CN106644277A - Side leakage tool for corrugated pipe - Google Patents
Side leakage tool for corrugated pipe Download PDFInfo
- Publication number
- CN106644277A CN106644277A CN201510712929.1A CN201510712929A CN106644277A CN 106644277 A CN106644277 A CN 106644277A CN 201510712929 A CN201510712929 A CN 201510712929A CN 106644277 A CN106644277 A CN 106644277A
- Authority
- CN
- China
- Prior art keywords
- bellows
- corrugated pipe
- hole
- cover plate
- upper flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The invention discloses a side leakage tool for a corrugated pipe, and the tool comprises an upper flange cover plate (1) with a hole, a double-head stud (2), the corrugated pipe (3), a hexagon nut (4), a bottom blind plate (5) with a hole, and sealing rings (6). The sealing rings (6) are disposed in flange sealing grooves at two ends of the corrugated pipe (3), and the bottom blind plate (5) with a hole is corresponding to the position of a flange hole of the corrugated pipe (3). The bottom blind plate (5) with a hole, the upper flange cover plate (1) with a hole and the corrugated pipe (3) are enabled to be in fixed connection through the double-head stud (2). The interface of the upper flange cover plate (1) with a hole is connected with a leakage detector. The tool is reasonable in structure, can reduce the damage rate of parts and the detector, also reduces the potential safety hazards of operation, can carry out the leakage detection of the corrugated pipe (3), also can carry out the pressure-maintaining operation of the corrugated pipe (3), and improves the utilization efficiency.
Description
Technical field
The frock the present invention relates to frock that a kind of detection is revealed, especially a kind of bellows leak hunting,
Belong to semiconductive thin film equipment technical field.
Background technology
Commonly used bellows is used for realizing the lifting work(of some parts in semiconductor coated film equipment
Can, while the exchange of air and vacuum environment is realized, so must assure that the sealing of bellows
The requirement of equipment can be met.In addition, before bellows is installed to equipment, if do not carried out close
The detection of sealing property, increased uncertain factor it is possible that the phenomenon such as leak rate is unqualified, such as
This can increase the replacing installation time of equipment leak detection time and parts.
The content of the invention
The present invention devises a kind of sylphon seal service check for the purpose of solving the above problems
Tool structure, can realize the function of hunting leak with pressurize.The reliability of leak detection is effectively raised,
The leak detection time is reduced, while eliminating bellows there is a possibility that leak source.
For achieving the above object, the technical solution used in the present invention is：Bellows leaks hunting frock,
Including upper flange cover plate (1) with holes, studs (2), bellows (3), hex nut (4),
Perforated bottom blind plate (5) and sealing ring (6).Sealing ring (6) is installed in bellows (3)
In the flange sealing trough at two ends, perforated bottom blind plate (5) is corresponding with the flange hole position of bellows,
By studs (2) and hex nut (4) by perforated bottom blind plate (5), upper method with holes
Blue cover plate (1) is fixedly connected with bellows (3), the interface of upper flange cover plate (1) with holes
Place's connection leak detector.
Beneficial effects of the present invention and feature are：
1st, it is rational in infrastructure, the natural length of bellows ensure that by nut and studs,
The negative pressure contraction distortion of bellows, plays a protective role in itself to bellows when avoiding pumping,
The damage probability of part and leak detector is reduced, while also reducing the potential safety hazard of operation；
2nd, extensively, the present invention is not only applicable to weld the bellows of circular flange applicable surface,
Apply also for welding the bellows of the arbitrary shape flanges such as ellipse, triangle, with versatility；
3rd, the present invention not only can carry out the leak detection operation of bellows, can also carry out bellows
Pressurize operation, improve the service efficiency of frock；
4th, present configuration is compact simple, and convenient disassembly improves the leak detection efficiency of bellows.
Description of the drawings
Fig. 1 is the structural representation of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, to the technical side in the embodiment of the present invention
Case carry out clearly, be fully described by, it is clear that described embodiment be only the present invention one
Divide embodiment, rather than the embodiment of whole.Based on the embodiment in the present invention, this area is general
The every other embodiment that logical technical staff is obtained under the premise of creative work is not made,
Belong to the scope of protection of the invention.
As shown in Figure 1：Bellows leaks hunting frock, including upper flange cover plate 1 with holes, double end spiral shell
Post 2, bellows 3, hex nut 4, perforated bottom blind plate 5 and sealing ring 6.Sealing ring 6
In the flange sealing trough at the two ends of bellows 3, the method for perforated bottom blind plate 5 and bellows
Flange aperture position correspondence, by studs 2 and hex nut 4 by perforated bottom blind plate 5, with holes
Upper flange cover plate 1 is fixedly connected with bellows 3, the interface connection of upper flange cover plate 1 with holes
Leak detector.
Upper flange cover plate 1 with holes is welded on flange by a pipe joint and is constituted, to welding requirements
Firmly, rosin joint, slag inclusion, pore are not allow for, casting skin splashing, electricity is not allow at non-solder
The defects such as arc damage, the leak detection of postwelding smoothing weld seam, leak rate≤1.0x10-11Pam3/s；Ripple
Line pipe 3 welds two ring flanges with holes and constitutes by a bellows upper and lower ends, welding manner
For circumferential sealing welding.First all parts are wiped or cleaned using front, to guarantee
Sealing effectiveness；When using, sealing ring 6 is arranged in the flange sealing trough at the two ends of bellows 3,
Perforated bottom blind plate is corresponding with the flange hole position of bellows, then in the flange hole position of bellows 3
In respectively penetrate three studs 2, with hex nut 4 fix bellows lower flange with it is with holes
Bottom blind flange 5, then hex nut 4 is installed on the top of studs 2, by bellows upper flange
Install into studs 2, adjusting hex nut 4 makes bellows 3 in natural length state,
Upper flange cover plate 1 with holes is installed on the upper flange of bellows 3 again, it is solid with hex nut 4
Fixed, finally the interface connection leak detector in upper flange cover plate 1 with holes carries out the pressurize behaviour that hunts leak
Make, it is desirable to firmly install, there must not be loosening phenomenon；It is further to note that the present invention is suitable
For welding the bellows of the arbitrary shape flange such as circle, ellipse, triangle, but be suitable for
Precondition is the need to ensure that the diameter of upper flange cover plate 1 with holes is at least greater than sealing ring 6
Diameter, so can just cover sealing ring, it is to avoid gas leakage.Finally in leak detection link, the device
Can prevent the negative pressure contraction distortion of bellows, help from smoothly completing leak detection ring during leak detection
Section.
Claims (1)
1. bellows leaks hunting frock, it is characterised in that：Including upper flange cover plate (1) with holes,
Studs (2), bellows (3), hex nut (4), perforated bottom blind plate (5) and
Sealing ring (6)；Sealing ring (6) in the flange sealing trough at bellows (3) two ends,
Perforated bottom blind plate (5) is corresponding with the flange hole position of bellows, by studs (2) and
Hex nut (4) is by perforated bottom blind plate (5), upper flange cover plate with holes (1) and bellows
(3) it is fixedly connected, the interface connection leak detector of upper flange cover plate (1) with holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510712929.1A CN106644277A (en) | 2015-10-28 | 2015-10-28 | Side leakage tool for corrugated pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510712929.1A CN106644277A (en) | 2015-10-28 | 2015-10-28 | Side leakage tool for corrugated pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106644277A true CN106644277A (en) | 2017-05-10 |
Family
ID=58815033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510712929.1A Pending CN106644277A (en) | 2015-10-28 | 2015-10-28 | Side leakage tool for corrugated pipe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106644277A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107461563A (en) * | 2017-08-11 | 2017-12-12 | 广东省特种设备检测研究院珠海检测院 | A kind of bellows expansion joint detection means and method |
| CN108788616A (en) * | 2018-06-27 | 2018-11-13 | 中船澄西船舶修造有限公司 | A kind of piping leans on die craft equipment |
| CN109667930A (en) * | 2018-12-21 | 2019-04-23 | 中国船舶重工集团公司第七0七研究所 | A kind of liquid floats the air-tightness device of inertia type instrument |
| CN109813176A (en) * | 2019-01-25 | 2019-05-28 | 江苏通盛换热器有限公司 | A kind of leak detection tool equipment of heat exchanger |
-
2015
- 2015-10-28 CN CN201510712929.1A patent/CN106644277A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107461563A (en) * | 2017-08-11 | 2017-12-12 | 广东省特种设备检测研究院珠海检测院 | A kind of bellows expansion joint detection means and method |
| CN108788616A (en) * | 2018-06-27 | 2018-11-13 | 中船澄西船舶修造有限公司 | A kind of piping leans on die craft equipment |
| CN108788616B (en) * | 2018-06-27 | 2024-03-19 | 中船澄西船舶修造有限公司 | Piping profiling tool |
| CN109667930A (en) * | 2018-12-21 | 2019-04-23 | 中国船舶重工集团公司第七0七研究所 | A kind of liquid floats the air-tightness device of inertia type instrument |
| CN109813176A (en) * | 2019-01-25 | 2019-05-28 | 江苏通盛换热器有限公司 | A kind of leak detection tool equipment of heat exchanger |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170510 |
|
| WD01 | Invention patent application deemed withdrawn after publication |