CN209387694U - A kind of probe station probe card fixing mechanism - Google Patents
A kind of probe station probe card fixing mechanism Download PDFInfo
- Publication number
- CN209387694U CN209387694U CN201822051611.5U CN201822051611U CN209387694U CN 209387694 U CN209387694 U CN 209387694U CN 201822051611 U CN201822051611 U CN 201822051611U CN 209387694 U CN209387694 U CN 209387694U
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- Prior art keywords
- probe card
- clamping jaw
- bracket
- screw rod
- traveller
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- 239000000523 sample Substances 0.000 title claims abstract description 43
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000033001 locomotion Effects 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 241000237858 Gastropoda Species 0.000 claims 1
- 238000013459 approach Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model relates to semiconductor element technical field of processing equipment, more particularly to a kind of probe station probe card fixing mechanism, including mounting rack, top plate, bracket, traveller, clamping jaw, threaded screw rod, connecting plate, transmission mechanism, transmission mechanism is for driving threaded screw rod to rotate.The vacancy portion on fixed bracket is arranged in the utility model, the probe card on external equipment is set to pass through vacancy portion, transmission mechanism drives threaded screw rod rotation, makes two clamping jaws that probe card is carried out clamping, to realize the quick fixation of probe card, make two clamping jaw relative motions additionally by rotary worm, replaces traditional approach to rotate the mode of multiple screws, improve operating efficiency, mobile mechanism is set, by rotating thread spindle, enables clamping jaw vertical lifting, be fixed to adapt to different model probe card.
Description
Technical field
The utility model relates to semiconductor element technical field of processing equipment, and in particular to a kind of probe station is fixed with probe
Determine mechanism.
Background technique
Probe test station on the market has the fixation kit of clamping probe card at present, by the way that fixing piece is arranged, rotates spiral shell
Silk driving fixing piece clamping probe card fixes probe card each time and requires to carry out can be manually rotated for screw, operating process trouble
And slowly, influence working efficiency.
Utility model content
The purpose of the utility model is to overcome problems of the prior art, a kind of probe station is provided and is fixed with probe
Determine mechanism, it may be implemented quickly to fix probe card, improve efficiency.
To realize above-mentioned technical purpose and the technique effect, the utility model is achieved through the following technical solutions
:
A kind of probe station probe card fixing mechanism comprising:
Mounting rack, the mounting rack bottom outer wall are equipped with vacancy portion；
Top plate, the top plate are fixed at the top of mounting rack, which is provided with the avoiding hollow groove being connected in the vacancy portion；
Bracket, the bracket is arranged in avoiding hollow groove and its length direction is across vacancy portion, by a top plate and two
Side plate composition；
Traveller, the traveller are correspondingly provided with two, and level penetrates the bracket both side plate and can be free to slide respectively；
Clamping jaw, the clamping jaw are correspondingly connected on two travellers, are made of vertical section and horizontal segment；
Threaded screw rod, the threaded screw rod are horizontally set on bracket and connect with holder pivots, revolved by both ends screw thread
It is formed to the first opposite thread segment, the second thread segment；
Connecting plate, there are two the connecting plate is set, the upper end is respectively sleeved at the first thread segment, on the second thread segment and with
First thread segment, the second thread segment are threadedly coupled, and lower end is socketed in respectively on the traveller, when the threaded screw rod rotates,
Drive two connecting plate relative motions；
Transmission mechanism, the transmission mechanism is for driving threaded screw rod to rotate.
Further, the transmission mechanism includes the worm gear being coaxially fixed on threaded screw rod, penetrates support level vertically
Section and the worm screw being connect with holder pivots, the worm and wheel engagement.
Further, the worm screw is equipped with rotating wheel.
It further, further include the mobile mechanism for driving two clamping jaw vertical shifts.
Further, the mobile mechanism includes penetrating clamping jaw and the thread spindle with clamping jaw rotation connection, the folder vertically
Threadingly shaft length direction is provided with the card slot for traveller engaging on pawl, and the thread spindle penetrates traveller and is threadedly coupled with traveller.
The utility model has the beneficial effects that the vacancy portion on fixed bracket is arranged, pass through the probe card on external equipment
Vacancy portion, transmission mechanism drive threaded screw rod rotation, make two clamping jaws that probe card is carried out clamping, to realize the fast of probe card
Speed is fixed, makes two clamping jaw relative motions additionally by rotary worm, traditional approach is replaced to rotate the mode of multiple screws, improve
Mobile mechanism is arranged in operating efficiency, by rotating thread spindle, enables clamping jaw vertical lifting, to adapt to different model spy
Needle card is fixed.
Detailed description of the invention
In order to illustrate more clearly of the technical solution of the utility model embodiment, make required for being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model use state；
In attached drawing, component representated by each label is as follows:
1- mounting rack, 2- vacancy portion, 3- top plate, 4- avoiding hollow groove, 5- bracket, 6- traveller, 7- clamping jaw, the first thread segment of 8-,
The second thread segment of 9-, 10- connecting plate, 11- worm gear, 12- worm screw, 13- thread spindle, 14- card slot, 15- probe card.
Specific embodiment
In order to be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, under
Face will combine the attached drawing in the utility model embodiment, carry out to the technical scheme in the embodiment of the utility model clear, complete
Ground description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.Base
In the embodiments of the present invention, institute obtained by those of ordinary skill in the art without making creative efforts
There are other embodiments, fall within the protection scope of the utility model.
A kind of probe station probe card fixing mechanism as shown in Figs. 1-2 comprising:
Mounting rack 1,1 bottom outer wall of mounting rack are equipped with vacancy portion 2, and mounting rack 1 is by way of screw or welding
It is connected in external probe station rack；
Top plate 3, the top plate 3 are fixed in 1 top of mounting rack, which is provided with the avoiding hollow groove being connected in the vacancy portion 2
4, the mode that top plate 3 is connected by screw to is connected in external probe station rack；
Bracket 5, the bracket 5 is arranged in avoiding hollow groove 4 and its length direction is across vacancy portion 2, by a top plate and
Two side plate compositions；
Traveller 6, the traveller 6 are correspondingly provided with two, and level penetrates 5 both side plate of bracket and can be free to slide respectively；
Clamping jaw 7, the clamping jaw 7 are correspondingly connected on two travellers 6, are made of vertical section and horizontal segment, two clamping jaws 7
Vertical section between surround for probe card 15 engage installation space；
Threaded screw rod, the threaded screw rod is horizontally set on bracket 5 and is rotatablely connected with bracket 5, by both ends screw thread
Oppositely oriented the first thread segment 8, the second thread segment 9 composition；
Connecting plate 10, there are two the connecting plate 10 is set, the upper end is respectively sleeved at the first thread segment 8, the second thread segment 9
It above and with the first thread segment 8, the second thread segment 9 is threadedly coupled, lower end is socketed in respectively on the traveller 6, the screw thread silk
When bar rotates, two 10 relative motions of connecting plate are driven；
Transmission mechanism, the transmission mechanism is for driving threaded screw rod to rotate.
The transmission mechanism include the worm gear 11 being coaxially fixed on threaded screw rod, vertically penetrate 5 horizontal segment of bracket and with
The worm screw 12 that bracket 5 is rotatablely connected, the worm screw 12 engage with worm gear 11.
The worm screw 12 is equipped with rotating wheel, is convenient for rotary worm 12.
It further include the mobile mechanism for driving two 7 vertical shifts of clamping jaw.
The mobile mechanism includes penetrating clamping jaw 7 and the thread spindle 13 with the rotation connection of clamping jaw 7 vertically, on the clamping jaw 7
Threadingly 13 length direction of axis be provided with for traveller 6 engage card slot 14, the thread spindle 13 penetrate traveller 6 and with 6 screw thread of traveller
Connection.
Specifically, the rotation connection mode in the present embodiment including but not limited to uses rolling bearing.
The utility model is when in use: probe card being passed through vacancy portion, rotary worm rotates worm gear, drives screw thread silk
Bar rotation, due to the thread rotary orientation of the first thread segment and the second thread segment on threaded screw rod on the contrary, two connecting plates will opposite fortune
It is dynamic, and make two clamping jaws are opposite to draw close, probe card is clamped by the installation space surrounded between vertical section thereon, is reached with this
To the quick fixation to probe card, when adjusting the lifting of clamping jaw, thread spindle is rotated, since thread spindle and clamping jaw are rotatablely connected simultaneously
It is threadedly coupled again with traveller, clamping jaw is by vertical shift at this time, to complete the adjusting of lifting.
The preferred embodiment in the utility model disclosed above is only intended to help to illustrate the utility model.Preferred embodiment is simultaneously
There is no the details that detailed descriptionthe is all, also not limiting the utility model is only the specific embodiment.Obviously, according to this theory
The content of bright book can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably
The principles of the present invention and practical application are explained, so that skilled artisan be enable to better understand and utilize this
Utility model.The utility model is limited only by the claims and their full scope and equivalents.
Claims (5)
1. a kind of probe station probe card fixing mechanism, characterized in that it comprises:
Mounting rack (1), mounting rack (1) bottom outer wall are equipped with vacancy portion (2)；
Top plate (3), the top plate (3) are fixed at the top of mounting rack (1), which is provided with and be connected to keeping away on the vacancy portion (2)
Empty slot (4)；
Bracket (5), bracket (5) setting is in avoiding hollow groove (4) and its length direction is across vacancy portion (2), is pushed up by one
Plate and two side plate compositions；
Traveller (6), the traveller (6) are correspondingly provided with two, and level penetrates the bracket (5) both side plate and can free skating respectively
It is dynamic；
Clamping jaw (7), the clamping jaw (7) are correspondingly connected on two travellers (6), are made of vertical section and horizontal segment；
Threaded screw rod, the threaded screw rod is horizontally set on bracket (5) and is rotatablely connected with bracket (5), by both ends screw thread
Oppositely oriented the first thread segment (8), the second thread segment (9) composition；
Connecting plate (10), there are two the connecting plate (10) sets, the upper end is respectively sleeved at the first thread segment (8), the second screw thread
It being threadedly coupled in section (9) and with the first thread segment (8), the second thread segment (9), lower end is socketed in respectively on the traveller (6),
When the threaded screw rod rotates, two connecting plate (10) relative motions are driven；
Transmission mechanism, the transmission mechanism is for driving threaded screw rod to rotate.
2. a kind of probe station probe card fixing mechanism according to claim 1, which is characterized in that the transmission mechanism packet
The snail for including the worm gear (11) being coaxially fixed on threaded screw rod, penetrating bracket (5) horizontal segment vertically and being rotatablely connected with bracket (5)
Bar (12), the worm screw (12) are engaged with worm gear (11).
3. a kind of probe station probe card fixing mechanism according to claim 2, which is characterized in that on the worm screw (12)
Equipped with rotating wheel.
4. a kind of probe station probe card fixing mechanism according to claim 1, which is characterized in that further include driving two
The mobile mechanism of clamping jaw (7) vertical shift.
5. a kind of probe station probe card fixing mechanism according to claim 4, which is characterized in that mobile mechanism's packet
It includes and penetrates clamping jaw (7) and the thread spindle (13) with clamping jaw (7) rotation connection vertically, threadingly axis (13) is long on the clamping jaw (7)
Degree direction is provided with the card slot (14) for traveller (6) engaging, and the thread spindle (13) penetrates traveller (6) and connects with traveller (6) screw thread
It connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822051611.5U CN209387694U (en) | 2018-12-07 | 2018-12-07 | A kind of probe station probe card fixing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822051611.5U CN209387694U (en) | 2018-12-07 | 2018-12-07 | A kind of probe station probe card fixing mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209387694U true CN209387694U (en) | 2019-09-13 |
Family
ID=67871168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822051611.5U Active CN209387694U (en) | 2018-12-07 | 2018-12-07 | A kind of probe station probe card fixing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209387694U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114879012A (en) * | 2022-05-13 | 2022-08-09 | 昆山兢美电子科技有限公司 | Plane type flying probe testing device |
-
2018
- 2018-12-07 CN CN201822051611.5U patent/CN209387694U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114879012A (en) * | 2022-05-13 | 2022-08-09 | 昆山兢美电子科技有限公司 | Plane type flying probe testing device |
| CN114879012B (en) * | 2022-05-13 | 2023-12-19 | 昆山兢美电子科技有限公司 | Plane type flying probe testing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220614 Address after: 230000 Room 301 and 302, building 4, phase I, mechanical and Electrical Industrial Park, No. 767, Yulan Avenue, high tech Zone, Hefei City, Anhui Province Patentee after: Hefei Huayu Semiconductor Co.,Ltd. Address before: 230088 6th floor, building B, science and technology innovation public service and applied technology R & D center, hewubeng Experimental Zone, No. 860, Wangjiang West Road, high tech Zone, Hefei, Anhui Province Patentee before: HEFEI HUADA SEMICONDUCTOR Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 230000, No. 66 Tiantangzhai Road, High tech Zone, Hefei City, Anhui Province Patentee after: Hefei Huayu Semiconductor Co.,Ltd. Country or region after: China Address before: 230000 Room 301 and 302, building 4, phase I, mechanical and Electrical Industrial Park, No. 767, Yulan Avenue, high tech Zone, Hefei City, Anhui Province Patentee before: Hefei Huayu Semiconductor Co.,Ltd. Country or region before: China |
|
| CP03 | Change of name, title or address |