CN209485979U - A kind of novel micro nanometer index sensor based on metamaterial structure - Google Patents
A kind of novel micro nanometer index sensor based on metamaterial structure Download PDFInfo
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- CN209485979U CN209485979U CN201920067012.4U CN201920067012U CN209485979U CN 209485979 U CN209485979 U CN 209485979U CN 201920067012 U CN201920067012 U CN 201920067012U CN 209485979 U CN209485979 U CN 209485979U
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- 239000002184 metal Substances 0.000 claims abstract description 56
- 229910052751 metal Inorganic materials 0.000 claims abstract description 56
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000010931 gold Substances 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 239000000835 fiber Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 238000002835 absorbance Methods 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001808 coupling effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 2
- 241000549556 Nanos Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
The utility model relates to a kind of novel micro nanometer index sensor based on metamaterial structure, what is solved is traditional optical index sensor since structure size is big, it cannot achieve the problem of nanoscale is detected, its structure includes substrate and sensing unit, and wherein sensing unit is located above substrate and is equally distributed.The substrate includes double layer of metal plate and one layer of dielectric-slab；The sensing unit includes two parallel metal nm cylinders being arranged on medium bottom plate and medium bottom plate；Metal nano cylinder and the edge of medium bottom plate are tangent in longitudinal direction, and the length of the metal nano cylinder is consistent with the length of sensing unit long side.The micro-nano index sensor is identical as the material of first medium plate using medium bottom plate, the identical technical solution of the material of first metal plate, the second metal plate and metal nano cylinder, preferably realize index sensor miniaturization and it is integrated, can be used in the various kinds of sensors on the basis of the refractometry of nm regime.
Description
Technical field
The utility model relates to index sensor fields, and in particular to a kind of novel micro nanometer refractive index of metamaterial structure
Sensor and micro/nano-scale refractivity tester.
Background technique
Refractive index is the build-in attribute of a variety of materials itself, has consequence in field of photodetection, is optics object
The important parameter in one, quality detection field.The index sensor of current main-stream is optic fibre refractive index sensor, such as Fabry-Perot
Luo Gan's interferometer, sagnac interferometer, Mach-Zender interferometer, single mode-multi-mode-single mode optical fiber structure, Bragg grating
Deng.It is this kind of generally relatively low based on optic fibre refractive index sensor sensitivity made of the relevant principle of light beam, and it is based on surface plasma
The optical fiber biochemical sensor of resonance body (Surface Plasmon Resonance, SPR) principle is substantially also a kind of refractive index
Sensor, is used for measuring refractive indexes of liquid, and sensitivity is higher than conventional interference type optic fibre refractive index sensor.But currently utilize light
Fibre is also very difficult to prepare the nano-probe based on SPR effect truly, to be difficult to realize in micro/nano-scale
Refractometry and biochemistry detection.This severely limits the application fields of optical refractive index sensor.
The development of nanosecond science and technology provides new idea and method for the design of novel index sensor, production.This is practical
It is novel to provide a kind of novel micro nanometer index sensor of metamaterial structure based on SPR principle, with traditional fiber refractive index
Compare, the sensor have many advantages, such as structure it is simple, it is small in size, be easily integrated, overcome the spirit of traditional optical index sensor
Sensitivity is low, volume is bigger than normal, can not achieve the shortcomings that micro-nano field is detected.
Utility model content
To be solved in the utility model is that traditional optical index sensor volume is big, can not be examined in micro/nano-scale
The problem of survey, provides a kind of novel micro nanometer index sensor based on metamaterial structure.
To solve the problems, such as that conventional fiber optic sensors size is bigger than normal and sensitivity is less than normal, the technical solution adopted is as follows:
A kind of novel micro nanometer index sensor based on metamaterial structure, the novel micro nanometer index sensor include
Substrate, equal pitch arrays are provided with sensing unit on substrate；The substrate includes the first gold medal successively overlapped from the bottom up
Belong to plate, first medium plate, the second metal plate；The sensing unit includes medium bottom plate and two metal nanos being arranged thereon circle
Column, the side adjacent with neighboring sensor unit are defined as long side, and cylinder axis is parallel with long side, and are placed in the edge of medium bottom plate,
The length of the metal nano cylinder is consistent with the length of long side；The medium bottom plate is identical as the material of first medium plate, the
The material of one metal plate, the second metal plate and metal nano cylinder is identical.
Working principle of the utility model is: the novel micro nanometer index sensor based on metamaterial structure of the utility model
It is based on a kind of index sensor developed on the basis of plasmon absorption.When electromagnetic wave irradiation is to consisting of metal
Nm cylinder array on, when the vibration frequency of the frequency of incidence wave and metal nano cylindrical-array conduction electronics matches, gold
Strong absorption will be generated to photon energy by belonging to nm cylinder, i.e. realization resonance absorbing, and resonance absorbing wavelength can be with the external world
The change of refractive index and change, therefore inspection can be passed through according to the relationship between extraneous refractive index size and resonance absorbing wavelength
The numerical value of extraneous refractive index can be calculated indirectly by surveying resonance absorbing wavelength.Since local surface plasma resonance is to ring
Border response of refractive index is very sensitive, therefore the index sensor of the utility model has high sensitivity.Micro-nano is reflected
Rate sensor is placed in environment to be measured, using resonance absorbing wavelength come the variation of sensing external environment refractive index, realizes that this is practical
Measurement of the novel micro-nano index sensor to the environment to be measured of micro/nano-scale.
In addition, magnetic field is in Jie being mainly distributed between two metal nano cylinders and gold thin film in the index sensor
Matter layer.Surface plasma body resonant vibration causes the cavity coupling effect of nanostructure, i.e., structure designed by the utility model by
Plasma resonance produces the humorous resonance of magnetic.Sensor normalization absorptivity is defined as Q=1- (T+R), wherein R indicates reflection
Rate, T indicate transmissivity.Due to the first metal plate as reflecting layer thickness be greater than incidence wave the metal skin depth,
Therefore T=0.Sensor refractive index sensitivity definition S=Δ λ/Δ n, wherein Δ λ indicates that the drift value of resonance wavelength, Δ n indicate
Analyze the variable quantity of liquid refractive index.
In above scheme, it is particular in that the material of the medium bottom plate and first medium plate is MgF2, the first metal
The material of plate, the second metal plate and metal nano cylinder is Au.
Further, first metal plate with a thickness of h4=100nm, length 1000nm, width 1000nm, the
The thickness h of one dielectric-slab3=170nm, the second metal plate with a thickness of h2=25nm；Medium bottom plate with a thickness of h1=10nm, gold
The radius for belonging to nm cylinder is r=50nm, and the spacing of adjacent media bottom plate is d=20nm, and the setting of spacing d will affect coupling effect
It answers, and then influences absorption of the sensor to incident electromagnetic wave, this programme spacing is the optimal distance after parameter optimization.The base
In metamaterial structure novel micro nanometer index sensor operating wavelength range be 1100nm~1500nm.
The utility model has the beneficial effects that the novel micro nanometer index sensor size based on metamaterial structure is small, construction
Simply, it is easy to accomplish the miniaturization of sensor with it is integrated, the sensor absorption band width, quality factor and sensitivity are higher.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1, the novel micro nanometer index sensor geometry three-dimensional figure based on metamaterial structure.
Fig. 2, the geometry cross-sectional view of novel micro nanometer index sensor described in embodiment.
Fig. 3, the absorption spectra of novel micro nanometer index sensor described in embodiment.
Fig. 4, cylindrical radius change the influence absorbed to sensor light.
Fig. 5, the influence that array element mechanical periodicity absorbs sensor light.
Fig. 6, absorption spectra of novel micro nanometer sensor under the conditions of different refractivity.
Fig. 7, the absorption peak drift and the relationship of analysis liquid refractive index of sensor described in embodiment.
In figure, the first metal plate of 1-, 2- first medium plate, the second metal plate of 3-, 4- medium bottom plate, 5- metal nano circle
Column.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, with reference to embodiments, to this
Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain that this is practical new
Type is not used to limit the utility model.
Embodiment
The present embodiment provides a kind of novel micro nanometer index sensor based on metamaterial structure, by metal medium nanometer battle array
Column composition, such as Fig. 1 and Fig. 2.The novel micro nanometer index sensor includes the biography of equal pitch arrays setting on substrate and substrate
Feel unit；The substrate includes the first metal plate (1) successively overlapped from the bottom up, first medium plate (2), the second metal
Plate (3)；The sensing unit includes two metal nano cylinders (5) being arranged on medium bottom plate (4) and medium bottom plate (4), with
The adjacent side of neighboring sensor unit is defined as long side, and cylinder axis is parallel with long side, and is placed in the edge of medium bottom plate (4), institute
The length for stating metal nano cylinder (5) is consistent with the length of sensing unit long side；The medium bottom plate (4) and first medium plate
(2) material is identical, is MgF2, the material phase of the first metal plate (1), the second metal plate (3) and metal nano cylinder (5)
It together, is Au.
In the present embodiment, the material of the medium bottom plate (4) and first medium plate (2) is MgF2, the first metal plate (1),
The material of second metal plate (3) and metal nano cylinder (5) is Au.
Wherein, such as Fig. 1 and Fig. 2, the first metal plate (1) with a thickness of h4=100nm, the thickness h of first medium plate (2)3=
170nm, the second metal plate (3) with a thickness of h2=25nm；Medium bottom plate (4) with a thickness of h1=10nm, metal nano cylinder
(5) radius is r=50nm, and the spacing of adjacent media bottom plate (4) is d=20nm.
If the novel micro nanometer index sensor of Fig. 1 and Fig. 2, the present embodiment are metal nano cylinder periodic arrangement, pass through
Nanofabrication technique is easily achieved.
The operating wavelength range of the embodiment of the present invention novel micro nanometer index sensor is 1100nm~1500nm.
By FDTD solutions simulation calculation, Fig. 3 gives the absorption spectra of sensor described in the present embodiment, nanometer battle array
The period of column and refractive index difference value 1000nm and 1.0 (air).As seen from the figure, there are two resonance absorbing peaks for sensor.
First absorption peak, absorptivity is high, and full width at half maximum (FWHM) is narrow, and quality factor are high；Second absorption peak, full width at half maximum (FWHM) is big, quality factor
It is low.
Fig. 4 demonstrates influence of the metal nano cylindrical radius size to peak absorbance.The nano-array unit period takes P=
1000nm, ambient refractive index take 1.0 (air), metal nano cylindrical radius value range 50nm~200nm, and two absorption peaks are several
It is not influenced by radius change, resonance wavelength position is almost unchanged, and the absorptivity of first absorption peak has been above 80%.
Fig. 5 demonstrates the influence of nano-array period local area surface plasmon resonance absorption.Metal nano cylindrical radius
It is set as 50nm, ambient refractive index is set as 1.0, and as seen from the figure, first resonance absorbing peak wavelength is hardly with the period
Change drift about, and the wavelength of second resonance absorbing peak with the period increase to long wave direction drift about.Its physics is former
Reason is that first resonance absorbing peak is to be absorbed to generate by local surface plasma resonance, and second absorption peak is by nanometer grating
Effect generates.When being less than 600nm in the period, the full width at half maximum (FWHM) of first absorption peak is bigger, is unfavorable for sensor quality factor
Raising.Therefore the period takes 1000nm to have reasonability.
Fig. 6 demonstrates analysis liquid refractive index to the spectral resonance inhalation effects of novel micro nanometer sensor, array period and gold
Belonging to nm cylinder radius and takes 1000nm and 50nm respectively, analysis liquid refractive index is successively taken as 1.33,1.36,1.39, as seen from the figure,
With the increase of analysis liquid refractive index, the wavelength of two resonance absorbing peaks all drifts about to long wave direction, and first absorption peak
Peak absorbance rate reduces, and the peak absorbance rate of second absorption peak increases.
Fig. 7 further quantitatively determined peak shift and analyze liquid refractive index relationship, analysis liquid refractive index by 1.33 by
Cumulative to be added to 1.45, peak wavelength is linearly increasing therewith.Wherein first peak wave length shift is 25nm, second peak wave length shift
For 65nm, it is respectively 208nm/RIU, 541nm/ that the refractive index sensitivity at two peaks can be obtained by, which being defined by refractive index sensing sensitivity,
RIU。
The novel micro nanometer index sensor based on metamaterial structure of the present embodiment is periodic structure, is constituted more simple
It is single, it is easy to accomplish, index sensor quality factor with higher is able to achieve the measurement of micro/nano-scale refractive index, overcomes
The application limitation of traditional fiber index sensor.
Although specific implementation of the patent mode is described above, in order to those skilled in the art's energy
Enough understand this patent, but this patent is not limited only to the range of specific embodiment, to those skilled in the art
For, as long as various change is in the range of this patent that the attached claims limit and determine, all utilize this patent structure
The utility model of think of and creation are in the column of protection.
Claims (4)
1. a kind of novel micro nanometer index sensor based on metamaterial structure, it is characterised in that: described to be based on metamaterial structure
Novel micro nanometer index sensor include substrate, the sensing unit of equal pitch arrays setting on substrate；
The substrate includes the first metal plate (1) successively overlapped from the bottom up, first medium plate (2), the second metal plate
(3)；
The sensing unit includes medium bottom plate (4), and there are two metal nano cylinder (5) for setting on medium bottom plate (4), with phase
The adjacent side of adjacent sensing unit is defined as long side, and cylinder axis is parallel with long side, and is placed in the edge of medium bottom plate (4), described
The length of metal nano cylinder (5) is consistent with the length of sensing unit long side；
The medium bottom plate (4) is identical as the material of first medium plate (2), the first metal plate (1), the second metal plate (3) and gold
The material for belonging to nm cylinder (5) is identical.
2. the novel micro nanometer index sensor according to claim 1 based on metamaterial structure, it is characterised in that: described
The material of medium bottom plate (4) and first medium plate (2) is MgF2, the first metal plate (1), the second metal plate (3) and metal nano
The material of cylinder (5) is Au.
3. the novel micro nanometer index sensor according to claim 2 based on metamaterial structure, it is characterised in that: described
First metal plate (1) with a thickness of h4=100nm, the thickness h of first medium plate (2)3=170nm, the thickness of the second metal plate (3)
Degree is h2=25nm；Medium bottom plate (4) with a thickness of h1=10nm, the radius of metal nano cylinder (5) are r=50nm, adjacent Jie
The spacing of matter bottom plate (4) is d=20nm.
4. the novel micro nanometer index sensor according to claim 3 based on metamaterial structure, it is characterised in that: described
The operating wavelength range of novel micro nanometer index sensor is 1100nm~1500nm.
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| CN201920067012.4U CN209485979U (en) | 2019-01-15 | 2019-01-15 | A kind of novel micro nanometer index sensor based on metamaterial structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580545A (en) * | 2019-01-15 | 2019-04-05 | 桂林电子科技大学 | A kind of novel micro nanometer index sensor based on metamaterial structure |
| CN114324225A (en) * | 2021-09-08 | 2022-04-12 | 中山大学 | Micro-nano device capable of regulating spectral response and applied to gas sensing |
-
2019
- 2019-01-15 CN CN201920067012.4U patent/CN209485979U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580545A (en) * | 2019-01-15 | 2019-04-05 | 桂林电子科技大学 | A kind of novel micro nanometer index sensor based on metamaterial structure |
| CN109580545B (en) * | 2019-01-15 | 2024-04-02 | 桂林电子科技大学 | Novel micro-nano refractive index sensor based on metamaterial structure |
| CN114324225A (en) * | 2021-09-08 | 2022-04-12 | 中山大学 | Micro-nano device capable of regulating spectral response and applied to gas sensing |
| CN114324225B (en) * | 2021-09-08 | 2023-06-02 | 中山大学 | Micro-nano device applied to gas sensing and capable of regulating and controlling spectral response |
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