CN209485838U - A kind of dilution device of automatic sampling - Google Patents

A kind of dilution device of automatic sampling Download PDF

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Publication number
CN209485838U
CN209485838U CN201822043033.0U CN201822043033U CN209485838U CN 209485838 U CN209485838 U CN 209485838U CN 201822043033 U CN201822043033 U CN 201822043033U CN 209485838 U CN209485838 U CN 209485838U
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China
Prior art keywords
liquid
power source
dilution
automatic sampling
dilution device
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CN201822043033.0U
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Chinese (zh)
Inventor
王立言
段保峰
姜建星
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Luoyang Huaqing Skywood Biotechnology Co Ltd
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Luoyang Huaqing Skywood Biotechnology Co Ltd
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Abstract

The utility model relates to a kind of dilution devices of automatic sampling, are made of stoste container, soda liquor container, quantitative hydraulic power source, Pneumatic pressure power source, liquid hybrid chip, solvent bottle, diluting tank, receiving flask, Multi-channel switching valve, solenoid electric valve and interconnected pipeline.The utility model automatic dilution, dilution mixing is more uniform, and dilution accuracy is high, and equipment maintenance easy to clean.

Description

A kind of dilution device of automatic sampling
Technical field
The utility model relates to liquid sample dilution device, in particular to a kind of dilution device of automatic sampling.
Background technique
Traditional liquid accurate dilutions are to use the accurate measuring device such as pipette, volumetric flask by stoste accurate dilutions to target rich Degree, but this process needs are a large amount of artificial, it is also necessary to it calculates extension rate and is diluted again.
In recent years, automatic dilution method and apparatus rapidly develops.Patent CN103852369A discloses a kind of dilution equipment, Including solvent bottle, stoste bottle, dilution bottle, the first peristaltic pump, the second peristaltic pump, pump line and control device, the first peristaltic pump Liquid inlet is connected to by pump line with solvent bottle, and the liquid outlet of the first peristaltic pump is connected to by pump line with dilution bottle;Second peristaltic pump Entrance be connected to stoste bottle by pump line, the outlet of the second peristaltic pump passes through pump line and is connected to dilution bottle;First peristaltic pump, Two peristaltic pumps are electrically connected with the control output end of control device respectively, are additionally provided on control device for immersing in solution for examining Survey the temperature sensor of solution temperature.Patent CN104991081A discloses a kind of automatic sampling dilution process, first by specified agent Object and the diluent sample introduction to be diluted of amount is to sample room;Mixed liquor back suction a part in sample room is drained later;Again will Remaining mixed liquor whole back suction is to gauge line in sample room;Finally the mixed liquor in gauge line is measured again, and will metering Mixed liquor afterwards is discharged into again to sample room.Above-mentioned patent procedure is simple and convenient, calculates control dilution generally according to known concentration Multiple, but in dilution, can not complete to mix well before entering diluting tank;Liquid, which remains, in pipeline gives dilution precision It impacts;For the liquid diluting of high concentration, the dilution for completing target liq usually can not be once diluted;It can not on-line checking Strength of fluid is diluted unknown liquid.
Summary of the invention
The utility model provides a kind of dilution device of automatic sampling, overcome cannot achieve in the prior art it is online dilute The solution released mixes and On-line Control extension rate problem.
Technical solutions of the utility model:
A kind of dilution device of automatic sampling, by stoste container, soda liquor container, hydraulic power supply, Pneumatic pressure power source, liquid Body hybrid chip, solvent bottle, diluting tank, receiving flask, Multi-channel switching valve, solenoid electric valve and interconnected pipeline, wherein Stoste container, soda liquor container, solvent bottle contain stoste, cleaning solution, retarder thinner respectively;Hydraulic power supply, for that can quantify The quantitative hydraulic power source of liquid disengaging is controlled, two hydraulic power supply compositions is included at least, holds with stoste container, cleaning solution Device, solvent bottle are connected, and enter pipeline for stoste, cleaning solution, retarder thinner and provide driving force;Pneumatic pressure power source drives sterile sky Gas enters in pipeline;Liquid hybrid chip crosses mixing for stoste and retarder thinner;Diluting tank, one end pass through piping connection Liquid hybrid chip, the other end are stored by piping connection receiving flask for liquid diluting;Receiving flask, for collecting dilution And/or cleaning waste liquid;Solenoid electric valve acts on the pipeline that diluting tank is connect with receiving flask, for controlling in diluting tank Liquid enters receiving flask;Multi-channel switching valve switches over pipe path, includes at least three Multi-channel switching valves, wherein At least one is four-way switching valve.
The diluting tank, solenoid electric valve and its pipeline of relevant connection as a whole, can be made of one or more groups of.
The quantitative hydraulic power source includes the control unit for controlling sample introduction, and the quantitative hydraulic power source control is single Member adjusts time, flow velocity and the flow that liquid enters in diluting tank to control the sample volume of liquid.
The Pneumatic pressure power source includes the control unit for controlling gas inlet, and Pneumatic pressure power source control unit is used In control inlet period, flow velocity and air inflow.
The Multi-channel switching valve includes the control unit for controlling the switching of pipe path interface.
The liquid storage chamber of transparent material is provided on the quantitative hydraulic power source.
A kind of dilution device of automatic sampling further includes strength of fluid detector, is arranged saturating in quantitative hydraulic power source At the liquid storage chamber of bright material;Strength of fluid detector described further includes detection control unit, the strength of fluid Detector detection control unit is used for the detection to liquid on-line concentration and controls.
Further, the quantitative hydraulic power source is syringe pump, and the Pneumatic pressure power source is air pump, the strength of fluid inspection Survey device is fiber spectrometer.
A kind of dilution device of automatic sampling further includes control system and display interface, and the control system includes general place Device, digital signal processor, application-specific integrated circuit ASIC or on-site programmable gate array FPGA are managed, it is dynamic for controlling quantitative hydraulic The control unit in power source, the control unit in Pneumatic pressure power source, the control unit of Multi-channel switching valve, strength of fluid Indexs measure dress Set detection control unit;The display interface shows flow velocity, the sample volume of liquid and/or gas, strength of fluid index and its dilute Release multiple.
The liquid hybrid chip material includes PDMS, PC, PMMA, glass and/or silicon.
A kind of dilution device of automatic sampling of the utility model, which has the advantage that, improves the diluted standard of automatic sampling True property and stability, by chip minipool, the dilution mixing of liquid sample is more uniform, diluted sample introduction control errors 2% with It is interior.In addition, secondary decreasing concentration dilution may be implemented for the utility model and unknown liquid is diluted, especially realize for not The secondary liquid diluting for knowing concentration liquids improves high concentration liquid dilution precision;Full automatic working automatically controls cleaning, has Effect reduces manual operation, can effectively reduce cost of labor in industrial application;It may be adapted to laboratory micro dilution, fermentation exists Line detects a variety of occasions such as dilution.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is an example structure schematic diagram of the utility model.
Fig. 3 is the structural schematic diagram of another embodiment of the utility model.
Symbol description:
1 is stoste container;2 be soda liquor container;3,4,9,12 be Multi-way control valve;5,11 be quantitative hydraulic power Source;6 be strength of fluid index detection device;7 be Pneumatic pressure power source;8 be liquid hybrid chip;10 be solvent bottle;13,16 be dilute Release pond;14,17 be solenoid electric valve;15,18,19 be receiving flask.
Specific embodiment
Specific embodiment of the utility model is more fully described below with reference to accompanying drawings.Although showing this reality in attached drawing With novel specific embodiment, it being understood, however, that may be realized in various forms the utility model without that should be illustrated here Embodiment limited.It is to be able to thoroughly understand the utility model on the contrary, providing these embodiments, and can incite somebody to action The scope of the utility model is fully disclosed to those skilled in the art.
It should be noted that having used some vocabulary in the specification and claims to censure specific components.Ability Field technique personnel it would be appreciated that, technical staff may call the same component with different nouns.This specification and right It is required that not in such a way that the difference of noun is as component is distinguished, but with the difference of component functionally as differentiation Criterion."comprising" or " comprising " as mentioned throughout the specification and claims are an open language, therefore should be solved It is interpreted into " including but not limited to ".Specification subsequent descriptions are preferred embodiment of the present invention, the right description It is being not intended to limit the scope of the utility model for the purpose of the rule of specification.The protection scope of the utility model As defined by the appended claims.
Convenient for the understanding to the utility model embodiment, to be done by taking specific embodiment as an example below in conjunction with attached drawing further Explanation, and each attached drawing does not constitute the restriction to the utility model embodiment.
A kind of dilution device of automatic sampling, including stoste container, soda liquor container, hydraulic power supply, Pneumatic pressure power source, Liquid hybrid chip, solvent bottle, diluting tank, receiving flask, Multi-channel switching valve, solenoid electric valve and interconnected pipeline, In,
Stoste container, soda liquor container, solvent bottle contain stoste, cleaning solution, retarder thinner respectively;
Hydraulic power supply, it is hydraulic including at least two for the quantitative hydraulic power source that can quantitatively control liquid disengaging Power source composition, is connected with stoste container, soda liquor container, solvent bottle, enters pipeline for stoste, cleaning solution, retarder thinner and mentions For driving force;
Pneumatic pressure power source, driving filtrated air enter in pipeline;
Liquid hybrid chip crosses mixing for stoste and retarder thinner;
Diluting tank, one end are used for liquid by piping connection receiving flask by piping connection liquid hybrid chip, the other end Dilution storage;
Receiving flask, for collecting dilution and/or cleaning waste liquid;
Solenoid electric valve acts on the pipeline that diluting tank is connect with receiving flask, for control the liquid in diluting tank into Enter receiving flask;
Multi-channel switching valve switches over pipe path, includes at least three Multi-channel switching valves, wherein at least one For four-way switching valve.
The quantitative hydraulic power source is further syringe pump, and the Pneumatic pressure power source is further air pump.
Fig. 1 is a kind of one example structure schematic diagram of dilution device of automatic sampling of the utility model.
A kind of dilution device of automatic sampling is by stoste container 1, soda liquor container 2, triple channel switching valve a 3, four-way Switching valve 4, syringe pump a 5, Pneumatic pressure power source 7, liquid hybrid chip 8, triple channel switching valve b 9, solvent bottle 10, syringe pump b 11, diluting tank I 13, solenoid electric valve I 14, receiving flask 15 form.
Further, triple channel switching valve a 3, three interfaces respectively by pipeline connect stoste container 1, soda liquor container 2, Four-way switching valve 4;For four-way switching valve 4 in addition to connecting triple channel switching valve a 3, there are three interfaces to be connected respectively by pipeline Connect syringe pump a 5, Pneumatic pressure power source 7, liquid hybrid chip 8;The chip pipeline structure of liquid hybrid chip 8 is T-shape, except company It connects outside four-way switching valve 4, another both ends connect triple channel switching valve b 9, diluting tank I 13 by pipeline;Triple channel switching valve b 9 other two interface are separately connected solvent bottle 10, syringe pump b 11 by pipeline;Diluting tank I 13 connects receiving flask by pipeline A 15 controls whether dilution enters in receiving flask a 15 by solenoid electric valve I 14, and receiving flask a 15 can collect dilute Release and/or clean waste liquid.
A kind of dilution device of automatic sampling further includes strength of fluid Indexs measure device 6, unknown concentration stoste may be implemented The detection of concentration, further controls extension rate.
When carrying out sample dilution, syringe pump a 5 extracts the stoste in stoste container 1, by triple channel switching valve a's 3 A1-B1 access, four-way switching valve 4 A2-B2 access enter in syringe pump 5, according to stoste known concentration determine dilution times Number, or the stoste in syringe pump a 5 is carried out to detect determining extension rate using strength of fluid detector 6, in syringe pump a 5 Control under, inject quantitative stoste and enter in diluting tank 13, when undercoating liquid hybrid chip 8, and equipped with molten in solvent bottle 10 The solvent that the syringe pump b 11 of agent drives reaches liquid hybrid chip 8 together, and two kinds of liquid run process one in chip junction The time of sample, that is, liquid disengaging chip is the same, is more advantageous to and is mixed and fed into diluting tank 13, pump a 5 to be injected, syringe pump b11 Liquid injection is completed, air pump 7 will be in the liquid sample push-in diluting tank 13 in pipeline.
In order to further control the precision of apparatus of the present invention, before sample dilution, can be driven in advance by syringe pump b 11 Solvent be full of pipeline of the triple channel switching valve b 9 into liquid hybrid chip 8, then the liquid sample in pipeline is pushed away with air pump 7 Enter in diluting tank 13 and excluded by receiving flask 15, then more renews receiving flask connection and carry out sample dilution.
Stoste dilution is completed, when carrying out utility model device cleaning, syringe pump a 5 drives clear in soda liquor container 2 Washing lotion enters 5 liquid chamber of syringe pump a, pipeline is cleaned, and completes 3-5 times after rinsing, air pump 7 arranges pipeline liquid Sky, liquid enter in receiving flask 15 under 14 open state of solenoid electric valve by diluting tank 13.
A kind of dilution device of automatic sampling of the present invention is cleverly combined by Each part, and especially air pump 7 designs, Liquid in pipeline is discharged into completely in diluting tank 13, dilution precision is substantially increased.
Utility model device is carried out in order to facilitate the operation of personnel to be automatically brought into operation control, the syringe pump a 5, syringe pump B 11 includes the control unit for controlling sample introduction, described control unit adjust the time that liquid enters in diluting tank, flow velocity with Flow is to control the sample volume of liquid.Air pump 7 is provided with the control unit for controlling gas inlet, and the air pump 7 controls Unit is for controlling inlet period, flow velocity and air inflow.The Multi-channel switching valve includes cutting for controlling pipe path interface The control unit changed.
The dilution device of the automatic sampling further includes control system and display interface, and the control system includes general place Device, digital signal processor, application-specific integrated circuit ASIC or on-site programmable gate array FPGA are managed, it is dynamic for controlling quantitative hydraulic The control unit in power source, the control unit in Pneumatic pressure power source, the control unit of Multi-channel switching valve, strength of fluid Indexs measure dress Set detection control unit;The display interface shows flow velocity, the sample volume of liquid and/or gas, strength of fluid index and its dilute Release multiple.
In the embodiment of Fig. 2, the triple channel switching valve a 3 changes four-way switching valve into, and four interfaces pass through pipeline respectively Connect stoste container 1, soda liquor container 2, four-way switching valve 4, receiving flask 19.It, can will be in syringe pump a 5 after primary dilution Stoste be discharged into receiving flask 19, by soda liquor container 2 cleaning solution be pumped into syringe pump a 5 and its with four-way switching valve a 3 Between pipeline cleaned, then pipeline liquid is emptied with air pump 7, is diluted the measurement of 13 liquid back suction of pond again for the first time The concentration of dilution simultaneously determines extension rate, while opening solenoid electric valve 14, remaining liq is excluded with air pump, finally according to one Secondary dilution process carries out sample secondary dilution.
In the embodiment of Fig. 3, the cut-back tank, solenoid electric valve and its pipeline of relevant connection as a whole, can have The on-line dilution of a variety of various concentrations may be implemented in one or more groups of compositions.
A wherein case study on implementation, cut-back tank, solenoid electric valve and its pipeline of relevant connection are two groups, i.e. diluting tank I 13, solenoid electric valve I 14, pipeline and diluting tank II 16, solenoid electric valve II 17, pipeline composition;The receipts being connect with diluting tank Collection bottle can share one or individually each self-configuring.
If cut-back tank, solenoid electric valve and its pipeline of relevant connection be multiple groups, can according to it is different need to carry out it is a variety of Various concentration exact dilution.
Following embodiment designs automatic according to two groups of cut-back tanks, solenoid electric valve and its pipeline configuration of relevant connection The dilution device of sample introduction, by stoste container 1, soda liquor container 2, receiving flask 19, four-way switching valve a 3, four-way switching Valve b 4, syringe pump a 5, strength of fluid index detection device 6, Pneumatic pressure power source 7, liquid hybrid chip 8, triple channel switching valve b 9, solvent bottle 10, syringe pump b 11, triple channel switching valve c 12, diluting tank I 13, solenoid electric valve I 14, receiving flask a 15, Diluting tank II 16, solenoid electric valve II 17 composition.Four-way switching valve a 3, three of them interface are connected by pipeline former respectively Liquid bottle 1, cleaning solution bottle 2, four-way switching valve 4, receiving flask 19;4 the other three interface of four-way switching valve b passes through pipeline respectively Connect syringe pump a 5, Pneumatic pressure power source 7, liquid hybrid chip 8;Syringe pump a(5) it is provided with strength of fluid Indexs measure dress outside Set 6;The chip pipeline of liquid hybrid chip 8 is T-shape, and there are also both ends to connect triple channel switching valve b 9, triple channel by pipeline Switching valve c12;9 another two interface of triple channel switching valve b is separately connected solvent bottle 10, syringe pump b 11 by pipeline;Triple channel Other two port switching valve c 12 connects diluting tank I 13, diluting tank II 16 by pipeline respectively;Diluting tank I 13, dilution Pond II 16 is correspondingly connected with receiving flask a 15, receiving flask b 18 by pipeline respectively, corresponds to pipeline and passes through solenoid electric valve respectively Whether I 14, solenoid electric valve II 17 control dilution respectively enter receiving flask a 15 and receiving flask b 18, the receiving flask a 15 and receiving flask b 18 can collect dilution and/or cleaning waste liquid.Receiving flask a 15 and receiving flask b 18 can realize various concentration Dilution storage sample.
When carrying out sample dilution, syringe pump a 5 extracts the stoste in stoste container 1, by four-way switching valve a's 3 A1-B1 access, four-way switching valve b 4 A2-B2 access enter in syringe pump 5, according to 6 pairs of strength of fluid Indexs measure device infuse The stoste penetrated in pump a 5 carries out detection and determines preliminary extension rate, and under the control of 5 control unit of syringe pump a, injection is quantitative Stoste enter in diluting tank I 13, when undercoating liquid hybrid chip 8, driven with the syringe pump b 11 equipped with solvent in solvent bottle 10 Dynamic solvent enters liquid hybrid chip 8 together, and two kinds of liquid are the same in chip junction operation process, are more advantageous to mixed It is combined into diluting tank I 13, pump a 5 to be injected, syringe pump b 11 complete liquid injection, and air pump 7 pushes away the liquid sample in pipeline Enter in diluting tank 13.Then stoste remaining in syringe pump a 5 is passed through to A2-B2 access, the four-way of four-way switching valve b 4 The A1-B1 access of switching valve a 3 enters receiving flask 19.Dilution in 5 back suction diluting tank 13 of syringe pump carries out syringe pump 5 Rinse liquid is discharged into receiving flask 19 by rinse, and after rinse operates 2-3 times, the part of dilution liquid in back suction diluting tank 13, is utilized again Strength of fluid Indexs measure device 6 detects the first time dilution in syringe pump a 5, determines and finally needs extension rate. Then first time solution dilution step is repeated, diluted liquid enters in diluting tank II 16.
After completing stoste dilution, syringe pump a 5 drives the cleaning solution in soda liquor container 2 to enter pipeline and is cleaned, complete After rinsing at 3-5 times, air pump 7 empties pipeline liquid, and liquid is by diluting tank 13, diluting tank 16 in solenoid electric valve I It is respectively enterd in receiving flask a 15 and receiving flask b 18 under 14 and solenoid electric valve II, 17 open state.
In one embodiment, the strength of fluid detector 6 is fiber spectrometer, and the fibre-optical probe of the fiber spectrometer is set Outside 5 chamber of syringe pump a, it is close to chamber wall.
When carrying out biochemical indicator detection, it is often necessary to after primary dilution, be detected to index, then carry out secondary dilute It releases, improves diluted accuracy.In the embodiment of the utility model Fig. 2 and Fig. 3, secondary dilution can be achieved.
The diluted Stability and veracity of automatic sampling is improved according to the utility model, passes through chip minipool, liquid Sample dilution mixing is more uniform, and diluted sample introduction control errors are within 2%.In addition, secondary successively decrease may be implemented in the utility model Concentration dilution and unknown liquid are diluted, and are especially realized the secondary liquid diluting for unknown concentration liquid, are improved height Concentration liquids dilute precision;Full automatic working automatically controls cleaning, effectively reduces manual operation, can be effective in industrial application Reduce cost of labor;It may be adapted to a variety of occasions such as laboratory micro dilution, fermentation on-line checking dilution.
A kind of dilution device of automatic sampling of the utility model can be diluted field with automatic sampling and manufacture and use.
Although the embodiments of the present invention are described in conjunction with attached drawing above, the utility model does not limit to In above-mentioned specific embodiments and applications field, above-mentioned specific embodiment is only schematical, directiveness, without It is restrictive.Those skilled in the art under the enlightenment of this specification and are not departing from the utility model claims In the case where the range protected, a variety of forms can also be made, these belong to the column of the utility model protection.

Claims (11)

1. a kind of dilution device of automatic sampling, including stoste container, soda liquor container, hydraulic power supply, Pneumatic pressure power source, liquid Body hybrid chip, solvent bottle, diluting tank, receiving flask, Multi-channel switching valve, solenoid electric valve and interconnected pipeline, wherein
Stoste container, soda liquor container, solvent bottle contain stoste, cleaning solution, retarder thinner respectively;
Hydraulic power supply includes at least two hydraulic powers for the quantitative hydraulic power source that can quantitatively control liquid disengaging Source composition, is connected with stoste container, soda liquor container, solvent bottle, enters pipeline for stoste, cleaning solution, retarder thinner and provide drive Power;
Pneumatic pressure power source, driving filtrated air enter in pipeline;
Liquid hybrid chip crosses mixing for stoste and retarder thinner;
Diluting tank, one end are used for liquid diluting by piping connection receiving flask by piping connection liquid hybrid chip, the other end Storage;
Receiving flask, for collecting dilution and/or cleaning waste liquid;
Solenoid electric valve acts on the pipeline that diluting tank is connect with receiving flask, and the liquid for controlling in diluting tank enters receipts Collect bottle;
Multi-channel switching valve switches over pipe path, includes at least three Multi-channel switching valves, wherein at least one four Channel switching valve.
2. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the diluting tank, electromagnetism control Valve processed and its pipeline of relevant connection as a whole, can be made of one or more groups of.
3. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the quantitative hydraulic power source Including the control unit for controlling sample introduction, the quantitative hydraulic power source control unit adjust liquid enter in diluting tank when Between, flow velocity and flow be to control the sample volume of liquid.
4. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the Pneumatic pressure power source includes For controlling the control unit of gas inlet, Pneumatic pressure power source control unit is for controlling inlet period, flow velocity and air inlet Amount.
5. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the Multi-channel switching valve packet Include the control unit for controlling the switching of pipe path interface.
6. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the quantitative hydraulic power source On be provided with the liquid storage chamber of transparent material.
7. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that further include strength of fluid detection Device is arranged at the liquid storage chamber of quantitative hydraulic power source transparent material;The strength of fluid detector includes detection Control unit, the strength of fluid detector detection control unit are used for the detection to liquid on-line concentration and control.
8. a kind of dilution device of automatic sampling according to claim 7, which is characterized in that the strength of fluid detector For fiber spectrometer.
9. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the quantitative hydraulic power source For syringe pump, the Pneumatic pressure power source is air pump.
10. a kind of dilution device of automatic sampling according to claim 1 to 8, which is characterized in that it is described from The dilution device of dynamic sample introduction further includes control system and display interface, and the control system includes general processor, digital signal Processor, application-specific integrated circuit ASIC or on-site programmable gate array FPGA, for controlling the control list of quantitative hydraulic power source Member, the detection control of the control unit in Pneumatic pressure power source, the control unit of Multi-channel switching valve, strength of fluid index detection device are single Member;The display interface shows flow velocity, the sample volume of liquid and/or gas, strength of fluid index and its extension rate.
11. a kind of dilution device of automatic sampling according to claim 1, which is characterized in that the liquid hybrid chip Material includes PDMS, PC, PMMA, glass and/or silicon.
CN201822043033.0U 2018-12-06 2018-12-06 A kind of dilution device of automatic sampling Active CN209485838U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111505324A (en) * 2020-05-13 2020-08-07 安图实验仪器(郑州)有限公司 Automatic solution diluting method
CN113533446A (en) * 2021-07-13 2021-10-22 长鑫存储技术有限公司 Chemical cleaning liquid preparation system and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111505324A (en) * 2020-05-13 2020-08-07 安图实验仪器(郑州)有限公司 Automatic solution diluting method
CN113533446A (en) * 2021-07-13 2021-10-22 长鑫存储技术有限公司 Chemical cleaning liquid preparation system and method

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