CN209387387U - Array sample heating laser light source unit - Google Patents

Abstract

Array sample heating laser light source unit provided by the utility model, comprising: output laser is to provide heat energy and arranged side by side or array arrangement multiple lasers.The utility model can be realized the laser heating of multi-beam parallel, for the slewing heating to array sample.

Description

Array sample heating laser light source unit

Technical field

The utility model relates to material heat treatment technical fields, more particularly to a kind of array sample heating laser light source list Member.

Background technique

From last century Mo, Chinese American doctor Xiang Xiaodong of Univ California-Berkeley and its cooperation people's schulz Professor takes the lead in proposing combined material chip (Combinatorial material chip) or combined sample library in the world The innovative idea of (Combinatorial material library), and high density sample library is prepared for film morphology, Accelerate to obtain Demonstration Application in the optimal screenings such as superconductor, fluorescent material.Later, the preparation and representation of combination array sample library Technology is just acknowledged as that new material discovery is accelerated to search plain engine and efficient experimental method with what performance was screened, passes through prepared composition The array sample library or gradient sample library of discrete or quasi-continuous variation, in conjunction with the characterization technique of material structure and correlated performance, Can quick obtaining sample composition screening/performance optimization data, reaching the R&D cycle halves and researches and develops the target that cost halves, can It is researched and developed for new material and provides Science and Technology basis using selection.In material array sample library technology of preparing, multichannel is simultaneously Row integrated array sample library is an important branch, the quick preparation of Multi-example may be implemented, and each in sample array is only The space scale and the scale of construction of vertical sample are sufficient for existing structure characterization and requirement of the Performance Testing Technology to sample, thus establish Related law between material composition-technique-structure-performance.

In material preparation process, high-temperature heat treatment is important link, non-gold especially inorganic to metal and ceramics etc. Belong to material, it can be achieved that the chemical reaction of raw material, crystallizing into phase, fusing ingot casting etc..However, for the fast parallel of array sample library Heat treatment technics is still blank.

Laser heating technique have the characteristics that quickly, orientation, can focus, it should can become to array sample library heating at Manage one of effective technology.But some laser heating techniques for having developed at present or it is only applicable to single beam laser pair The point-by-point heating (patent document 1) of small film sample, or be only applicable to multi-beam laser Low Temperature Thermal etching and prepare micro-bit phase difference Film (patent document 2), or be only applicable to laser welding and detect solder joint burning situation (patent document 3).Obviously, these existing skills Art is not applicable to the quick high-temp heat treatment of array sample library.Therefore, it is necessary to develop to be directed to the parallel quick of array sample library High-temperature heat treatment technology and equipment, to meet the urgent need of accelerated material compound experiment process.

The prior art

Patent document 1: Chinese patent discloses CN 106992131A；

Patent document 2: Chinese patent discloses CN 101498805A；

Patent document 3: Chinese patent discloses CN 101107501A.

Utility model content

In view of the above, the technical problem to be solved by the utility model is to provide a kind of array sample heating lasers Light source unit can be realized the laser heating of multi-beam parallel, for the slewing heating to array sample.

In order to solve the above technical problems, array sample heating laser light source unit provided by the utility model, comprising: defeated Laser is out to provide heat energy and arranged side by side or array arrangement multiple lasers.

According to the utility model, it can be achieved that multi-beam parallel, can be used for the slewing heating of array sample, realize sample In-situ chemical reaction, crystallization, fusing etc., changed by laser energy feed-in and timeliness, obtain the sample heat treatment of optimization Effect.

Also, further including the laser set on the laser downstream to change the size of the hot spot of laser in the utility model Beam spot adjusts unit.

Can realize that beam spot size is adjustable according to the utility model.

Also, it includes corresponding with the multiple laser more that the laser beam spot, which adjusts unit, in the utility model A beam expanding lens.

Also, further including that the laser optical path for heating site needed for laser guide is adjusted unit in the utility model.

It according to the utility model, can effectively make to heat site needed for laser guide, realize orientation heating.

Also, the laser is continuous wave laser in the utility model, energy-conditioning range is 0.1W ~ 150W.

According to the utility model, continuous wave laser is selected, rather than pulse laser, quick heating up process can be kept Steadily.

Also, it includes being set to the laser beam spot to adjust unit downstream that the laser optical path, which adjusts unit, in the utility model Reflecting mirror.

According to the utility model, laser vertically-guided can be heated into site by reflecting mirror, reach what laser power utilized It maximizes.

Also, sample to be tested is prepared with array sample format or is assemblied on substrate, and the substrate is gone into battle in the utility model The spacing distance of each sample and the spacing of multiple laser beams match in column sample.

According to following specific embodiments and attached drawing is referred to, is better understood with the above content of the utility model and other Objects, features and advantages.

Detailed description of the invention

Fig. 1 shows the structural schematic diagram of the array sample heating laser light source unit of one implementation form of the utility model, Including laser 101, beam expanding lens 102 and reflecting mirror 103；

Fig. 2 shows the array sample laser heating systems of application array sample heating laser light source unit shown in FIG. 1 An implementation form structural schematic diagram；

Fig. 3 shows the structural schematic diagram of sample sealed compartment and sealed compartment form in system shown in Figure 2；

Fig. 4 shows the experimental result heated using the laser heating system of Fig. 2, with { 5 × 5 } array yellow fluorescence For the heating of powder sample library；

Fig. 5 shows another experimental result heated using the laser heating system of Fig. 2, is heated with ceramics sample red For outer imaging effect；

Appended drawing reference:

101- laser；

102- beam expanding lens；

103- reflecting mirror；

104- laser optical path；

105- thermometer；

106- camera；

107- mobile station；

108- mobile station controller；

109- main control computer；

110- data acquisition and control device；

111- array sample platform；

112- sample sealed compartment；

113- sealed compartment form.

Specific embodiment

It is clear in order to be more clear the purpose of this utility model, technical solution and advantage, below in conjunction with attached drawing and specifically Embodiment, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to solve The utility model is released, is not used to limit the utility model.

There is universal adaptability to meet the technical need for quickly heating high-temperature process to array material sample library, and developing Parallel laser heating technique and equipment, the utility model discloses a kind of array sample heating laser light source unit, including defeated Laser is out to provide heat energy and arranged side by side or array arrangement multiple laser elements.Multi-beam parallel can be achieved, can be used for The slewing of array sample is heated.In addition, it may further comprise the laser beam spot of changeable beam spot size adjusts unit, adjust The laser optical path of laser optical path adjusts unit, to realize that the orientation to different sample sizes heats.Further, array sample adds Thermal laser light source unit is also connected with Master Control Unit when working obtains work order, and records and show experimental result.

The multi-beam parallel that the array sample heating laser light source unit of the utility model is exported, can be used for array sample Slewing heating, realize in-situ chemical reaction, crystallization, fusing of sample etc., changed by laser energy feed-in and timeliness, The sample for obtaining optimization heats effect.

The array sample library, which can be, contains { A × B } a independent sample of ordered arrangement, can be metal or nothing The nonmetallic powder of machine, membrane material and block sample.

Fig. 2 shows the array sample laser heating systems of application array sample heating laser light source unit shown in FIG. 1 An implementation form structural schematic diagram.As shown in Fig. 2, the laser heating system of this implementation form can include: have with arranged side by side Or the laser light source unit of multiple lasers 101 of array manner arrangement, heat energy is provided；Laser beam spot adjusts unit, can The beam spot size for changing laser heats various sizes of sample orientation；Sample stage, for placing array sample；Temperature measurement Unit, for treating the laser heating temperature thermometric of heating electrodes sample and feeding back heating effect；Image recording unit, for remembering Record laser Heating Experiment image；And it is connected with above-mentioned laser light source unit, temperature measurement unit, image recording unit total Control unit.Master Control Unit can be main control computer 109 shown in Fig. 2 in this embodiment.

Further, the laser heating system of this implementation form may also include that laser optical path adjusts unit, by laser guide Heat site；Sample stage mobile unit, for realizing array sample and laser beam orientation heating site location matches movement and Heating positioning；The sealed compartment and its removal unit for accommodating sample stage, for keeping array sample not contaminated and discharging heated The gaseous substance generated in journey；Above-mentioned Master Control Unit can also be with sample stage mobile unit and sample sealed compartment and its removal unit phase Connection.

Master Control Unit passes through mobile single with above-mentioned laser light source unit, temperature measurement unit, image recording unit, sample stage Member, sealing and the connection of removal unit make laser pair for controlling the variation of laser energy feed-in, timeliness, temperature, position etc. Each sample in array reaches gas object that is quick, effectively heating with fixed point, and generate in the reaction process of removal heating in real time Matter.Also, also by the connection with temperature measurement unit, recording unit, record experiment parameter, heating may be implemented in Master Control Unit Process parameter change, heating temperature (power)-time graph, real-time recording, the playback of screen experimental result.The utility model can root It according to needing to several samples while heating, and realizes laser feed in energy analysis, timeliness, temperature, position multi-parameter controllable adjustment, reaches Heating parameters high frequency zone and the technical requirements of optimization.

Specifically, as shown in Fig. 2, being shown as example three light beam parallel laser heating systems in this implementation form (i.e. Three 101 arranged in parallel of laser), sample stage 111 is array sample platform, and the array sample placed thereon is { 12 × 9 } group It closes.But the laser of the utility model, the quantity of array sample and arrangement are not limited to this, can be adjusted as needed.

Preferably, the energy of each laser of the laser light source unit is adjustable, energy-conditioning range be 0.1W~ 150W.Selection continuous wave laser, rather than pulse laser, can keep the steady of quick heating up process.

More preferably, above-mentioned laser can be gas laser (such as carbon dioxide gas laser, carbon monoxide gas Body laser etc.) or solid state laser (such as yttrium-aluminium-garnet solid state laser, semiconductor laser etc.), wherein gas laser Device is more suitable for inorganic non-metallic material heating, and solid state laser is more suitable for metal material heating.In addition, gas laser Can be mashed up with solid state laser, while meeting the demand for heat of different samples.

In this embodiment, laser light source unit and laser beam spot adjust the top that unit is set to array sample, and Horizontally export laser.In turn, unit can be adjusted by laser optical path (is, for example, to be set to the laser beam in this embodiment The reflecting mirror 103 in spot adjusting unit downstream) by laser vertical (90^o) guiding heating site (laser optical path shown in Figure 2 104), reach the maximization that laser power utilizes.

In this embodiment, it may include corresponding more with multiple lasers 101 that the laser beam spot, which adjusts unit, A beam expanding lens 102.The beam spot size of changeable laser, is oriented heating to various sizes of sample, hot spot expands range It is 2~8 times of the original spot size of laser.Specifically, laser beam spot, which adjusts unit, can be used beam expanding lens 102, be that one kind can Change the lens subassembly of laser beam spot sizes and the angle of divergence.Beam expanding lens can be made of former and later two toroidal lens, and quasi-parallel swashs Light is become to focus or be dissipated by previous toroidal lens, then is become quasi-parallel again by the latter toroidal lens and swashed Light adjusts the beam spot size of the changeable output laser in relative position of two toroidal lens；Change laser beam spot size be for Realization different heating mode, beam spot size hour are approximately to carry out a heating to sample, when beam spot size is big, it can be achieved that To being evenly heated in the certain area of sample.In the present system, beam expanding lens can be mounted on laser beam in the following, thus changing laser The beam spot size of beam, therefore, the effect of beam expanding lens are that laser heating spot size is made to become larger, make the irradiated area of laser beam with to Heat sample heating surface area coincide, reach optimal heating effect, it is emphasized that, due to expanding, laser power density can under Drop can make up the decline of power density by improving laser energy.

Temperature measurement unit is that the sample arrived to laser irradiation carries out thermometric, for accurate thermometric and feedback heating effect. In this embodiment, temperature measurement unit can be hyperthermia radiation type temperature device, such as contactless infrared thermography Device (such as thermometer 105 shown in Fig. 2), monitoring temperature range are 500~3000 DEG C.Specifically, the infrared temperature of thermometer 105 Degree detecting head is separated by with the array sample short distance being placed on sample stage 111, measures temperature with contactless infrared sensor Degree.Temperature measurement unit to every Shu Jiguang be equipped with independent detector, measurement be the sample that every Shu Jiguang is being heated temperature Degree.In addition, sample stage can also be made to be moved to new position, temperature measurement unit after the completion of the heating of one or a set of sample Measure the temperature of new sample to be heated.

In this embodiment, sample stage mobile unit may include mobile station 107, can be X-Y two-dimensional movement platform.Sample Platform 111 is placed in 107 top of mobile station, with its synchronizing moving.Specifically, mobile station 107 can drive the sample stage of mounting thereon 111 is mobile in X or Y-direction, and the moving guide rail of the lower orthogonal both direction of setting, driving device is servo motor or step Into motor, moving distance is arbitrarily set according to demand.As shown in Fig. 2, sample stage mobile unit can be via mobile station controller 108 It is connected with Master Control Unit, under the movement instruction of mobile station controller 108, by driving servo motor or stepper motor, makes to move Dynamic platform 107 is mobile, drives the sample stage 111 of top mobile, realizes of array sample and laser beam orientation heating site location With movement and positioning heating.

In this embodiment, the sample sealed compartment (as shown in Figure 3) and its removal unit can keep sample not get dirty The gaseous substance generated in dye and release heating process.The upper cover form 113 of sealed compartment 112 uses laser transmissive material, such as Zinc selenide crystal etc. makes laser beam penetrate form and heats to internal array sample.Sample stage 111 is placed in sealed compartment 112, And by being connected to vacuum pump with the pipeline being connected in sealed compartment 112.Main control computer when needing degasification, as Master Control Unit 109 control vacuum pumps are opened, the gas in you can pump it away sealed compartment 112.

Also as shown in Fig. 2, in this implementation form, laser light source unit, temperature measurement unit can be acquired and be controlled by data Device 110 processed is connected with main control computer 109.Above-mentioned data acquisition and control device 110 is system-wide intelligent data control centre, is used In acquisition and control laser power and temperature data.In addition, main control computer 109 can be with the camera 106 as image recording unit (such as can be high-speed CCD camera) communication connection, for recording heating process and heating process image reproducing.

Specifically, in this implementation form, three parallel lasers 101 and three parallel infrared heat thermometers 105 with 110 communication connection of data collection and control device, can obtain temperature data when different laser output powers, further connection master The data feedback system of control computer 109 can carry out the accurate control of PID heating temperature and program.Mobile station controller 108 and master Control 109 communication connection of computer can accurately control the position of array sample platform；Three parallel high temperature observation cameras 106 and master control 109 communication connection of computer, can obtain the digital image data in high-temperature heating process.Experiment parameter in experimentation plus Thermal process, heating temperature (power)-time graph, heating process real-time recording, screen picture playback are controlled by main control computer 109 System, and in liquid crystal display real-time display.Communication connection therein can be used to be communicated in multiplex roles/protocol suite of information exchange Mode.

Array sample heating laser light source unit described in the utility model is applicable to metal or inorganic non-metallic material Powder, membrane material or block materials array sample high-temperature heating treatment, heating thickness is less than or equal to 5mm, more preferably heats Effect is that thickness is less than or equal to 3mm.The array sample is produced or is assemblied on substrate, array format can be A × B } any combination, wherein A and B are positive integer, and 1≤A≤20,1≤B≤20.Each sample is flat in array sample Face full-size (diameter or side length) is less than or equal to 10 mm, and is formed with { A × B } array format appropriately combined.Array on substrate The spacing distance of each sample need to match with the spacing of parallel laser light beam in sample, and substrate size need to be with two-dimensional movement platform Size and the moving range adaptation of X-Y plane in unit.Thus, it is possible to realize in the center and laser beam spot of each sample The collimation of heart position is corresponding, reaches " point " to the accurate heating effect of " point ".After the completion of the heating of one or a set of sample, sample Sample stage can be moved to new position by platform mobile unit, and laser beam can heat new sample, so as to realize Automatic traversal heating is carried out to each sample on sample stage under process control.Meanwhile multiple laser can also be realized to multiple samples Product heat simultaneously, significantly promote heating efficiency.

When specifically used, the sample of required heating is packed into sample stage 111, sample stage 111 is then put into sealed compartment 112, heating parameters (target temperature, heating time, the soaking time of the sample of corresponding position are set in main control computer 109 Deng), laser beam passes through sealed compartment form 113 and heats to sample.After beginning to warm up, data acquisition and control device 110 is according to each The heating parameters of sample adjust the output power percentage of corresponding laser 101, and the laser of output passes through beam expanding lens 102 and reflection It is irradiated on sample after mirror 103, data acquisition and control device 110 adjusts in real time according to the collected sample temperature of thermometer 105 The output power percentage of laser 101, to ensure that heating process meets initial setting, camera 106 can observe sample in real time Heating state.After the completion of the heating of one or a set of sample, main control computer 109 sends new position to be heated to mobile station control Device 108 processed, mobile station controller 108 control mobile station 107 and are moved to designated position.Sealed compartment 112 is circumscribed with removal unit and (takes out Gas vacuum pump), user can set whether removal unit in heating process opens in main control computer 109 as needed, work as unlatching When, removal unit can take the gas in sample sealed compartment 112 away.

Compared with prior art, using the array sample laser of the array sample heating laser light source unit of this implementation form Heating system has the advantages that

(1) use multiple lasers side by side or array arrangement, the energy of each laser is adjustable, and energy adjustable extent is wide； Select continuous wave laser, rather than pulse laser can keep the steady of quick heating up process, avoid temperature skyrocket and Heating fluctuation caused by steep drop；

(2) the single or multiple laser light sources used can be gas laser light source or Solid State Laser light source, wherein gas Volumetric laser light source is more suitable for inorganic non-metallic material heating, and Solid State Laser light source is more suitable for metal material heating；Gas swashs Radiant can also be mashed up with Solid State Laser light source, while meeting the demand for heat of different samples；

(3) laser optical path is adjusted to the laser vertical (90 in unit using high anti-reflecting mirror^o) guiding heating site, it reaches The maximization utilized to laser power；

(4) beam spot size for changing laser using laser beam expanding mirror unit, is oriented heating to various sizes of sample, Hot spot expands range up to 2~8 times of the original spot size of laser；

(5) the material array sample sealed compartment and its removal unit designed can keep sample not contaminated and release is heated The gaseous substance generated in journey, sealed compartment upper cover form use the special glass of laser transmissive；

(6) intelligent image record and the display unit designed is that high-speed CCD camera and computer are combined, for recording experiment Parameter, heating process Parameters variation, heating temperature (power)-time graph, heating process real-time recording, screen picture playback.

The utility model is further described below by way of specific embodiment.

As shown in Fig. 2, be a kind of array sample that one implementation form of the utility model provides three light beams are parallel and beam spot The structural schematic diagram of adjustable laser heating system.Including laser light source (three lasers arranged side by side) -101, beam expanding lens -102, laser The reflecting mirror -103 of optical path adjusting, laser optical path -104, above-mentioned four forming arrays sample heating laser light source unit；Also The equipment such as peripheral control and detection, including thermometer -105, camera -106, mobile station -107, mobile station controller -108, master control Computer -109 processed, data acquisition and control device -110, array sample platform -111, sample sealed compartment -112, sealed compartment form -113.

Sample heating and process record are by the adjusting and sample stage movement of control laser power and temperature and imaging The unlatching and operation of record.Beam expanding lens 102 passes through the beam spot size for manually adjusting and changing laser, carries out to various sizes of sample The range that expands of orientation heating, hot spot is 2~8 times of the original spot size of laser；Laser optical path adjusts unit 103 and passes through height Laser vertical (or 90 °) guiding heating site is reached the maximization that laser power utilizes by anti-reflecting mirror；Pass through laser optical path The 104 zinc selenide monocrystalline forms 113 for penetrating sealed compartment 112 are irradiated on array sample platform 111.Thermometer 105 and monitoring temperature The temperature and sample status change data for the heating region that camera 106 obtains feed back to main control computer 109.Thermometer 105 Infrared temperature detecting lenses be separated by with array sample unit and 112 short distance of sealed compartment, with contactless infrared sensor To monitor the stability of temperature.Data acquisition and control device 110 is system-wide intelligent data control centre, for acquiring and controlling Laser power processed and temperature data.Three parallel lasers 101 and three parallel high temperature thermometers 105 and data collection and control 110 communication connection of device, can obtain temperature data when different laser output powers, further connect the number of main control computer 109 The accurate control of PID heating temperature and program can be carried out according to feedback system.Mobile station controller 108 and main control computer 109 communicate Connection can accurately control the position of array sample platform；Three parallel high temperature observation cameras 106 and the communication of main control computer 109 connect It connects, the digital image data in high-temperature heating process can be obtained.Experiment parameter, heating process, heating temperature in experimentation (power)-time graph, heating process real-time recording, screen picture playback are spent by main control computer control and in liquid crystal display Real-time display.

It is parallel using three light beams according to array sample manufactured by Fig. 2 example and beam spot adjustable laser heating system is laser Heating Experiment sample, the working principle and process of the array sample laser heating system of an embodiment of the present invention are as follows: root According to the spacing of the size and every a sample of the temperature and heating time requirement and array sample of sample heating, inputs and determine Running parameter and location parameter such as laser heating spot size, target temperature and heating time, select single beam or two beams or three beams Laser heats simultaneously, hot spot position etc., starts laser 101 to the array sample platform for being loaded with sample by main control computer 109 111 heating.At the same time, temperature information is fed back to master control electricity by the temperature data in 105 real-time measurement of thermometer heating site Brain.High temperature observation camera 106 records the heating process of hot spot sample in real time, and data acquisition and control device 110 exports laser function Rate and temperature collection data carry out the process control of heating process by main control computer 109, control laser power, heating temperature, The shift position of soaking time and two-dimensional movement platform makes the heating temperature of each sample in array sample reach goal-setting Value.Experiment parameter, heating process Parameters variation, heating temperature (power)-time graph, heating process is recorded simultaneously to record in real time Picture, screen picture playback.The gaseous product discharged in sample heating reaction passes through the depassing unit discharge sealing in sealed compartment 112 Cabin.

Embodiment 1

With the three beam laser heating systems that are designed and manufactured according to Fig. 2 to { 5 × 5 } array yellow fluorescent powder sample Library carries out laser Heating Experiment.According to demand, heated using single beam or the combination of two beams or three beams of laser.In { 5 × 5 } array In yellow fluorescent powder sample library, each sample is 14 mm in the spacing of X-direction, and consistent with the spacing of laser beam, sample is in Y The spacing of axis direction is 12 mm, makes sample and laser beam heats location matches by the movement of two-dimensional movement platform, realizes that fixed point adds Heat.Main control computer 109 is regulated and controled by adjusting the shift position of laser power, heating time and two-dimensional movement platform, makes array sample In the heating of each sample reach target set point.The gaseous product discharged in sample heating reaction passes through removing in sealed compartment Sealed compartment is discharged in device of air.Temperature measurement unit real-time measurement heats the temperature data in site, and temperature information is fed back to master control Unit.High speed camera records the heating process of hot spot sample in real time, and connect with intelligent display unit, record experiment parameter, Heating process Parameters variation, heating temperature (power)-time graph, heating process real-time recording, screen picture playback.Heating knot It is as shown in Figure 4 that image is recorded when fruit.

Fig. 4 is shown by taking the heating of { 5 × 5 } array yellow fluorescent powder sample library as an example, using three manufactured and designed according to Fig. 2 The experimental result of light beam parallel laser heating system combined heated.1800~2000 DEG C of heating temperature range of setting；Laser heating 10 DEG C/s of heating rate；60~1200s of soaking time variation range after being heated to assigned temperature；Adjusting beam expanding lens shines laser Spot diameter is penetrated having a size of 9 mm；Thermometer sampling time interval 1s.

In Fig. 4, for the c1-t1-1 sample of c1 series, target heating temperature is 1800 DEG C, not bright after heat preservation 60s Aobvious heating effect shows.And for c1-t2-1 sample, holding time 300s has apparent heating effect to show. For c1-t3-1, c1-t4-1, c1-t5-1 sample with holding time, heating effect is more significant (heating zone darkens).

For c2 series c2-t1-2 sample, target heating temperature is 1850 DEG C, is not also heated significantly after keeping the temperature 60s Effect shows.And for c2-t2-2 sample, holding time 300s has shown apparent heating effect.For c2-t3- 2, c2-t4-2, c2-t5-2 sample, with holding time, heating effect is more significant (heating zone darkens).

For c3, c4, c5 series of samples, target heating temperature is respectively 1900 DEG C, 1970 DEG C, 2000 DEG C, is keeping the temperature 60s Apparent heating effect has inside just been shown (heating zone darkens).

The reason of generating above-mentioned heating effect difference is mainly, when target heating temperature is lower (C1 and C2 series), In shorter soaking time (such as 60 s), no matter sample surface temperature and internal temperature are not in bright without reaching fusing point Aobvious molten state only further extends soaking time just it is observed that significantly heating molten state.And when target heats When temperature is higher (C3, C4 and C5 series), even if in shorter soaking time (such as 60 s), the surface of sample and inside temperature Degree has reached or is more than melting temperature, so being able to observe that sample surfaces molten state (heating zone darkens).

Embodiment 2

By taking ceramics sample heats as an example, optimize the optimal viewing parameter of high speed camera, realizes that videograph content is clearly quasi- Really.It is heated using single beam laser, 30~90W of heating power adjustable range.Beam expanding lens is adjusted, laser irradiation spot diameter size is made For 6 mm.According to camera lens operating distance, camera is adjusted to positive burnt position.Select optical filter model: 520 nm(green light of wavelength) and 650 nm(feux rouges)；Attenuator model: transmitance 2% and 0.1%.Sample heats image recording effect as shown in Figure 5.

Effect comparison is imaged in first group of heating: when not using attenuator, only add optical filter (wavelength 520 nm and 650 nm), If laser power is heated to 60W or more, due to the strong radiant light halation issued when sample is heated to high temperature, lead to image The white radiation shaped laser spot of spot, can not observe shape of sample itself.Continue to increase with heating power, radiant light halation is more Obviously.In contrast, using the optical filter of 520 nm of shorter wavelength, radiant light halation slightly weakens.

Effect comparison is imaged in second group of heating: using the optical filter of 520 nm of shorter wavelength, and plus with different transmissions The attenuator (transmitance 2% and 0.1%) of rate is applied in combination.When using transmitance for 2% attenuator combination, laser power adds When heat is to 90W or more, due to there is the radiant light halation of high temperature melt sample, so that the white radiation shaped laser spot of image spot, nothing Method observes shape of sample itself.And when using transmitance for 0.1% attenuator combination, even if optical power is heated to 90W When above, but since the radiant light halation of high temperature melt sample is decayed, it will be seen that the positive burnt imaging of heating sample.

Third group heating imaging effect comparison: using the optical filter of 650 nm of longer wavelength, and plus with different transmissions The attenuator (transmitance 2% and 0.1%) of rate is applied in combination.When using transmitance for 2% attenuator combination, laser power adds When heat is to 60W or more, the radiant light halation occurred due to there is melting sample, sample itself shape starts to be difficult to observe；Work as light When power is further up into 90W or more, since the radiant light halation of high temperature melt sample aggravates, put so that image spot is white Shaped laser spot is penetrated, can not observe shape of sample itself completely.And when using transmitance for 0.1% attenuator combination, even if When optical power is heated to 90W or more, but since the radiant light halation of high temperature melt sample is decayed, it will be seen that heating The positive burnt imaging of sample, but the clarity of image is good not as good as the effect of the filter set synthesized image of short wavelength (520 nm).

So by embodiment 2 the results show that being for the image recording optimum condition of ceramics sample heating: use is shorter The optical filter of wavelength (520 nm) is combined with low transmission attenuator (transmitance 0.1%).

The above content is combine specific embodiment further detailed description of the utility model, and it cannot be said that The specific implementation of the utility model is only limited to these instructions.For the utility model those skilled in the art, Under the premise of not departing from the utility model design, some replacements or modifications can also be made to the embodiment that these have been described, And these substitutions or variant all shall be regarded as belonging to the protection scope of the utility model.

Claims (6)

1. a kind of array sample heating laser light source unit characterized by comprising

Output laser is to provide heat energy and arranged side by side or array arrangement multiple lasers；Sample to be heated is with array sample shape Formula is prepared or is assemblied on substrate, on the substrate in array sample between the spacing distance of each sample and multiple laser beams Away from matching.

2. array sample heating laser light source unit according to claim 1, which is characterized in that further include swashing set on described Light device downstream adjusts unit with the laser beam spot for changing the size of the hot spot of laser.

3. array sample heating laser light source unit according to claim 2, which is characterized in that the laser beam spot is adjusted Unit includes multiple beam expanding lens corresponding with the multiple laser.

4. array sample heating laser light source unit according to claim 2, which is characterized in that further include by laser guide The laser optical path in required heating site adjusts unit.

5. array sample heating laser light source unit according to claim 4, which is characterized in that the laser optical path is adjusted Unit includes the reflecting mirror that unit downstream is adjusted set on the laser beam spot.

6. array sample heating laser light source unit according to claim 1, which is characterized in that the laser is continuous Laser, energy-conditioning range are 0.1W ~ 150W.