CN209456555U - A kind of magnetron sputtering plating room for fabric - Google Patents

Abstract

A kind of magnetron sputtering plating room for fabric, including shell, the shell is respectively equipped with fabric inlet and fabric outlet on opposite two sidewalls, the inside of the shell is connected with vaccum-pumping equipment, the inside of the shell is equipped with film coating roller and multiple deflector rolls, the film coating roller and deflector roll are connected with driving equipment, and the film coating roller and multiple deflector rolls rotate in same direction under the driving of the driving equipment, and fabric is transported to the fabric outlet by the fabric inlet.The utility model is intended to provide a kind of magnetic-controlled sputtering coating equipment for fabric coloring, and the magnetron sputtering plating room design of the utility model facilitates the breakdown maintenance of sputtering source；And the magnetron sputtering plating room of the utility model can be suitable for the high-volume flow line production of fabric.

Description

A kind of magnetron sputtering plating room for fabric

Technical field

The utility model relates to fabric coloring apparatus field more particularly to a kind of coating chambers that can be used for fabric coloring.

Background technique

In existing colour system, by adding lustre to, principle is distinguished, and there are mainly two types of methods of adding lustre to: pigmentary color and structure Color.Pigmentary color depends primarily on the chemical bond in material molecule --- and the electronics state in which in some chemical bonds is very easy to The visible light of specific wavelength is absorbed, and being left other wavelength will be reflected to that different colors is presented.Such effect can be played Substance be exactly pigment, such color is referred to as pigmentary color.Pigmentary color can be understood as a kind of build-in attribute of material.

Schemochrome is otherwise known as physical colour, is the special construction due to body surface, make light wave occur refraction, diffusing reflection, Diffraction or interference enhance the light intensity of the certain specific wavelengths of spectrum to change the ingredient of light, certain, weaken, finally make object Body shows different colors.The metallic luster on beetle body wall surface and flash of light etc. are typical schemochromes.

Traditional fabric coloring depends on pigmentary color and adds lustre to, and specially chemical dyestuff dyes, and mainly applies dyestuff It is added in base fabric and generates.The dyeing and finishing process of entire dyeing and finishing industry generally comprises pretreatment, dyeing, stamp and arranges several at present A step.Traditional dyeing and finishing has the following problems:

1, dyeing and finishing industry belongs to the strict supervision class industry of current country, and average every hundred meters of cloth dyeings just need to consume 2-4 Ton water, and wastewater flow rate accounts for the 60-80% of total water consumption.Meanwhile volatilization can be generated in the preparation and production process of dyestuff Contact scar substance.

2, existing chemical dyestuff dyeing relies primarily on absorption between dye radical and fabric fibre and fixed, and the mistake Journey has high dependence to the structure of fiber, so being directed to different fabric textures, needs with the use of different dyeing Agent and auxiliary agent, such as nylon fabric mainly mainly use the dye of positive ion or disperse dyeing, vinegar with acid dyes, acrylic fabric Ester fiber fabric mainly uses disperse dyes, azoic dyeing is also used sometimes, so the universality of pigment is poor.

3, traditional dyeing be mainly liquid stain coloring, the fabric of different weaving manners in shrink crimping degree exist compared with Big difference, therefore it is directed to the fabric of different weaving manners, when dyeing, used equipment was also different.

In view of drawbacks described above existing for traditional chemical industry dyeing, technology deposition film on textile material is sunk using vacuum Layer, structural texture color make fabric that the gorgeous color that becomes clear be presented.The dye technology no wastewater discharge, avoids water resource waste And the pollution to environment；Wider simultaneously for base fabric adaptability, the fiber of base fabric can be the native proteins such as mulberry silk fibre Dimension, can be the chemical fibres such as terylene, polyamide fibre.

In the prior art, magnetron sputtering technology is mainly used for the plated film of glass, plastic film and other material, seldom applies It is less for the technical research of fabric magnetron sputtering plating in fabric.

Fig. 1 is the structure diagram of magnetron sputtering coater in the prior art；Please refer to Fig. 1.A kind of magnetic control is shown in Fig. 1 Sputter coating machine, can be applied to the magnetron sputtering plating of fabric, and magnetron sputtering coater mainly includes vacuum chamber, in vacuum chamber Equipped with film coating roller, being respectively arranged on the left side and the right side above film coating roller receives cotton piece buff and puts cotton piece buff, and multiple lead is additionally provided in vacuum chamber To wheel, the lower section of film coating roller is equipped with target cover and template, multiple sputtering sources is equipped in target cover, between target cover and film coating roller Gap is target sputtering zone, and template is located in the region.When carrying out fabric plated film, it is wrapped in the fabric warp received in cotton piece buff It is wrapped on film coating roller after the guidance of directive wheel, when being wrapped in the fabric on film coating roller by target sputtering zone, from target cover The target particle flux of interior injection passes through the hollowed out area of template, to form the film that adds lustre to certain pattern in fabric surface Layer.

The unreeling of its fabric of the magnetron sputtering coater of the prior art, plated film and winding carry out in vacuum chamber 1, by It is limited in by 1 inner space of vacuum chamber, the magnetron sputtering coater of the prior art is only applicable to the fabric of small lot Processing is unfavorable for realizing the high-volume flow line production of fabric.In addition, in the prior art, when event occurs for the sputtering source of coating machine When barrier, the maintenance of sputtering source and other component is more difficult in coating chamber.

Utility model content

In view of above-mentioned analysis, the utility model is intended to provide a kind of magnetic-controlled sputtering coating equipment for fabric coloring, The magnetron sputtering plating room of the utility model is designed, and the breakdown maintenance of sputtering source is facilitated；And the magnetron sputtering of the utility model Film room can be suitable for the high-volume flow line production of fabric.

The purpose of this utility model is mainly achieved through the following technical solutions:

A kind of magnetron sputtering plating room for fabric, including shell, the shell are respectively equipped on opposite two sidewalls The inside of fabric inlet and fabric outlet, the shell is connected with vaccum-pumping equipment, the inside of the shell be equipped with film coating roller and Multiple deflector rolls, the film coating roller and deflector roll are connected with driving equipment, under the driving of the driving equipment film coating roller and Multiple deflector rolls rotate in same direction, and fabric is transported to the fabric outlet by the fabric inlet；

It is additionally provided with multiple sputtering sources below the film coating roller, forms plating between multiple sputtering sources and the film coating roller Intermembrane space；

The concave shape running target vehicle that can be pulled out is equipped with below the coating chamber, target vehicle bottom surface is equipped with wheel, can It extracts out or pushes back, multiple sputtering sources are fixed on the target car recess.

Further, a drive roll, the drive roll and the film coating roller and institute are included at least in multiple deflector rolls Driving equipment is stated to be connected.

Further, the target car recess is arc-shaped to be adapted with film coating roller outer surface.

Further, the sputtering source is along the target car recess spaced set.

Further, the target in multiple sputtering sources is identical or different.

Further, it is additionally provided with the cooling system for connecting the film coating roller and multiple sputtering sources.

Further, the fabric inlet and fabric outlet are greater than the fabric thickness 1-5mm.

The utility model also provides a kind of coating apparatus, including multiple foregoing magnetron sputtering plating rooms, adjacent Load lock is equipped between the magnetron sputtering plating room, the load lock connects the vaccum-pumping equipment, described true It is equipped with multiple deflector rolls in empty isolation ward, includes at least a drive roll, the drive roll and the driving in multiple deflector rolls Equipment is connected.

Further, the vacuum insulation chamber surface is equipped with watch window, and the load lock is also connected with monitoring system System, the monitoring system include the sensor being arranged in the vacuum insulation room, and the sensor and ppu communicate Connection.

The target vehicle of magnetron sputtering plating room provided by the utility model, coating chamber lower part can be pulled out or be pushed back along track, When the indoor sputtering source of plated film or other structures break down, target vehicle can be pulled out and be repaired, facilitate producing line troubleshooting. The coating chamber of the utility model is equipped with fabric inlet and fabric outlet, and fabric only carries out plated film operation, Ke Yitong in coating chamber The form for crossing multiple coating chambers of connecting realizes the high-volume flow line production of fabric plated film.

It in the utility model, can also be combined with each other between above-mentioned each technical solution, to realize more preferably combination sides Case.Other feature and advantage of the utility model will illustrate in the following description, also, certain advantages can be from specification It becomes apparent, or is understood and implementing the utility model.The purpose of this utility model and other advantages can pass through It is achieved and obtained in specifically noted content in bright book, claims and attached drawing.

Detailed description of the invention

Attached drawing is only used for showing the purpose of specific embodiment, and is not considered as limitations of the present invention, entire In attached drawing, identical reference symbol indicates identical component.

Fig. 1 is the structure diagram of magnetron sputtering coater in the prior art；

Fig. 2 is the structure diagram of coating chamber provided by the embodiment of the utility model；

Fig. 3 is the structure diagram of coating apparatus provided by the embodiment of the utility model；

Fig. 4 is the structure diagram of drying room provided by the embodiment of the utility model；

Fig. 5 is the structure diagram of fabric coating system provided by the embodiment of the utility model；

Appended drawing reference:

1- fabric；2- deflector roll；3- baking zone；4- heating device；5- bleeding point；6- film coating roller；7- sputtering source；8- wheel； 9- target vehicle；10- isolation ward；111- unreels room；122- drying room；133- coating chamber；144- winds room.

Specific embodiment

It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.

Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.In the absence of conflict, following implementation Feature in example and embodiment can be combined with each other.

In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " is based on the figure Orientation or positional relationship is merely for convenience of describing the present invention and simplifying the description, rather than the dress of indication or suggestion meaning It sets or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to the utility model Limitation.

In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be It is connected directly, the mutual of connection inside two elements or two elements can also be can be indirectly connected through an intermediary Interactively.For the ordinary skill in the art, it can understand that above-mentioned term is practical new at this as the case may be Concrete meaning in type.

It should be noted that term " first ", " second " are only used for facilitating description different in the description of the present invention, Component, be not understood to indicate or imply ordinal relation, relative importance or implicitly indicate indicated technical characteristic Quantity." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one of the features.

It is described below in conjunction with the detailed content to the utility model of attached drawing, so that those skilled in the art can The more detailed content for understanding the utility model.

Embodiment

The present embodiment provides a kind of fabric coating system that can be used for fabric coloring, structure diagram is as shown in Figure 5.Specifically , it successively include unreeling room, drying room, coating apparatus and winding room in the fabric coating system of the present embodiment, in each chamber Multiple for transporting the deflector roll of fabric equipped with being equipped with, deflector roll is connected with driving equipment, and fabric is identical in the driving lower edge of deflector roll Direction rotation, by fabric by the room of unreeling be transported to winding room in, each chamber is connected with vaccum-pumping equipment, i.e. whole system Under vacuum conditions, the room of unreeling is equipped with the opening being put into for fabric for operation, fabric is put into after unreeling room and closes opening, made Whole system is isolated with ambient atmosphere, and internal system is extracted into after preset vacuum degree by opening vaccum-pumping equipment carries out fabric again Sputter coating, system moment during sputter coating keep vacuum state, can effectively guarantee the quality of plated film.

When the present embodiment is in use, it is put into and unreels indoor fabric and rotated in same direction under the driving of deflector roll, with Fabric is transported in winding room by the room of unreeling.In the process, drying room can dry moisture extra in fabric；Plated film Room can carry out plated film operation to fabric；Winding room for collecting fabric, will be wound after collection indoor air pressure be down to The outlet being disposed thereon is opened after ambient atmosphere is identical again to take out fabric, to complete a production operation.Due to this The unreeling of embodiment, plated film and winding are carrying out in different chambers, and fabric only carries out plated film operation in coating chamber, can The high-volume flow line production of fabric plated film is realized in the form of through multiple coating chambers of connecting.And the overall space volume of system It is significantly increased compared with the prior art, to realize the high-volume flow line production of fabric.

The utility model provides a kind of coating apparatus, including coating chamber, and wherein the specific structure of coating chamber is as follows, the plating Film room includes shell, and fabric inlet and fabric outlet, the inside of the shell are respectively equipped on the opposite two sidewalls of the shell It is connected with vaccum-pumping equipment, the inside of the shell is equipped with film coating roller and multiple deflector rolls, and inside is equipped with film coating roller and multiple deflector rolls It is connected with driving equipment, film coating roller and multiple deflector rolls rotate in same direction under the driving of driving equipment, by fabric Fabric outlet is transported to by fabric inlet；Multiple sputtering sources, multiple sputtering sources and institute are additionally provided with below the film coating roller It states and forms plating intermembrane space between film coating roller；The concave shape running target vehicle that can be pulled out, the target are equipped with below the coating chamber Vehicle bottom surface is equipped with wheel, can extract out or push back, and target car recess is arc-shaped to be adapted with film coating roller outer surface, multiple described Sputtering source is equidistantly fixed on the target car recess.Magnetron sputtering plating room provided by the utility model and coating apparatus, The target vehicle of coating chamber lower part can be pulled out or be pushed back along track, can when the indoor sputtering source of plated film or other structures break down The pull-out of target vehicle is repaired, producing line troubleshooting is facilitated.The coating chamber of the utility model is equipped with fabric inlet and fabric outlet, Fabric only carries out plated film operation in coating chamber, and in coating process, identical target is can be set in the same indoor target of plated film Or different targets, the high-volume flow line production of fabric plated film is realized by way of multiple coating chambers of connecting.

The film coating roller and multiple sputtering sources are also connected with cooling system, can generate high temperature in coating process, pass through Cooling system cools down film coating roller, and then cools down to fabric, prevents fabric coking due to high temperature.

Fabric inlet and fabric outlet are slightly larger than the thickness of fabric, if can satisfy fabric normal through, And it is the smaller the better, to effectively increase flow resistance, the diffusion of gas is reduced, avoids collaborating, more conducively magnetron sputtering plating and true The maintenance of reciprocal of duty cycle, the present embodiment are preferably greater than the fabric thickness 1-5mm.

The utility model also provides a kind of coating apparatus, including multiple foregoing magnetron sputtering plating rooms, adjacent Load lock is equipped between the magnetron sputtering plating room, the load lock connects the vaccum-pumping equipment, described true It is equipped with multiple deflector rolls in empty isolation ward, includes at least a drive roll, the drive roll and the driving in multiple deflector rolls Equipment is connected.

Further, the vacuum insulation chamber surface is equipped with watch window, and the load lock is also connected with monitoring system System, the monitoring system include the sensor being arranged in the vacuum insulation room, and the sensor and ppu communicate Connection.Sensor may include temperature sensor and pressure sensor, and staff combines according to the temperature and pressure monitored The plated film situation of fabric surface can real-time adjusting process parameter.

The specific structure of drying room provided in this embodiment is that the drying room is case structure, is internally provided with heating Device and several deflector rolls, wherein the heating device is arranged on two opposite inner walls of drying room, and the deflector roll is distributed in drying Interior, and be arranged in parallel with heating device；The drying room is equipped with gap, and fabric enters drying from one of gap Room, and after being moved to same direction along the deflector roll, the drying room is pierced by from another gap；The drying room is with respect to two inner walls On heating device it is parallel with the surface of fabric.

A kind of drying room that can be used for fabric coloring of drying room, specifically, the drying room be case structure, inside set There are heating device and several deflector rolls, wherein the heating device is arranged on two opposite inner walls of drying room, the deflector roll distribution It is arranged in parallel in drying room, and with heating device；The drying room is equipped with gap, and fabric enters from one of gap Drying room, and after being moved to same direction along the deflector roll, the drying room is pierced by from another gap；The drying room is with respect to two Heating device on inner wall is parallel with the surface of fabric.

Further, the drying room respectively corresponds the obverse and reverse of fabric with respect to the heating device on two inner walls.It dries Inside dry chamber, the heating device of two sides respectively corresponds the tow sides of fabric, can comprehensively remove moisture and gas in fabric Body avoids the occurrence of only one side and heats, and the drying of another side is not enough, when causing to carry out plated film to fabric, inside still contain There are moisture and gas, influences the fastness of fabric surface film layer.

Further, the drying room is equipped with bleeding point, and the bleeding point is connect by pipeline with extract system；It is described Pipeline is coated with the cooling pipe being connected with cooling system.Bleeding point can will dry indoor moisture and gas and arrange rapidly Out, residual in chamber is avoided, and then fabric is caused to get damp again, influences subsequent coating process.

It further, is vacuum environment in the drying room.

Further, the heating device is infrared heating device, and the infrared heating device is infrared radiation lamp.This reality Applying the heating device in example is infrared heating device.Under vacuum conditions due to the present embodiment operation, vacuum non-conducting thermal energy, Therefore, the heat heating object with radiation forms is needed under vacuum conditions.For fabric, burning point is very low, should use energy Amount controls easier radiation forms and is heated.It is heated in the present embodiment using infrared heating device, infrared heating dress Set to be infrared radiation lamp, infra-red radiation lamp group or infra-red radiation lamp box etc..

Further, in this embodiment the heating device is set on the left and right sides wall of drying room, fabric is by right side The gap of wall enters drying room, is pierced by drying room by the gap of left side wall.

Further, the outer wall of drying room is coated with thermal insulation material, this can make drying room be maintained at certain temperature, section It is about environmentally friendly.

Magnetron sputtering coater compared with the prior art, drying room provided by the utility model can will be more in fabric Remaining moisture drying, and being extracted the moisture of evaporation out from drying room by extract system, is coated with and cooling system using pipeline The connected cooling pipe of system, the solidification so that moisture liquefies rapidly avoid remaining steam in drying room, and then prevent fabric resurgence simultaneously The risk of separation layer is formed on surface, is conducive to the color fastness for improving film layer.

Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new The range of each embodiment technical solution of type.

Claims (7)

1. a kind of magnetron sputtering plating room for fabric, which is characterized in that including shell, on the opposite two sidewalls of the shell It is respectively equipped with fabric inlet and fabric outlet, the inside of the shell is connected with vaccum-pumping equipment, and the inside of the shell is equipped with Film coating roller and multiple deflector rolls, the film coating roller and deflector roll are connected with driving equipment, described under the driving of the driving equipment Film coating roller and multiple deflector rolls rotate in same direction, and fabric is transported to the fabric by the fabric inlet and is gone out Mouthful；

It is additionally provided with multiple sputtering sources below the film coating roller, is formed between plated film between multiple sputtering sources and the film coating roller Gap；

The concave shape running target vehicle that can be pulled out is equipped with below the coating chamber, target vehicle bottom surface is equipped with wheel, can extract out Or push back, multiple sputtering sources are fixed on the target car recess.

2. magnetron sputtering plating room according to claim 1, which is characterized in that include at least one in multiple deflector rolls Drive roll, the drive roll and the film coating roller are connected with the driving equipment.

3. magnetron sputtering plating room according to claim 1, which is characterized in that the target car recess be with outside film coating roller Surface is adapted arc-shaped.

4. magnetron sputtering plating room according to claim 1, which is characterized in that the sputtering source is along the target car recess Spaced set.

5. magnetron sputtering plating room according to claim 1, which is characterized in that the target in multiple sputtering sources is identical Or it is different.

6. magnetron sputtering plating room according to claim 1, which is characterized in that be additionally provided with the connection film coating roller and multiple The cooling system of the sputtering source.

7. magnetron sputtering plating room according to claim 1, which is characterized in that the fabric inlet and fabric outlet are greater than The fabric thickness 1-5mm.