CN209526666U - Linear micro machine - Google Patents
Linear micro machine Download PDFInfo
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- CN209526666U CN209526666U CN201920204637.0U CN201920204637U CN209526666U CN 209526666 U CN209526666 U CN 209526666U CN 201920204637 U CN201920204637 U CN 201920204637U CN 209526666 U CN209526666 U CN 209526666U
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- Prior art keywords
- mover
- sliding rail
- micro machine
- linear micro
- machine according
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Abstract
The utility model relates to a kind of linear micro machines, the linear micro machine includes: substrate, and sliding rail is provided in the substrate, and the sliding rail has opposite first surface and second surface, the first surface is bonded with the substrate, and the second surface is with atomically flat and even curface；Mover, the mover are arranged on the sliding rail, are atomic contacts between the mover and the contact surface and the second surface of sliding rail cooperation, the mover is configured as sliding on the second surface；Stator, two stators be arranged in the mover linearly on two sides, the stator is configured as and the sliding rail and the mover insulate.One effect of the utility model is, reduces frictional force when mover and sliding rail slide in linear micro machine, significantly improves the service life of linear motor.
Description
Technical field
The utility model relates to the technical fields of the motor by static-electronic driving, more specifically, the utility model relates to one
The linear micro machine of kind.
Background technique
Micro machine is a kind of important actuator, can convert electrical signals into mechanical movement, it is in MEMS
It plays an important role, can be used for driving Hinge mechanism, it can also be used to the driving etc. of micro mirror.Electrostatic drive micro machine is due to knot
The advantages that structure is simple, be easy to make, be low in energy consumption, good compatibility and be widely used.
In the prior art, in order to reduce the frictional force in motor between mover and sliding rail, the wear-resistant of slip flow regime is improved
Ability obtains the straight line micro machine of energy long-term work.Those skilled in the art propose a series of methods for reducing friction, such as subtract
Contact area between few mover and sliding rail, using silicon and silicon nitride as the line that friction is secondary or design structure is increasingly complex
Property micro machine.But on the one hand these modes are unfavorable for producing in batches there is many defects, on the other hand strongly limit straight
The range of line micro machine.
Therefore, it is necessary to a kind of novel straight line micro machine be proposed, to overcome drawbacks described above.
Utility model content
One purpose of the utility model is to provide a kind of new technical solution of linear micro machine.
One aspect according to the present utility model provides a kind of linear micro machine, the linear micro machine, comprising:
Substrate, is provided with sliding rail in the substrate, and the sliding rail has an opposite first surface and second surface, and described the
One surface is bonded with the substrate, and the second surface is with atomically flat and even curface；
Mover, the mover are arranged on the sliding rail, the contact surface of the mover and sliding rail cooperation and described the
It is atomic contacts between two surfaces, the mover is configured as sliding on the second surface；
Stator, two stators be arranged in the mover linearly on two sides, the stator be configured as with
The sliding rail and mover insulation.
Optionally, the material of the sliding rail is the material that interlayer has Van der Waals interaction power.
Optionally, the area of the mover and the contact surface of sliding rail cooperation is equal to the mover towards the sliding rail
Area.
Optionally, the material of the sliding rail and the mover be graphite, graphene, boron nitride, transition metal dichalcogenide,
Any two kinds in black phosphorus or silene.
Optionally, the atomically flat and even curface are the coating being made of Van der Waals stratified material.
Optionally, the length of the sliding rail is equal to the linear distance between two stators.
Optionally, the shape of the contact surface is one of round, ellipse or polygon.
Second aspect according to the present utility model provides a kind of linear micro machine, the linear micro machine, comprising:
Substrate is provided with multiple electrodes in the substrate, and the arrangement that multiple electrodes are successively spaced is on the substrate；
Sliding rail, the sliding rail are arranged on multiple electrodes, and the sliding rail has opposite first surface and the second table
Face, the first surface are bonded with the electrode, and the second surface is with atomically flat and even curface；
Mover group, for the mover group by two mover monomer compositions, interval between described two mover monomers is certain
Distance is atomic contacts between the mover group and the contact surface and the second surface of sliding rail cooperation, the mover group
It is configured as sliding on the second surface.
Optionally, the material of the sliding rail is the material that interlayer has Van der Waals interaction power.
Optionally, the material of the sliding rail and the mover monomer is graphite, graphene, boron nitride, two sulphur of transition metal
Any two kinds in compound, black phosphorus or silene.
Optionally, the atomically flat and even curface are the coating being made of Van der Waals stratified material.
Optionally, the mover group further include: bridge connector, the bridge connector are configured as making between two mover monomers
Every a certain distance, the distance is less than the width of the electrode.
One of the utility model has technical effect that, mover and the mutually matched contact surface of sliding rail are atomic contacts, two
Super lubricating status is presented between a contact surface, can be reduced the coefficient of friction in linear motor between stator and sliding rail in this way,
The service life of linear motor can also be significantly improved while reducing friction, reducing and wear.
By the detailed description referring to the drawings to the exemplary embodiment of the utility model, the utility model it is other
Feature and its advantage will become apparent.
Detailed description of the invention
The attached drawing for constituting part of specification describes the embodiments of the present invention, and uses together with the description
In explanation the principles of the present invention.
Fig. 1 is the structural schematic diagram of linear micro machine provided by the utility model；
Fig. 2 is the schematic top plan view of linear micro machine provided by the utility model；
Fig. 3 is the structural schematic diagram of another linear micro machine provided by the utility model；
Fig. 4 is the schematic top plan view of another linear micro machine provided by the utility model.
Specific embodiment
The various exemplary embodiments of the utility model are described in detail now with reference to attached drawing.It should also be noted that unless another
It illustrates outside, the component and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments is unlimited
The scope of the utility model processed.
Be to the description only actually of at least one exemplary embodiment below it is illustrative, never as to this is practical
Novel and its application or any restrictions used.
Technology and equipment known to person of ordinary skill in the relevant may be not discussed in detail, but in appropriate situation
Under, the technology and equipment should be considered as part of specification.
It is shown here and discuss all examples in, any occurrence should be construed as merely illustratively, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, then in subsequent attached drawing does not need that it is further discussed.
Fig. 1 is the structural schematic diagram of linear micro machine provided by the utility model, and Fig. 2 is provided by the utility model linear
The schematic top plan view of micro machine, Fig. 3 are the structural schematic diagrams of another linear micro machine provided by the utility model, and Fig. 4 is this reality
With the schematic top plan view of another linear micro machine of novel offer.It is linearly micro- to the utility model now by taking Fig. 1 to Fig. 4 as an example
Structure, principle of motor etc. are described in detail.
The utility model provides a kind of linear micro machine, which includes: substrate 10, sliding rail 20, mover 30, determines
The components such as son 40.As shown in Figure 1, being provided with sliding rail 20 in the substrate 10, the sliding rail 20 has opposite first surface 21
With second surface 22, the first surface 21 is bonded with the substrate 10, the second surface 22 be with atomically flat and
Even curface.Wherein, the second surface 22 of sliding rail 20 can be by constituting what coating was formed with atom level stratified material,
It can use and realized by the atomically flat material with low friction, the present embodiment is without limitation.
Particularly, the mover 30 is arranged on the sliding rail 20, what the mover 30 was used to cooperate with the sliding rail 20
It is atomic contacts between contact surface and the second surface 22.In this way, when mover is when the second surface slides, mover and institute
Stating the atomic contacts between sliding rail can make the two in super lubricating status, i.e., the surface of two atomically flatings is parallel to each other,
There is no other impurities between two bed boundarys, frictional force is almost nil, and no abrasion or only small abrasion exist.
Further, two stators 40 be arranged in the mover 30 linearly on two sides.Such as Fig. 1 and Fig. 2
Shown in embodiment, the mover 30 linear slide between two stators 40, when the mover 30 and the cunning
Rail 20 connects power cathode, and one of stator 40 connects positive pole, and when another stator 40 connects power cathode, mover 30 will be in electricity
Reciprocal linear motion is done between two stators 40 under the action of field force；By adjusting the driving voltage on stator 40
Change the position of stator stop on the slide rail.
Linear micro machine provided by the utility model, mover and the mutually matched contact surface of sliding rail be atomic contacts, i.e., two
Super lubricating status is presented between a contact surface, can be reduced the coefficient of friction in linear motor between stator and sliding rail in this way,
The service life of linear motor can also be significantly improved while reducing friction, reducing and wear.
Optionally, the material of the sliding rail is the material that interlayer has Van der Waals interaction power.Due to mover with it is described
It is atomic contacts between the contact surface and the second surface of sliding rail cooperation, this atomic contacts are heterogeneous Van der Waals stratified materials
Between sliding, can make that super lubricating status is presented between two contact surfaces, effectively reduce movement portion in linear micro machine
Coefficient of friction between part.
In the present embodiment, the area of the mover 30 and the contact surface of the sliding rail 20 cooperation is equal to 30 direction of mover
The area of the sliding rail 20.When the mover slides on the sliding rail, relied between mover and two contact surfaces of sliding rail
This model ylid bloom action power, when moving mover on the slide rail, the area of the contact surface of mover and sliding rail cooperation is equal to institute
State area of the mover towards the sliding rail.When the contact area between the mover and the sliding rail is less than mover towards the cunning
When the area of rail, the model ylid bloom action power between mover and sliding rail is F=-C dA/dx, wherein C is Van der Waals coefficient, and A is to connect
Contacting surface product, x are the displacement of glide direction.I.e. under the constraint of model ylid bloom action power, mover is remained to be connect with what sliding rail cooperated
Contacting surface product is equal to area of the mover towards the sliding rail.
There are many type of Van der Waals stratified material, and optionally, the material of the sliding rail and the mover is graphite, graphite
Any two kinds in alkene, boron nitride, transition metal dichalcogenide, black phosphorus or silene.
It will be appreciated by those skilled in the art that, identical Van der Waals stratified material since structure is similar, it is possible that
It spends contact together, is i.e. is mutually twisted between two interfaces, frictional force increases.Sliding rail in the linear micro machine of the utility model and dynamic
Son is made of any two kinds in above-mentioned material, can guarantee component contact or sliding when it is required it is non-spend contact together, from
And realize the ultralow friction coefficient of sliding interface, to reduce micro machine caused abrasion in high-speed slide.Meanwhile heterogeneous model
The coating that moral China stratified material is constituted can also be to avoid the generation of corona discharge phenomenon.
Alternatively, the atomically flat and even curface is the coating being made of Van der Waals stratified material, this coating
It is atomic contacts between the contact surface and the second surface that mover and the sliding rail can equally cooperated, to realize reduction
The effect of friction.
As depicted in figs. 1 and 2, the both ends of sliding rail 20 are arranged in two stators 40, and the length of the sliding rail 20 is equal to two
Linear distance between the stator 40, i.e., the described mover 30 do reciprocal linear motion on the sliding rail 20.Change two
Driving voltage on stator is the position of changeable stator stop on the slide rail.
Optionally, the shape of the contact surface is one of round, ellipse or polygon.That is mover and sliding rail connects
The atomic contacts that the surface of touching is realized by heterogeneous Van der Waals stratified material, it is this it is non-be under super lubricating status when spending contact together,
Frictional force during contact movement is almost nil, and rotor and shape, the area of sliding rail contact surface etc. will not influence linear micro-
The friction or abrasion of component in motor, those skilled in the art can be freely arranged as needed.
As shown in Figure 1, being additionally provided with insulating layer 31 between the stator 40 and the sliding rail 20, the material of insulating layer 31 is
Boron nitride, insulating layer 31 can be connected between anti-anti-slip track 20 and stator 40.
The another aspect of the utility model also provides a kind of linear micro machine, which includes: substrate 50, electrode
60, sliding rail 70, mover group 80 etc..Multiple electrodes 60, the row that multiple electrodes 60 are successively spaced are provided in the substrate 50
Cloth is in the substrate 50.As shown in Figure 3 and Figure 4, equal distance is spaced between two neighboring electrode 60.The sliding rail 70 is set
It sets on multiple electrodes 60, the sliding rail 70 has opposite first surface 71 and second surface 72, the first surface
71 are bonded with the electrode 60, and the second surface 72 is with atomically flat and even curface.Wherein, the of sliding rail 70
Two surfaces 72 can be by constituting what coating was formed with atom level stratified material, also can use by the atom with low friction
Grade lubricious material realizes that the present embodiment is without limitation.
Particularly, the mover group 80 is made of two mover monomers 81, the spacing between described two mover monomers 81
It is that atom connects between the contact surface and the second surface 72 that a certain distance, the mover group 80 and the sliding rail 70 cooperate
Touching, the mover group 80 are configured as sliding on the second surface 72.In this way, when mover group 80 is in the second surface 72
When sliding, the atomic contacts between mover group 80 and the sliding rail 70 can make the two in super lubricating status, i.e. two atoms
Grade even curface is parallel to each other, and does not have other impurities between two bed boundarys, and frictional force is almost nil, no abrasion or only micro-
Small abrasion exists.
Multiple electrodes 60 are arranged in the substrate 50, and three adjacent electrodes 60 constitute one group.When to an electrode 60
When energization, capacitor, the trend that electrostatic force becomes maximum capacitor i.e. electrode and mover are formed between mover monomer 81 and electrode 60
Monomer positive area is maximum.By planting to alternate energisation between the multiple electrodes of mover group face, mover group can be driven in sliding rail
Upper movement.Atomic contacts between mover group and the sliding rail can make the two in super lubricating status, i.e. two atom levels are flat
Whole surface is parallel to each other, and does not have other impurities between two bed boundarys, and frictional force is almost nil, no abrasion or only small
Abrasion exists.
Linear micro machine provided by the utility model, mover group and the mutually matched contact surface of sliding rail are atomic contacts, i.e.,
Super lubricating status is presented between two contact surfaces, can be reduced the friction in linear micro machine between mover group and sliding rail in this way
Coefficient can also significantly improve the service life of linear motor while reducing friction, reducing and wear.
Optionally, the material of the sliding rail is the material that interlayer has Van der Waals interaction power.Due to mover with it is described
It is atomic contacts between the contact surface and the second surface of sliding rail cooperation, this atomic contacts are heterogeneous Van der Waals stratified materials
Between sliding, can make that super lubricating status is presented between two contact surfaces, effectively reduce movement portion in linear micro machine
Coefficient of friction between part.
There are many type of Van der Waals stratified material, and optionally, the material of the sliding rail and the mover monomer is graphite, stone
Any two kinds in black alkene, boron nitride, transition metal dichalcogenide, black phosphorus or silene.
It will be appreciated by those skilled in the art that, identical Van der Waals stratified material since structure is similar, it is possible that
It spends contact together, is i.e. is mutually twisted between two interfaces, frictional force increases.Sliding rail in the linear micro machine of the utility model and dynamic
Sub- monomer is made of any two kinds in above-mentioned material, can guarantee that required non-spend together connects when component contact or sliding
Touching, so that the ultralow friction coefficient of sliding interface is realized, to reduce micro machine caused abrasion in high-speed slide.Meanwhile it is different
The coating that the Van der Waals stratified material of matter is constituted can also be to avoid the generation of corona discharge phenomenon.
Alternatively, the atomically flat and even curface is the coating being made of Van der Waals stratified material, this coating
It is atomic contacts between the contact surface and the second surface that mover and the sliding rail can equally cooperated, to realize reduction
The effect of friction.
In embodiment as shown in Figure 3 and Figure 4, the mover group 80 further includes bridge connector 82,82 quilt of bridge connector
It is configured to be spaced a distance two mover monomers 81, the distance is less than the width of the electrode.By to more
Alternate energisation between a electrode, so that the mover monomer slided on the slide rail can remain under Van der Waals interaction power
The maximum of mover monomer and sliding rail contact area.
Although being described in detail by some specific embodiments of the example to the utility model, this field
It is to be understood by the skilled artisans that above example merely to be illustrated, rather than in order to limit the scope of the utility model.This
Field it is to be understood by the skilled artisans that can not depart from the scope of the utility model and spirit in the case where, to above embodiments
It modifies.The scope of the utility model is defined by the following claims.
Claims (12)
1. a kind of linear micro machine characterized by comprising
Substrate, sliding rail is provided in the substrate, and the sliding rail has opposite first surface and second surface, first table
Face is bonded with the substrate, and the second surface is with atomically flat and even curface；
Mover, the mover are arranged on the sliding rail, the contact surface and second table of the mover and sliding rail cooperation
It is atomic contacts between face, the mover is configured as sliding on the second surface；
Stator, two stators be arranged in the mover linearly on two sides, the stator be configured as with it is described
Sliding rail and mover insulation.
2. linear micro machine according to claim 1, which is characterized in that the material of the sliding rail is that interlayer has Van der Waals
The material of interaction force.
3. linear micro machine according to claim 1, which is characterized in that the contact surface of the mover and sliding rail cooperation
Area be equal to area of the mover towards the sliding rail.
4. linear micro machine according to claim 2, which is characterized in that the material of the sliding rail and the mover is stone
Any two kinds in ink, graphene, boron nitride, transition metal dichalcogenide, black phosphorus or silene.
5. linear micro machine according to claim 1, which is characterized in that the atomically flat and even curface be by
The coating that Van der Waals stratified material is constituted.
6. linear micro machine according to claim 1, which is characterized in that the length of the sliding rail is equal to two stators
Between linear distance.
7. linear micro machine according to claim 1, which is characterized in that the shape of the contact surface is round, ellipse
Or one of polygon.
8. a kind of linear micro machine characterized by comprising
Substrate is provided with multiple electrodes in the substrate, and the arrangement that multiple electrodes are successively spaced is on the substrate；
Sliding rail, the sliding rail are arranged on multiple electrodes, and the sliding rail has opposite first surface and second surface, institute
It states first surface to be bonded with the electrode, the second surface is with atomically flat and even curface；
Mover group, the mover group is by two mover monomer compositions, being spaced a distance between described two mover monomers,
It is atomic contacts between the mover group and the contact surface and the second surface of sliding rail cooperation, the mover group is configured
To be slided on the second surface.
9. linear micro machine according to claim 8, which is characterized in that the material of the sliding rail is that interlayer has Van der Waals
The material of interaction force.
10. linear micro machine according to claim 9, which is characterized in that the material of the sliding rail and the mover monomer
It is any two kinds in graphite, graphene, boron nitride, transition metal dichalcogenide, black phosphorus or silene.
11. linear micro machine according to claim 8, which is characterized in that the atomically flat and even curface is
The coating being made of Van der Waals stratified material.
12. linear micro machine according to claim 8, which is characterized in that the mover group further include: bridge connector, it is described
Bridge connector is configured as being spaced a distance two mover monomers, and the distance is less than the width of the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920204637.0U CN209526666U (en) | 2019-02-15 | 2019-02-15 | Linear micro machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920204637.0U CN209526666U (en) | 2019-02-15 | 2019-02-15 | Linear micro machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209526666U true CN209526666U (en) | 2019-10-22 |
Family
ID=68230665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920204637.0U Expired - Fee Related CN209526666U (en) | 2019-02-15 | 2019-02-15 | Linear micro machine |
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| Country | Link |
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| CN (1) | CN209526666U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111817497A (en) * | 2020-07-10 | 2020-10-23 | 深圳市汇顶科技股份有限公司 | Control device and movement mechanism |
-
2019
- 2019-02-15 CN CN201920204637.0U patent/CN209526666U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111817497A (en) * | 2020-07-10 | 2020-10-23 | 深圳市汇顶科技股份有限公司 | Control device and movement mechanism |
| CN111817497B (en) * | 2020-07-10 | 2022-01-21 | 深圳市汇顶科技股份有限公司 | Control device and movement mechanism |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191022 Termination date: 20200215 |
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| CF01 | Termination of patent right due to non-payment of annual fee |