CN209401598U - Chip acid dip pickle - Google Patents
Chip acid dip pickle Download PDFInfo
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- CN209401598U CN209401598U CN201822247421.0U CN201822247421U CN209401598U CN 209401598 U CN209401598 U CN 209401598U CN 201822247421 U CN201822247421 U CN 201822247421U CN 209401598 U CN209401598 U CN 209401598U
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- chip
- dip pickle
- spray
- acid dip
- rotatable stage
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Abstract
This application involves chip manufacture technical fields, more particularly to a kind of chip acid dip pickle, comprising: operating room and spray chamber, spray chamber is arranged in the operating room and is connected to the operating room, and rotatable stage, spray assemblies and image collection assembly are provided in the spray chamber；The rotatable stage is for placing chip to be corroded；The spray assemblies include the sour shower valve and pure water shower valve being arranged in above the rotatable stage；Described image acquisition component is used for the image of acquisition chip.Production efficiency can be improved in the application chip acid dip pickle, chip is corroded under rotation status by spray mode on rotatable stage, and corrosion thickness is more uniform, can pass through the extent of corrosion on figure line acquisition component monitoring chip surface, without artificial direct operation, securely and reliably.
Description
Technical field
This application involves chip manufacture technical field more particularly to a kind of chip acid dip pickles.
Background technique
The upper and lower surfaces of chip are respectively the yin, yang pole-face of chip.Cathode surface and anode surface are a flat plating
Metal layer.During preparing metal layer inevitably there is scratch in metal layer, and the presence of scratch can enable the blocking voltage of chip
Power is fallen too low, in addition, the metal layer of chip surface can have oxide layer during prolonged storage, equally will affect core
The normal function of piece.The most effective method for eliminating scratch and oxide layer is to carry out chemical attack to chip surface.
The chemical attack used in production is strong acid with medium, during carrying out chemical attack to chip, is needed
Chip is manually put into sour pond to corrode, need to be carried out under good ventilated environment, it is difficult to it is controlled and low efficiency, it is artificial to put into
It is bigger and be difficult to realize mass production, and corrosion thickness is not accurate, and strong acid is dangerous, is unfavorable for production safety.
Utility model content
In order to solve the above-mentioned technical problem, the embodiment of the present application provides a kind of chip acid dip pickle.
According to chip acid dip pickle provided by the embodiments of the present application comprising:
Operating room；
Spray chamber is arranged in the operating room and is connected to the operating room, and rotation is provided in the spray chamber and is carried
Object platform, spray assemblies and image collection assembly；
The rotatable stage is for placing chip to be corroded；
The spray assemblies include the sour shower valve and pure water shower valve being arranged in above the rotatable stage；
Described image acquisition component is used for the image of acquisition chip.
Further, the chip acid dip pickle further includes motor, and the loading surface of the rotatable stage is horizontally disposed, institute
It states the rotary shaft that rotatable stage is arranged by plummet and matches connection with the drive shaft of the motor.
Further, the chip acid dip pickle further includes the sour storage bin connecting with the sour shower valve, the acid storage
Case is deposited for holding strong acid liquid.
Further, the first liquid level being provided on the sour storage bin for detecting the strong acid liquid levels height passes
Sensor.
Further, the chip acid dip pickle further includes the waste liquid storage tank being arranged in below the spray chamber, described
The bottom of spray chamber is connected with pipeline, and the pipeline is used to the waste liquid collected in the spray chamber importing the waste liquid storage tank
It is interior, discharge opeing control valve door is provided on the pipeline.
Further, the second level sensing for detecting the waste liquid liquid level is provided on the waste liquid storage tank
Device.
Further, the chip acid dip pickle further includes exhaust system, and the exhaust system is connected to the operating room,
For the gas generated after the indoor strong acid volatilization gas of the operation and corrosion to be discharged.
Further, the chip acid dip pickle further includes the work chamber door and inspection for being used to open or closing the operating room
Survey the sensor that the work chamber door is in the state that opens or closes, when the sensor detects that the work chamber door is opened, institute
State spray assemblies closing.
Further, described image acquisition component includes high-definition camera.
Above-mentioned technical proposal provided by the embodiments of the present application has the advantages that chip acid dip pickle compared with prior art
Production efficiency can be improved, chip is corroded under rotation status by spray mode on rotatable stage, corrosion thickness
More uniformly, safely can may be used by the extent of corrosion on figure line acquisition component monitoring chip surface without artificial direct operation
It leans on.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets the utility model
Embodiment, and be used to explain the principles of the present invention together with specification.
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, for ordinary skill people
For member, without any creative labor, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram of chip acid dip pickle provided by the utility model.
In figure,
1, operating room；2, spray chamber；3, rotatable stage；4, image collection assembly；5, sour shower valve；6, pure water sprays
Valve；7, motor；8, rotary shaft；9, sour storage bin；10, the first liquid level sensor；11, waste liquid storage tank；12, pipeline；13, second
Liquid level sensor；14, exhaust system；15, work chamber door；16, sensor；17, air draft external tapping；18, industrial personal computer.
Specific embodiment
In order to make those skilled in the art more fully understand application scheme, below in conjunction in the embodiment of the present application
Attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is only
The embodiment of the application a part, instead of all the embodiments.Based on the embodiment in the application, ordinary skill people
Member's every other embodiment obtained without making creative work, all should belong to the model of the application protection
It encloses.
It should be noted that the description and claims of this application and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so as to embodiments herein described herein.In addition, term " includes " and " tool
Have " and their any deformation, it is intended that cover it is non-exclusive include, for example, containing a series of steps or units
Process, method, system, product or equipment those of are not necessarily limited to be clearly listed step or unit, but may include without clear
Other step or units listing to Chu or intrinsic for these process, methods, product or equipment.
In this application, term " on ", "lower", "inner", " in ", "outside", the orientation of the instructions such as "front", "rear" or position close
System is to be based on the orientation or positional relationship shown in the drawings.These terms are primarily to better describe the application and its implementation
Example, is not intended to limit indicated device, element or component must have particular orientation, or carries out structure with particular orientation
It makes and operates.
Also, above-mentioned part term is other than it can be used to indicate that orientation or positional relationship, it is also possible to for indicating it
His meaning, such as term " on " also are likely used for indicating certain relations of dependence or connection relationship in some cases.For ability
For the those of ordinary skill of domain, the concrete meaning of these terms in this application can be understood as the case may be.
In addition, term " setting ", " connection ", " fixation " shall be understood in a broad sense.For example, " connection " may be a fixed connection,
It is detachably connected or monolithic construction；It can be mechanical connection, or electrical connection；It can be directly connected, or pass through centre
Medium is indirectly connected, or is two connections internal between device, element or component.For ordinary skill
For personnel, the concrete meaning of above-mentioned term in this application can be understood as the case may be.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.1 and it is described in detail the application in conjunction with the embodiments below with reference to the accompanying drawings.
As shown in Figure 1, the embodiment of the present application provides a kind of chip acid dip pickle comprising operating room 1 and spray chamber 2.
Wherein spray chamber 2 is arranged in the operating room 1 and is connected to the operating room 1, is provided with rotation loading in the spray chamber 2
Platform 3, spray assemblies and image collection assembly 4；The rotatable stage 3 is for placing chip to be corroded；The spray assemblies
Sour shower valve 5 and pure water shower valve 6 including 3 top of rotatable stage is arranged in；Described image acquisition component 4 is for adopting
Collect the image of chip.The production efficiency of chip corrosion can be improved in chip acid dip pickle in above-described embodiment, in specifically used mistake
Cheng Zhong, by the way that rotatable rotatable stage 3, the placed side water of rotatable stage 3 are arranged in the spray chamber 2 in operating room 1
Flat setting, for placing the chip of pending chemical attack.The rotation of rotatable stage 3 can increase strong acid in chip surface
Mobility, while strong acid liquid is improved to the impact kinetic energy of chip surface, the corrosion rate of strong acid liquid can be effectively improved,
So as to improve the uniformity of chemical attack, reduce corrosion waste liquid in the residual of chip surface.Wherein, in rotatable stage 3
The mode that the chip of pending chemical attack is placed on placed side includes but is not limited to adsorb, clamping, clamp and compress connection, all
It is that the binding face of chip and the placed side of rotatable stage 3 can be made to fit closely, preferably by the binding face of chip and spray
Indoor corrosive environment isolation is drenched, realizes the protection to chip binding face.It wherein, can when carrying out the sprinkling of strong acid liquid to chip
It is sprayed, can also be sprayed by the entire spray assembly of programming Control with manually controlling spray assembly.Chip is rotating
Corroded under rotation status by spray mode on objective table, corrosion thickness is more uniform, and corroding waste liquid can be according to
Centrifugal force of the rotatable stage 3 in rotary course is relied to throw away, convenient for collecting waste liquid, the embodiment of the present application can also pass through figure line
The extent of corrosion on 4 monitoring chip surface of acquisition component, without artificial direct operation, securely and reliably.
In some embodiments, chip acid dip pickle further includes motor 7, and the loading surface of the rotatable stage 3 is horizontal
Setting, the rotary shaft 8 that the rotatable stage 3 is arranged by plummet match connection with the drive shaft of the motor 7.Preferably,
The speed changer being connected to motor can also be installed in the embodiment of the present application, speed changer is used to control turning for the drive shaft of motor
Speed, to adjust the revolving speed of rotatable stage.In the embodiment of the present application, by by the rotary shaft 8 of rotatable stage 3 and motor 7
Drive shaft match connection, may be implemented under the control of motor 7, rotatable stage 3 and be placed on rotatable stage 3
The automatic rotation of chip improves the uniformity that strong acid flows on chip, and then improves chemistry while saving manpower
The total quality of corrosion and the corrosion uniformity on surface, while strong acid is reduced also to the harm of human health, speed changer is used for
The revolving speed for controlling the drive shaft of motor 7, is adjusted the revolving speed of rotatable stage 3, can be according to the spray speed of spray assemblies
The chip for spending to control rotatable stage 3 and be placed on rotatable stage 3 reaches suitable revolving speed, with advanced optimizing
Learn the effect and quality of corrosion.
In some embodiments, chip acid dip pickle further includes the sour storage bin 9 connecting with the sour shower valve 5, institute
Sour storage bin 9 is stated for holding strong acid liquid.By the way that the sour storage bin 9 for being used to hold strong acid liquid is connected to sour shower valve 5,
Strong acid liquid needed for chemical corrosion process is provided, while necessary pressure control can also be increased on sour storage bin 9
Structure or electric control structure, further to control the rate of spray, to cooperate rotatable stage 3 and be placed on rotatable stage 3
On chip revolving speed.
In some embodiments, it is provided on the sour storage bin 9 for detecting the strong acid liquid levels height
First liquid level sensor 10.First liquid level sensor 10 can be with the surplus of the strong acid liquid in the real time measure acid storage bin 9, just
In addition strong acid liquid in time.Wherein the first liquid level sensor 10 includes but is not limited to float liquid level sensor, ultrasonic liquid level biography
Sensor, capacitive liquid level sensor, Optical Liquid Level Sensors and combinations thereof.
In some embodiments, chip acid dip pickle further includes the waste liquid storage tank being arranged in below the spray chamber 2
11, the bottom of the spray chamber 2 is connected with pipeline 12, and the pipeline 12 is used to import the waste liquid collected in the spray chamber 2
In the waste liquid storage tank 11, discharge opeing control valve door is provided on the pipeline 12.Waste liquid storage tank 11 is set under spray chamber 2
Side, can be convenient and be directed into waste liquid storage tank 11 by the waste liquid in gravity part spray chamber 2.In waste liquid storage tank 11
Vapor-liquid separation processing and devil liquor recovery can be carried out after corrosion waste collection, reduces the consumption of the energy, while reducing corruption
The risk of the other components of etched waste liquid corrosion and damage reduces corrosion waste liquid to the hazard to person of operator.
In some embodiments, the second liquid for detecting waste liquid liquid level is provided on the waste liquid storage tank 11
Level sensor 13.Second liquid level sensor 13 can be with the accumulation of the waste liquid in the real time measure waste liquid storage tank 11, convenient for timely
It is discharged and empties.Wherein the second liquid level sensor 13 includes but is not limited to float liquid level sensor, ultrasonic liquid level sensor, capacitor
Liquid level sensor, Optical Liquid Level Sensors and combinations thereof.
In some embodiments, chip acid dip pickle further includes exhaust system 14, the exhaust system 14 and the behaviour
Make the connection of room 1, the gas for generating by the strong acid volatilization gas in the operating room 1 and after corroding is discharged.In order to operate peace
Entirely and environmental pollution is avoided, operating room 1 should be fully sealed, and be in communication with the outside by exhaust system 14, especially by air draft
Air draft external tapping 17 in system 14 is attached with exhaust treatment system, and corrosion exhaust gas is handled and converted.
In some embodiments, chip acid dip pickle further includes the working chamber for being used to open or closing the operating room 1
Door 15 and the detection work chamber door 15 are in the sensor 16 for the state that opens or closes, and the sensor 16 detects the work
When chamber door 15 is opened, the spray assemblies are closed.Work chamber door 15 can be put into or be taken out chip, fixed core after opening
Strong acid liquid, cleaning internal structure etc. operation is added in piece, and the setting of sensor 6 may further ensure that staff
The safety of operation, after detecting that work chamber door is opened, i.e. automatic control spray assemblies stop working sensor 6, to prevent
Production development accident.
In some embodiments, described image acquisition component 4 includes high-definition camera.High-definition camera is rotten by shooting
The variation of the image of chip surface and color during erosion can adjust at any time to judge the degree of corrosion according to extent of corrosion
And control.The image that image processing apparatus acquires image collection assembly 4 can also be arranged in certain the application to handle, divide
Analysis and after comparing, automatically confirms that the extent of corrosion with identification chip surface, realizes and automatically control, the setting of image processing apparatus and
Its specific working principle is suitable for the prior art, and those of ordinary skill in the art can select and adjust according to the prior art
It is whole, it no longer repeats one by one herein.
Specifically, also work can be arranged on chip acid dip pickle in the embodiment of the present application to realize automation control
Control machine 18, industrial personal computer 18 can choose various control mechanisms in the prior art, such as industrial personal computer 18 can choose as the upper of PLC
Machine is programmed the control program of PLC, is controlled by PLC chip acid dip pickle.
Section Example is described in a progressive manner in this specification, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
The above is only specific embodiment of the present utility model, make skilled artisans appreciate that or realizing that this is practical
It is novel.Various modifications to these embodiments will be apparent to one skilled in the art, defined herein
General Principle can realize in other embodiments without departing from the spirit or scope of the present utility model.Therefore,
Originally it is not intended to be limited to the embodiments shown herein, and is to fit to and applied principle and features of novelty phase herein
Consistent widest scope.
Claims (9)
1. a kind of chip acid dip pickle characterized by comprising
Operating room (1)；
Spray chamber (2), setting are connected in the operating room (1) and with the operating room (1), setting in the spray chamber (2)
There are rotatable stage (3), spray assemblies and image collection assembly (4)；
The rotatable stage (3) is for placing chip to be corroded；
The spray assemblies include the sour shower valve (5) and pure water shower valve (6) being arranged above the rotatable stage (3)；
Described image acquisition component (4) is used for the image of acquisition chip.
2. chip acid dip pickle according to claim 1, which is characterized in that further include motor (7), the rotatable stage
(3) loading surface is horizontally disposed, the drive of rotary shaft (8) and the motor (7) that the rotatable stage (3) is arranged by plummet
Moving axis matching connection.
3. chip acid dip pickle according to claim 1, which is characterized in that further include being connect with the sour shower valve (5)
Sour storage bin (9), the acid storage bin (9) is for holding strong acid liquid.
4. chip acid dip pickle according to claim 3, which is characterized in that be provided with and be used on the acid storage bin (9)
Detect the first liquid level sensor (10) of the strong acid liquid levels height.
5. chip acid dip pickle according to claim 1, which is characterized in that further include being arranged under the spray chamber (2)
The waste liquid storage tank (11) of side, the bottom of the spray chamber (2) are connected with pipeline (12), and the pipeline (12) is used for the spray
It drenches the waste liquid collected in room (2) to import in the waste liquid storage tank (11), is provided with discharge opeing control valve door on the pipeline (12).
6. chip acid dip pickle according to claim 5, which is characterized in that be arranged on the waste liquid storage tank (11) useful
In the second liquid level sensor (13) of detection waste liquid liquid level.
7. chip acid dip pickle according to claim 1, which is characterized in that further include exhaust system (14), the air draft
System (14) is connected to the operating room (1), for what is generated by the strong acid volatilization gas in the operating room (1) and after corroding
Gas discharge.
8. chip acid dip pickle according to claim 1, which is characterized in that further include being used to open or closing the operation
The work chamber door (15) of room (1) and the detection work chamber door (15) are in the sensor (16) for the state that opens or closes, the biography
When sensor (16) detects that the work chamber door (15) is opened, the spray assemblies are closed.
9. chip acid dip pickle according to claim 1, which is characterized in that described image acquisition component (4) includes high definition
Camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822247421.0U CN209401598U (en) | 2018-12-28 | 2018-12-28 | Chip acid dip pickle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822247421.0U CN209401598U (en) | 2018-12-28 | 2018-12-28 | Chip acid dip pickle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209401598U true CN209401598U (en) | 2019-09-17 |
Family
ID=67897146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822247421.0U Active CN209401598U (en) | 2018-12-28 | 2018-12-28 | Chip acid dip pickle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209401598U (en) |
-
2018
- 2018-12-28 CN CN201822247421.0U patent/CN209401598U/en active Active
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Address after: 518000 4th Floor, Building A5, Nanshan Zhiyuan, 1001 Xueyuan Avenue, Nanshan District, Shenzhen City, Guangdong Province Patentee after: Core technology (Shenzhen) Co., Ltd Address before: 518000 4th Floor, Building A5, Nanshan Zhiyuan, 1001 Xueyuan Avenue, Nanshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN PHOGRAIN INTELLIGENT SENSING TECHNOLOGY CO., LTD. |