CN209381170U - A kind of silicon single crystal rod excavation machine - Google Patents

A kind of silicon single crystal rod excavation machine Download PDF

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Publication number
CN209381170U
CN209381170U CN201821888855.2U CN201821888855U CN209381170U CN 209381170 U CN209381170 U CN 209381170U CN 201821888855 U CN201821888855 U CN 201821888855U CN 209381170 U CN209381170 U CN 209381170U
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China
Prior art keywords
clamping device
single crystal
silicon single
rim charge
crystal rod
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CN201821888855.2U
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Chinese (zh)
Inventor
朱文志
黄奇勋
黄田玉
林孝狮
李元业
林光展
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Fuzhou Tianrui Scroll Saw Technology Co Ltd
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Fuzhou Tianrui Scroll Saw Technology Co Ltd
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Priority to CN201821888855.2U priority Critical patent/CN209381170U/en
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Abstract

The utility model discloses a kind of silicon single crystal rod excavation machines, including trolley device, robot device, clamping device and bilateral scroll saw running gear, clamping device include silicon single crystal rod clamping device；Silicon single crystal rod clamping device includes front end clamping device, tail end clamping device and silicon single crystal rod clamping device driving mechanism；Tail end clamping device and front end clamping device face are arranged, and the two is provided with sensor；Silicon single crystal rod clamping device driving mechanism is for driving tail end clamping device and front end clamping device close to each other or separate；Bilateral scroll saw running gear includes Liang Ge saw blade cutting mechanism, First Line saw cut mechanism driving mechanism and the second saw blade cutting mechanism driving mechanism；Liang Ge saw blade cutting mechanism is respectively arranged at the two sides of clamping device；Trolley device is set to the side of clamping device；Robot device is for grabbing silicon single crystal rod.The utility model has the advantages that silicon single crystal rod keeps proper alignment state by the brilliant line in cutting front and back.

Description

A kind of silicon single crystal rod excavation machine
Technical field
The utility model relates to hard and brittle material cutting technology field more particularly to a kind of silicon single crystal rod excavation machines.
Background technique
Crystalline silicon is steel grey, and amorphous silicon is black, belongs to atomic crystal, is hard and shiny, there is semiconductor property, can For making alloyage such as ferrosilicon, silicon steel etc., and can be used for manufacturing high power transistor, rectifier, solar battery etc..It is high-purity The polysilicon of degree is drawn into ingot casting in single crystal growing furnace, then to the bar for forming various shape specification after ingot casting evolution, truncation, i.e., brilliant Silicon rod.
Publication No. CN107322823A discloses a kind of scroll saw operating mechanism, can run two groups of diamond fretsaws simultaneously Monocrystalline silicon stick is cut, but before cutting, it needs manually to find out the brilliant line of monocrystalline silicon stick and marks, then pass through people Work feeding, and according to being cut after mark line centering clamping monocrystalline silicon stick, under causing efficiency relatively low, and cut quality is difficult Guarantee.
Publication No. CN105583957B discloses one kind to brilliant line apparatus, and the monocrystalline silicon stick crystalline substance line of the invention is to exactly It is completed on to brilliant line station, brilliant line is needed after the completion to send bar to the folder of progress bar at lathe bed device by manipulator It tightly and is cut, the lathe bed device again tests to brilliant line position after clamping again, and manipulator is again Secondary clamping error may cause brilliant line dislocation；In addition, since cutting seam is minimum, and flaw-piece cut surface is larger, in cutting process Spray liquid can generate negative-pressure adsorption and live flaw-piece after following cutting wire to bring cutting seam into, the clamping cylinder and tail of back frame are completed in cutting After frame end floating clamp unclamps the flaw-piece clamping to bar, what flaw-piece cannot be much smoother is fallen into pulp-collecting box.
Utility model content
For this reason, it may be necessary to provide a kind of silicon single crystal rod excavation machine, with solve in the prior art manually to positive brilliant line inefficiency, Problem of the brilliant line in cutting front and back to positive inaccuracy.
To achieve the above object, a kind of silicon single crystal rod excavation machine, including robot device, clamping device are inventor provided And bilateral scroll saw running gear, the clamping device include silicon single crystal rod clamping device；
The silicon single crystal rod clamping device includes that front end clamping device, tail end clamping device and silicon single crystal rod clamping device drive Motivation structure；The tail end clamping device and front end clamping device face are arranged, for clamping and rotating silicon single crystal rod；The monocrystalline Silicon rod clamping device driving mechanism is set between tail end clamping device and front end clamping device, for driving tail end clamping device It is close to each other or separate with front end clamping device；The tail end clamping device and front end clamping device are provided with sensor, institute Sensor is stated for scanning the shape feature of silicon single crystal rod；
The bilateral scroll saw running gear includes Liang Ge saw blade cutting mechanism, First Line saw cut mechanism driving mechanism and Two wires saw cut mechanism driving mechanism；Liang Ge saw blade cutting mechanism is respectively arranged at the two sides of clamping device；The First Line Saw cut mechanism driving mechanism is for driving saw blade cutting mechanism to move cutting silicon single crystal rod along clamping device；Second scroll saw Cutting mechanism driving mechanism is used for the calculated brilliant line present position of scanning result institute according to sensor, and two scroll saws is driven to cut Cutting mill structure is relatively close or separate；
The robot device is set to above clamping device, for grabbing silicon single crystal rod.
Further, the clamping device further includes rim charge clamping device；
The rim charge clamping device includes holding frame, rim charge Hua Ding mechanism, rim charge Bo Ding mechanism；Rim charge Hua Ding mechanism It is set to one end of holding frame, rim charge Bo Ding mechanism is set to the other end of holding frame；Rim charge Hua Ding mechanism and rim charge are dialled Top mechanism is oppositely arranged, and can be relatively close or separate, for clamping and ejecting the rim charge of silicon single crystal rod；Rim charge clamping device is set There are two setting, two rim charge clamping devices are respectively arranged at the two sides of silicon single crystal rod clamping device, and respectively can be close or remote Side from silicon single crystal rod clamping device.
Further, the rim charge clamping device further includes that rim charge clamping device mounting base and the overturning of rim charge clamping device are driven Motivation structure；One end of the rim charge clamping device mounting base is connect with silicon single crystal rod clamping device, and the rim charge clamping device turns over The bottom for turning driving mechanism is articulated with the other end of rim charge clamping device mounting base；The rim charge clamping device is located at rim charge clamping Between mechanism turnover driving mechanism and silicon single crystal rod clamping device, and the bottom of rim charge clamping device and rim charge clamping device are installed Seat is hinged；The top of the rim charge clamping device turnover driving mechanism and the top of rim charge clamping device are hinged；Rim charge clamping machine Structure turnover driving mechanism is for driving rim charge clamping device to rotate by the point of rotation of the hinge joint with rim charge clamping device mounting base.
Further, rim charge Hua Ding mechanism includes that sliding pawl, movable base plate, fixed base plate, withstanding tight block and withstanding tight block drive Motivation structure；
The fixed base plate is connect with holding frame, and the front of fixed base plate offers the pin shaft hole for being through to the back side, institute It states and is movably provided with slidiing pin in pin shaft hole；The sliding pawl is set at the front of fixed base plate, and and slidiing pin End face connection, and sliding pawl and rim charge Bo Ding mechanism face；The back side spring slot of the fixed base plate, in the pin shaft slot It is slidably provided with slidiing pin, is fixedly installed the first spring in the spring slot；The movable base plate is set to solid At the back side of reservation plate, and it is connect with the first spring, slidiing pin；The withstanding tight block driving mechanism passes through withstanding tight block and sliding seat Plate connection, for driving movable base plate, slidiing pin, sliding pawl close to or far from rim charge Bo Ding mechanism.
Further, rim charge Bo Ding mechanism includes that pusher dog, pusher dog fixing seat, pusher dog rotary drive mechanism and pusher dog are flat Move driving mechanism；
The pusher dog fixing seat is connect with holding frame, and can be along holding frame close to or far from the sliding top mechanism slips of rim charge；Institute It states pusher dog to be articulated at pusher dog fixing seat, the pusher dog rotary drive mechanism is connect with pusher dog, for driving pusher dog to rotate to vertical Directly in holding frame；The pusher dog translational drive mechanism is connect with pusher dog fixing seat, for driving pusher dog fixing seat to lean on along holding frame Close or remote from the sliding top mechanism slips of rim charge.
Further, the front end clamping device includes front end grip slipper and front end rotating disk；The tail end clamping device Including tail end grip slipper, tail end rotating disk and spinning disk drive motor；
The front end grip slipper and tail end grip slipper are oppositely arranged, and the front end rotating disk is set on the grip slipper of front end, The tail end rotating disk is set on tail end grip slipper, and front end rotating disk and the coaxial arrangement of tail end rotating disk；The rotating disk Driving motor is connect with tail end rotating disk, for driving tail end to rotate disc spins；
Be provided with sensor installation seat in the middle part of the front end grip slipper and tail end grip slipper, the front end grip slipper and The sensor installation seat of tail end grip slipper is respectively arranged with sensor.
Further, the top of the front end grip slipper and tail end grip slipper offers bearing mounting groove,
The front end rotating disk and tail end rotating disk include bearing, mounting base and ejector pin；The bearing is fixedly installed on In bearing mounting groove, the back side of the mounting base is provided with rotary shaft, and the rotary shaft is stuck in bearing；It opens in the front of mounting base Equipped with ejector pin mounting groove and drive end bearing bracket, the drive end bearing bracket is set at the front of mounting base；The ejector pin is set at drive end bearing bracket, And the end of ejector pin is through in ejector pin mounting groove；Finite place piece is arranged in the end of ejector pin, and the locating part is for limiting ejector pin End is pierced by outside drive end bearing bracket；Second spring is provided in the ejector pin mounting groove, one end of the second spring bears against ejector pin The other end of mounting groove, spring bears against locating part；
The tail end rotating disk further includes rotary disk drive mechanism, and the rotary disk drive mechanism and rotation axis connection are used In driving rotary shaft, mounting base and ejector pin synchronous rotary.
It further, further include control system, the control system and robot device, clamping device and bilateral scroll saw are transported Luggage sets connection, for controlling robot device, clamping device and bilateral scroll saw running gear respectively.
Further, the first sliding rail, the front end folder are provided between the front end clamping device and tail end clamping device The bottom for holding mechanism is provided with sliding block, and the bottom of the sliding block offers first sliding groove compatible with sliding rail, and the sliding block is logical First sliding groove is crossed to be slidably disposed on the first sliding rail.
Further, the robot device include support frame, the first slide unit, the first slide unit driving mechanism, the second slide unit, Second slide unit driving mechanism and clip claw mechanism；
Support frame as described above is across the top of clamping device, and support frame is provided with the second sliding rail across clamping device； First slide unit is horizontally disposed, and the first slide unit is provided with second sliding slot, and the second slide unit is slideably set by second sliding slot It is placed at the second sliding rail；The first slide unit driving mechanism is connect with the first slide unit, for driving the first slide unit sliding along second Rail is mobile；
First slide unit side is provided with the connecting plate of vertical direction, the third sliding rail of the connecting plate setting vertical direction； Second slide unit is provided with third sliding slot, and the second slide unit is slidably disposed at third sliding rail by third sliding slot；It is described Second slide unit driving mechanism is connect with the second slide unit, for driving the second slide unit to move along third sliding rail；The clip claw mechanism It is connect with the second slide unit.
It is different from the prior art, silicon single crystal rod excavation machine described in above-mentioned technical proposal, including robot device, clamping dress It sets and bilateral scroll saw running gear, the clamping device includes silicon single crystal rod clamping device；The silicon single crystal rod clamping device packet Include front end clamping device, tail end clamping device and silicon single crystal rod clamping device driving mechanism；The tail end clamping device and front end Clamping device face setting, for clamping and rotating silicon single crystal rod；The silicon single crystal rod clamping device driving mechanism is set to tail It holds between clamping device and front end clamping device；The tail end clamping device and front end clamping device are provided with sensor；Institute Stating bilateral scroll saw running gear includes Liang Ge saw blade cutting mechanism, First Line saw cut mechanism driving mechanism and the second saw blade cutting Mechanism driving mechanism；Liang Ge saw blade cutting mechanism is respectively arranged at the two sides of clamping device；The robot device is set to Above clamping device, for grabbing silicon single crystal rod.When needing to cut silicon single crystal rod, robot device presss from both sides silicon single crystal rod to preceding It holds between clamping device and tail end clamping device, silicon single crystal rod clamping device driving mechanism drives front end clamping device and tail end folder Hold that mechanism is close, until clamping the both ends of silicon single crystal rod completely；Front end clamping device and tail end clamping device drive silicon single crystal rod It is rotated along axis, at this point, the sensor is used to scan the shape feature of silicon single crystal rod；According to the scanning result of sensor, meter The central axes of silicon single crystal rod are calculated, manipulator adjusts the position of silicon single crystal rod, make list according to the position of the central axes of silicon single crystal rod The central axes of crystalline silicon rod are located at the middle of Liang Ge saw blade cutting mechanism, due to silicon single crystal rod specification there are many, so root again The brilliant line of silicon single crystal rod is obtained according to central axes, the second saw blade cutting mechanism driving mechanism adjusts Liang Ge saw blade cutting mechanism and monocrystalline The spacing of silicon rod clamping device, so that Liang Ge saw blade cutting mechanism is aligned with the brilliant line of silicon single crystal rod respectively；Last first scroll saw Cutting silicon single crystal rod is moved along clamping device in cutting mechanism driving saw blade cutting mechanism edge.Such setting can then cut Before, by the brilliant line of silicon single crystal rod to just to bilateral scroll saw running gear cutting channel middle, guarantee the two of silicon single crystal rod The equivalent width that side is cut.
Detailed description of the invention
Fig. 1 is the structure chart for the silicon single crystal rod excavation machine that an embodiment of the present invention is related to；
Fig. 2 is the schematic diagram for the bilateral scroll saw running gear that an embodiment of the present invention is related to；
Fig. 3 is the schematic diagram for the saw blade cutting mechanism that an embodiment of the present invention is related to；
Fig. 4 is the trolley device schematic diagram that an embodiment of the present invention is related to；
Fig. 5 is the schematic side view for the trolley device that an embodiment of the present invention is related to；
Fig. 6 is the robot device schematic diagram that an embodiment of the present invention is related to；
Fig. 7 is the clip claw mechanism schematic diagram that an embodiment of the present invention is related to；
Fig. 8 is the schematic diagram for the silicon single crystal rod that the clip claw mechanism that an embodiment of the present invention is related to clamps before cutting；
Fig. 9 is the schematic diagram for the silicon single crystal rod that the clip claw mechanism that an embodiment of the present invention is related to clamps after cutting；
Figure 10 is the schematic diagram for the clamping device that an embodiment of the present invention is related to；
Figure 11 is the opening schematic diagram for the rim charge clamping device that an embodiment of the present invention is related to；
Figure 12 is the cross-sectional view for the front end clamping device that an embodiment of the present invention is related to；
Figure 13 is the schematic diagram for the tail end clamping device that an embodiment of the present invention is related to；
Figure 14 is the working state figure one for the rim charge clamping device that an embodiment of the present invention is related to；
Figure 15 is the working state figure two for the rim charge clamping device that an embodiment of the present invention is related to；
Figure 16 is the schematic diagram for the rim charge Bo Ding mechanism that an embodiment of the present invention is related to；
Figure 17 is the schematic diagram for the rim charge Hua Ding mechanism that an embodiment of the present invention is related to.
Description of symbols:
1, rack；
2, bilateral scroll saw running gear；
20, saw blade cutting mechanism；201, annular diamond fretsaw；202, tension pulley mechanism；203, weight；204, driven wheel Mechanism；205, drive wheel mechanism；206, spraying mechanism；21, First Line saw cut mechanism driving mechanism；22, the second saw blade cutting Mechanism driving mechanism；23, collect flitch；24, First Line saw cut mechanism sliding rail；25, the second saw blade cutting mechanism sliding rail；
3, clamping device；
31, front end clamping device；311, front end grip slipper；312, sliding block；313, rear end cap；314, bearing；315, it installs Seat；316, second spring；317, top plate；318, ejector pin fixed plate；319, drive end bearing bracket；320, ejector pin；3201, sensor is installed Seat；3202, sensor；
32, silicon single crystal rod clamping device driving mechanism；
321, lead screw motor；322, speed reducer；323, turn-screw；324, the first sliding rail；325, transmission nut；
33, tail end clamping device；
331, tail end grip slipper；332, speed reducer；333, rotary disk drive mechanism；
34, rim charge clamping device；
341, rim charge clamping device mounting base；342, rim charge clamping device turnover driving mechanism；
35, holding frame；
36, rim charge Bo Ding mechanism；361, pusher dog translational drive mechanism；362, pusher dog fixing seat；363, pusher dog rotation driving Mechanism；364, pusher dog；
37, rim charge Hua Ding mechanism；371, sliding pawl；372, movable base plate；373, the first spring；374, slidiing pin；375, Fixed base plate；376, withstanding tight block；377, withstanding tight block driving mechanism；
4, robot device；
41, support frame；410, the second sliding rail；411, the first slide unit driving mechanism；42, the first slide unit；420, the second slide unit Driving mechanism；43, connecting plate；430, third sliding rail；44, the second slide unit；45, clip claw mechanism；450, clamping jaw；451, cushion； 452, slide chair；453, slide plate；454, linear guide；455, screw holder；456, right nut；457, reverse-flighted screw；458, Left nut；459, speed reducer；4591, servo motor；
5, control system；
6, trolley device；
60, truck pedestal；61, idler wheel；62, feeding rack；63, handle；
7, the silicon single crystal rod before cutting；
71, rim charge；
8, the silicon single crystal rod after cutting.
Specific embodiment
Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality It applies example and attached drawing is cooperated to be explained in detail.
Fig. 1 to Figure 17 is please referred to, the utility model provides a kind of silicon single crystal rod excavation machine, for cutting monocrystalline silicon, especially It is can efficiently mechanical brilliant line to just, and can silicon single crystal rod be in brilliant line to just in the state of cut monocrystalline silicon Stick.
Referring to Fig. 1, in the particular embodiment, the silicon single crystal rod excavation machine includes trolley device 6, robot device 4, clamping device 3 and bilateral scroll saw running gear 2, the clamping device 3 include silicon single crystal rod clamping device.The silicon single crystal rod Clamping device detects the brilliant line present position of silicon single crystal rod while being used to clamp silicon single crystal rod；The bilateral scroll saw running gear 2 for cutting brilliant line to positive silicon single crystal rod；The trolley device 6 is used to place and transport the silicon single crystal rod 7 before cutting and cuts Silicon single crystal rod 8 after cutting；The robot device 4 is for grabbing silicon single crystal rod, especially by the silicon single crystal rod 7 before cutting from material On vehicle device 6 at crawl to clamping device 3, and by the silicon single crystal rod 8 after cutting from the crawl of clamping device 3 to trolley device 6 Place, and position of the adjustment silicon single crystal rod at clamping device.
Referring to Fig. 10, the silicon single crystal rod clamping device includes front end clamping device 31, tail end clamping device 33 and list Crystalline silicon rod clamping device driving mechanism 32.Wherein, the tail end clamping device 33 is arranged with 31 face of front end clamping device, described Silicon single crystal rod clamping device driving mechanism 32 is set between tail end clamping device 33 and front end clamping device 31, such setting It is adjusted to silicon single crystal rod clamping device driving mechanism 32 by the spacing of tail end clamping device 33 and front end clamping device 31 Greater than the length of silicon single crystal rod, allow silicon single crystal rod be placed on tail end clamping device 33 and front end clamping device 31 it Between；It is also possible that silicon single crystal rod clamping device driving mechanism 32 can be by tail end clamping device 33 and front end clamping device 31 Spacing, which is adjusted to, to guarantee that tail end clamping device 33 and front end clamping device 31 can be by monocrystalline with the size of clamping silicon single crystal rod Silicon rod is sandwiched between it, the position that silicon single crystal rod is kept fixed, and is cut for bilateral scroll saw running gear 2；The tail End clamping device 33 and front end clamping device 31 are provided with sensor 3202, and the sensor is vertically disposed sensor； And tail end clamping device 33 and front end clamping device 31 can also drive silicon single crystal rod to rotate along its central axes, such setting The sensor 3202 is allowed to scan the shape feature of silicon single crystal rod, control system is by shape feature it can be concluded that list The position of the central axes of the brilliant line and silicon single crystal rod of crystalline silicon rod is brilliant line to just providing information.
Figure 12 and Figure 13 is please referred to, in a further embodiment, the front end clamping device 31 includes front end grip slipper 311 and front end rotating disk；The tail end clamping device 33 includes tail end grip slipper 331, tail end rotating disk and rotation dish driving electricity Machine.Silicon single crystal rod axial-rotation is driven while the front end rotating disk and tail end rotating disk for clamping silicon single crystal rod jointly. Specifically, the front end grip slipper 311 and tail end grip slipper 331 are oppositely arranged, and the front end rotating disk is set to front end clamping On seat 311, the tail end rotating disk is set on tail end grip slipper 331, and front end rotating disk and the coaxial arrangement of tail end rotating disk； The spinning disk drive motor is connect with tail end rotating disk, for driving tail end to rotate disc spins.311 He of front end grip slipper The middle part of tail end grip slipper 331 is provided with sensor installation seat 3201, the front end grip slipper 311 and tail end grip slipper 331 Sensor installation seat 3201 be respectively arranged with sensor 3202.While such setting then may be implemented to clamp silicon single crystal rod Rotate silicon single crystal rod.
When robot device 4 grabs silicon single crystal rod between front end rotating disk and tail end rotating disk, silicon single crystal rod folder Holding mechanism driving mechanism 32 drives front end grip slipper 311 and tail end grip slipper 331 close, until silicon single crystal rod is clamped to front end Between rotating disk and tail end rotating disk, robot device 4 can then discharge silicon single crystal rod；Then start spinning disk drive motor, So that spinning disk drive motor driving tail end rotates disc spins, the tail end rotating disk of rotation drives silicon single crystal rod and front end rotating disk Rotation；At the same time, the sensor 3202 of front end grip slipper 311 and tail end grip slipper 331 scans the circumference of silicon single crystal rod；Directly When accurately scanning the resemblance of silicon single crystal rod to sensor 3202, then can stop rotating disk-drive motor, according to sweeping The resemblance described is calculated central axes and the crystalline substance line of silicon single crystal rod, does not revolve with front end in the central axes of silicon single crystal rod When turntable, tail end rotating disk coaxial (i.e. the middle that the central axes of silicon single crystal rod are not located at Liang Ge saw blade cutting mechanism), then lead to The position for crossing robot device adjustment silicon single crystal rod, keeps the central axes of silicon single crystal rod and front end rotating disk, tail end rotating disk coaxial (i.e. the central axes of silicon single crystal rod be located at Liang Ge saw blade cutting mechanism middle) distinguishes Liang Ge saw blade cutting mechanism It is aligned with two brilliant lines of monocrystalline plate stick, can start to cut.
In order to realize the rotatability of front end rotating disk and tail end rotating disk, in a further embodiment, the front end The top of grip slipper 311 and tail end grip slipper 331 offers bearing mounting groove；
Please refer to Figure 12 and Figure 13, the front end rotating disk and tail end rotating disk include bearing 314, mounting base 315 and Ejector pin 320；The bearing 314 is fixedly installed in bearing mounting groove, and the back side of the mounting base 315 is provided with rotary shaft, institute Rotary shaft is stated to be stuck in bearing 314；The front of mounting base 315 offers ejector pin mounting groove and drive end bearing bracket 319, the drive end bearing bracket 319 are set at the front of mounting base 315；The ejector pin 320 is set at drive end bearing bracket 319, and the end of ejector pin 320 is through at top It sells in mounting groove；Finite place piece is arranged in the end of ejector pin 320, and the end that the locating part is used to limit ejector pin 320 is pierced by front end Outside lid 319；Second spring 316 is provided in the ejector pin mounting groove, one end of the second spring 316 bears against ejector pin installation The other end of slot, spring bears against locating part.When silicon single crystal rod is between front end rotating disk and tail end rotating disk, monocrystalline silicon Stick clamping device driving mechanism 32 drives front end grip slipper 311 and tail end grip slipper 331 close, under the extruding of silicon single crystal rod, The ejector pin 320 in ejector pin 320 and tail end rotating disk in the rotating disk of front end squeezes second spring 316, in 316 quilt of second spring It is expressed to most in short-term, then can close silicon single crystal rod clamping device driving mechanism 32.Under the elasticity of second spring 316, front end Rotating disk and tail end rotating disk can more stably clamp silicon single crystal rod.
For the ease of the installation of second spring 316, top plate 317 is provided between second spring 316 and ejector pin 320, and push up Plate 317 is movably located in ejector pin mounting groove, in this way can be in order to the installation of second spring 316, can also be in order to the second bullet Spring 316 is had an effect.
For the ease of the installation of ejector pin 320, ejector pin fixed plate 318 is additionally provided between top plate 317 and ejector pin 320, and Ejector pin fixed plate 318 is movably located in ejector pin mounting groove, and the end of ejector pin 320 is connect with ejector pin fixed plate 318.
For the ease of the installation of bearing 314, the bearing mounting groove of the front end grip slipper 311 runs through front end grip slipper 311 Two sides, the bearing mounting groove of tail end grip slipper 331 also extends through to the two sides of tail end grip slipper 331, do not connect in bearing mounting groove The one end for connecing mounting base 315 is provided with rear end cap 313.
In order to drive tail end to rotate disc spins, in a further embodiment, the tail end rotating disk further includes being provided with The rotary disk drive mechanism 333 of speed reducer 332, the rotary disk drive mechanism 333 and rotation axis connection, for driving rotation 320 synchronous rotary of axis, mounting base 315 and ejector pin.Such setting can then drive silicon single crystal rod axial-rotation.
In a further embodiment, it is sliding that first is provided between the front end clamping device 31 and tail end clamping device 33 Rail 324, the bottom of the front end clamping device 31 are provided with sliding block 312, and the bottom of the sliding block 312 is offered mutually fits with sliding rail The first sliding groove matched, the sliding block 312 are slidably disposed on the first sliding rail 324 by first sliding groove.Such setting is then Front end clamping device 31 and the motion track close to each other or separate of tail end clamping device 33 can be limited.
In a further embodiment, the silicon single crystal rod clamping device driving mechanism 32 can be to be provided with speed reducer 322 lead screw motor 321, the bottom of the front end grip slipper 311 are provided with transmission nut 325, the bottom of tail end grip slipper 331 Offer the screw hole that diameter is greater than 323 diameter of turn-screw, the transmission nut 325 and the setting of screw hole face, the silk The body of bar motor 321 is set on tail end grip slipper 331, the length direction and first of the turn-screw 323 of lead screw motor 321 The length direction of sliding rail 324 is consistent, and turn-screw 323 sequentially passes through the transmission nut 325 and front end folder of tail end grip slipper 331 Hold the screw hole of seat 311.Need to drive front end clamping device 31 and tail end clamping device 33 close to when, control silicon single crystal rod folder The rotating forward of mechanism driving mechanism 32 is held, turn-screw 323 rotates forward, and the turn-screw 323 of rotating forward will drive 31 edge of front end clamping device First sliding rail 324 leans on caudal part clamping device 33；Need to control front end clamping device 31 and tail end clamping device 33 close to when, The reversion of monocrystalline silicon plate clamping device driving mechanism is controlled, turn-screw 323 inverts, and the turn-screw 323 of reversion will drive front end Clamping device 31 is along the first sliding rail 324 far from tail end clamping device 33.
Referring to Fig. 2, the bilateral scroll saw running gear 2 includes Liang Ge saw blade cutting mechanism 20.Two saw blade cutting machines Structure 20 is respectively arranged at the two sides of clamping device 3, is then cutting channel between Liang Ge saw blade cutting mechanism 20, is worked as silicon single crystal rod It can then be cut in cutting channel.It can be clamping device 3 to move in cutting channel, be also possible to saw blade cutting machine Structure 20 is moved to the two sides of clamping device 3, in order to avoid single silicon crystal bar causes brilliant line position to change because frequently mobile, preferred In embodiment, when needing to cut silicon single crystal rod, driving saw blade cutting mechanism 20 is moved at the two sides of clamping device 3.In order to The movement of saw blade cutting mechanism 20 is driven, the bilateral scroll saw running gear 2 further includes First Line saw cut mechanism driving mechanism 21, when needing to cut silicon single crystal rod, then it can star First Line saw cut mechanism, in the driving of First Line saw cut mechanism Under, saw blade cutting mechanism 20 can be moved along clamping device 3, to cut silicon single crystal rod.
For the ease of the bilateral scroll saw running gear 2 of movement, the silicon single crystal rod excavation machine further includes rack 1, the clamping Device 3 and bilateral scroll saw running gear 2 are then arranged in rack 1.
In a further embodiment, it is provided with two First Line saw cut mechanism sliding rails 24 in the rack 1, described two First Line saw cut mechanism sliding rail 24 is arranged according to the motion track of Liang Ge saw blade cutting mechanism 20 respectively, the saw blade cutting The bottom of mechanism is provided with saw blade cutting mechanism slide unit, and the bottom of saw blade cutting mechanism slide unit is provided with First Line saw cut mechanism Sliding slot, saw blade cutting mechanism slide unit are slidably connected by saw blade cutting mechanism sliding slot and First Line saw cut mechanism sliding rail 24 It connects.Saw blade cutting mechanism slide unit is provided with nut, and First Line saw cut mechanism driving mechanism 21 can be lead screw motor, institute The body for stating lead screw motor is set at one end of First Line saw cut mechanism sliding rail 24, and the screw rod of lead screw motor is along the first scroll saw The length direction of cutting mechanism sliding rail 24 is arranged, and passes through the nut on saw blade cutting mechanism slide unit.It is such to be arranged so that silk Bar motor rotate forward when, screw rod rotate forward, the screw rod of rotating forward under the action of cooperating with nut, will drive saw blade cutting mechanism 20 along First Line saw cut mechanism sliding rail 24 is mobile close to the body of lead screw motor；Lead screw motor is in reversion, screw rod reversion, reversion Screw rod will drive saw blade cutting mechanism 20 along First Line saw cut mechanism sliding rail 24 far from silk under the action of cooperating with nut The body of bar motor is mobile.Mobile saw blade cutting mechanism 20 can then cut the list between Liang Ge saw blade cutting mechanism 20 Crystalline silicon rod.
The sensor 3202 of the clamping device 3 can scan the shape feature of silicon single crystal rod, and control system passes through shape Shape feature it can be concluded that the central axes of the brilliant line and silicon single crystal rod of silicon single crystal rod position, the central axes of silicon single crystal rod not It is coaxial (i.e. the middle that the central axes of silicon single crystal rod are not located at Liang Ge saw blade cutting mechanism) with front end rotating disk, tail end rotating disk When, then the position of silicon single crystal rod is adjusted by robot device, rotates the central axes of silicon single crystal rod and front end rotating disk, tail end Disk is coaxial (i.e. the central axes of silicon single crystal rod be located at Liang Ge saw blade cutting mechanism middle), then completes silicon single crystal rod in this way To just；Due to silicon single crystal rod specification there are many, the spacing of the brilliant line of opposite two bar of different silicon single crystal rods is inconsistent, in order to suitable Answer the silicon single crystal rod of different-diameter.The spacing of Liang Ge saw blade cutting mechanism 20 adjustable itself and clamping device 3, makes monocrystalline silicon Two opposite brilliant lines of stick are aligned with Liang Ge saw blade cutting mechanism respectively, in a further embodiment, the bilateral scroll saw fortune It further includes the second saw blade cutting mechanism driving mechanism 22 that luggage, which sets 2, and Liang Ge saw blade cutting mechanism slide unit is respectively arranged with one Two wires saw cut mechanism sliding rail 25, and Liang Ge saw blade cutting mechanism sliding rail is respectively perpendicular to two First Line saw cut mechanism sliding rails 24.The bottom of the saw blade cutting mechanism 20 is provided with saw blade cutting mechanism base, and the saw blade cutting mechanism base offers Second saw blade cutting mechanism sliding slot, the saw blade cutting mechanism base are cut by the second saw blade cutting mechanism sliding slot with the second scroll saw Cutting mill structure sliding rail 25 is slidably connected.Similarly, second saw blade cutting mechanism driving mechanism 22 or screw rod electricity Machine, therefore, the saw blade cutting mechanism base are also equipped with nut.The body of second saw blade cutting mechanism driving mechanism 22 is arranged At the side of saw blade cutting mechanism base, the screw rod and the second saw blade cutting mechanism of the second saw blade cutting mechanism driving mechanism 22 The length direction of sliding rail 25 is consistent, and screw rod passes through nut.When such setting is so that lead screw motor rotates forward, screw rod is rotated forward, just It is close along the second saw blade cutting mechanism sliding rail 25 to will drive saw blade cutting mechanism under the action of cooperating with nut for the screw rod turned The body of lead screw motor is mobile；Lead screw motor reversion when, screw rod reversion, the screw rod of reversion under the action of cooperating with nut, It will drive saw blade cutting mechanism 20 to move along 24 body far from lead screw motor of First Line saw cut mechanism sliding rail.Two scroll saws Cutting mechanism 20 and the spacing of clamping device 3 are adjustable, allow the position of bilateral scroll saw running gear 2 with monocrystalline The brilliant line present position of silicon rod adjusts, and guarantees that online saw cut mechanism is along brilliant wire cutting silicon single crystal rod.
In a further embodiment, the saw blade cutting mechanism 20 includes cutting panel, guide wheel assembly and diamond wire Saw, the guide wheel assembly are installed on cutting panel, and the diamond fretsaw is laid in the wire casing of guide wheel assembly.Saw blade cutting Mechanism 20 can be linear lines saw cut mechanism or ring wire saw cutting mechanism, the diamond wire of linear lines saw cut mechanism The saw threadiness not connected for head and the tail, as linear diamond fretsaw；Headed by the diamond fretsaw of the ring wire saw cutting mechanism The connected ring-type of tail, as annular diamond fretsaw 201 is, it is preferable to use ring wire saw cutting mechanism.
Referring to Fig. 3, in a further embodiment, the guide wheel assembly of the ring wire saw cutting mechanism includes driving wheel Mechanism 205, driven pulley mechanism 204, tension pulley mechanism 202；The drive wheel mechanism 205 includes driving wheel and guide wheel driving machine Structure；The driving wheel is flexibly connected with cutting panel, and the guide wheel driving mechanism and driving wheel are sequentially connected, for driving driving Wheel rotation；The tension pulley mechanism 202 includes tensioning wheel, connecting rod and tensioning driving mechanism；One end of the connecting rod and tensioning wheel It is flexibly connected, the other end of connecting rod and tensioning driving mechanism transmission connection；The tensioning driving mechanism is set at cutting panel, For driving tensioning wheel to tense annular diamond fretsaw 201.The tension pulley mechanism 202 of ring wire saw cutter device can pass through weight Hammer 203 provides cutting tensile force, can also be tensioned by servo motor.
The driven pulley mechanism 204 of ring wire saw cutter device is two, 205, two driven pulley mechanisms 204 of drive wheel mechanism And annular diamond fretsaw 201 is supported quadrangularly by tension pulley mechanism 202, wherein longitudinal both sides are for cutting monocrystalline silicon Stick.
Since cutting silicon single crystal rod can generate fines, in a further embodiment, the drive wheel mechanism 205, Driven pulley mechanism 204, tension pulley mechanism 202 are provided with spraying mechanism 206 one by one.Such setting can then cut list After crystalline silicon rod, drive wheel mechanism 205, driven pulley mechanism 204, tension pulley mechanism 202 are cleaned, guarantee drive wheel mechanism 205, driven pulley mechanism 204, tension pulley mechanism 202 it is clean, do not influence cutting next time.
Referring to Fig. 2, in order to collect rim charge 71, in a further embodiment, the side of the saw blade cutting mechanism 20 It is provided with collection flitch 23, the rim charge 71 can directly fall to collection flitch 23 after being detached from the silicon single crystal rod 8 after cutting Rim charge 71 is collected and is cleared up in place, such setting convenient for user.
It, can be by when rim charge 71 is not cut also completely during silicon single crystal rod cuts in online saw cut mechanism 20 To the influence of gravity, so that the case where breaking, causes silicon single crystal rod imperfect or out-of-flatness；In addition, saw blade cutting Mechanism 20 cut silicon single crystal rod, and after being rinsed by spraying mechanism 206, diamond fretsaw surface can adhere to flushing liquor and Bits are washed, such diamond fretsaw is when cutting silicon single crystal rod next time, it is also possible to the rim charge cut down 71 can be made to be attached to cutting It on crystalline silicon rod afterwards, can not separate, need in this way by manual operation, inefficiency with silicon single crystal rod.
Figure 10 and Figure 11 is please referred to, in order to avoid the generation of above situation, in a further embodiment, the clamping dress Setting 3 further includes rim charge clamping device 34；The rim charge clamping device 34 includes holding frame 35, rim charge Hua Ding mechanism 37, rim charge group Push up mechanism 36；Rim charge Hua Ding mechanism 37 is set to one end of holding frame 35, and rim charge Bo Ding mechanism 36 is set to clamping The other end of frame 35；Rim charge Hua Ding mechanism 37 and rim charge Bo Ding mechanism 36 are oppositely arranged, and can be relatively close or separate, for pressing from both sides Hold and eject the rim charge of silicon single crystal rod；There are two the settings of rim charge clamping device 34, and two rim charge clamping devices 34 are respectively arranged at At the two sides of silicon single crystal rod clamping device, and respectively can be close to or far from the side of silicon single crystal rod clamping device.It is filled in manipulator When setting 4 holds silicon single crystal rod and be in the top of clamping device 3, it is separate first to control two rim charge clamping devices 34, so that two There is the space for accommodating robot device 4 between rim charge clamping device 34；Then robot device 4 moves downwardly at silicon single crystal rod Between front end clamping device 31 and tail end clamping device 33；Then front end clamping device 31 and tail end clamping device 33 clamp list Silicon crystal bar；Then robot device 4 unclamps silicon single crystal rod, and is moved upward to higher than clamping device 3；Then start two rim charges Clamping device 34 is close, until rim charge Hua Ding mechanism 37 and rim charge Bo Ding mechanism 36 are located at two endfaces of silicon single crystal rod；So Drive rim charge Hua Ding mechanism 37 and rim charge Bo Ding mechanism 36 close to each other afterwards, until rim charge Hua Ding mechanism 37 and rim charge Bo Ding mechanism 36 block the two end faces for pressing against silicon single crystal rod respectively；Then it is mobile to cut monocrystalline then to can star bilateral scroll saw running gear 2 Silicon rod；After completing cutting, rim charge Hua Ding mechanism 37 and rim charge Bo Ding mechanism 36 hold rim charge；Then the sliding top machine of driving rim charge Structure 37 and rim charge Bo Ding mechanism 36 are translated to one side simultaneously, so that gap is generated between the silicon single crystal rod 8 after rim charge and cutting, into After entering air, rim charge is then fallen automatically by gravity.Therefore, such setting can not only prevent bilateral cutting operation dress During setting cutting silicon single crystal rod, the case where rim charge breaks, can also mechanically remove rim charge after completing cutting, Not only processing quality is stablized, but also high efficiency.
In order to realize that two difference can be close to or far from the side of silicon single crystal rod clamping device, in further embodiment In, the rim charge clamping device 34 further includes rim charge clamping device mounting base 341 and rim charge clamping device turnover driving mechanism 342；Wherein, the rim charge clamping device turnover driving mechanism 342 can be cylinder, the rim charge clamping device mounting base 341 One end connect with silicon single crystal rod clamping device, the bottom of the rim charge clamping device turnover driving mechanism 342 is articulated with rim charge The other end of clamping device mounting base 341；The rim charge clamping device 34 is located at 342 He of rim charge clamping device turnover driving mechanism Between silicon single crystal rod clamping device, and the bottom of rim charge clamping device 34 and rim charge clamping device mounting base 341 are hinged；The side The top of material clamping mechanism turnover driving mechanism 342 and the top of rim charge clamping device 34 are hinged；The overturning of rim charge clamping device is driven Motivation structure 342 is for driving rim charge clamping device 34 to rotate by the point of rotation of the hinge joint with rim charge clamping device mounting base 341. When needing to concede enough accommodation spaces for robot device 4, rim charge clamping device turnover driving mechanism 342 can be driven to contract It is short, overturn the top of rim charge clamping device 34 to rim charge clamping device turnover driving mechanism 342；It is removed in robot device 4 It can then drive rim charge clamping device turnover driving mechanism 342 elongated afterwards, make the top of rim charge clamping device 34 to silicon single crystal rod Clamping device overturning, until rim charge clamping device 34 is in a vertical state.
Figure 14, Figure 15 and Figure 17 are please referred to, in order to realize the translation of rim charge Hua Ding mechanism 37, in further embodiment In, rim charge Hua Ding mechanism 37 includes that sliding pawl 371, movable base plate 372, fixed base plate 375, withstanding tight block 376 and withstanding tight block drive Motivation structure 377；
The fixed base plate 375 is connect with holding frame 35, and the front of fixed base plate 375 offers the pin for being through to the back side Axis hole is movably provided with slidiing pin 374 in the pin shaft hole；The sliding pawl 371 is set to the front of fixed base plate 375 Place, and connect with the end face of slidiing pin 374, and sliding pawl 371 and 36 face of rim charge Bo Ding mechanism；The fixed base plate 375 Back side spring slot is slidably provided with slidiing pin 374 in the pin shaft slot, is fixedly installed in the spring slot First spring 373；The movable base plate 372 is set at the back side of fixed base plate 375, and with the first spring 373, slidiing pin 374 connections；The withstanding tight block driving mechanism 377 is connect by withstanding tight block 376 with movable base plate 372, for driving movable base plate 372, slidiing pin 374, sliding pawl 371 are close to or far from rim charge Bo Ding mechanism 36.
One end of the withstanding tight block 376 is that the shape of longitudinal section is radius by the sector that becomes larger under upper, withstanding tight block 376 Fan-shaped surface and mobile base contradict；The other end of withstanding tight block 376 is rod-shaped；The middle part of withstanding tight block 376 and holding frame 35 are hinged. The withstanding tight block driving mechanism 377 can be cylinder, and the cylinder is vertically arranged, and bottom end and the withstanding tight block 376 of cylinder hingedly connect It connects, the top of cylinder is connect with holding frame 35.When needing to control rim charge Hua Ding mechanism 37 close to rim charge Bo Ding mechanism 36, only need Cylinder elongation is controlled, to push withstanding tight block 376 to rotate with 35 hinge joint of holding frame as the point of rotation using it, fans withstanding tight block 376 The institute of shape face greatest radius abuts against movable base plate 372 to place, in the process, promotion of the movable base plate 372 in withstanding tight block 376 Under, mobile close to rim charge Bo Ding mechanism 36, active pin shaft is dialled under the extruding of movable base plate 372, by sliding pawl 371 also close to rim charge The movement of mechanism 36 is pushed up, sliding pawl 371 is allow to bear against an end face of monocrystalline silicon plate, the first spring 373 stores bullet by compression at this time Property potential energy；When needing with the year-on-year equidirectional movement of rim charge Bo Ding mechanism 36 or release rim charge, cylinder shortening need to be only controlled, to push away Dynamic withstanding tight block 376 is rotated with 35 hinge joint of holding frame as the point of rotation using it, makes the institute of 376 fan-shaped surface of withstanding tight block most short radius to place Movable base plate 372 is abutted against, in the process, the first spring 373 discharges elastic potential energy, makes movable base plate 372 close to withstanding tight block 376, under the drive of movable base plate 372, slidiing pin 374 is also mobile towards the direction of close withstanding tight block 376, in slidiing pin Under 374 drive, sliding pawl 371 is also towards mobile close to the direction of withstanding tight block 376.36 edge of rim charge Bo Ding mechanism then may be implemented in this way Holding frame 35 it is close, far from rim charge Bo Ding mechanism 36, or with the equidirectional movement of rim charge Bo Ding mechanism 36.
Figure 14, Figure 15 and Figure 16 are please referred to, in order to realize that rim charge Bo Ding mechanism 36 clamps silicon single crystal rod and translation, into one In the embodiment of step, rim charge Bo Ding mechanism 36 includes pusher dog 364, pusher dog fixing seat 362, pusher dog rotary drive mechanism 363 And pusher dog translational drive mechanism 361；
The pusher dog fixing seat 362 is connect with holding frame 35, and can be along holding frame 35 close to or far from rim charge Hua Ding mechanism 37 slidings；The pusher dog 364 is articulated at pusher dog fixing seat 362, and the pusher dog rotary drive mechanism 363 is connect with pusher dog 364, For driving the rotation of pusher dog 364 to perpendicular to holding frame 35；The pusher dog translational drive mechanism 361 connects with pusher dog fixing seat 362 It connects, for driving pusher dog fixing seat 362 to slide along holding frame 35 close to or far from rim charge Hua Ding mechanism 37.Similarly, pusher dog revolves Turn driving mechanism 363 and pusher dog translational drive mechanism 361 all can be cylinder.The initial position of the pusher dog 364 be and clamping One end face of the silicon single crystal rod on clamping device 3 is angled.Monocrystalline is born against needing to control rim charge Bo Ding mechanism 36 When one end face of silicon rod, the elongation of pusher dog rotary drive mechanism 363 need to be only controlled, to push pusher dog 364 with itself and pusher dog fixing seat 362 hinge joints are point of rotation rotation, so that pusher dog 364 is perpendicular to holding frame 35, rim charge Hua Ding mechanism 37 is also dialled to rim charge at this time Top mechanism 36 is close, until pusher dog 364 and rim charge Hua Ding mechanism 37 together clamp the rim charge of silicon single crystal rod；If pusher dog translation is driven Motivation structure 361 is set between pusher dog 364 and rim charge Hua Ding mechanism 37, is needing to separate rim charge with the monocrystalline silicon plate after cutting When, it is only necessary to the shortening of pusher dog translational drive mechanism 361 is controlled, to drive pusher dog seat along holding frame 35 close to rim charge Hua Ding mechanism 37 is mobile, at the same time, mobile (i.e. 37 He of rim charge Hua Ding mechanism in the direction of rim charge sliding equipment towards separate rim charge Bo Ding mechanism 36 Rim charge Bo Ding mechanism 36 translates in the same direction simultaneously), then rim charge and the silicon single crystal rod 8 after cutting can be made interleaved, staggeredly Gap is generated between silicon single crystal rod 8 after the rim charge opened and cutting, imports air, then controls pusher dog translational drive mechanism 361 Elongation keeps pusher dog 364 mobile towards the direction far from rim charge Hua Ding mechanism 37, to discharge rim charge, rim charge under by gravity, Automatically it is split away off from the silicon single crystal rod 8 after cutting.
Fig. 4, Fig. 5 are please referred to, the trolley device 6 is set to the side of clamping device 3, and trolley device 6 includes truck bottom Seat 60, idler wheel 61, feeding rack 62, handle 63.There are two the settings of feeding rack 62, and two feeding racks 62 are disposed side by side on truck Silicon single crystal rod 8 after the silicon single crystal rod 7 for being respectively used to place before cutting on pedestal 60 and cutting.The longitudinal section of feeding rack 62 is Contraband shape, and the top of feeding rack 62 is intilted scarf, it is such to be arranged so that silicon single crystal rod is placed in feeding rack 62 On it is more stable.There are four the idler wheel 61 can be set, four rolling 61 is respectively arranged at the four corners of truck pedestal 60, this The movement of truck pedestal 60 is convenient in the setting of sample, and in a preferred embodiment, the idler wheel 61 can be universal wheel, such to set It sets so that the movement of truck pedestal 60 is more convenient.The handle 63 is set to the lateral position of truck pedestal 60, such setting Allow user when needing to push truck pedestal 60 by control handle 63, it is more convenient.
Referring to Fig. 4, the robot device 4 is set between trolley device 6 and clamping device 3, specifically implementing In example, the robot device 4 includes support frame 41, the first slide unit 42, the first slide unit driving mechanism 420, the second slide unit 44, the Two slide unit driving mechanisms 420 and clip claw mechanism 45.Support frame as described above 41 is across the top of trolley device 6 and clamping device 3, and Support frame 41 is provided with the second sliding rail 410 across trolley device 6 and clamping device 3, second sliding rail 410 can be set in At the top surface of support frame 41；First slide unit 42 is horizontally disposed, and the first slide unit 42 is provided with second sliding slot, the second slide unit 44 It is slidably disposed at the second sliding rail 410 by second sliding slot；The first slide unit driving mechanism 411 and the first slide unit 42 connect It connects, for driving the first slide unit to move along the second sliding rail 410.Specifically, the first slide unit driving mechanism 411 may be Lead screw motor, the first slide unit 42 are provided with nut, and the body of lead screw motor is set at one end of the second sliding rail 410, screw rod Direction is consistent with the length direction of the second sliding rail 410, and screw rod is threaded onto nut, and such setting is so that lead screw motor rotates forward When, screw rod rotates forward, and the screw rod of rotating forward will drive the first slide unit 42 and lean on along the second sliding rail 410 under the action of cooperating with nut The body of nearly lead screw motor is mobile, that is, drives the first slide unit 42 close to clamping device 3；Lead screw motor is in reversion, screw rod reversion, For the screw rod of reversion under the action of cooperating with nut, meeting the first slide unit of band 42 is along the second machine of the sliding rail 410 far from lead screw motor Body is mobile, that is, drives the first slide unit 42 close to trolley device 6.Thus, such setting is clamping robot device 4 Move back and forth between device 3 and trolley device 6.
First slide unit, 42 side is provided with the connecting plate 43 of vertical direction, and the third of vertical direction is arranged in the connecting plate 43 Sliding rail 430；Second slide unit 44 is provided with third sliding slot, and the second slide unit 44 is slidably disposed in third by third sliding slot At sliding rail 430；The second slide unit driving mechanism 420 is connect with the second slide unit 44, for driving the second slide unit 44 along third Sliding rail 430 is mobile；The clip claw mechanism 45 is connect with the second slide unit 44.Specifically, the second slide unit driving mechanism 420 can also Think lead screw motor, the second slide unit 44 is provided with nut, and the body of lead screw motor is set at one end of third sliding rail 430, silk The direction of bar is consistent with the length direction of third sliding rail 430, and screw rod is threaded onto nut, such setting so that lead screw motor just When turning, screw rod is rotated forward, and the screw rod of rotating forward will drive the second slide unit 44 along third sliding rail 430 under the action of cooperating with nut Body close to lead screw motor is mobile, that is, the second slide unit 44 is driven to move up；Lead screw motor is in reversion, screw rod reversion, instead The screw rod turned under the action of cooperating with nut, can band the and slide unit is moved along third sliding rail 430 far from the body of lead screw motor It is dynamic, that is, drive the second slide unit 44 to move down.Thus, such setting moves down clip claw mechanism 45 in the vertical direction It is dynamic.
The initial position of the clip claw mechanism 45 is to need at the surface of trolley device 6 by cutting in trolley device 6 When 7 pawl of silicon single crystal rod before cutting is taken to clamping device 3, the reversion of the second slide unit driving mechanism 420 is controlled first, makes the second slide unit 44 move down, until clip claw mechanism 45 can grab the silicon single crystal rod 7 before cutting；Then before clip claw mechanism 45 is promptly cut Silicon single crystal rod 7；Then the rotating forward of the second slide unit driving mechanism 420 is controlled, moves up the second slide unit 44, until clip claw mechanism 45 are higher than clamping device 3；Then the rotating forward of the first slide unit driving mechanism 411 is controlled, makes the first slide unit 42 with 44 He of the second slide unit Clip claw mechanism 45 is close to clamping device 3, until the second slide unit 44 and clip claw mechanism 45 are located at the surface of clamping device 3；Then, The reversion of the second slide unit driving mechanism 420 is controlled, the second slide unit 44 is moved down, until before the cutting that clip claw mechanism 45 clamps Silicon single crystal rod 7 is between front end clamping device 31 and tail end clamping device 33；To front end clamping device 31 and tail end clamping machine Silicon single crystal rod 7 after structure 33 clamps the silicon single crystal rod 7 before cutting, before the release cutting of clip claw mechanism 45；Then the second slide unit is controlled Driving mechanism 420 rotates forward, and moves up the second slide unit 44, until clip claw mechanism 45 is higher than clamping device 3.
When needing to take 8 pawl of silicon single crystal rod after the cutting on clamping device 3 to trolley device 6, control the first The reversion of two slide unit driving mechanisms 420, moves down the second slide unit 44, until clip claw mechanism 45 can grab the list after cutting Crystalline silicon rod 8；Then clip claw mechanism 45 firmly grasps the silicon single crystal rod 8 after cutting；To front end clamping device 31 and tail end clamping device After 33 release the silicon single crystal rod 8 after cutting, the second slide unit driving mechanism 420 of control is rotated forward, and moves up the second slide unit 44, Until clip claw mechanism 45 is higher than clamping device 3；Then control the first slide unit driving mechanism 411 reversion, make the first slide unit 42 with Second slide unit 44 and clip claw mechanism 45 are close to trolley device 6, until the second slide unit 44 and clip claw mechanism 45 are located at trolley device 6 Surface；Then, the second slide unit driving mechanism 420 of control reversion, moves down the second slide unit 44, until clip claw mechanism 45 presss from both sides Silicon single crystal rod 8 after tight cutting is located in the feeding rack 62 in trolley device 6；Monocrystalline silicon after the release cutting of clip claw mechanism 45 Stick 8；Then the rotating forward of the second slide unit driving mechanism 420 is controlled, the second slide unit 44 is moved up, until clip claw mechanism 45 is higher than material Vehicle device 6.
Please refer to Fig. 7 to Fig. 9, in a further embodiment, the clip claw mechanism 45 include clamping jaw 450, slide plate 453 and Clamping jaw driving mechanism；The clamping jaw 450 is provided with two column, and two column clamping jaws 450 are symmetrical arranged；The slide plate 453 is also equipped with two A, two slide plates 453 are respectively arranged at the top of two column clamping jaws 450 by slide chair 452；The bottom of second slide unit 44 is set It is equipped with linear guide 454, the top of two slide plates 453 offers straight compatible with linear guide 454, two cunnings The straight of plate 453 is on same straight line, and two slide plates 453 are slideably connected by straight with line slide rail It connects；The clamping jaw driving mechanism is connect with two column clamping jaws 450, for driving two column clamping jaws 450 close to each other or separate.It is such Setting allows clamping jaw 450 to clamp or discharge silicon single crystal rod.
In a further embodiment, the driving mechanism is the servo motor 4591 for being provided with speed reducer 459, described to watch The output shaft for taking motor 4591 is reverse-flighted screw 457；The top of two clamping jaws 450 is respectively arranged with left nut 458 and right nut 456, the reverse-flighted screw 457 of the servo motor 4591 sequentially passes through left nut 458 and right nut 456.It is needing to clamp monocrystalline When silicon rod, control servo motor 4591 is rotated forward, and reverse-flighted screw 457 rotates forward, the reverse-flighted screw 457 of rotating forward and left nut 458, right spiral shell Mother 456 cooperates, and drives two column clamping jaws 450 close；When needing to discharge silicon single crystal rod, control servo motor 4591 is inverted, two-way Screw rod 457 inverts, and 457 bar of reverse-flighted screw and left nut 458, the right nut 456 of reversion cooperate, and drives two column clamping jaws 450 separate. The close to each other or separate of two column clamping jaws 450 then may be implemented in this way.
In a further embodiment, the tail end of reverse-flighted screw 457 is provided with screw holder 455, and such setting can To prevent reverse-flighted screw 457 from deviating from out of left nut 458 and right nut 456.
In a further embodiment, two column clamping jaws 450 are bent into fold-line-shaped outwardly, and the upper half of clamping jaw 450 is under Half portion is provided with flat cushion 451, and such setting is so that silicon single crystal rod 7 of the clamping jaw 450 before clamping cutting is (cylindrical Crystalline silicon rod) when, referring to Fig. 8, flat cushion 451 is directly contacted with the side wall of the silicon single crystal rod 7 before cutting, it can increase and rub Wiping power prevents the silicon single crystal rod 7 before cutting from falling off.The bending place of clamping jaw 450 is provided with the cushion of compatible fold-line-shaped therewith 451, such setting is so that clamping jaw 450 first passes through clamping machine in silicon single crystal rod 8 (the square body crystalline silicon rod) after clamping is cut Silicon single crystal rod 8 after cutting is rotated by 90 ° by structure, so that four seamed edges of silicon single crystal rod are respectively at surface, underface, just At left side, directly to the right, when clamping jaw 450 clamps the silicon single crystal rod 8 after cutting, referring to Fig. 9, the silicon single crystal rod 8 after cutting is just The seamed edge of left side and directly to the right is stuck in respectively in the bending place of two column clamping jaws 450, is directly contacted with the cushion 451 of bent, can Prevent the silicon single crystal rod 7 before cutting from falling off with increasing friction force.
For the shape feature of the silicon single crystal rod scanned according to the sensor 3202, can be obtained by shape feature The position of the central axes of the brilliant line and silicon single crystal rod of silicon single crystal rod, and control robot device and the second saw blade cutting mechanism 22 operation of driving mechanism further includes in a further embodiment control system 5, the control system 5 and robot device 4, Clamping device 3 and the connection of bilateral scroll saw running gear 2, for controlling robot device 4, clamping device 3 and bilateral scroll saw respectively Running gear 2.It is such to be arranged so that robot device 4, clamping device 3 and bilateral scroll saw running gear 2 are conditioned With controlled.
It should be noted that being not intended to limit although the various embodiments described above have been described herein The scope of patent protection of the utility model.Therefore, based on the innovative idea of the utility model, embodiment described herein is carried out Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model Within enclosing.

Claims (10)

1. a kind of silicon single crystal rod excavation machine, which is characterized in that run and fill including robot device, clamping device and bilateral scroll saw It sets, the clamping device includes silicon single crystal rod clamping device；
The silicon single crystal rod clamping device includes front end clamping device, tail end clamping device and silicon single crystal rod clamping device driving machine Structure；The tail end clamping device and front end clamping device face are arranged, for clamping and rotating silicon single crystal rod；The silicon single crystal rod Clamping device driving mechanism is set between tail end clamping device and front end clamping device, for driving tail end clamping device with before Hold clamping device close to each other or separate；The tail end clamping device and front end clamping device are provided with sensor, the biography Sensor is used to scan the shape feature of silicon single crystal rod；
The bilateral scroll saw running gear includes Liang Ge saw blade cutting mechanism, First Line saw cut mechanism driving mechanism and the second line Saw cut mechanism driving mechanism；Liang Ge saw blade cutting mechanism is respectively arranged at the two sides of clamping device；The First Line sawing Cutting mill structure driving mechanism is for driving saw blade cutting mechanism to move cutting silicon single crystal rod along clamping device；Second saw blade cutting The brilliant line present position that mechanism driving mechanism is used to be calculated according to the scanning result of sensor drives two saw blade cuttings Mechanism is relatively close or separate；
The robot device is set to above clamping device, for grabbing silicon single crystal rod.
2. silicon single crystal rod excavation machine according to claim 1, which is characterized in that the clamping device further includes rim charge clamping Mechanism；
The rim charge clamping device includes holding frame, rim charge Hua Ding mechanism, rim charge Bo Ding mechanism；The setting of rim charge Hua Ding mechanism In one end of holding frame, rim charge Bo Ding mechanism is set to the other end of holding frame；Rim charge Hua Ding mechanism and rim charge dial top machine Structure is oppositely arranged, and can be relatively close or separate, for clamping and ejecting the rim charge of silicon single crystal rod；Rim charge clamping device is provided with Two, two rim charge clamping devices are respectively arranged at the two sides of silicon single crystal rod clamping device, and respectively can be close to or far from list The side of crystalline silicon rod clamping device.
3. silicon single crystal rod excavation machine according to claim 2, which is characterized in that the rim charge clamping device further includes rim charge Clamping device mounting base and rim charge clamping device turnover driving mechanism；One end of the rim charge clamping device mounting base and monocrystalline silicon The connection of stick clamping device, the bottom of the rim charge clamping device turnover driving mechanism is articulated with the another of rim charge clamping device mounting base One end；The rim charge clamping device is between rim charge clamping device turnover driving mechanism and silicon single crystal rod clamping device, and side The bottom of material clamping mechanism and rim charge clamping device mounting base are hinged；The top of the rim charge clamping device turnover driving mechanism with The top of rim charge clamping device is hinged；Rim charge clamping device turnover driving mechanism is for driving rim charge clamping device to press from both sides with rim charge The hinge joint of mechanism mounting base is held as point of rotation rotation.
4. silicon single crystal rod excavation machine according to claim 2, which is characterized in that rim charge Hua Ding mechanism include sliding pawl, Movable base plate, fixed base plate, withstanding tight block and withstanding tight block driving mechanism；
The fixed base plate is connect with holding frame, and the front of fixed base plate offers the pin shaft hole for being through to the back side, the pin Slidiing pin is movably provided in axis hole；The sliding pawl is set at the front of fixed base plate, and the end with slidiing pin Face connection, and sliding pawl and rim charge Bo Ding mechanism face；The back side spring slot of the fixed base plate can be slided in the pin shaft slot It is provided with slidiing pin dynamicly, is fixedly installed the first spring in the spring slot；The movable base plate is set to fixing seat At the back side of plate, and it is connect with the first spring, slidiing pin；The withstanding tight block driving mechanism is connected by withstanding tight block and movable base plate It connects, for driving movable base plate, slidiing pin, sliding pawl close to or far from rim charge Bo Ding mechanism.
5. silicon single crystal rod excavation machine according to claim 2, which is characterized in that rim charge Bo Ding mechanism include pusher dog, Pusher dog fixing seat, pusher dog rotary drive mechanism and pusher dog translational drive mechanism；
The pusher dog fixing seat is connect with holding frame, and can be along holding frame close to or far from the sliding top mechanism slips of rim charge；Described group Pawl is articulated at pusher dog fixing seat, and the pusher dog rotary drive mechanism is connect with pusher dog, for drive pusher dog rotate to perpendicular to Holding frame；The pusher dog translational drive mechanism is connect with pusher dog fixing seat, for drive pusher dog fixing seat along holding frame it is close or Far from the sliding top mechanism slips of rim charge.
6. silicon single crystal rod excavation machine according to claim 1, which is characterized in that the front end clamping device includes front end folder Hold seat and front end rotating disk；The tail end clamping device includes tail end grip slipper, tail end rotating disk and spinning disk drive motor；
The front end grip slipper and tail end grip slipper are oppositely arranged, and the front end rotating disk is set on the grip slipper of front end, described Tail end rotating disk is set on tail end grip slipper, and front end rotating disk and the coaxial arrangement of tail end rotating disk；The rotation dish driving Motor is connect with tail end rotating disk, for driving tail end to rotate disc spins；
Sensor installation seat, the front end grip slipper and tail end are provided in the middle part of the front end grip slipper and tail end grip slipper The sensor installation seat of grip slipper is respectively arranged with sensor.
7. silicon single crystal rod excavation machine according to claim 6, which is characterized in that the front end grip slipper and tail end grip slipper Top offer bearing mounting groove,
The front end rotating disk and tail end rotating disk include bearing, mounting base and ejector pin；The bearing is fixedly installed on bearing In mounting groove, the back side of the mounting base is provided with rotary shaft, and the rotary shaft is stuck in bearing；The front of mounting base offers Ejector pin mounting groove and drive end bearing bracket, the drive end bearing bracket are set at the front of mounting base；The ejector pin is set at drive end bearing bracket, and is pushed up The end of pin is through in ejector pin mounting groove；Finite place piece is arranged in the end of ejector pin, and the locating part is used to limit the end of ejector pin It is pierced by outside drive end bearing bracket；Second spring is provided in the ejector pin mounting groove, one end of the second spring bears against ejector pin installation The other end of slot, spring bears against locating part；
The tail end rotating disk further includes rotary disk drive mechanism, the rotary disk drive mechanism and rotation axis connection, for driving Dynamic rotary shaft, mounting base and ejector pin synchronous rotary.
8. silicon single crystal rod excavation machine according to claim 1, which is characterized in that it further include control system, the control system System is connect with robot device, clamping device and bilateral scroll saw running gear, for controlling robot device, clamping device respectively And bilateral scroll saw running gear.
9. silicon single crystal rod excavation machine according to claim 1, which is characterized in that the front end clamping device and tail end clamping The first sliding rail is provided between mechanism, the bottom of the front end clamping device is provided with sliding block, and the bottom of the sliding block offers First sliding groove compatible with sliding rail, the sliding block are slidably disposed on the first sliding rail by first sliding groove.
10. silicon single crystal rod excavation machine according to claim 1, which is characterized in that the robot device include support frame, First slide unit, the first slide unit driving mechanism, the second slide unit, the second slide unit driving mechanism and clip claw mechanism；
Support frame as described above is across the top of clamping device, and support frame is provided with the second sliding rail across clamping device；It is described First slide unit is horizontally disposed, and the first slide unit is provided with second sliding slot, and the second slide unit is slidably disposed in by second sliding slot At second sliding rail；The first slide unit driving mechanism is connect with the first slide unit, for driving the first slide unit to move along the second sliding rail It is dynamic；
First slide unit side is provided with the connecting plate of vertical direction, the third sliding rail of the connecting plate setting vertical direction；It is described Second slide unit is provided with third sliding slot, and the second slide unit is slidably disposed at third sliding rail by third sliding slot；Described second Slide unit driving mechanism is connect with the second slide unit, for driving the second slide unit to move along third sliding rail；The clip claw mechanism and The connection of two slide units.
CN201821888855.2U 2018-11-16 2018-11-16 A kind of silicon single crystal rod excavation machine Active CN209381170U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109397563A (en) * 2018-11-16 2019-03-01 福州天瑞线锯科技有限公司 A kind of silicon single crystal rod excavation machine
CN111361030A (en) * 2020-04-24 2020-07-03 西安奕斯伟硅片技术有限公司 Multi-wire cutting device and multi-wire cutting method
CN112095156A (en) * 2020-09-21 2020-12-18 江苏晶品新能源科技有限公司 Clamping mechanism with stable clamping for processing monocrystalline silicon wafers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109397563A (en) * 2018-11-16 2019-03-01 福州天瑞线锯科技有限公司 A kind of silicon single crystal rod excavation machine
CN109397563B (en) * 2018-11-16 2024-03-29 福州天瑞线锯科技有限公司 Monocrystalline silicon rod squarer
CN111361030A (en) * 2020-04-24 2020-07-03 西安奕斯伟硅片技术有限公司 Multi-wire cutting device and multi-wire cutting method
CN111361030B (en) * 2020-04-24 2021-11-23 西安奕斯伟材料科技有限公司 Multi-wire cutting device and multi-wire cutting method
CN112095156A (en) * 2020-09-21 2020-12-18 江苏晶品新能源科技有限公司 Clamping mechanism with stable clamping for processing monocrystalline silicon wafers

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