CN209401599U - A kind of wafer carrying box - Google Patents

Abstract

The utility model discloses a kind of wafer carrying boxes, are related to semiconductor integrated circuit manufacturing field.The first slot for carrying wafer is provided on the inside of the left plate and right side plate of the wafer carrying box, when the wafer carrying box is horizontal positioned, first slot θ at an angle to the horizontal direction makes the wafer of carrying be located at wafer carrying box mouth portion side and tilts upwards.Wafer carrying box provided by the utility model can prevent from vibrating because of table top out-of-flatness or oven, and the wafer skids off from the wafer carrying box and causes fragmentation, improves the yield of product, reduce production cost.

Description

A kind of wafer carrying box

Technical field

The utility model relates to semiconductor integrated circuit manufacturing fields, more particularly, to a kind of wafer carrying box.

Background technique

As the integrated level of integrated circuit is continuously improved, semiconductor technology also lasting rapid development.In semiconductor technology In, toast for a long time with wafer carrying box carrying wafer is crucial processing step.

Existing wafer carrying box is made of box body and handle, the slot of the placement wafer on the inside of box body bottom and left side plate Position is all level design, but inside the use environment of wafer carrying box such as oven, laboratory workbench place is not necessarily Horizontal, in addition oven has certain vibration in the process of running, once wafer carrying box be placed on the table top of out-of-flatness or Oven vibration, in fact it could happen that wafer carrying cassette bottom portion is higher than the case where oral area, and wafer is just easy to skid off, and causes fragmentation；In addition, Existing wafer carrying box can only be horizontally arranged, and be placed the wafer in Carrier box from horizontal direction, and height of table and crystalline substance are limited to The circle reasons such as size, it is very inconvenient to be put into or take out in some cases wafer, take multiple wafers when it is particularly evident.

Utility model content

The purpose of this utility model is to provide a kind of wafer carrying box, prevent from being placed on out-of-flatness because of wafer carrying box On table top or oven vibration, wafer skid off from wafer carrying box and cause fragmentation, improve the yield of product and reduce production cost.

In order to achieve the above object, the utility model provides a kind of wafer carrying box, the left side of the wafer carrying box The first slot for carrying wafer is provided on the inside of plate and right side plate, it is described when the wafer carrying box is horizontal positioned First slot θ at an angle to the horizontal direction makes the wafer of carrying be located at wafer carrying box mouth portion side upward Inclination.

Optionally, the range of the angle, θ is 0 < θ < 45 °.

Optionally, the wafer carrying box includes being surrounded and being formed by the left plate, the right side plate, upper plate and lower plate The box body of the wafer carrying box, and the left shelves item by being arranged between the upper plate and the lower plate and right shelves item are formed The cassette bottom of the wafer carrying box.

Optionally, the left shelves article and the right shelves article be provided with opening towards the wafer carrying box oral area the The position of two slots, the position of second slot and first slot is adapted.

Optionally, the quantity of first slot is multiple, and the quantity of second slot and position are inserted with described first The quantity of slot and position are adapted.

Optionally, it is respectively upper plate bottom surface under that the upper plate and the lower plate, which are located at wafer carrying cassette bottom portion one side, Board bottom face, the upper plate bottom surface and the lower plate bottom surface are plane and coplanar.

Optionally, the wafer carrying box further includes three handles, three handles be separately positioned on the left plate, On the upper plate and the right side plate.

Optionally, the wafer carrying box further includes support device, and the support device is arranged in the upper plate, the left side On side plate or the right side plate, the support device is at least partly coplanar with the upper plate bottom surface.

Optionally, the support device is the 4th handle, and the 4th handle is arranged on the upper plate, and close to described Wafer carrying cassette bottom portion one side is coplanar with the upper plate bottom surface.

Optionally, multiple holes are offered in the upper plate and the lower plate.

In a kind of wafer carrying box provided by the utility model, on the inside of the left plate and right side plate of the wafer carrying box It is provided with the first slot for carrying wafer, when the wafer carrying box is horizontal positioned, first slot and level Direction θ at an angle makes the wafer of carrying be located at wafer carrying box mouth portion side and tilts upwards.The utility model The wafer carrying box of offer can prevent from vibrating because of table top out-of-flatness or oven, and the wafer is skidded off from the wafer carrying box and caused Fragmentation improves the yield of product, reduces production cost.

Detailed description of the invention

Fig. 1 is the wafer carrying box three-dimensional figure that an embodiment of the present invention provides；

Fig. 2 is the wafer carrying box cross-sectional view that an embodiment of the present invention provides；

Wherein: 1- upper plate, 2- lower plate, 3- left plate, 4- right side plate, the left shelves item of 5-, the right shelves item of 6-, the 71- first in command, 72- second handle, 73- third handle, the 4th handle of 74-, the first slot of 101-, the second slot of 102-, 103- upper plate bottom surface, 104- lower plate bottom surface, 105- handle bottom surface.

Specific embodiment

Specific embodiment of the present utility model is described in more detail below in conjunction with schematic diagram.It is retouched according to following It states and claims, will be become apparent from feature the advantages of the utility model.It should be noted that attached drawing is all made of very simplification Form and use non-accurate ratio, only to it is convenient, lucidly aid in illustrating the purpose of the utility model embodiment.

An embodiment of the present invention provides a kind of wafer carrying box, prevents from being placed on the platform of out-of-flatness because of wafer carrying box On face or oven vibration, wafer skid off from wafer carrying box and cause fragmentation, improve the yield of product and reduce production cost.

Fig. 1 is the wafer carrying box three-dimensional figure that an embodiment of the present invention provides, and Fig. 2 is an embodiment of the present invention The wafer carrying box cross-sectional view of offer, as depicted in figs. 1 and 2, the wafer carrying box includes box body and cassette bottom, the box body by Left plate 3, right side plate 4, upper plate 1 and lower plate 2 surround to be formed, and the cassette bottom is formed by left shelves item 5 and right shelves item 6, the left shelves Item 5 and the right shelves item 6 are arranged between the upper plate 1 and the lower plate 2.The inside of the left plate 3 and the right side plate 4 It is provided with the first slot 101 for carrying the wafer, when the wafer carrying box is horizontal positioned, first slot 101 θ at an angle to the horizontal direction make the wafer of carrying be located at wafer carrying box mouth portion side and tilt upwards. So set, prevent on the table top of out-of-flatness when the wafer carrying box, or oven vibrates when baking wafer, wafer is not yet It can be skidded off from wafer carrying box and cause fragmentation, increase the yield of product.The range of the angle, θ is 0 < θ < 45 °, specific value It can be arranged according to the actual situation, the utility model is with no restriction.

As depicted in figs. 1 and 2, the left shelves item 5 and the right shelves item 6 are provided with opening towards the wafer carrying box Oral area the second slot 102, the position of the position of second slot 102 and first slot 101 is adapted, with carrying The same wafer.The quantity of first slot 101 be it is multiple, the quantity of second slot 102 and position with it is described The quantity of first slot 101 and position are adapted.Second slot 102 may also set up certain angle with horizontal direction；Work as institute State angle, θ numerical value it is smaller when, second slot 102 can also be horizontally disposed, does not make angle adjustment.

As depicted in figs. 1 and 2, the upper plate 1 and the lower plate 2 be located at the wafer carrying cassette bottom portion one side be respectively on Board bottom face 103 and lower plate bottom surface 104, the upper plate bottom surface 103 and the lower plate bottom surface 104 are plane, and two planes are total Face.So set, can place vertically the wafer carrying box, i.e., the described upper plate bottom surface 103 and the lower plate bottom surface 104 are branch Support face is contacted with loading floor.Existing wafer carrying box can only be horizontally arranged, and be placed the wafer in Carrier box from horizontal direction, The reasons such as height of table and wafer size are limited to, it is very inconvenient to be put into or take out wafer in some cases, multiple crystalline substances of taking Bowlder is particularly evident.When the wafer carrying box is placed vertically, can take the wafer along the vertical direction, operate more square Just.

As depicted in figs. 1 and 2, the wafer carrying box further includes three handles, the respectively first in command 71, second handle 72 and third handle 73, three handles be separately positioned on the left plate 3, the upper plate 1 and the right side plate 4. Three handles are provided with, when placing vertically by the wafer carrying box or is horizontal positioned, convenient for holding operation.

Further, as depicted in figs. 1 and 2, the wafer carrying box further includes support device, the support device setting On the upper plate, the left plate or the right side plate, the support device is at least partly total with the upper plate bottom surface 103 Face.Specifically, the support device may be configured as the 4th handle 74, the 4th handle is arranged on the upper plate 1, and close Wafer carrying cassette bottom portion one side (handle bottom surface 105) is coplanar with the upper plate bottom surface 103.4th handle 74 is set, it is described The base area of wafer carrying box increases, and when the wafer carrying box is placed vertically, increases with the contact area of loading floor, The wafer carrying box is more steady.

As depicted in figs. 1 and 2, multiple holes are offered in the upper plate 1 and the lower plate 2, to mitigate the wafer The weight of Carrier box.The material of the wafer carrying box is the heat-resisting material for being able to bear the temperature for toasting the wafer.

In conclusion in a kind of wafer carrying box that an embodiment of the present invention provides, the wafer carrying box The first slot for carrying wafer is provided on the inside of left plate and right side plate, when the wafer carrying box is horizontal positioned, First slot θ at an angle to the horizontal direction makes the wafer of carrying be located at wafer carrying box mouth portion side Inclination upwards.Wafer carrying box provided by the utility model can prevent from vibrating because of table top out-of-flatness or oven, and the wafer is from institute It states wafer carrying box and skids off and cause fragmentation, improve the yield of product, reduce production cost.

The preferred embodiment that above are only the utility model, does not play the role of any restrictions to the utility model. Any person of ordinary skill in the field, in the range of not departing from the technical solution of the utility model, to the utility model The technical solution and technology contents of exposure make the variation such as any type of equivalent replacement or modification, belong to without departing from the utility model Technical solution content, still fall within the protection scope of the utility model.

Claims (10)

1. a kind of wafer carrying box, which is characterized in that be provided with use on the inside of the left plate and right side plate of the wafer carrying box In the first slot of carrying wafer, when the wafer carrying box is horizontal positioned, first slot and horizontal direction are in certain The side of angle, θ, the oral area for making the wafer of carrying be located at the wafer carrying box tilts upwards.

2. wafer carrying box according to claim 1, which is characterized in that the range of the angle, θ is 0 < θ < 45 °.

3. wafer carrying box according to claim 1, which is characterized in that the wafer carrying box includes by the left side Plate, the right side plate, upper plate and lower plate surround the box body for the wafer carrying box to be formed, and by be arranged in the upper plate and The cassette bottom for the wafer carrying box that left shelves item and right shelves item between the lower plate are formed.

4. wafer carrying box according to claim 3, which is characterized in that the left shelves item and the right shelves item are provided with Be open towards the wafer carrying box oral area the second slot, the position of the position of second slot and first slot It is adapted.

5. wafer carrying box according to claim 4, which is characterized in that the quantity of first slot be it is multiple, it is described The quantity and position of the quantity of second slot and position and first slot are adapted.

6. wafer carrying box according to claim 3, which is characterized in that the upper plate and the lower plate are located at the wafer The bottom one side of Carrier box is respectively upper plate bottom surface and lower plate bottom surface, the upper plate bottom surface and the lower plate bottom surface be plane and It is coplanar.

7. wafer carrying box according to claim 6, which is characterized in that the wafer carrying box further includes three handles, Three handles are separately positioned on the left plate, the upper plate and the right side plate.

8. wafer carrying box according to claim 6 or 7, which is characterized in that the wafer carrying box further includes support dress Set, the support device is arranged on the upper plate, the left plate or the right side plate, the support device at least partly with The upper plate bottom surface is coplanar.

9. wafer carrying box according to claim 8, which is characterized in that the support device is the 4th handle, described the Four handles are arranged on the upper plate, and coplanar with the upper plate bottom surface close to the bottom of wafer carrying box one side.

10. wafer carrying box according to claim 3, which is characterized in that offered in the upper plate and the lower plate Multiple holes.