CN205556855U - Flange that sapphire single crystal growing furnace vacuum system used - Google Patents
Flange that sapphire single crystal growing furnace vacuum system used Download PDFInfo
- Publication number
- CN205556855U CN205556855U CN201620231887.XU CN201620231887U CN205556855U CN 205556855 U CN205556855 U CN 205556855U CN 201620231887 U CN201620231887 U CN 201620231887U CN 205556855 U CN205556855 U CN 205556855U
- Authority
- CN
- China
- Prior art keywords
- flange
- flange body
- vacuum system
- sapphire single
- guiding gutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a flange that sapphire single crystal growing furnace vacuum system used, including flange body (1), be equipped with guiding gutter (6) in flange body (1), be equipped with cooling water inlet (2) and coolant outlet (3) that switch on with guiding gutter (6) on flange body (1), be equipped with support frame (5) in the through -hole of flange body (1), be connected with on support frame (5) if dry filtration board (4). The utility model discloses have and to slow down seal ring aged deterioration speed, extension seal ring's life, volatile substance in some gas bleedings of condensing reduces the volatile substance to the performance of vacuum pump and the beneficial effect of the influence in life -span.
Description
Technical field
This utility model relates to a kind of flange, the adpting flange of a kind of sapphire single-crystal furnace vacuum system.
Background technology
Flange, again call orchid flange or bead.Flange is interconnective part between pipe and pipe, the connection between pipe end；Also there are the flange that the equipment that is used in is imported and exported, the connection between two equipment.As, in sapphire single-crystal furnace vacuum system, being connected through pipeline between vacuum chamber with vacuum pump, but owing to the temperature in single crystal growing furnace is higher than
1000
DEG C, the gas that vacuum pump is extracted out has the highest temperature, and the tube wall temperature making connection pipeline is the highest, the seal washer (rubber ring) causing flange connections is easy to aged deterioration, sealing reduces, if changing the phenomenon that there is also gas leakage not in time, affects the vacuum of vacuum chamber；Simultaneously as the sapphire crystal material in single crystal growing furnace can produce substantial amounts of volatile matter when high-temperature fusion, vacuum pump performance and life-span can be affected after entering vacuum pump by volatile matter.
Summary of the invention
For solving above-mentioned technical problem, this utility model provides the adpting flange of a kind of sapphire single-crystal furnace vacuum system.
The technical solution of the utility model: the adpting flange of a kind of sapphire single-crystal furnace vacuum system, include flange body, guiding gutter it is provided with in flange body, flange body is provided with the cooling water inlet with guiding gutter conducting and coolant outlet, being provided with bracing frame in the through hole of flange body, bracing frame connects some screen plates.
The adpting flange of aforesaid sapphire single-crystal furnace vacuum system, support frame as described above is two metallic rod being set in parallel in flange body through hole, and after metallic rod passes perpendicularly through screen plate plate face, two ends are connected on the internal ring wall of flange body.
The beneficial effects of the utility model: this utility model is by arranging guiding gutter in flange, and the cooling water inlet with guiding gutter conducting and coolant outlet are set on flange, in flange, cooling water it is passed through by cooling water inlet during use, reduce the temperature of flange, slow down the aging speed of the seal washer of flange connections, extend the service life of seal washer；Simultaneously, this utility model is by arranging screen plate in flange through hole, the temperature in the pipeline of flange can be reduced after guiding gutter in flange is passed through cooling water, form certain temperature difference, volatile matter in the gas that vacuum pump is extracted out condenses at this, reduce volatile matter and enter the amount of vacuum pump, reduce volatile matter to vacuum pump performance and the impact in life-span.In sum, this utility model has can slow down seal washer aged deterioration speed, extends the service life of seal washer, can condense the volatile matter in part gas bleeding, reduces volatile matter to vacuum pump performance and the beneficial effect of the impact in life-span.
Accompanying drawing explanation
Accompanying drawing
1
For perspective view of the present utility model；
Accompanying drawing
2
For main sectional view of the present utility model.
Description of reference numerals:
1-
Flange body,
2-
Cooling water inlet,
3-
Coolant outlet,
4-
Screen plate,
5-
Bracing frame,
6-
Guiding gutter.
Detailed description of the invention
With embodiment, this utility model is further described below in conjunction with the accompanying drawings, but is not intended as the foundation that this utility model is limited.
Embodiment of the present utility model: the adpting flange of a kind of sapphire single-crystal furnace vacuum system, such as accompanying drawing
1-2
Shown in, include flange body
1
, flange body
1
Inside it is provided with guiding gutter
6
, flange body
1
It is provided with and guiding gutter
6
The cooling water inlet of conducting
2
And coolant outlet
3
, flange body
1
Through hole in be provided with bracing frame
5
, bracing frame
5
Upper connection has some screen plates
4
。
Support frame as described above
5
It is two and is set in parallel in flange body
1
Metallic rod in through hole, metallic rod passes perpendicularly through screen plate
4
Behind plate face, two ends are connected to flange body
1
Internal ring wall on.
During utility model works, first by flange body
1
It is arranged on junction, in cooling water inlet
2
And coolant outlet
3
Place connects corresponding pipeline, and cooling water is from cooling water inlet
2
Enter guiding gutter
6
In, take away heat, reduce flange body
1
On temperature, reduce high temperature to flange body
1
The impact in the life-span of the seal washer of side, finally absorbs the cooling water of heat from coolant outlet
3
Flowing out, meanwhile, the high-temperature gas that vacuum pump is extracted out is affected by the temperature difference at flange, and the volatile matter in gas condenses at this and is attached near screen plate, reduces the volatile matter impact on vacuum pump performance.
Claims (2)
1. the adpting flange of a sapphire single-crystal furnace vacuum system, it is characterized in that: include flange body (1), guiding gutter (6) it is provided with in flange body (1), flange body (1) is provided with the cooling water inlet (2) and coolant outlet (3) turned on guiding gutter (6), being provided with bracing frame (5) in the through hole of flange body (1), the upper connection of bracing frame (5) has some screen plates (4).
The adpting flange of sapphire single-crystal furnace vacuum system the most according to claim 1, it is characterized in that: support frame as described above (5) is two metallic rod being set in parallel in flange body (1) through hole, after metallic rod passes perpendicularly through screen plate (4) plate face, two ends are connected on the internal ring wall of flange body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620231887.XU CN205556855U (en) | 2016-03-24 | 2016-03-24 | Flange that sapphire single crystal growing furnace vacuum system used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620231887.XU CN205556855U (en) | 2016-03-24 | 2016-03-24 | Flange that sapphire single crystal growing furnace vacuum system used |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205556855U true CN205556855U (en) | 2016-09-07 |
Family
ID=56814733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620231887.XU Expired - Fee Related CN205556855U (en) | 2016-03-24 | 2016-03-24 | Flange that sapphire single crystal growing furnace vacuum system used |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205556855U (en) |
-
2016
- 2016-03-24 CN CN201620231887.XU patent/CN205556855U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Gao Youjun Inventor after: Li Zhiqiang Inventor after: Dai Xiaobo Inventor after: Wang Guangming Inventor before: Gao Youjun Inventor before: Li Zhiqiang Inventor before: Dai Xiaobo Inventor before: Wang Guangming |
|
| CB03 | Change of inventor or designer information | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160907 Termination date: 20200324 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |