CN209428141U - A kind of high corrosion-resistant silane purification apparatus - Google Patents
A kind of high corrosion-resistant silane purification apparatus Download PDFInfo
- Publication number
- CN209428141U CN209428141U CN201821930964.6U CN201821930964U CN209428141U CN 209428141 U CN209428141 U CN 209428141U CN 201821930964 U CN201821930964 U CN 201821930964U CN 209428141 U CN209428141 U CN 209428141U
- Authority
- CN
- China
- Prior art keywords
- reactor tank
- silane
- purification apparatus
- high corrosion
- setting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 52
- 238000000746 purification Methods 0.000 title claims abstract description 28
- 230000007797 corrosion Effects 0.000 title claims abstract description 17
- 238000005260 corrosion Methods 0.000 title claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 238000004821 distillation Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 9
- 230000003628 erosive effect Effects 0.000 claims description 8
- 230000003197 catalytic effect Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 abstract description 8
- 238000002156 mixing Methods 0.000 abstract description 8
- 238000009833 condensation Methods 0.000 abstract description 6
- 230000005494 condensation Effects 0.000 abstract description 6
- 239000013067 intermediate product Substances 0.000 abstract description 6
- 230000036632 reaction speed Effects 0.000 abstract description 5
- 238000000605 extraction Methods 0.000 abstract description 4
- 238000003756 stirring Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000000926 separation method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Abstract
The utility model discloses a kind of high corrosion-resistant silane purification apparatus, including reactor tank, top one end of reactor tank is provided with feed inlet, charging solenoid valve is provided on feed inlet, the center of top of reactor tank is equipped with motor, the bottom of motor is equipped with agitating shaft, and agitating shaft runs through reactor tank, extends to the inside of reactor tank.The utility model is a kind of high corrosion-resistant silane purification apparatus, the equipment makes material convenient for mixing by the through-hole for the stirring leaf surface being arranged, accelerate reaction speed, and react uniform, the silane gas containing intermediate product is generated by the heating tube heating of setting, the high purity silane generated liquefaction is prevented by the heat-exchange device of setting, heavy seeds gas is further separated out by the condenser condensation temperature of setting, purify silane, increase silane discharge pressure by the pressurizing device of setting, avoid the residence time too long and caused by liquefaction phenomenon, the device structure is simple, the silane purity is high of extraction.
Description
Technical field
The utility model relates to a kind of silane purification apparatus, in particular to a kind of high corrosion-resistant silane purification apparatus.
Background technique
Silane as it is a kind of provide silicon components gas source, can be used for manufacturing high-purity polycrystalline silicon, monocrystalline silicon, microcrystal silicon,
Amorphous silicon, silicon nitride, silica, heterogeneous silicon, various metal silicides because of its high-purity and are able to achieve precise controlling, it has also become
The important special gas that many other silicon sources can not replace, silane are widely used in microelectronics, optoelectronics industry, for manufacturing too
Positive electricity pond, flat-panel monitor, glass and steel coating, and be that granular high purity silicon is uniquely mass produced in the world so far
Intermediate product.
In actual use, traditional silane equipment purification in terms of silane purification is inadequate, and purity is not good enough, shadow
Ring product quality.
Utility model content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of high corrosion-resistant silane essence
Control equipment makes material convenient for mixing, accelerates reaction speed, and react uniformly, pass through by the through-hole of the stirring leaf surface of setting
The heating tube heating of setting generates the silane gas containing intermediate product, and the HIGH-PURITY SILICON generated is prevented by the heat-exchange device of setting
Alkane liquefaction is further separated out heavy seeds gas by the condenser condensation temperature of setting, purifies silane, pass through the pressurization of setting
Device increase silane discharge pressure, avoid the residence time too long and caused by liquefaction phenomenon, the device structure is simple, the silicon of extraction
Alkane purity is high.
For connection, certainly above-mentioned technical problem, the utility model provide the following technical solution:
The utility model relates to a kind of high corrosion-resistant silane purification apparatus, including reactor tank, the tops one of the reactor tank
End is provided with feed inlet, charging solenoid valve is provided on the feed inlet, the center of top of the reactor tank is equipped with motor, institute
The bottom for stating motor is equipped with agitating shaft, and agitating shaft runs through reactor tank, extends to the inside of reactor tank, the agitating shaft it is outer
Surface is socketed with paddle, and the bottom end of the reactor tank is connected with discharge nozzle, discharging electromagnetism is equipped on the discharge nozzle
The side of valve, the discharging solenoid valve is equipped with delivery pump, and one end of the discharge nozzle is equipped with treating column, the treating column
Inner bottom is equipped with heating tube, and distillation cabin is provided at the top of the heating tube, is provided with catalysis at the top of the distillation cabin
Layer, purification layer is provided at the top of the Catalytic Layer, the both ends of the purification layer are mounted on erosion resistant coating, and erosion resistant coating is tightly attached to
The inner wall for the treatment of column is provided with gas-liquid separation layer at the top of the purification layer, exhaust pipe, institute is equipped at the top of the treating column
It states and is provided with heat-exchange device on exhaust pipe, one end of the exhaust pipe is equipped with collecting box, the top setting of the collecting box
There is waste gas outlet, the bottom of the collecting box is connected with recovery tube.
As a kind of optimal technical scheme of the utility model, the surface of the paddle is provided with several arranged in a uniform
Through-hole.
As a kind of optimal technical scheme of the utility model, one end of the treating column is equipped with pressurizing device.
As a kind of optimal technical scheme of the utility model, the motor is connect by agitating shaft with paddle.
As a kind of optimal technical scheme of the utility model, the reactor tank is connect by discharge nozzle with treating column.
As a kind of optimal technical scheme of the utility model, the collecting box is internally provided with condenser.
As a kind of optimal technical scheme of the utility model, the treating column is connect by exhaust pipe with collecting box.
As a kind of optimal technical scheme of the utility model, the collecting box is connect by recovery tube with treating column.
Compared with prior art, the beneficial effects of the utility model are as follows:
The utility model is a kind of high corrosion-resistant silane purification apparatus, makes material by the through-hole of the stirring leaf surface of setting
Convenient for mixing, accelerate reaction speed, and react uniformly, the silane gas containing intermediate product is generated by the heating tube heating of setting
Body prevents the high purity silane generated from liquefying by the heat-exchange device of setting, further by the condenser condensation temperature of setting
Heavy seeds gas is isolated, silane is purified, silane discharge pressure is increased by the pressurizing device of setting, avoids the residence time too long
Liquefaction phenomenon caused by and, the device structure is simple, the silane purity is high of extraction.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the overall structure figure of the utility model；
In figure: 1, reactor tank；2, motor；3, agitating shaft；4, paddle；5, through-hole；6, treating column；7, feed inlet；8, into
Expect solenoid valve；9, discharge nozzle；10, discharge solenoid valve；11, delivery pump；12, recovery tube；13, heating tube；14, cabin is distilled；15, it urges
Change layer；16, erosion resistant coating；17, layer is refined；18, condenser；19, pressurizing device；20, gas-liquid separation layer；21, exhaust pipe；22, hot
Switch；23, collecting box；24, waste gas outlet.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.Wherein identical mark in attached drawing
Number all refer to identical component.
In addition, if the detailed description of known technology for show the utility model be characterized in it is unnecessary, then by it
It omits.It should be noted that term " setting ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, it is also possible to
It is detachably connected, or is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also lead to
It crosses intermediary to be indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be with
Concrete condition understands the concrete meaning of above-mentioned term in the present invention, is not understood to indicate or imply relative importance.
Embodiment 1
As shown in Figure 1, the utility model provides a kind of high corrosion-resistant silane purification apparatus, including reactor tank 1, reactor tank 1
Top one end be provided with feed inlet 7, charging solenoid valve 8 is provided on feed inlet 7, the center of top of reactor tank 1 is equipped with electricity
Machine 2, the bottom of motor 2 is equipped with agitating shaft 3, and agitating shaft 3 runs through reactor tank 1, extends to the inside of reactor tank 1, agitating shaft 3
Outer surface be socketed with paddle 4, the bottom end of reactor tank 1 is connected with discharge nozzle 9, discharging electromagnetism is equipped on discharge nozzle 9
The side of valve 10, discharging solenoid valve 10 is equipped with delivery pump 11, and one end of discharge nozzle 9 is equipped with treating column 6, treating column 6 it is interior
Portion bottom end is equipped with heating tube 13, and the top of heating tube 13 is provided with distillation cabin 14, and the top in distillation cabin 14 is provided with Catalytic Layer
15, the top of Catalytic Layer 15 is provided with purification layer 17, and the both ends of purification layer 17 are mounted on erosion resistant coating 16, and erosion resistant coating 16 is close to
In the inner wall for the treatment of column 6, the top for refining layer 17 is provided with gas-liquid separation layer 20, and the top for the treatment of column 6 is equipped with exhaust pipe 21,
Heat-exchange device 22 is provided on exhaust pipe 21, one end of exhaust pipe 21 is equipped with collecting box 23, the top setting of collecting box 23
There is waste gas outlet 24, the bottom of collecting box 23 is connected with recovery tube 12.
Further, the surface of paddle 4 is provided with several through-holes arranged in a uniform 5, is convenient for object by the through-hole 5 of setting
Material mixing, keeps stirring more abundant, and mixing is more evenly.
One end for the treatment of column 6 is equipped with pressurizing device 19, increases silane discharge pressure by the pressurizing device 19 of setting, keeps away
Exempt from the residence time too long and caused by liquefaction phenomenon.
Motor 2 is connect by agitating shaft 3 with paddle 4, conveys power by the motor 2 of setting, agitating shaft 3 is driven to revolve
Turn, so that paddle 4 be made to operate, is stirred operation.
Reactor tank 1 is connect by discharge nozzle 9 with treating column 6, by 1 mixed material of reactor tank of setting, generates compound
Treating column 6 is entered by discharge nozzle 9 afterwards and carries out distilation.
Collecting box 23 is internally provided with condenser 18, is further separated out weight by 18 condensation temperature of condenser of setting
Foreign gas purifies silane, collects the silane generated by the collecting box 23 of setting.
Treating column 6 is connect by exhaust pipe 21 with collecting box 23, will be generated in treating column 6 by the exhaust pipe 21 of setting
Silane is delivered in collecting box 23.
Collecting box 23 is connect by recovery tube 12 with treating column 6, is recycled in collecting box 23 by the recovery tube 12 of setting
Intermediate liquid is allowed to return to 14 re-distillation of distillation cabin of 6 bottom for the treatment of column, avoid waste.
Specifically, opening charging solenoid valve 8 when using this equipment, production material is added by feed inlet 7, is beaten
Motor 2 is opened, motor 2 drives the paddle 4 of 3 two sides of agitating shaft to rotate, and the surface of paddle 4 is provided with several arranged in a uniform logical
Hole 5 makes material convenient for mixing, accelerates reaction speed, and reacts uniformly, and intermediate liquid after the reaction was completed is defeated by discharge nozzle 9
It is sent to the distillation cabin 14 of 6 inner bottom for the treatment of column, the silane gas containing intermediate product is generated by the heating of heating tube 13, contained
Between product silane gas by Catalytic Layer 15 accelerate mixing, using purification layer 17 purify, then reach gas-liquid separation layer 20,
Silane component containing liquid is improved upwards to decline, silane gas effective component, and silane gas is by exhaust pipe 21 through overheating
Switch 22 prevents the high purity silane generated from liquefying, is finally transported in collecting box 23 by the heat-exchange device 22 of setting,
18 condensation temperature of condenser in collecting box 23 is further separated out heavy seeds gas, purifies silane, passes through the recovery tube of setting
Intermediate liquid in 12 recycling collecting boxs 23, is allowed to return to 14 re-distillation of distillation cabin of 6 bottom for the treatment of column, avoid waste, lead to
Cross setting pressurizing device 19 increase silane discharge pressure, avoid the residence time too long and caused by liquefaction phenomenon, pass through setting
Delivery pump 11 control conveying speed, internal structure is protected by the erosion resistant coating 6 of setting, prevents from corroding and leading to internal damage.
In conclusion the equipment makes material convenient for mixing by the through-hole 5 on 4 surface of paddle of setting, accelerate reaction speed
Degree, and react uniformly, the silane gas containing intermediate product is generated by the heating of heating tube 13 of setting, passes through the heat exchange of setting
Device 22 prevents the high purity silane generated liquefaction, is further separated out heavy seeds gas by 18 condensation temperature of condenser of setting
Body purifies silane, increases silane discharge pressure by the pressurizing device 19 of setting, avoid the residence time too long and caused by liquefaction
Phenomenon, the device structure is simple, the silane purity is high of extraction.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (8)
1. a kind of high corrosion-resistant silane purification apparatus, including reactor tank (1), which is characterized in that the top one of the reactor tank (1)
End is provided with feed inlet (7), and charging solenoid valve (8), the center of top of the reactor tank (1) are provided on the feed inlet (7)
It is equipped with motor (2), the bottom of the motor (2) is equipped with agitating shaft (3), and agitating shaft (3) is extended to through reactor tank (1)
The outer surface of the inside of reactor tank (1), the agitating shaft (3) is socketed with paddle (4), the bottom end of the reactor tank (1)
It is connected with discharge nozzle (9), discharging solenoid valve (10), the side of discharging solenoid valve (10) is installed on the discharge nozzle (9)
It is equipped with delivery pump (11), one end of the discharge nozzle (9) is equipped with treating column (6), the inner bottom peace of the treating column (6)
Equipped with heating tube (13), distillation cabin (14), the top setting of distillation cabin (14) are provided at the top of the heating tube (13)
Have Catalytic Layer (15), purification layer (17) is provided at the top of the Catalytic Layer (15), the both ends of purification layer (17) are respectively mounted
Have erosion resistant coating (16), and erosion resistant coating (16) is tightly attached to the inner wall for the treatment of column (6), is provided with gas-liquid at the top of the purification layer (17)
Separating layer (20) is equipped with exhaust pipe (21) at the top of the treating column (6), and heat exchange dress is provided on the exhaust pipe (21)
It sets (22), one end of the exhaust pipe (21) is equipped with collecting box (23), is provided with exhaust gas at the top of the collecting box (23) and is gone out
Mouth (24), the bottom of the collecting box (23) is connected with recovery tube (12).
2. a kind of high corrosion-resistant silane purification apparatus according to claim 1, which is characterized in that the paddle (4)
Surface is provided with several through-holes arranged in a uniform (5).
3. a kind of high corrosion-resistant silane purification apparatus according to claim 1, which is characterized in that the treating column (6)
One end is equipped with pressurizing device (19).
4. a kind of high corrosion-resistant silane purification apparatus according to claim 1, which is characterized in that the motor (2) passes through
Agitating shaft (3) is connect with paddle (4).
5. a kind of high corrosion-resistant silane purification apparatus according to claim 1, which is characterized in that the reactor tank (1) is logical
Discharge nozzle (9) is crossed to connect with treating column (6).
6. a kind of high corrosion-resistant silane purification apparatus according to claim 1, which is characterized in that the collecting box (23)
It is internally provided with condenser (18).
7. a kind of high corrosion-resistant silane purification apparatus according to claim 6, which is characterized in that the treating column (6) is logical
Exhaust pipe (21) is crossed to connect with collecting box (23).
8. a kind of high corrosion-resistant silane purification apparatus according to claim 7, which is characterized in that the collecting box (23) is logical
Recovery tube (12) is crossed to connect with treating column (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821930964.6U CN209428141U (en) | 2018-11-22 | 2018-11-22 | A kind of high corrosion-resistant silane purification apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821930964.6U CN209428141U (en) | 2018-11-22 | 2018-11-22 | A kind of high corrosion-resistant silane purification apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209428141U true CN209428141U (en) | 2019-09-24 |
Family
ID=67969152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821930964.6U Expired - Fee Related CN209428141U (en) | 2018-11-22 | 2018-11-22 | A kind of high corrosion-resistant silane purification apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209428141U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112121939A (en) * | 2020-08-26 | 2020-12-25 | 耒阳市刘燕酿制生物科技有限公司 | Promote skin cell metabolism's essence processingequipment |
-
2018
- 2018-11-22 CN CN201821930964.6U patent/CN209428141U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112121939A (en) * | 2020-08-26 | 2020-12-25 | 耒阳市刘燕酿制生物科技有限公司 | Promote skin cell metabolism's essence processingequipment |
| CN112121939B (en) * | 2020-08-26 | 2021-08-31 | 耒阳市刘燕酿制生物科技有限公司 | Promote skin cell metabolism's essence processingequipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104058413A (en) | Method and device for continuous acid pickling purification of quartz sand | |
| CN209428141U (en) | A kind of high corrosion-resistant silane purification apparatus | |
| CN212198514U (en) | Graphite purification device | |
| CN208454853U (en) | A kind of benzene acetonitrile continuous rectification apparatus | |
| CN108409780B (en) | Method and device for cracking organic silicon hydrolysate by solvent oil thermal flooding circulation | |
| CN207862421U (en) | The primary displacement of zinc powder prepares Spongy Cadmium device | |
| CN116510671A (en) | Preparation device and preparation method of ultra-high purity antimony | |
| CN216358821U (en) | Rectifying column is used in production of compound polymerization inhibitor | |
| CN210145535U (en) | Accurate separator of pyridine chloride | |
| CN213049124U (en) | Integrated equipment for harmless treatment of fine chemical waste salt | |
| CN209155154U (en) | M-aminophenol filter cake vacuum distillation plant | |
| CN211133037U (en) | Multifunctional distillation pot | |
| CN209143702U (en) | A kind of acid dip pickle of high purity phosphorus | |
| CN219941788U (en) | Concentrated purification device of dilute sulfuric acid | |
| CN103754844B (en) | A kind of stirred crystallization produces the device of electron-level phosphoric acid | |
| CN208917108U (en) | A kind of furfural high-efficient production line | |
| CN214346458U (en) | Chemical reaction kettle | |
| CN214436547U (en) | Medical intermediate concentrating and separating device | |
| CN216653443U (en) | Production isooctyl acrylate's delicate system | |
| CN220677819U (en) | Dinonyl naphthalene sulfonic acid apparatus for producing | |
| CN220159956U (en) | Reaction kettle for producing 5-chlorovaleryl chloride | |
| CN2883327Y (en) | Thin sulfuric acid thickener | |
| CN205258347U (en) | Mix phenol rectification system | |
| CN220206392U (en) | Tail gas treatment device for silicon ore heating furnace | |
| CN215506761U (en) | Crude benzene hydrofining strengthening device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190924 |