CN209512725U - A kind of measuring device - Google Patents
A kind of measuring device Download PDFInfo
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- CN209512725U CN209512725U CN201822270358.2U CN201822270358U CN209512725U CN 209512725 U CN209512725 U CN 209512725U CN 201822270358 U CN201822270358 U CN 201822270358U CN 209512725 U CN209512725 U CN 209512725U
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- Prior art keywords
- sliding block
- guide rail
- regulating mechanism
- measuring appliance
- regulating
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- 230000001105 regulatory effect Effects 0.000 claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 62
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000014759 maintenance of location Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 30
- 238000012797 qualification Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The utility model discloses a kind of measuring devices, comprising: pedestal, regulating device and measuring appliance, wherein, the pedestal is equipped with the support portion for being used to support object to be measured, the measuring appliance is mounted on the pedestal by the regulating device, the regulating device includes the first regulating mechanism, second regulating mechanism and third regulating mechanism, first regulating mechanism is for driving the measuring appliance to move along the x axis, second regulating mechanism is for driving the measuring appliance to move along the y axis, the third regulating mechanism is for adjusting the measuring appliance in the height of Z-direction, to measure the size of object to be measured by the measuring appliance.The measuring device of the utility model embodiment, structure is simple, easy to operate, can be avoided because the mode of operation of survey crew interferes measurement result with qualification difference, the accuracy of measurement is higher, additionally it is possible to avoid because of survey crew's careless manipulation damaging caused by object to be measured.
Description
Technical field
The utility model relates to measuring instrument technical field more particularly to a kind of measuring devices.
Background technique
Target is sputtered under appropriate process conditions by magnetron sputtering, multi-arc ion coating or other kinds of coating system
The sputtering source of various function films is formed on substrate.It is more demanding for the outer diameter of target when production, but can not adopt
The outer diameter of target is measured with accurate measurement instruments such as such as laser measuring apparatus, so can only be using machines such as electronics public law micrometers
Tool measuring instrument.In the prior art, when detecting the outer diameter of target, electronics public law micrometer is held to target by survey crew
Material outer diameter measures.But since electronics public law micrometer operation difficulty is higher, the mode of operation of different survey crews, skilled journey
Degree is different, causes measurement data to have error larger, accuracy is lower.In addition, the surface due to target is easily damaged, survey crew
It is careless slightly that target material surface will be caused to damage, cause target mass defect occur.
Utility model content
In view of the above-mentioned problems in the prior art, the utility model provide it is a kind of it is easy to operate, measurement is accurate
It spends higher and is not easy to cause object to be measured the measuring device of damage.
To achieve the above object, the utility model provides a kind of measuring device comprising: pedestal, regulating device and survey
Measuring device, wherein the pedestal is equipped with the support portion for being used to support object to be measured, and the measuring appliance is pacified by the regulating device
On the pedestal, the regulating device includes the first regulating mechanism, the second regulating mechanism and third regulating mechanism, and described the
One regulating mechanism is for driving the measuring appliance to move along the x axis, and second regulating mechanism is for driving the measuring appliance
It moves along the y axis, the third regulating mechanism is for adjusting the measuring appliance in the height of Z-direction, to pass through the survey
Measuring device measures the size of object to be measured.
In some embodiments, first regulating mechanism includes being arranged on the pedestal and arranging along the x axis
First guide rail and the first sliding block being movably attached on first guide rail.
In some embodiments, second regulating mechanism includes that on first sliding block and along the y axis cloth is arranged
The second guide rail for setting and it is movably attached the second sliding block on second guide rail.
In some embodiments, the third regulating mechanism includes being arranged on second sliding block and along Z-direction cloth
The third guide rail set and the third sliding block being movably attached on the third guide rail, the measuring appliance and the third sliding block
Connection.
In some embodiments, first sliding block be equipped with for lock its on first guide rail position first
Locking mechanism;And/or
Second sliding block is equipped with the second locking mechanism for locking its position on second guide rail;And/or
The third sliding block is equipped with the third locking mechanism for locking its position on the third guide rail.
In some embodiments, the measuring appliance is public law micrometer, the ruler frame of the public law micrometer and the third
The micrometer stud of sliding block connection, the public law micrometer is arranged along Z-direction and is located under the gage button of the public law micrometer
Side.
In some embodiments, first guide rail includes the slide bar that at least one is arranged along the x axis, and the slide bar is worn
If first sliding block;And/or
Second guide rail is the dovetail groove opened up along the y axis on first sliding block, is had on second sliding block
There is trapezoidal sliding part, the trapezoidal sliding part is slidably connected in the dovetail groove;And/or
The third guide rail includes at least one sliding support along Z-direction setting, and the third sliding block is slidably connected
On the sliding support.
In some embodiments, the third regulating mechanism includes regulating arm, and the measuring appliance is connected to the regulating arm
On, one end of the regulating arm is rotatably connected on second sliding block, by adjusting the regulating arm and Z-direction
Angle adjust the height of the measuring appliance in the Z-axis direction.
In some embodiments, there is the first support and second support that are oppositely arranged on the pedestal, described first
Frame is equipped with the first clamping groove for being clamped object to be measured, and the second support is equipped with second for being clamped object to be measured
Clamping groove, first clamping groove and second clamping groove form the support portion;First clamping groove and/or described
Two clamping grooves are equipped with the retention mechanism for fixing object to be measured.
In some embodiments, the measuring appliance is detachably connected with the regulating mechanism.
Compared with prior art, the utility model embodiment measuring device puts the determinand such as target in measurement
It sets on the support portion of pedestal, measuring appliance is adjusted separately by the first regulating mechanism, the second regulating mechanism and third regulating mechanism
In the position of X-direction, Y direction and Z-direction, so that measuring appliance is enable to be directed at object to be measured, it can be maximum
The mode of operation because of survey crew is avoided to interfere with qualification difference to measurement result, the accuracy of measurement is higher, also
It is damaged caused by can be avoided because of survey crew's careless manipulation to object to be measured.
It should be appreciated that foregoing general description and it is described in detail below be merely exemplary with it is illustrative, rather than use
In limitation the utility model.
Present specification provides the various realizations or exemplary general introduction of technology described in the utility model, is not that institute is public
Open the full scope of technology or the comprehensive disclosure of all features.
Detailed description of the invention
In the attached drawing being not drawn necessarily to scale, identical appended drawing reference can describe similar in different views
Component.Same reference numerals with letter suffix or different letter suffix can indicate the different instances of similar component.Attached drawing
Generally through citing rather than the mode of limitation shows various embodiments, and reinstates with specification and claims one
It is illustrated in the disclosed embodiments.In due course, make to be referred to identical reference in all the appended drawings same
One or similar part.Such embodiment is illustrative, and is not intended as the exhaustive or exclusive of the present apparatus or method
Embodiment.
Fig. 1 is the structural schematic diagram for the measuring device that the utility model embodiment is related to.
Appended drawing reference:
1- pedestal;2- substrate;3- first support;4- second support;The first clamping groove of 5-;The second clamping groove of 6-;7- first
Guide rail;The first sliding block of 8-;The second guide rail of 9-;The second sliding block of 10-;11- third guide rail;12- third sliding block;13- measuring appliance;14-
Object to be measured.
Specific embodiment
In order to enable the objectives, technical solutions, and advantages of the embodiments of the present invention are clearer, below in conjunction with this reality
With the attached drawing of new embodiment, the technical solution of the utility model embodiment is clearly and completely described.Obviously, it is retouched
The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.It is practical new based on described sheet
The embodiment of type, those of ordinary skill in the art's every other embodiment obtained under the premise of being not necessarily to creative work,
It fall within the protection scope of the utility model.
Unless otherwise defined, the technical term or scientific term that the utility model uses are should be belonging to the utility model
The ordinary meaning that personage in field with general technical ability is understood." first ", " second " used in the utility model and
Similar word is not offered as any sequence, quantity or importance, and is used only to distinguish different component parts." comprising "
Either the similar word such as "comprising" means to occur element or object before the word and covers to appear in the word presented hereinafter
Element perhaps object and its equivalent and be not excluded for other elements or object.The similar word such as " connection " or " connected " is simultaneously
Non-limiting but may include electrical connection in physics or mechanical connection, either direct or indirectly.
"upper", "lower", "left", "right" etc. are only used for indicating relative positional relationship, after the absolute position for being described object changes, then should
Relative positional relationship may also correspondingly change.
In order to keep the following explanation of the utility model embodiment to understand and concise, known function is omitted in the utility model
With the detailed description of known elements.
Fig. 1 is the structural schematic diagram of the measuring device of the utility model embodiment, which includes: pedestal 1, adjusts
Device and measuring appliance 13, wherein pedestal 1 is equipped with the support portion for being used to support object 14 to be measured, and measuring appliance 13 is by adjusting dress
It sets and is mounted on pedestal 1, regulating device includes the first regulating mechanism, the second regulating mechanism and third regulating mechanism, and first is adjusted
For driving measuring appliance 13 to move along the x axis, the second regulating mechanism is used to that measuring appliance 13 to be driven to move along the y axis for mechanism,
Third regulating mechanism is for adjusting measuring appliance 13 in the height of Z-direction, to measure the ruler of object 14 to be measured by measuring appliance 13
It is very little.X-direction, Y direction and Z-direction in the utility model embodiment as shown in Figure 1, but can adjust according to actual needs,
As known to the public, X-direction, Y direction and Z-direction respectively represent three directions in three-dimensional structure, as long as orthogonal
?.
The determinands such as such as target are placed on the support portion of pedestal 1 in measurement by measuring device using the above structure
On, measuring appliance 13 is adjusted separately in X-direction, Y-axis side by the first regulating mechanism, the second regulating mechanism and third regulating mechanism
To and the position of Z-direction can avoid to the greatest extent because measuring people so that measuring appliance 13 be enable to be directed at object 14 to be measured
The mode of operation of member interferes measurement result with qualification difference, and the accuracy of measurement is higher, additionally it is possible to avoid because surveying
Amount personnel careless manipulation causes to damage to object 14 to be measured.
In some embodiments, which may include substrate 2, first support 3 and second support 4, first support 3 and
On a substrate 2, first support 3 is equipped with the first clamping groove 5 for being clamped portion to be measured to the opposite setting of two brackets 4, and second
Bracket 4 is equipped with the second clamping groove 6 of subscriber card reception measurement object 14, and the first clamping groove 5 and the second clamping groove 6 together constitute
It is used to support the support portion of object 14 to be measured.When measurement, one end of the object 14 to be measured such as such as target can be placed on the first card
In access slot 5, the other end of target is placed in the second clamping groove 6, so that target is supported on first support 3 and second support
Between 4.In addition, the fastening machine for fixing object 14 to be measured can also be arranged in the first clamping groove 5 and/or the second clamping groove 6
Structure, for example, a fastening screw can respectively be arranged in the first clamping groove 5 and the second clamping groove 6, by the two fastening screws come
It pushes against the both ends of target respectively to fix target, avoids making measurement result generate mistake due to target is mobile in measurement process or rotates
Difference.Specifically, the pedestal 1 can be 304 stainless steel material pedestals 1 or 316 stainless steel material pedestals 1.The first support 3 and second
Bracket 4 can be the plate-shaped carrier being oppositely arranged.
In some embodiments, which may include that first arranged on pedestal 1 and along the x axis is arranged in
Guide rail 7 and the first sliding block 8 being movably attached on the first guide rail 7.First guide rail 7 may include at least one along X-axis side
To the slide bar of arrangement, the both ends of slide bar can be separately fixed in first support 3 and second support 4, and slide bar can wear the first sliding block
8.Second regulating mechanism may include being arranged on the first sliding block 8 and the second guide rail 9 for arranging along the y axis and movably connecting
Connect second sliding block 10 on the second guide rail 9.Second guide rail 9 may include at least one opening up along the y axis on the first sliding block 8
Dovetail groove, there is on corresponding second sliding block 10 trapezoidal sliding part, which is slidably connected in dovetail groove, this
Sample, the second sliding block 10 can be slided along the length direction of dovetail groove, that is, sliding along the y axis.The third regulating mechanism can
Including being arranged on the second sliding block 10 and along the third guide rail 11 of Z-direction arrangement and being movably attached on third guide rail 11
Third sliding block 12, measuring appliance 13 connect with third sliding block 12.The third guide rail 11 may include that at least one is arranged along Z-direction
Sliding support, third sliding block 12 is slidably connected on the sliding support.The second adjusting machine can be driven by mobile first sliding block 8
Structure, third regulating mechanism and measuring appliance 13 move along the x axis together, third can be driven to adjust machine by mobile second sliding block 10
Structure and measuring appliance 13 move along the y axis together, measuring appliance 13 can be driven to move along Z-direction by mobile third sliding block 12,
It is easy to operate.
It should be noted that above content is only the exemplary illustration to three regulating mechanisms, either three adjusting machines
Other structures can be used in structure or three guide rails, such as screw rod or electric pushrod etc. also can be used in three guide rails.Further for example,
In another embodiment, third regulating mechanism may include the support rod being arranged on the second sliding block 10 and be rotatably connected to
Regulating arm on support rod, measuring appliance 13 are connected on regulating arm by universal joint, can be by such as between regulating arm and support rod
The structures such as universal joint or articulated shaft are rotatably coupled, by adjusting the angle of regulating arm and Z-direction, namely adjustment when measurement
The pitch angle of regulating arm adjusts the height of measuring appliance 13 in the Z-axis direction.
In some embodiments, the first lock for locking its position on the first guide rail 7 can be set on the first sliding block 8
Determine mechanism.The first locking mechanism may include one through the first sliding block 8 and can push against the jackscrew of pedestal 1.When measuring appliance 13 is in X
After axis direction is adjusted to particular measurement position, jackscrew can be tightened, the first sliding block 8 is fixed on to the particular measurement of X-direction
At position, avoid that the first sliding block 8 is caused to slide because of maloperation.It can also be equipped on the second sliding block 10 and be led for locking it second
The second locking mechanism of position on rail 9, the second locking mechanism may include one through the second sliding block 10 and can push against second and lead
Another jackscrew of rail 9.When measuring appliance 13 is after Y direction is adjusted to particular measurement position, another jackscrew can be tightened, by
Two sliding blocks 10 are fixed on the particular measurement position of the Y direction, avoid that the second sliding block 10 is caused to slide because of maloperation.It can also be
Three sliding blocks 12 are equipped with the third locking mechanism for locking its position on third guide rail 11, which can also wrap
One is included through third sliding block 12 and another jackscrew of third guide rail 11 can be pushed against.When measuring appliance 13 is adjusted to special in Z-direction
After measurement position, another jackscrew can be tightened, third sliding block 12 is fixed on to the particular measurement position of Z-direction.Certainly,
Other forms can be used in first locking mechanism, second locking mechanism and third locking mechanism, for example, clamping piece or friction member
Deng as long as can be realized the purpose of latched position.
For target etc., specifically measurement object can be in pedestal usually by standard with one or more particular measurements position
1, the position mark for marking particular measurement position is set on the first guide rail 7, the second guide rail 9 and third guide rail 11, and
Setting is used to indicate the cue mark of position mark, such as arrow, with side on first sliding block 8, the second sliding block 10 and third sliding block 12
Just survey crew is directed at measurement position.
In some embodiments, the measuring appliance 13 can be electronics public law micrometer, the ruler frame of the electronics public law micrometer with
Third sliding block 12 connects, and the micrometer stud of electronics public law micrometer is arranged along Z-direction and is located at the electronics public law micrometer
The lower section of gage button.When measurement, the third locking structure on third sliding block 12 can be made to be in the state that unlocks, by electronics public law thousand
Electronics public law micrometer is unclamped, by the weight of electronics public law micrometer itself in the top for dividing the gage button of ruler to move to object 14 to be measured
Power drives third sliding block 12 to slide along third guide rail 11, until gage button and object 14 to be measured completely attach to, then adjusts micrometer spiral shell
Column, until micrometer stud is contacted with object 14 to be measured, reading numerical values complete measurement, can be avoided because of manual mobile third sliding block
12 forces are excessive and gage button is caused to be damaged to object 14 to be measured.
In some embodiments, measuring appliance 13 is detachably connected with regulating mechanism, in order to replace measuring appliance 13.For example,
One clamping portion or clamping part can be set on third sliding block 12, electronics public law micrometer can be connected on the clamping portion, or
Electronics public law micrometer can be detachably connected on the clamping part by screw, bolt or other fasteners.
The measuring device of the utility model embodiment, structure is simple, easy to operate, can be avoided the operation because of survey crew
Mode interferes measurement result with qualification difference, and the accuracy of measurement is higher, additionally it is possible to avoid grasping because of survey crew
Work causes to damage to object 14 to be measured accidentally.
Above description is intended to illustrative rather than restrictive.For example, above-mentioned example (or one or more side
Case) it can be in combination with one another.Such as other embodiments can be used when reading foregoing description in those of ordinary skill in the art.
In addition, various features can be grouped together to simplify the utility model in above-mentioned specific embodiment.This should not be solved
It is interpreted as a kind of not claimed disclosed feature and intention is necessary for any claim.On the contrary, the utility model
Theme can be less than whole features of specific disclosed embodiment.To which following claims is as example or embodiment
It is incorporated in specific embodiment herein, wherein each claim is independently as individual embodiment, and considers these realities
Applying example can be combined with each other with various combinations or arrangement.The scope of the utility model should refer to appended claims and these power
Benefit requires the full scope of entitled equivalent form to determine.
Above embodiments are only the exemplary embodiment of the utility model, are not used in limitation the utility model, this is practical new
The protection scope of type is defined by the claims.Those skilled in the art can be in the essence and protection scope of the utility model
It is interior, various modifications or equivalent replacements are made to the utility model, this modification or equivalent replacement also should be regarded as falling in originally practical new
In the protection scope of type.
Claims (10)
1. a kind of measuring device characterized by comprising pedestal, regulating device and measuring appliance, wherein the pedestal is equipped with
It is used to support the support portion of object to be measured, the measuring appliance is mounted on the pedestal by the regulating device, the adjusting
Device includes the first regulating mechanism, the second regulating mechanism and third regulating mechanism, and first regulating mechanism is described for driving
Measuring appliance moves along the x axis, and second regulating mechanism is for driving the measuring appliance to move along the y axis, the third
Regulating mechanism is for adjusting the measuring appliance in the height of Z-direction, to measure the size of object to be measured by the measuring appliance.
2. measuring device according to claim 1, which is characterized in that first regulating mechanism includes being arranged in the base
The first guide rail arranged on seat and along the x axis and the first sliding block being movably attached on first guide rail.
3. measuring device according to claim 2, which is characterized in that second regulating mechanism includes setting described the
The second guide rail for arranging on one sliding block and along the y axis and it is movably attached the second sliding block on second guide rail.
4. measuring device according to claim 3, which is characterized in that the third regulating mechanism includes setting described the
On two sliding blocks and along the third guide rail of Z-direction arrangement and the third sliding block being movably attached on the third guide rail, institute
Measuring appliance is stated to connect with the third sliding block.
5. measuring device according to claim 4, which is characterized in that
First sliding block is equipped with the first locking mechanism for locking its position on first guide rail;And/or
Second sliding block is equipped with the second locking mechanism for locking its position on second guide rail;And/or
The third sliding block is equipped with the third locking mechanism for locking its position on the third guide rail.
6. measuring device according to claim 4, which is characterized in that the measuring appliance is public law micrometer, the public law
The ruler frame of micrometer is connect with the third sliding block, and the micrometer stud of the public law micrometer is arranged along Z-direction and is located at institute
State the lower section of the gage button of public law micrometer.
7. measuring device according to claim 4, which is characterized in that first guide rail includes at least one along X-axis side
To the slide bar of setting, the slide bar wears first sliding block;And/or
Second guide rail is the dovetail groove opened up along the y axis on first sliding block, has ladder on second sliding block
Shape sliding part, the trapezoidal sliding part are slidably connected in the dovetail groove;And/or
The third guide rail includes at least one sliding support along Z-direction setting, and the third sliding block is slidably connected at institute
It states on sliding support.
8. measuring device according to claim 3, which is characterized in that the third regulating mechanism includes regulating arm, described
Measuring appliance is connected on the regulating arm, and one end of the regulating arm is rotatably connected on second sliding block, to pass through
The angle for adjusting the regulating arm and Z-direction adjusts the height of the measuring appliance in the Z-axis direction.
9. measuring device according to claim 1, which is characterized in that have the first support being oppositely arranged on the pedestal
And second support, the first support are equipped with the first clamping groove for being clamped object to be measured, the second support is equipped with
For being clamped the second clamping groove of object to be measured, first clamping groove and second clamping groove form the support portion;Institute
The first clamping groove and/or second clamping groove are stated equipped with the retention mechanism for fixing object to be measured.
10. measuring device according to claim 1, which is characterized in that the measuring appliance and the regulating mechanism are detachable
Connection.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822270358.2U CN209512725U (en) | 2018-12-29 | 2018-12-29 | A kind of measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822270358.2U CN209512725U (en) | 2018-12-29 | 2018-12-29 | A kind of measuring device |
Publications (1)
Publication Number | Publication Date |
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CN209512725U true CN209512725U (en) | 2019-10-18 |
Family
ID=68199006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201822270358.2U Active CN209512725U (en) | 2018-12-29 | 2018-12-29 | A kind of measuring device |
Country Status (1)
Country | Link |
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CN (1) | CN209512725U (en) |
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2018
- 2018-12-29 CN CN201822270358.2U patent/CN209512725U/en active Active
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