to claim 1 or 2 or 3 or 4, which is characterized in that sealing ring and/or wire are selected from Gold, silver, copper, aluminium or phosphide material.
7. a kind of sealing ring according to claim 1 or 2 or 3 or 4, which is characterized in that sealing ring and/or wire diameter For 1~2mm.
8. a kind of sealing ring according to claim 1 or 2 or 3 or 4, which is characterized in that sealing ring-shaped is polygon, circle Shape or triangle.
9. a kind of flat plate sealing structure, including the first plate (401), the second plate (404), the first plate (401) includes aperture (403), it is characterised in that: further include sealing ring (301) described in one of claim 1-8, sealing ring (301) it is described a plurality of Wire (303) is fixed on the first plate (401), and sealing ring (302) is positioned to the mounting hole of the first plate (401) (402) on the sealing surface between aperture (403), which is fastenedly connected with the second plate (404).
10. a kind of flat plate sealing structure according to claim 9, which is characterized in that the length of a plurality of wire is super The edge of second plate (404) out.
CN201822060202.1U 2018-12-10 2018-12-10 A kind of sealing ring and flat plate sealing structure Active CN209540022U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201822060202.1U CN209540022U (en) 2018-12-10 2018-12-10 A kind of sealing ring and flat plate sealing structure
US17/311,341 US20220025972A1 (en) 2018-12-10 2019-10-22 Seal gasket for flat plate structure and sealing structure thereof
PCT/CN2019/112593 WO2020119259A1 (en) 2018-12-10 2019-10-22 Seal gasket for flat plate structure and sealing structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201822060202.1U CN209540022U (en) 2018-12-10 2018-12-10 A kind of sealing ring and flat plate sealing structure

Publications (1)

Publication Number Publication Date
CN209540022U true CN209540022U (en) 2019-10-25

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CN201822060202.1U Active CN209540022U (en) 2018-12-10 2018-12-10 A kind of sealing ring and flat plate sealing structure

Country Status (1)

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CN (1) CN209540022U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109268500A (en) * 2018-12-10 2019-01-25 清华大学 A kind of slab construction sealing ring and sealing structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109268500A (en) * 2018-12-10 2019-01-25 清华大学 A kind of slab construction sealing ring and sealing structure

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