CN209341648U - A kind of vacuum chamber cooling device - Google Patents
A kind of vacuum chamber cooling device Download PDFInfo
- Publication number
- CN209341648U CN209341648U CN201822106312.7U CN201822106312U CN209341648U CN 209341648 U CN209341648 U CN 209341648U CN 201822106312 U CN201822106312 U CN 201822106312U CN 209341648 U CN209341648 U CN 209341648U
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- CN
- China
- Prior art keywords
- water
- bottom plate
- cooling tube
- vacuum
- cover board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of vacuum chamber cooling devices, including bottom plate, cover board, water cooling tube, the bottom plate is mounted on vacuum-chamber wall by fixed column, the curved water-cooling groove of S type detour is provided on one side towards vacuum chamber in bottom plate, water-cooling groove is evenly distributed on bottom plate, water cooling tube is embedded in water-cooling groove after penetrating vacuum-chamber wall, and water cooling tube water inlet end and water outlet and vacuum-chamber wall junction are sealed by sealing device, and cover board is bolted on bottom plate and seals water cooling tube.The utility model reduces the temperature of cover board by equally distributed water cooling tube; the temperature of substrate surface is absorbed by way of absorbing heat indirectly to achieve the purpose that cooling; it absorbs heat more uniform; cover board simultaneously can play a protective role to water cooling tube; integral installation when installation; convenient for installation and maintenance, when installation maintenance, does not have cooling water and enters vacuum chamber.
Description
Technical field
The utility model relates to technical field of vacuum plating, specifically a kind of vacuum chamber cooling device.
Background technique
In vacuum coating production line, after the completion of substrate coating, need to carry out gradient cooling to substrate, to avoid temperature difference mistake
The phenomenon that causing film layer to crack or fall off greatly.Existing cooling method is mainly directly drawn by metal hose in internal vacuum chamber
Enter cooling water, if installing during the installation process not in place, will lead to cooling water and enter vacuum chamber and cause normally to produce,
Meanwhile the regular water that has enters vacuum chamber formation pollution when demolition and maintenance, needs to repair, to delay production
Period.
Summary of the invention
For above-mentioned problems of the prior art, the utility model provides a kind of easy to install and use, endothermic effect
Good vacuum chamber cooling device.
The technical solution adopted in the utility model is as follows: a kind of vacuum chamber cooling device, including bottom plate, cover board, water cooling
Pipe, the bottom plate are mounted on vacuum-chamber wall by fixed column, are provided with the curved water of S type detour on one side towards vacuum chamber in bottom plate
Cold trap, water-cooling groove are evenly distributed on bottom plate, and water cooling tube penetrates after vacuum-chamber wall in water-cooling groove, water cooling tube water inlet end and are gone out
Water end (W.E.) and vacuum-chamber wall junction are sealed by sealing device, and cover board is bolted on bottom plate and seals water cooling tube.
Further, water cooling tube water inlet end and water outlet and vacuum-chamber wall junction are close by dismountable static seal device
Envelope.
Further, bottom plate, cover board, the water cooling tube being stitched together including upper and lower two groups, top water cooling tube and lower part water
At one, lower part water cooling tube enters the bottom of lower part after passing through below the bottom plate of top for the water outlet of cold pipe and water inlet end concentrated setting
In plate.
Further, it is equipped with backplate at top cover board and lower part cover board splicing seams and covers splicing seams.
The utility model is introduced into the cooling water under atmosphere under vacuum environment by water cooling tube, passes through equally distributed water
Cold pipe reduces the temperature of cover board, absorbs the temperature of substrate surface by way of absorbing heat indirectly to reach the mesh of cooling
, it absorbs heat more uniform, cover board simultaneously can play a protective role to water cooling tube, and the device bottom plate, cover board, water cooling tube are integrated in one
It rises, integral installation when installation is convenient for installation and maintenance, and water cooling tube water inlet end and water outlet and vacuum-chamber wall junction pass through detachable
Static seal device sealing, when installation maintenance do not have cooling water and enters vacuum chamber.
Detailed description of the invention
Fig. 1 is the side structure schematic diagram of the utility model embodiment.
Fig. 2 is the water cooling tube distribution schematic diagram of the utility model embodiment.
Fig. 3 is the front schematic view of the utility model embodiment.
Fig. 4 is B-B direction schematic diagram in Fig. 3.
Fig. 5 is partial enlarged view at A in Fig. 1.
Specific embodiment
For the ease of understanding the utility model, below in conjunction with Figure of description and preferred embodiment to the utility model
Work more comprehensively, meticulously describes, but the protection scope of the utility model is not limited to embodiment in detail below.
As Figure 1-Figure 5, a kind of vacuum chamber cooling device of the present embodiment, including upper and lower two groups be stitched together
Bottom plate 1, cover board 2, water cooling tube 3, the bottom plate 1 is mounted on vacuum-chamber wall by fixed column 4, in bottom plate 1 towards vacuum chamber
It is provided with the curved water-cooling groove of S type detour on one side, water-cooling groove is evenly distributed on bottom plate 1, and water cooling tube 3 is embedded in after penetrating vacuum-chamber wall
In water-cooling groove, cover board 2 is bolted on bottom plate 1 and seals water cooling tube 3.Lower part water cooling tube passes through below the bottom plate of top
Enter in the bottom plate of lower part afterwards, water cooling tube water inlet end and water outlet and vacuum-chamber wall junction pass through dismountable static seal device
5 sealings, the water outlet and water inlet end concentrated setting of top water cooling tube and lower part water cooling tube are at one, cover board and lower cover on top
It is equipped with backplate 6 at plate splicing seams and covers splicing seams.
The utility model is introduced into the cooling water under atmosphere under vacuum environment by water cooling tube, passes through equally distributed water
Cold pipe reduces the temperature of cover board, absorbs the temperature of substrate surface by way of absorbing heat indirectly to reach the mesh of cooling
, it absorbs heat more uniform, cover board simultaneously can play a protective role to water cooling tube, and the device bottom plate, cover board, water cooling tube are integrated in one
It rises, integral installation when installation is convenient for installation and maintenance, and water cooling tube water inlet end and water outlet and vacuum-chamber wall junction pass through detachable
Static seal device sealing, when installation maintenance do not have cooling water and enters vacuum chamber.
With the help of the introduction present in aforementioned specification and relevant drawings, the technology people of the utility model fields
Member will be appreciated that many modifications and other embodiments of the utility model.It will consequently be understood that the utility model is not limited to
Disclosed specific embodiment, modification and other embodiments are to be considered as included in scope of the appended claims.Although this
Specific term is used in text, they are only used with generic and descriptive sense, rather than limitation.
Claims (4)
1. a kind of vacuum chamber cooling device, it is characterised in that: including bottom plate, cover board, water cooling tube, the bottom plate passes through fixed column
It is mounted on vacuum-chamber wall, is provided with the curved water-cooling groove of S type detour on one side towards vacuum chamber in bottom plate, water-cooling groove is evenly distributed on
On bottom plate, water cooling tube is penetrated after vacuum-chamber wall in water-cooling groove, water cooling tube water inlet end and water outlet and vacuum-chamber wall junction
It is sealed by sealing device, cover board is bolted on bottom plate and seals water cooling tube.
2. a kind of vacuum chamber cooling device as described in claim 1, it is characterised in that: water cooling tube water inlet end and water outlet with
Vacuum-chamber wall junction is sealed by dismountable static seal device.
3. a kind of vacuum chamber cooling device as claimed in claim 1 or 2, it is characterised in that: exist including upper and lower two groups of splicings
The water outlet of bottom plate, cover board, water cooling tube together, top water cooling tube and lower part water cooling tube and water inlet end concentrated setting at one,
Lower part water cooling tube enters in the bottom plate of lower part after passing through below the bottom plate of top.
4. a kind of vacuum chamber cooling device as claimed in claim 3, it is characterised in that: on top, cover board and lower part cover board are spelled
Seam crossing is equipped with backplate and covers splicing seams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822106312.7U CN209341648U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822106312.7U CN209341648U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209341648U true CN209341648U (en) | 2019-09-03 |
Family
ID=67757127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822106312.7U Active CN209341648U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209341648U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489319A (en) * | 2018-12-15 | 2019-03-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber cooling device |
-
2018
- 2018-12-15 CN CN201822106312.7U patent/CN209341648U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489319A (en) * | 2018-12-15 | 2019-03-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber cooling device |
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