CN209452356U - A kind of silicium wafer dust guard - Google Patents
A kind of silicium wafer dust guard Download PDFInfo
- Publication number
- CN209452356U CN209452356U CN201920112191.9U CN201920112191U CN209452356U CN 209452356 U CN209452356 U CN 209452356U CN 201920112191 U CN201920112191 U CN 201920112191U CN 209452356 U CN209452356 U CN 209452356U
- Authority
- CN
- China
- Prior art keywords
- fixed
- station
- protecting box
- driving motor
- silicium wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of silicium wafer dust guards, including station, the upper end of the station is fixed, and there are two limit plates, cylinder is fixed on the limit plate, the piston-rod end of the cylinder is fixed with L-type plate, the upper end of the station is equipped with transport mechanism, and two L-type plates are located at the two sides of transport mechanism, the side of the station is fixed with fixed bin, the side of the fixed bin is fixed with protecting box, rotating device is equipped in the fixed bin, the rotating device is equipped with mobile bar, one end of the mobile bar is through fixed bin and the side wall of protecting box and extends in protecting box.The utility model solves the problems, such as artificial dust-proof inefficiency, it also solves the problems, such as simultaneously dust-proof halfway, avoid the case where causing silicium wafer to damage when artificial dust-proof, reduce the labor intensity of staff, improve dust-proof efficiency, structure is simple, easy to use, realizes and automates dust-proof function.
Description
Technical field
The utility model relates to silicium wafer technical field more particularly to a kind of silicium wafer dust guards.
Background technique
Silicon crystal, i.e. silicon wafer, the crystalline solid of silicon are divided into monocrystalline silicon and polysilicon, and monocrystalline silicon can be used to make wafer, wafer
It is the base stock for manufacturing integrated circuit；And high purity polycrystalline silicon is the basic material of electronics industry and solar photovoltaic industry.It is more
Crystal silicon is the direct material for producing monocrystalline silicon, is the semiconductors such as contemporary artificial intelligence, automatic control, information processing, photoelectric conversion
The electronics and information infrastructure material of device, referred to as " foundation stone of Microelectronics Building ".
With the development of society and the progress of scientific and technological level, solar energy using more and more common, when using solar energy,
Need to use silicium wafer, silicium wafer needs to carry out in use for some time dust-proof, and still, existing silicium wafer is dust-proof most of
It is all artificial dust-proof, not only inefficiency, labor intensity of workers is big, is also easy to cause the damage of silicium wafer, increase loss, and
It is dust-proof to be not thorough, for this purpose, we have proposed a kind of silicium wafer dust guards to solve the above problems.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of silicium wafer proposed is dust-proof
Device.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of silicium wafer dust guard, including station, the upper end of the station is fixed, and there are two limit plate, the limits
Cylinder is fixed on the plate of position, the piston-rod end of the cylinder is fixed with L-type plate, and the upper end of the station is equipped with conveyer
Structure, and two L-type plates are located at the two sides of transport mechanism, the side of the station is fixed with fixed bin, the fixed bin
Side be fixed with protecting box, rotating device is equipped in the fixed bin, the rotating device is equipped with mobile bar, the movement
One end of bar is through fixed bin and the side wall of protecting box and extends in protecting box, and one end of the mobile bar is fixed with movement
Block, the two sides of the protecting box are equipped with opening, and the both ends of the movable block extend through two and are open and extend to protecting box
Two sides, the side of the movable block is rotatably connected to connecting rod, and the side of the protecting box is rotatably connected to rotor plate, described
One end of connecting rod is rotatably connected on the side of rotor plate, and the lower end of the rotor plate is fixed with foam-rubber cushion, and foam-rubber cushion and biography
Send mechanism corresponding.
Preferably, the transport mechanism includes being fixed on four fixed plates of station upper end, two fixations of the same side
Plate common rotation between two fixed plates in one group, same group is connected with rotating roller, is provided with jointly in two rotating rollers
Conveyer belt, the side of one of fixed plate are fixed with gearbox, and the side of the gearbox is fixed with the first driving motor, institute
The output shaft for stating the first driving motor runs through the side wall of gearbox and extends in gearbox, the output of first driving motor
Shaft end is fixed with gear, and the output shaft of the gear through gearbox and the side wall of the fixed plate and is connected to it
In a rotating roller side, the foam-rubber cushion and conveyer belt are corresponding.
Preferably, the rotating device includes two risers being fixed in fixed bin on the side wall of one end, one of them is perpendicular
The side of plate is fixed with the second driving motor, and the output shaft of second driving motor through the riser and extends to the riser
The other side, the output shaft end of second driving motor are fixed with a vertical bar, and the side of another riser is rotatably connected to
Cross bar, one end of the cross bar are fixed with another vertical bar, run through jointly on two vertical bars and be equipped with shaft, be arranged in the shaft
There is fixing sleeve, one end of the mobile bar is fixed on the side of fixing sleeve.
Preferably, the lower end quadrangle of the station is respectively and fixedly provided with support rod, and the lower end of the support rod is fixed with backing plate.
Preferably, the upper end side of the L-type plate is fixed with rubber block.
Preferably, the side of the protecting box is welded on one end side wall of fixed bin.
Compared with prior art, the utility model has the beneficial effects that
1, by the cooperation between conveyer belt, fixed plate and the first driving motor, the function for automatically delivering silicium wafer is realized
Can, avoid the case where artificial transmission causes large labor intensity generation；
2, it by the cooperation between the second driving motor, mobile bar, movable block, connecting rod and rotor plate, solves artificial
The problem of dust-proof inefficiency, has achieved the effect that automatic dustproof；
In conclusion the problem of which solves artificial dust-proof inefficiency, while also solving dust-proof halfway
Problem avoids the case where causing silicium wafer to damage when artificial dust-proof, reduces the labor intensity of staff, improves
Dust-proof efficiency, structure is simple, easy to use, realizes and automates dust-proof function.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of silicium wafer dust guard schematic diagram of internal structure；
Fig. 2 be the utility model proposes a kind of silicium wafer dust guard external structure schematic diagram；
Fig. 3 be the utility model proposes a kind of silicium wafer dust guard side view；
Fig. 4 be the utility model proposes a kind of silicium wafer dust guard rotor plate structural schematic diagram；
Fig. 5 be the utility model proposes a kind of silicium wafer dust guard A at enlarged drawing.
In figure: 1 gearbox, 2 first driving motors, 3 protecting box, 4 openings, 5 movable blocks, 6 vertical bars, 7 second driving motors,
8 mobile bars, 9 fixing sleeves, 10 risers, 11 stations, 12 fixed plates, 13 conveyer belts, 14 fixed bins, 15 rotor plates, 16 limit plates,
17 cylinders, 18L template, 19 rubber blocks, 20 backing plates, 21 support rods, 22 connecting rods, 23 foam-rubber cushions.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
Referring to Fig.1-5, a kind of silicium wafer dust guard, including station 11, play the role of support, station 11 it is upper
Limit plate 16 there are two fixing to be held, is fixed with cylinder 17 on limit plate 16, the piston-rod end of cylinder 17 is fixed with L-type plate 18,
The piston rod of cylinder 17 is mobile to drive L-type plate 18 mobile, and the upper end of station 11 is equipped with transport mechanism, is convenient for transmission silicium wafer,
And two L-type plates 18 are located at the two sides of transport mechanism, and the side of station 11 is fixed with fixed bin 14, and the one of fixed bin 14
Side is fixed with protecting box 3, and rotating device is equipped in fixed bin 14, and rotating device is equipped with mobile bar 8, and one end of mobile bar 8 is passed through
It wears the side wall of fixed bin 14 and protecting box 3 and extends in protecting box 3, one end of mobile bar 8 is fixed with movable block 5, mobile bar 8
It is mobile to drive movable block 5 mobile, under the action of rotating device, facilitates and drive movable block 5 to move back and forth using mobile bar 8, from
And silicium wafer is dusted.
The two sides of protecting box 3 are equipped with opening 4, and the both ends of movable block 5 extend through two openings 4 and extend to protecting box
3 two sides, the side of movable block 5 are rotatably connected to connecting rod 22, and movable block 5 is mobile to drive connecting rod 22 mobile, protecting box 3
Side is rotatably connected to rotor plate 15, and one end of connecting rod 22 is rotatably connected on the side of rotor plate 15, the mobile band of connecting rod 22
Turn movable plate 15 rotates, and the lower end of rotor plate 15 is fixed with foam-rubber cushion 23, and foam-rubber cushion 23 and transport mechanism are corresponding, station
11 lower end quadrangle is respectively and fixedly provided with support rod 21, and the lower end of support rod 21 is fixed with backing plate 20, plays the role of stablizing support, L
The upper end side of template 18 is fixed with rubber block 19, facilitates protection silicium wafer, and the side of protecting box 3 is welded on the one of fixed bin 14
On the wall of end side, the rotation of rotor plate 15 drives foam-rubber cushion 23 to rotate, convenient to clear up the dust on silicium wafer.
In the utility model, transport mechanism includes being fixed on four fixed plates 12 of 11 upper end of station, and the two of the same side
A fixed plate 12 is that common rotation is connected with rotating roller between two fixed plates 12 in one group, same group, in two rotating rollers
Being provided with the rotation of 13 rotating roller of conveyer belt jointly drives conveyer belt 13 to rotate, and the side of one of fixed plate 12 is fixed with speed change
Case 1, the side of gearbox 1 are fixed with the first driving motor 2, and the output shaft of the first driving motor 2 runs through the side wall of gearbox 1 simultaneously
It extends in gearbox 1, the output shaft end of the first driving motor 2 is fixed with gear, and the output shaft of gear runs through
Gearbox 1 and the side wall of the fixed plate 12 and the side for being connected to one of rotating roller, foam-rubber cushion 23 and conveyer belt 13 are opposite
It answers, the output shaft rotation of the first driving motor 2 drives rotating roller rotation, to provide power for transmission silicium wafer.
In the utility model, rotating device includes two risers 10 being fixed in fixed bin 14 on the side wall of one end, wherein
The side of one riser 10 is fixed with the second driving motor 7, and the output shaft of the second driving motor 7 through the riser 10 and extends to
The other side of the riser 10, the output shaft end of the second driving motor 7 are fixed with a vertical bar 6, the side of another riser 10
It is rotatably connected to cross bar, one end of cross bar is fixed with another vertical bar 6, runs through jointly on two vertical bars 6 and be equipped with shaft, in shaft
It is arranged with fixing sleeve 9, one end of mobile bar 8 is fixed on the side of fixing sleeve 9, and the output shaft of the second driving motor 7, which rotates, to be driven
Vertical bar 6 rotates, and the rotation of vertical bar 6 drives fixing sleeve 9 to rotate, and then movable plate 8 is driven to move repeatedly, and convenient is turning for rotor plate 15
It is dynamic that power is provided.
In the utility model, when carrying out dust-proof to silicium wafer, first silicium wafer is placed on conveyer belt 13, then first
The output shaft rotation of driving motor 2 drives gear rotation, and gear rotation drives rotating roller rotation, and then drives transmission
Band 13 is mobile, so that silicium wafer is transmitted to suitable position, then the piston rod of cylinder 17 is mobile drives L-type plate 18 mobile, L
Template 18 is mobile to drive rubber block 19 mobile, is clamped using rubber block 19 to silicium wafer, then the second driving motor 7 is defeated
Shaft rotation drives vertical bar 6 to rotate, and the rotation of vertical bar 6 drives shaft rotation, and shaft rotation drives fixing sleeve 9 mobile, and fixing sleeve 9 moves
Dynamic to drive mobile bar 8 mobile, mobile bar 8 is mobile to drive movable block 5 mobile, and movable block 5 is mobile to drive connecting rod 22 mobile, connection
Bar 22 is mobile to drive rotor plate 15 to rotate, and drives foam-rubber cushion 23 to rotate when rotor plate 15 rotates, using foam-rubber cushion 23 to silicium wafer
Surface carry out it is dust-proof.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (6)
1. a kind of silicium wafer dust guard, including station (11), it is characterised in that: the upper end of the station (11) is fixed with
Two limit plates (16) are fixed with cylinder (17) on the limit plate (16), and the piston-rod end of the cylinder (17) is fixed with L
The upper end of template (18), the station (11) is equipped with transport mechanism, and two L-type plates (18) are located at the two of transport mechanism
The side of side, the station (11) is fixed with fixed bin (14), and the side of the fixed bin (14) is fixed with protecting box (3),
Rotating device is equipped in the fixed bin (14), the rotating device is equipped with mobile bar (8), one end of the mobile bar (8)
It through fixed bin (14) and the side wall of protecting box (3) and extends in protecting box (3), one end of the mobile bar (8) is fixed with
The two sides of movable block (5), the protecting box (3) are equipped with opening (4), and the both ends of the movable block (5) extend through two and open
Mouth (4) and the two sides for extending to protecting box (3), the side of the movable block (5) is rotatably connected to connecting rod (22), the protection
The side of box (3) is rotatably connected to rotor plate (15), and one end of the connecting rod (22) is rotatably connected on the one of rotor plate (15)
The lower end of side, the rotor plate (15) is fixed with foam-rubber cushion (23), and foam-rubber cushion (23) is corresponding with transport mechanism.
2. a kind of silicium wafer dust guard according to claim 1, which is characterized in that the transport mechanism includes being fixed on
Four fixed plates (12) of station (11) upper end, two fixed plates (12) of the same side are that two in one group, same group are solid
Common rotation is connected with rotating roller between fixed board (12), is provided with conveyer belt (13) in two rotating rollers jointly, one of them is solid
The side of fixed board (12) is fixed with gearbox (1), and the side of the gearbox (1) is fixed with the first driving motor (2), and described
The output shaft of one driving motor (2) runs through the side wall of gearbox (1) and extends in gearbox (1), first driving motor
(2) output shaft end is fixed with gear, and the output shaft of the gear runs through gearbox (1) and the fixed plate (12)
Side wall and be connected to the side of one of rotating roller, the foam-rubber cushion (23) and conveyer belt (13) are corresponding.
3. a kind of silicium wafer dust guard according to claim 1, which is characterized in that the rotating device includes being fixed on
Two risers (10) on the interior one end side wall of fixed bin (14), the side of one of riser (10) are fixed with the second driving motor
(7), the output shaft of second driving motor (7) runs through the riser (10) and extends to the other side of the riser (10), described
The output shaft end of second driving motor (7) is fixed with a vertical bar (6), and the side of another riser (10) is rotatably connected to cross
Bar, one end of the cross bar are fixed with another vertical bar (6), run through jointly on two vertical bars (6) and be equipped with shaft, in the shaft
It is arranged with fixing sleeve (9), one end of the mobile bar (8) is fixed on the side of fixing sleeve (9).
4. a kind of silicium wafer dust guard according to claim 1, which is characterized in that the lower end four of the station (11)
Angle is respectively and fixedly provided with support rod (21), and the lower end of the support rod (21) is fixed with backing plate (20).
5. a kind of silicium wafer dust guard according to claim 1, which is characterized in that the upper end one of the L-type plate (18)
Side is fixed with rubber block (19).
6. a kind of silicium wafer dust guard according to claim 1, which is characterized in that weld the side of the protecting box (3)
It connects on one end side wall of fixed bin (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920112191.9U CN209452356U (en) | 2019-01-23 | 2019-01-23 | A kind of silicium wafer dust guard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920112191.9U CN209452356U (en) | 2019-01-23 | 2019-01-23 | A kind of silicium wafer dust guard |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209452356U true CN209452356U (en) | 2019-10-01 |
Family
ID=68045490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920112191.9U Expired - Fee Related CN209452356U (en) | 2019-01-23 | 2019-01-23 | A kind of silicium wafer dust guard |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209452356U (en) |
-
2019
- 2019-01-23 CN CN201920112191.9U patent/CN209452356U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191001 Termination date: 20210123 |