CN209434157U - A kind of semiconductor processing equipment - Google Patents
A kind of semiconductor processing equipment Download PDFInfo
- Publication number
- CN209434157U CN209434157U CN201920449158.5U CN201920449158U CN209434157U CN 209434157 U CN209434157 U CN 209434157U CN 201920449158 U CN201920449158 U CN 201920449158U CN 209434157 U CN209434157 U CN 209434157U
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- China
- Prior art keywords
- service sink
- transmission chain
- drying box
- gear
- semiconductor processing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a kind of semiconductor processing equipments, including transmission chain, gear, service sink, drying box, except electric room, automatic telescopic link is fixedly connected with below the transmission chain, the transmission chain both ends are equipped with gear, the gear is equipped with motor, the service sink, drying box, except electric room is arranged below transmission chain, the cleaning bottom of pond portion is equipped with heater and supersonic generator, liquid level sensor is equipped in the middle part of the service sink, the cleaning bottom of pond portion is equipped with drainpipe, head pin is equipped with outside the service sink, the drying box bottom is equipped with heater, the drying upper box part side is equipped with fan, it is described to remove electric chamber interior equipped with ion blower and electrostatic detector.The utility model have the advantages that can Rapid Cleaning, dry, remove electrostatic, be mainly used for semiconductor machining.
Description
Technical field
The utility model relates to semiconductor processing technology field, specifically a kind of semiconductor processing equipment.
Background technique
With society develop semiconductor with more and more extensive, the conducting power of semiconductor is situated between metallic conductor and absolutely
Between edge body, at normal temperature, its conductive capability only has one of hundreds of thousands of metal, but it has a unusual characteristic, is exactly
Temperature increases the several years, and the variation of its conductive capability, which is worth metal, reduces the variations of several Baidu in temperature, this characteristic makes it
It is widely used, and semiconductor fabrication is extremely difficult, because its chemical property is not very stable is easy in the process of cleaning
Occur to chemically react to arrive with cleaning solution that the characteristic of semiconductor is caused to fail, leverages the electric conductivity of semiconductor.
Utility model content
Aiming at the defects existing in the prior art, the utility model aim be to provide one kind can Rapid Cleaning,
Dry, go the semiconductor processing equipment of electrostatic.
The utility model technical solution used for the above purpose is: a kind of semiconductor processing equipment, including passes
Send chain, gear, service sink, drying box, except electric room, be fixedly connected with automatic telescopic link below the transmission chain, it is described from
Insertion is connected with film magazine below dynamic telescopic rod, and the transmission chain both ends are equipped with gear, the gear and the transmission chain
Connection is engaged, the gear is equipped with motor, and the service sink, drying box remove electric room setting below transmission chain, described clear
Wash pool bottom is equipped with heater and supersonic generator, is equipped with liquid level sensor, the cleaning bottom of pond portion in the middle part of the service sink
Equipped with drainpipe, the drainpipe is equipped with switch valve, is equipped with head pin, the head pin and service sink outside the service sink
It is connected by water inlet pipe, cleaning solution is equipped in the head pin, the water inlet pipe is equipped with switch valve, the drying box bottom
Portion is equipped with heater, and the drying upper box part side is equipped with fan, described except electric chamber interior is equipped with ion blower and electrostatic detection
Instrument, it is the motor, automatic telescopic link, switch valve, liquid level sensor, heater, supersonic generator, fan, ion blower, quiet
Electro-detection instrument connects control system by data line, and the control system connects touch panel by data line.
The touch panel is man-machine interface, is a kind of induction type liquid crystal display device of receivable contact input signal.
The drying box bottom is equipped with isolation board, and the isolation board material is graphite plate.
Described to remove electric room bottom equipped with isolation board, the isolation board material is graphite plate.
The liquid level sensor is equipped with warning device.
The utility model has the beneficial effects that by chain transmission avoid semiconductor material in cleaning, dry, remove electrostatic
Artificial contact in the process, and cause to clean sordid problem.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
In figure: 1 transmission chain, 2 gears, 3 service sinks, 4 drying boxes, 5 except electric room, 6 motors, 7 ion blowers, 8 isolation boards,
9 electrostatic detectors, 10 fans, 11 heaters, 12 liquid level sensors, 13 supersonic generators, 14 water inlet pipes, 15 head pins,
16 switch valves, 17 drainpipes, 18 automatic telescopic links, 19 film magazines.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, a kind of semiconductor processing equipment, including transmission chain 1, gear 2, service sink 3, drying box 4, except electricity
Room 5 is fixedly connected with automatic telescopic link 18 below transmission chain 1, and insertion is connected with film magazine 19 below automatic telescopic link 18, passes
1 both ends of chain are sent to be equipped with gear 2, gear 2 engages connection with transmission chain 1, and gear 2 is equipped with motor 6, service sink 3, drying box
4, except electric room 5 is arranged below transmission chain 1,3 bottom of service sink is equipped with heater 11 and supersonic generator 13, service sink 3
Middle part is equipped with liquid level sensor 12, and 3 bottom of service sink is equipped with drainpipe 17, and drainpipe 17 is equipped with switch valve 16, outside service sink 3
Portion is equipped with head pin 15, and head pin 15 is connect by water inlet pipe 14 with service sink 3, cleaning solution is equipped in head pin 15, enters water
Pipeline 14 is equipped with switch valve 16, and 4 bottom of drying box is equipped with heater 11, and 4 top side of drying box is equipped with fan 10, except electric room
5 inside are equipped with ion blower 7 and electrostatic detector 9, motor 6, automatic telescopic link 18, switch valve 16, liquid level sensor 12, heating
Device 11, supersonic generator 13, fan 10, ion blower 7, electrostatic detector 9 connect control system, control system by data line
System connects touch panel by data line.
In the utility model, touch panel is man-machine interface, is a kind of induction type liquid crystal of receivable contact input signal
Display device facilitates manual operation；4 bottom of drying box is equipped with isolation board 8, and 8 material of isolation board is graphite plate, and thermal conductive property is good
It is good, semiconductor can be made sufficiently to dry；Except electric 5 bottom of room is equipped with isolation board 8,8 material of isolation board is graphite plate, and conduction property is good
It is good, it can adequately remove the electrostatic on semiconductor；
Liquid level sensor 12 is equipped with warning device, issues when cleaning solution reaches 12 position Times alarm device of liquid level sensor
Alarm.
The working principle of the utility model is: in use, semiconductor material is put into film magazine 19, it is logical using touch panel
Cross control system control gear 2 on motor 6 make transmission chain 1 transmit automatic telescopic link 18, make its reach service sink 3 just on
Side, control automatic telescopic link 18 are stretched downwards, and film magazine is made to be put into service sink 3, and opening the switch valve 16 on water inlet pipe 14 will clean
Liquid injects service sink 3, and warning device when water level reaches to a certain degree on liquid level sensor 12 starts to alarm, and closes water inlet pipe afterwards
Switch valve 16 on road 14, supersonic generator 13 and heater 11 in service sink 3 are started to work, the row of opening after the completion of cleaning
Switch valve 16 on water pipe 17 is discharged cleaning solution, valve 16 is turned off the switch after discharge, then controls automatic telescopic link 18 and contracts upwards,
Motor 6, which is started to work, controls transmission chain 1 by rotate gear 2, and control automatic telescopic link 18 rests on right above drying box 4,
Then control automatic telescopic link 18 is stretched downwards, and the heater 11 and fan 10 in drying box 4 are started to work, after the completion of drying, control
The contracting upwards of automatic telescopic link 18 processed, motor 6, which is started to work, controls transmission chain 1 by rotate gear 2, controls automatic telescopic link 18
It rests on except right above electric room 5, then control automatic telescopic link 18 is stretched downwards, except the ion blower 7 in electric room 5 is started to work,
It can detecte whether semiconductor also has electrostatic by electrostatic detector 9, after the completion, control automatic telescopic link 18 contracts upwards, work
Make personnel's taking-up film magazine 19 can avoid artificial contact semiconductor, causes dirt because semiconductor material is placed in film magazine
Semiconductor is contaminated, all operations are realized by touch panel.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (5)
1. a kind of semiconductor processing equipment, including transmission chain (1), gear (2), service sink (3), drying box (4), except electric room
(5), it is characterised in that: be fixedly connected with automatic telescopic link (18) below the transmission chain (1), the automatic telescopic link (18)
Lower section insertion is connected with film magazine (19), and transmission chain (1) both ends are equipped with gear (2), the gear (2) and the transmission
Chain (1) engagement connection, the gear (2) are equipped with motor (6), and the service sink (3), drying box (4) are set except electric room (5)
It sets below transmission chain (1), service sink (3) bottom is equipped with heater (11) and supersonic generator (13), described clear
Liquid level sensor (12) are equipped in the middle part of wash pool (3), service sink (3) bottom is equipped with drainpipe (17), the drainpipe (17)
It is equipped with switch valve (16), is equipped with head pin (15) outside the service sink (3), the head pin (15) and service sink (3) are logical
Water inlet pipe (14) connection is crossed, cleaning solution is equipped in the head pin (15), the water inlet pipe (14) is equipped with switch valve
(16), drying box (4) bottom is equipped with heater (11), and drying box (4) the top side is equipped with fan (10), described to remove
Ion blower (7) and electrostatic detector (9), the motor (6), automatic telescopic link (18), switch valve are equipped with inside electric room (5)
(16), liquid level sensor (12), heater (11), supersonic generator (13), fan (10), ion blower (7), electrostatic detection
Instrument (9) connects control system by data line, and the control system connects touch panel by data line.
2. a kind of semiconductor processing equipment according to claim 1, it is characterised in that: the touch panel is man-machine boundary
Face is a kind of induction type liquid crystal display device of receivable contact input signal.
3. a kind of semiconductor processing equipment according to claim 1, it is characterised in that: drying box (4) bottom is equipped with
Isolation board (8), isolation board (8) material are graphite plate.
4. a kind of semiconductor processing equipment according to claim 1, it is characterised in that: described except electric room (5) bottom is equipped with
Isolation board (8), isolation board (8) material are graphite plate.
5. a kind of semiconductor processing equipment according to claim 1, it is characterised in that: set on the liquid level sensor (12)
There is warning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920449158.5U CN209434157U (en) | 2019-04-04 | 2019-04-04 | A kind of semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920449158.5U CN209434157U (en) | 2019-04-04 | 2019-04-04 | A kind of semiconductor processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209434157U true CN209434157U (en) | 2019-09-24 |
Family
ID=67979124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920449158.5U Active CN209434157U (en) | 2019-04-04 | 2019-04-04 | A kind of semiconductor processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209434157U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112802782A (en) * | 2021-03-29 | 2021-05-14 | 西安奕斯伟硅片技术有限公司 | Pretreatment system and method for testing minority carrier lifetime of monocrystalline silicon wafer by charge passivation |
-
2019
- 2019-04-04 CN CN201920449158.5U patent/CN209434157U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112802782A (en) * | 2021-03-29 | 2021-05-14 | 西安奕斯伟硅片技术有限公司 | Pretreatment system and method for testing minority carrier lifetime of monocrystalline silicon wafer by charge passivation |
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