CN204924574U - Sealing performance checking machine constructs for semiconductor device - Google Patents

Abstract

Sealing performance inspection mechanism for semiconductor equipment, which mainly includes upper flange cover plate, double-ended stud, bottom blind plate and sealing ring, etc. When in use, the double-headed studs are respectively inserted into the flange holes of the bellows, and the bellows are fixed with hexagonal nuts so that the bellows are in a state of natural length, which avoids the negative pressure shrinkage and deformation of the bellows when pumping air, and damages the bellows itself. To protect the effect, install the sealing ring in the flange sealing groove at both ends of the bellows, then press it on the bottom blind plate, then press the upper flange cover on the upper flange of the bellows, and finally press it on the upper flange The interface of the cover plate is connected to a leak detector for pumping and leak detection operations, and the vacuum degree of the bellows detected by the leak detector is recorded, and finally it is judged whether the sealing performance of the bellows is qualified. This mechanism is suitable for welding bellows with flanges of any shape, such as circular, oval, triangular, etc., and has versatility. It effectively improves the reliability of leak detection, reduces the time of leak detection, and eliminates the possibility of leaks in the bellows at the same time, and improves the total production capacity of the equipment in a deeper sense.

Description

Sealing performance inspection mechanism for semiconductor equipment

technical field

The utility model relates to a sealing performance testing mechanism for semiconductor equipment, which is mainly used in the process of testing the sealing performance of bellows and belongs to the application technical field of semiconductor thin film equipment.

Background technique

Bellows are often used in semiconductor coating equipment to realize the lifting function of certain components, and at the same time realize the interchange between the atmosphere and vacuum environment, so it is necessary to ensure that the sealing performance of the bellows meets the requirements of the equipment. In addition, before the bellows is installed in the equipment, if the sealing performance is not tested, uncertain factors may be added, and the leak rate may be unqualified, which will increase the leak detection time of the equipment and the replacement and assembly time of parts. Therefore, this inspection tool is designed to reduce the leak detection time of the equipment and the time for replacing parts, and at the same time improve the reliability of the equipment.

Contents of the invention

In order to solve the above problems, the utility model designs a bellows sealing performance inspection tooling structure, which effectively improves the reliability of leak detection, reduces the time for leak detection, and eliminates the possibility of leaks in the bellows at the same time.

In order to achieve the above purpose, the utility model adopts the following technical solution: a sealing performance inspection mechanism for semiconductor equipment, including: an upper flange cover plate. The upper flange cover plate is fixedly connected with the bottom blind plate through a stud stud provided with a hexagonal nut; the flange sealing grooves at both ends of the upper flange cover plate and the bottom blind plate are respectively installed There is a sealing ring; the upper flange cover plate is concentric with the bottom blind plate, and a bellows is installed on it.

When in use, insert three double-headed studs into the flange holes of the bellows, fix the bellows with hexagonal nuts to keep the bellows in a state of natural length, install the sealing rings in the flange sealing grooves at both ends of the bellows, and then Press on the bottom blind plate, then press the above-mentioned flange cover plate on the upper flange of the bellows, and finally connect a leak detector at the interface of the upper flange cover plate to perform air extraction and leak detection operations.

The beneficial effects and characteristics of the utility model are:

1. The structure is reasonable, the natural length of the bellows is guaranteed by nuts and studs, which avoids the negative pressure shrinkage and deformation of the bellows when pumping air, and protects the bellows itself;

2. It has a wide range of applications. This design is not only suitable for welding bellows with circular flanges, but also suitable for welding bellows with flanges of any shape such as elliptical and triangular. It has versatility;

3. The structure of this mechanism is small and simple, and it is easy to disassemble, which improves the leak detection efficiency of the bellows.

Description of drawings

Fig. 1 is a structural representation of the utility model.

Fig. 2 is a sectional view of A-A of Fig. 1 .

Detailed ways

Example

Referring to FIG. 1 and FIG. 2 , the sealing performance inspection mechanism for semiconductor equipment includes: an upper flange cover plate 1 .

The upper flange cover plate 1 is fixedly connected with the bottom blind plate 5 through a stud 2 provided with a hex nut 4;

Sealing rings 6 are installed at the joints between the flange sealing grooves at both ends of the upper flange cover plate 1 and the bottom blind plate 5 and the studs 2;

The upper flange cover plate is concentric with the bottom blind plate 5, on which the bellows 3 is installed;

There are at least three studs 2 .

Wipe or clean all parts before use to ensure the sealing effect.

When in use, three double-headed studs 2 are respectively inserted into the flange holes of the bellows 3, and fixed with hex nuts 4 so that the bellows 3 is in a state of natural length, which avoids the negative pressure shrinkage deformation of the bellows when pumping air , to protect the bellows itself, and then install the sealing ring 6 in the flange sealing groove at both ends of the bellows 3, and then press it on the bottom blind plate 5, and then press the upper flange cover 1 on the bellows 3 on the upper flange of the upper flange, and finally connect the leak detector 7 at the interface of the upper flange cover plate 1 to carry out pumping and leak detection operations, record the vacuum degree result of the bellows detected by the leak detector, and finally determine whether the sealing performance of the bellows is qualified. This design is suitable for welding bellows with flanges of any shape such as circular, elliptical, and triangular, and has versatility. This tooling structure effectively improves the reliability of leak detection, reduces the time for leak detection, and at the same time eliminates the possibility of leaks in the bellows, and improves the total production capacity of the equipment in a deeper sense.

Claims (3)

1. semiconductor equipment sealing property inspection body, it comprises upper flange cover plate, it is characterized in that: described upper flange cover plate is fixedly connected with bottom blind flange by the studs being provided with hexagonal nut; O-ring seal is equipped with respectively in flange sealing trough and the studs junction at described upper flange cover plate and bottom blind flange two ends; Described upper flange cover plate is concentric with bottom blind flange, and it installs corrugated tube.

2. semiconductor equipment sealing property inspection body as claimed in claim 1, is characterized in that: studs at least establishes 3.

3. semiconductor equipment sealing property inspection body as claimed in claim 1, it is characterized in that its concrete structure: in the flange hole position of corrugated tube, penetrate three studs respectively, corrugated tube is fixedly made to be in natural length state with hexagonal nut, again O-ring seal is arranged in the flange sealing trough at corrugated tube two ends, then be pressed on bottom blind flange, again upper flange cover plate is pressed on the upper flange of corrugated tube, finally connect leak locator at the interface of upper flange cover plate and carry out leak detection operation of bleeding, the vacuum tightness result of the corrugated tube that record leak locator detects, finally judge that whether the sealing property of corrugated tube is qualified, it is circular that the design is applicable to welding, the corrugated tube of ellipse or triangle flange.