CN209398779U - A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump - Google Patents

A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump Download PDF

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Publication number
CN209398779U
CN209398779U CN201920001170.XU CN201920001170U CN209398779U CN 209398779 U CN209398779 U CN 209398779U CN 201920001170 U CN201920001170 U CN 201920001170U CN 209398779 U CN209398779 U CN 209398779U
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CN
China
Prior art keywords
mounting plate
upper mounting
elastic component
lower installation
installation board
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Active
Application number
CN201920001170.XU
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Chinese (zh)
Inventor
刘洋
蒙伟强
毛乐山
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Shenzhen Zhihan Equipment Technology Co Ltd
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Shenzhen Zhihan Equipment Technology Co Ltd
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Abstract

The utility model provides a kind of vibration absorber on micro mass spectrometer instrument diaphragm pump, including the upper mounting plate being connect respectively with diaphragm pump and the lower installation board being connect with mass spectrograph frame, upper mounting plate and lower installation board are flexibly connected and spaced between the two by bolt, it is equipped between upper mounting plate and lower installation board by the distracted elastic component of the two, and the nominal load of the elastic component meets the weight demands of the separate pump.The damping device of the utility model is when being isolated pump work, can the vibration that generated when pump work is isolated be buffered and be eliminated by intermediate elastic component, it prevents from being transferred at rigidly connected lower installation board and mass spectrograph, greatly reduce on mass spectrometric influence, vibration when mass spectrograph work and noise are reduced, the vibration for absorbing separate pump is can be very good by elastic component, vibrational energy is consumed, guarantee the performance when work of micro mass spectrometer instrument, increases mass spectrograph service life.

Description

A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump
Technical field
The utility model relates to machinery fields, can reduce what mass spectrograph upper diaphragm pump work shook more particularly to a kind of Damping device.
Background technique
Vacuum system is the most basic system of micro mass spectrometer instrument, and effect is to provide enough vacuum degrees to meet mass spectrograph Function, diaphragm pump be micro mass spectrometer instrument obtain low vacuum important means.
But it is directly to rigidly fix between existing mass spectrometric diaphragm pump and mass spectrograph, the shake that diaphragm pump generates at work It is dynamic to be transferred directly at velocitron, mass spectrograph working performance is not only influenced, the service life of equipment itself can also be impacted.
Utility model content
The purpose of this utility model is to provide for a kind of damping device that can reduce the vibration of mass spectrograph upper diaphragm pump work.
Particularly, the utility model provides a kind of vibration absorber on micro mass spectrometer instrument diaphragm pump, including respectively The upper mounting plate connecting with diaphragm pump and the lower installation board connecting with mass spectrograph frame, upper mounting plate and lower installation board pass through bolt It is flexibly connected and spaced between the two, is equipped between upper mounting plate and lower installation board by the distracted elastic component of the two, And the nominal load of the elastic component meets the weight demands of the separate pump.
In an embodiment of the utility model, the upper mounting plate is rectangular slab, and there are four the bolts and divides It is not connected to four edges of the upper mounting plate.
In an embodiment of the utility model, the elastic component is helical spring, laminated spring or flexible damping Pad.
In an embodiment of the utility model, the spiral spring cover is located at the upper mounting plate in the bolt On shaft between the lower installation board, and each helical spring shares the weight of receiving equally.
In an embodiment of the utility model, in both ends and the upper mounting plate of the helical spring and described Resilient cushion member is separately installed between lower installation board.
In an embodiment of the utility model, frequency of the elastic component under nominal load is the elastic component Natural frequency ω0, the relationship between the diaphragm pump actual operating frequency ω meets ω0≤ω。
The damping device of the utility model can will be produced when pump work is isolated by intermediate elastic component when pump work is isolated Raw vibration is buffered and is eliminated, and is prevented from being transferred at rigidly connected lower installation board and mass spectrograph, be greatly reduced to mass spectrum The influence of instrument reduces vibration when mass spectrograph work and noise, can be very good the vibration for absorbing separate pump by elastic component, will Vibrational energy consumption guarantees the performance when work of micro mass spectrometer instrument, increases mass spectrograph service life.
Detailed description of the invention
Fig. 1 is the main view of the damping device structure of one embodiment of the utility model;
Fig. 2 is the left view of Fig. 1.
Specific embodiment
As shown in Figure 1, 2, one embodiment of the utility model discloses a kind of on micro mass spectrometer instrument diaphragm pump 10 Vibration absorber 20, the vibration absorber 20 include the upper mounting plate 21 and lower installation board 22 as loading end, wherein upper mounting plate 21 It can be used as the mounting base of diaphragm pump 10, lower installation board 22 is then as the pinboard connecting with mass spectrograph, specific lower installation board 22 It can be connect with mass spectrograph or fixed mass spectrometric frame, or directly using frame as lower installation board.
And be then flexibly connected by bolt 23 between upper mounting plate 21 and lower installation board 22, and after connecting between the two there are Certain gap, the elastic component 24 of pretightning force is born in installation in the gap formed between upper mounting plate 21 and lower installation board 22, I.e. elastic component 24 can by under active state upper mounting plate 21 and lower installation board 22 strut, both make to be constantly in stress shape State, in addition, the nominal load of elastic component 24 needs to meet the weight demands of separate pump 10, shape after being pressurized to avoid elastic component 24 Become.
The damping device 20 of present embodiment, can be by separate pump 10 by intermediate elastic component 24 when separate pump 10 works The vibration generated when work is buffered and is eliminated, and prevents from being transferred at rigidly connected lower installation board 22 and mass spectrograph, significantly Reduce vibration when reducing mass spectrograph work on mass spectrometric influence and noise, by elastic component 24 can be very good to absorb every Vibration from pump 10, vibrational energy is consumed, and is guaranteed the performance when work of micro mass spectrometer instrument, is increased mass spectrograph service life.
Elastic component 24 in present embodiment can be helical spring, laminated spring or flexible damping pad.Simultaneously in upper peace Loading board 21 and lower installation board 22 it is adjacent corresponding position limiting structure can be set on one side to avoid elastic component 24 from moving radially, such as upper Mounting plate 21 and lower installation board 22 it is opposite be respectively set on one side accommodate 24 both ends of elastic component pockets.
Specific upper mounting plate 21 can be rectangular slab, and bolt 23 is connected to four sides of rectangle upper mounting plate 21 At angle, such structure can be unbalance to avoid upper mounting plate 21 or be rotated, and improves the stability after isolating device 20 is fixed.
When elastic component 24 is using helical spring, spiral spring cover can be located at upper mounting plate 21 and lower installation in bolt 23 On shaft between plate 22, which can avoid helical spring and is detached from, while the elastic force for not influencing helical spring again plays, And each helical spring shares the weight of receiving equally.
Elasticity can also be installed respectively to subtract between helical spring both ends and upper mounting plate 21 and 22 contact surface of lower installation board Pad 25 is shaken, further eradicate a mental barrier 10 bring vibration influences of pump.
Further, it is also possible to also helical spring of the installation set on shaft between the nut and upper mounting plate 21 of bolt, with Further increase damping effect.If nut one end of bolt is located at lower installation board 22, then helical spring it is mountable nut with On shaft between lower installation board 22.
In present embodiment, natural frequency ω of frequency of the elastic component 24 under nominal load as elastic component 240, with Relationship between 10 actual operating frequency ω of diaphragm pump meets ω0≤ω。
So far, although those skilled in the art will appreciate that the more of the utility model have been shown and described in detail herein A exemplary embodiment still, still can be according to the utility model public affairs in the case where not departing from the spirit and scope of the utility model The content opened directly determines or derives many other variations or modifications for meeting the utility model principle.Therefore, this is practical new The range of type is understood that and regards as to cover all such other variations or modifications.

Claims (6)

1. a kind of vibration absorber on micro mass spectrometer instrument diaphragm pump, which is characterized in that including what is connect respectively with diaphragm pump Upper mounting plate and the lower installation board connecting with mass spectrograph frame, upper mounting plate and lower installation board pass through bolt flexible connection and the two Between it is spaced, be equipped between upper mounting plate and lower installation board by the distracted elastic component of the two, and the elastic component Nominal load meets the weight demands of the separate pump.
2. damping device according to claim 1, which is characterized in that
The upper mounting plate is rectangular slab, and there are four the bolts and is connected to four edges of the upper mounting plate.
3. damping device according to claim 2, which is characterized in that
The elastic component is helical spring, laminated spring or flexible damping pad.
4. damping device according to claim 3, which is characterized in that
The spiral spring cover is and each in the bolt on shaft between the upper mounting plate and the lower installation board The helical spring shares the weight of receiving equally.
5. damping device according to claim 4, which is characterized in that
Resilient cushion member is separately installed between the both ends and the upper mounting plate and the lower installation board of the helical spring.
6. damping device according to claim 1, which is characterized in that
Frequency of the elastic component under nominal load is the natural frequency ω of the elastic component0, with the diaphragm pump real work Relationship between frequencies omega meets ω0≤ω。
CN201920001170.XU 2019-01-03 2019-01-03 A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump Active CN209398779U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920001170.XU CN209398779U (en) 2019-01-03 2019-01-03 A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920001170.XU CN209398779U (en) 2019-01-03 2019-01-03 A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump

Publications (1)

Publication Number Publication Date
CN209398779U true CN209398779U (en) 2019-09-17

Family

ID=67897654

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920001170.XU Active CN209398779U (en) 2019-01-03 2019-01-03 A kind of vibration absorber on micro mass spectrometer instrument diaphragm pump

Country Status (1)

Country Link
CN (1) CN209398779U (en)

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