CN209515620U - A kind of groove body supporting mechanism - Google Patents
A kind of groove body supporting mechanism Download PDFInfo
- Publication number
- CN209515620U CN209515620U CN201920514503.9U CN201920514503U CN209515620U CN 209515620 U CN209515620 U CN 209515620U CN 201920514503 U CN201920514503 U CN 201920514503U CN 209515620 U CN209515620 U CN 209515620U
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- China
- Prior art keywords
- inside groove
- plate
- groove
- outline border
- supporting block
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Abstract
The utility model discloses a kind of groove body supporting mechanism, including outer groove, left support plate and right support plate are provided on the outer groove inner sidewall, inside groove installation outline border is provided in the outer groove, outer frame bottom is installed through the inside groove and is provided with inside groove, the inside groove installation two side external surface middle position of outline border is symmetrically arranged with No.1 engagement plate and No. two engagement plates, No.1 engagement plate bottom end is equipped with No.1 supporting block, the No.1 supporting block is provided with No. two supporting blocks about inside groove installation outline border symmetric position, is communicated at least one set of quartz ampoule on the inside groove；The utility model overall construction design is close, effectively raise space utilization rate, groove body stability of strutting system is splendid, dust pollution can effectively be prevented, slide damper and lower slider baffle lateral sliding can effectively be prevented, so that it is guaranteed that the stability of inside groove, whole process is simple and fast, operates convenient for staff.
Description
Technical field
The utility model belongs to semiconductor wet process apparatus field, more particularly a kind of groove body supporting mechanism.
Background technique
Semiconductor wet process equipment development is rapid at present, and existing groove body supporting mechanism is unable to satisfy design requirement, needs
Design occupy little space, be completely embedded, the mechanism of stable structure, it is believed that future will be further improved, with meet use
When different demands；
There are certain drawbacks in existing groove body supporting mechanism, unreasonable structural design, connection is not during use
Closely, occupied space is big, and space utilization rate is lower, and groove body support is unstable, is easy by dust pollution, whole operation process compared with
To be cumbersome, make troubles to staff.
Utility model content
In order to overcome above-mentioned technical problem, the purpose of this utility model is to provide a kind of groove body supporting mechanisms, pass through
No.1 supporting block and right support plate are welded as a whole with outer groove, No.1 engagement plate and inside groove installation outline border are welded as a whole,
And be attached No.1 engagement plate and No.1 supporting block with No. two bolts by No.1 bolt, the fixation to inside groove is completed, it is whole
The design of body structure is close, effectively raises space utilization rate, has the function of excellent support inside groove, stability is splendid, energy
It is enough effectively to prevent dust pollution；Inside groove is slided into lower slider baffle along upper limit position block and lower position block by upper slide damper
Inside groove is installed in outline border, and inside groove passes through inside groove installation through-hole and protrudes from the outer frame bottom of inside groove installation, and wherein upper limit position block is under
Limited block can effectively prevent slide damper and lower slider baffle lateral sliding, so that it is guaranteed that the stability of inside groove, entirely
Process is simple and fast, operates convenient for staff.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of groove body supporting mechanism, including outer groove are provided with left support plate and right support plate on the outer groove inner sidewall, institute
It states and is provided with inside groove installation outline border in outer groove, outer frame bottom is installed through the inside groove and is provided with inside groove, the inside groove installation is outer
Two side external surface middle position of frame is symmetrically arranged with No.1 engagement plate and No. two engagement plates, and No.1 engagement plate bottom end is equipped with
No.1 supporting block, the No.1 supporting block are provided with No. two supporting blocks about inside groove installation outline border symmetric position, on the inside groove
It is communicated at least one set of quartz ampoule；
The No.1 engagement plate includes backing plate, right side plate and left plate, and the left plate and right side plate are respectively arranged in pad
Board ends are connected with No.1 bolt and No. two bolts between the backing plate and No.1 supporting block；
Inside groove installation outline border bottom end offers inside groove installation through-hole, installs on the inside groove installation outline border side inner wall
There are two class upper limit position blocks, the inside groove installs outer frame bottom and is equipped with ring baffle, ring baffle and inside groove installation through-hole port
It is tangent, two lower class limit position blocks are installed on the inside groove installation outline border other side inner wall, are equipped on the inside groove lateral wall
Slide damper and lower slider baffle.
As a further solution of the present invention: the length of the distance between upper limit position block described in two groups and upper slide damper
Spend identical, and upper slide damper is tangential between two class upper limit position blocks, the distance between lower position block described in two groups and lower slider
The length of baffle is identical, and lower slider baffle be tangential on two groups described between lower position block, the inside groove passes through upper slide damper
Be slidably mounted in inside groove installation outline border with lower slider baffle fit upper limit position block and lower position block, the width of ring baffle with it is upper
Slide damper and lower slider baffle it is of same size.
As a further solution of the present invention: the upper slide damper and lower slider baffle are symmetrically welded at outside inside groove
On side wall, and inside groove upper port be designed as it is wavy, quartz ampoule described in every group include two water inlet pipes and an outlet pipe, intake
The spout of pipe is arranged horizontal by 45 degree.
As a further solution of the present invention: the shape of the left plate and right side plate is trapezoidal, and left plate
It is welded on right side plate on inside groove installation outline border lateral wall, and left plate and right side plate are symmetrical arranged about backing plate.
As a further solution of the present invention: offering two groups of bolt slots, the backing plate in the No.1 supporting block
It is connect by No.1 bolt with No. two bolt fitted bolt slots with No.1 supporting block.
As a further solution of the present invention: the left support plate and right support plate vertical plane with outer groove inner sidewall
Welding, and the shape of left support plate and right support plate be it is trapezoidal, the No.1 supporting block and No. two supporting block end faces are and outside
The welding of slot inner sidewall, and left support plate and right support plate are symmetrical arranged, the quantity of the left support plate and right support plate is two
Group, two groups of left support plates are symmetrically welded at No.1 supporting block bottom end, and two groups of right support plates are symmetrically welded at No. two supporting block bottom ends.
As a further solution of the present invention: the inside groove matches with inside groove installation through-hole, the ring baffle
With upper slide damper and lower slider baffle fit.
As a further solution of the present invention: three groups side by side the quartz ampoule be connected to inside groove, another group of quartz ampoule
It is connected to through inside groove installation outline border side wall with inside groove.
The utility model has the beneficial effects that
1, by being provided with four groups of supporting mechanisms, supporting mechanism includes right support plate, No.1 supporting block and No.1 engagement plate,
By the way that No.1 supporting block and right support plate are welded as a whole with outer groove, No.1 engagement plate and inside groove installation outline border are welded as one
Body, and be attached No.1 engagement plate and No.1 supporting block with No. two bolts by No.1 bolt, complete the group of supporting mechanism
Dress is completed at the same time the fixation to inside groove, and four groups of supporting mechanisms are distributed in corner location on the inside of outer groove, and it is welded as one with outer groove
The shape of body, left support plate and right support plate is designed as trapezoidal, and structure design is close, maintains the stabilization of inside groove, reduces and occupies
Space effectively raises space utilization rate, has the function of excellent support inside groove, and stability is splendid, while inside groove is installed
Outline border can effectively prevent dust pollution by being installed in outer groove.
2, inside groove is slided into outside inside groove installation by upper slide damper and lower slider baffle along upper limit position block and lower position block
In frame, and inside groove passes through inside groove installation through-hole and protrudes from the outer frame bottom of inside groove installation, ring baffle and upper slide damper and downslide
Dynamic baffle is tangent, and wherein upper limit position block can effectively prevent upper slide damper from laterally sliding with lower slider baffle with lower position block
Dynamic, so that it is guaranteed that the stability of inside groove, whole process is simple and fast, operates convenient for staff.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the schematic diagram of internal structure of outer groove in the utility model.
Fig. 2 is the external structure schematic diagram of inside groove installation outline border in the utility model.
Fig. 3 is the side view of Fig. 2 in the utility model.
Fig. 4 is that No.1 supporting block and No.1 engagement plate are connected schematic diagram in the utility model.
Fig. 5 is the schematic diagram of internal structure of inside groove installation outline border in the utility model.
Fig. 6 is the scheme of installation of inside groove in the utility model.
1, outer groove in figure；2, left support plate；3, right support plate；4, inside groove installs outline border；5, inside groove；6, No.1 engagement plate；
7, No. two engagement plates；8, No.1 supporting block；9, No.1 bolt；10, No. two supporting blocks；11, quartz ampoule；13, No. two bolts；14,
Right side plate；15, backing plate；16, left plate；17, inside groove installation through-hole；18, upper limit position block；19, lower position block；20, upper sliding gear
Plate；21, lower slider baffle；22, ring baffle.
Specific embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, fall within the protection scope of the utility model.
As shown in figures 1 to 6, a kind of groove body supporting mechanism, including outer groove 1 are provided with left support on 1 inner sidewall of outer groove
Plate 2 and right support plate 3 are provided with inside groove installation outline border 4 in the outer groove 1, are provided with through inside groove installation 4 bottom of outline border
Inside groove 5, the inside groove installation 4 liang of side external surface middle positions of outline border are symmetrically arranged with No.1 engagement plate 6 and No. two engagement plates 7,
6 bottom end of No.1 engagement plate is equipped with No.1 supporting block 8, and the No.1 supporting block 8 installs 4 symmetric position of outline border about inside groove
No. two supporting blocks 10 are provided with, at least one set of quartz ampoule 11 is communicated on the inside groove 5；
The No.1 engagement plate 6 includes backing plate 15, right side plate 14 and left plate 16, and the left plate 16 divides with right side plate 14
It is not installed on 15 both ends of backing plate, No.1 bolt 9 and No. two bolts are connected between the backing plate 15 and No.1 supporting block 8
13；
The inside groove installation 4 bottom end of outline border offers inside groove installation through-hole 17, and the inside groove is installed on 4 side inner wall of outline border
Two class upper limit position blocks 18 are installed, the inside groove installation 4 bottom of outline border is equipped with ring baffle 22, and ring baffle 22 and inside groove are pacified
It is tangent to fill 17 port of through-hole, two lower class limit position blocks 19, the inside groove 5 are installed on inside groove installation 4 other side inner wall of outline border
Slide damper 20 and lower slider baffle 21 are installed on lateral wall.
The distance between upper limit position block 18 described in two groups is identical as the length of upper slide damper 20, and 20 phase of upper slide damper
It being cut between two class upper limit position blocks 18, the distance between lower position block 19 described in two groups is identical as the length of lower slider baffle 21,
And lower slider baffle 21 be tangential on two groups described between lower position block 19, the inside groove 5 passes through upper slide damper 20 and lower slider
Baffle 21 cooperates upper limit position block 18 and lower position block 19 to be slidably mounted in inside groove installation outline border 4, the width of ring baffle 22 with
Upper slide damper 20 and lower slider baffle 21 it is of same size.
The upper slide damper 20 is symmetrically welded on 5 lateral wall of inside groove with lower slider baffle 21, and 5 upper port of inside groove is set
Be calculated as it is wavy, quartz ampoule described in every group include two water inlet pipes and an outlet pipe, the spout of water inlet pipe is horizontal by 45
Degree setting.
The shape of the left plate 16 and right side plate 14 is trapezoidal, and left plate 16 and right side plate 14 are welded on inside groove
It installs on 4 lateral wall of outline border, and left plate 16 and right side plate 14 are symmetrical arranged about backing plate 15.
Two groups of bolt slots are offered in the No.1 supporting block 8, the backing plate 15 passes through No.1 bolt 9 and No. two bolts 13
Fitted bolt slot is connect with No.1 supporting block 8.
The left support plate 2 and 3 vertical plane of right support plate are welded with 1 inner sidewall of outer groove, and left support plate 2 and right support
The shape of plate 3 be it is trapezoidal, the No.1 supporting block 8 and No. two 10 end faces of supporting block are welded with 1 inner sidewall of outer groove, and left branch
Fagging 2 and right support plate 3 are symmetrical arranged, and the quantity of the left support plate 2 and right support plate 3 is two groups, two groups of left support plates 2
It is symmetrically welded at 8 bottom end of No.1 supporting block, two groups of right support plates 3 are symmetrically welded at No. two 10 bottom ends of supporting block, and overall structure is set
Meter is close, effectively raises space utilization rate, has the function of excellent support inside groove 5, and stability is splendid, while inside groove is pacified
Outline border 4 is filled by being installed in outer groove 1, can effectively prevent dust pollution.
The inside groove 5 matches with inside groove installation through-hole 17, the ring baffle 22 and upper slide damper 20 and lower slider
Baffle 21 cooperates, and slide damper 20 and 21 lateral sliding of lower slider baffle can be effectively prevented, so that it is guaranteed that inside groove 5 is steady
Qualitative, whole process is simple and fast, operates convenient for staff.
Three groups side by side the quartz ampoule 11 be connected to inside groove 5, another group of quartz ampoule 11 through inside groove installation 4 side wall of outline border with
Inside groove 5 is connected to.
A kind of groove body supporting mechanism, at work, first by the way that left support plate 2 and 3 vertical plane of right support plate to be welded on
On 1 inner sidewall of outer groove, by No.1 supporting block 8 and No. two 10 end face of supporting block welding on outer 1 inner sidewall of slot, then by two groups of left sides
Support plate 2 and right support plate 3 are respectively welded at No.1 supporting block 8 and No. two 10 bottom end two sides of supporting block, secondly by by No.1
Engagement plate 6 and No. two 7 vertical planes of engagement plate are symmetrically welded inside groove installation 4 lateral wall middle position of outline border, and another vertical plane is logical
It crosses No.1 bolt 9 and No. two 13 fitted bolt slots of bolt is connected in No.1 supporting block 8 and No. two supporting blocks 10, complete to inside groove
The fixation of outline border 4 is installed, overall construction design is close, space utilization rate is effectively raised, with excellent support inside groove 5
Effect, stability is splendid, while inside groove installation outline border 4 can effectively prevent dust pollution, most by being installed in outer groove 1
By installing in inside groove upper slide damper 18 and lower slider baffle 19 are installed on 4 inner sidewall of outline border afterwards, in 5 liang of lateral walls of inside groove
On upper limit position block 20 and lower position block 21 are installed, then by by upper limit position block 20 and lower position block 21 along upper slide damper
18 slide into inside groove installation outline border 4 with lower slider baffle 19, complete the installation of inside groove 5, wherein inside groove 5 passes through inside groove installation through-hole 17
Inside groove installation 4 bottom of outline border is protruded from, wherein upper limit position block 18 and lower position block 19 can effectively prevent slide damper 20
With 21 lateral sliding of lower slider baffle, so that it is guaranteed that the stability of inside groove 5, whole process is simple and fast, grasps convenient for staff
Make.
The utility model includes right support plate, No.1 supporting block and one by being provided with four groups of supporting mechanisms, supporting mechanism
Number engagement plate is installed No.1 engagement plate and inside groove outer by being welded as a whole No.1 supporting block and right support plate with outer groove
Frame is welded as a whole, and is attached No.1 engagement plate and No.1 supporting block with No. two bolts by No.1 bolt, completes branch
The assembling of support mechanism, is completed at the same time the fixation to inside groove, and four groups of supporting mechanisms are distributed in corner location on the inside of outer groove, and its with it is outer
Slot is welded as a whole, and the shape of left support plate and right support plate is designed as trapezoidal, and structure design is close, maintains the steady of inside groove
It is fixed, occupied space is reduced, space utilization rate is effectively raised, has the function of excellent support inside groove, stability is splendid, together
When inside groove installation outline border by being installed in outer groove, can effectively prevent dust pollution；Inside groove is by upper slide damper under
Slide damper slides into inside groove installation outline border along upper limit position block and lower position block, and inside groove passes through inside groove installation through-hole and protrudes from
Inside groove installs outer frame bottom, and ring baffle and upper slide damper and lower slider baffle are tangent, wherein upper limit position block and lower position block
Slide damper and lower slider baffle lateral sliding can be effectively prevented, so that it is guaranteed that the stability of inside groove, whole process letter
It is single quick, it is operated convenient for staff.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the art
Member makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from reality
With novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (8)
1. a kind of groove body supporting mechanism, which is characterized in that including outer groove (1), be provided with left support on outer groove (1) inner sidewall
Plate (2) and right support plate (3), the outer groove (1) is interior to be provided with inside groove installation outline border (4), through inside groove installation outline border (4)
Bottom is provided with inside groove (5), and the inside groove installation (4) two side external surface middle position of outline border is symmetrically arranged with No.1 engagement plate
(6) it is equipped with No.1 supporting block (8) with No. two engagement plates (7), No.1 engagement plate (6) bottom end, the No.1 supporting block (8)
Inside groove installation outline border (4) symmetric position is provided with No. two supporting blocks (10), is communicated at least one set of stone on the inside groove (5)
English pipe (11)；
The No.1 engagement plate (6) includes backing plate (15), right side plate (14) and left plate (16), the left plate (16) and right side
Plate (14) is respectively arranged in backing plate (15) both ends, runs through and is connected with No.1 spiral shell between the backing plate (15) and No.1 supporting block (8)
Bolt (9) and No. two bolts (13)；
Inside groove installation outline border (4) bottom end offers inside groove installation through-hole (17), and the inside groove installs outline border (4) side inner wall
On two class upper limit position blocks (18) are installed, inside groove installation outline border (4) bottom is equipped with ring baffle (22), ring baffle
(22) tangent with inside groove installation through-hole (17) port, two lower class limits are installed on inside groove installation outline border (4) other side inner wall
Position block (19) is equipped with slide damper (20) and lower slider baffle (21) on inside groove (5) lateral wall.
2. a kind of groove body supporting mechanism according to claim 1, which is characterized in that between upper limit position block described in two groups (18)
Distance it is identical as the length of upper slide damper (20), and upper slide damper (20) is tangential between two class upper limit position blocks (18),
The distance between lower position block described in two groups (19) is identical as the length of lower slider baffle (21), and lower slider baffle (21) is tangent
Between the lower position block (19) described in two groups, the inside groove (5) passes through upper slide damper (20) and lower slider baffle (21) and cooperates
Upper limit position block (18) and lower position block (19) are slidably mounted in inside groove installation outline border (4), the width of ring baffle (22) with it is upper
Slide damper (20) and lower slider baffle (21) it is of same size.
3. a kind of groove body supporting mechanism according to claim 1, which is characterized in that the upper slide damper (20) and downslide
Dynamic baffle (21) are symmetrically welded on inside groove (5) lateral wall, and inside groove (5) upper port is designed as wavy, quartz described in every group
Managing (11) includes two water inlet pipes and an outlet pipe, and the spout of water inlet pipe is arranged horizontal by 45 degree.
4. a kind of groove body supporting mechanism according to claim 1, which is characterized in that the left plate (16) and right side plate
(14) shape is trapezoidal, and left plate (16) and right side plate (14) are welded on inside groove installation outline border (4) lateral wall, and
Left plate (16) and right side plate (14) are symmetrical arranged about backing plate (15).
5. a kind of groove body supporting mechanism according to claim 1, which is characterized in that opened up on the No.1 supporting block (8)
There are two groups of bolt slots, the backing plate (15) passes through No.1 bolt (9) and No. two bolt (13) fitted bolt slots and No.1 supporting block
(8) it connects.
6. a kind of groove body supporting mechanism according to claim 1, which is characterized in that the left support plate (2) and right support
Plate (3) vertical plane is welded with outer groove (1) inner sidewall, and the shape of left support plate (2) and right support plate (3) is trapezoidal, institute
It states No.1 supporting block (8) and No. two supporting block (10) end faces to weld with outer groove (1) inner sidewall, and left support plate (2) and right branch
Fagging (3) is symmetrical arranged, and the quantity of the left support plate (2) and right support plate (3) is two groups, and two groups of left support plates (2) are right
Title is welded on No.1 supporting block (8) bottom end, and two groups of right support plates (3) are symmetrically welded at No. two supporting block (10) bottom ends.
7. a kind of groove body supporting mechanism according to claim 1, which is characterized in that the inside groove (5) and inside groove installation are logical
Hole (17) matches, and the ring baffle (22) and upper slide damper (20) and lower slider baffle (21) cooperate.
8. a kind of groove body supporting mechanism according to claim 1, which is characterized in that three groups side by side the quartz ampoule (11) with
Inside groove (5) connection, another group of quartz ampoule (11) are connected to through inside groove installation outline border (4) side wall with inside groove (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920514503.9U CN209515620U (en) | 2019-04-16 | 2019-04-16 | A kind of groove body supporting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920514503.9U CN209515620U (en) | 2019-04-16 | 2019-04-16 | A kind of groove body supporting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209515620U true CN209515620U (en) | 2019-10-18 |
Family
ID=68188461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920514503.9U Expired - Fee Related CN209515620U (en) | 2019-04-16 | 2019-04-16 | A kind of groove body supporting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209515620U (en) |
-
2019
- 2019-04-16 CN CN201920514503.9U patent/CN209515620U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 Termination date: 20210416 |
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| CF01 | Termination of patent right due to non-payment of annual fee |