CN209311854U - Exposure components and exposure device - Google Patents
Exposure components and exposure device Download PDFInfo
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- CN209311854U CN209311854U CN201920180119.XU CN201920180119U CN209311854U CN 209311854 U CN209311854 U CN 209311854U CN 201920180119 U CN201920180119 U CN 201920180119U CN 209311854 U CN209311854 U CN 209311854U
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- air exhaust
- exposure
- exhaust head
- exposure components
- mercury vapour
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Abstract
The utility model relates to a kind of exposure components and exposure devices, wherein exposure components include: support frame；Reflective mirror, is set on support frame and including reflective surface, and reflective surface is for focusing light-ray condensing in advance；Exposing Lamp, be set to reflective surface and focus in advance between, include mercury vapour in Exposing Lamp；Extract system, including at least one air exhaust head, at least one air exhaust head is set to side of the Exposing Lamp far from the reflective mirror, and is movably arranged inside and outside the optically focused path of reflective surface.Above-mentioned exposure components, including at least one air exhaust head, and setting can be moved inside and outside the optically focused path of reflective surface.When quick-fried lamp occurs for the Exposing Lamp in reflective mirror, air exhaust head is movable in optically focused path, and before harmful mercury vapour overflows support frame, mercury vapour is taken away, is prevented mercury vapour from overflowing and is generated injury to human body.When Exposing Lamp normal exposure, air exhaust head is movable to outside optically focused path, does not influence the normal use of exposure components.
Description
Technical field
The utility model relates to display fields, more particularly to exposure components and exposure device.
Background technique
Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) display panel, it is also referred to as organic
Electroluminescence display panel is a kind of emerging panel display apparatus, due to its simple with preparation process, at low cost, power consumption
It low, the advantages that light emission luminance is high, volume is frivolous, fast response time, has broad application prospects.
In existing display panel preparation process, need to carry out multiple exposure technique to substrate, it usually needs use exposure
Machine is exposed.In practice, high-pressure sodium lamp is the common exposure light source of exposure machine.Filled with having to human health in high-pressure sodium lamp
Harmful mercury vapour.
In general, detecting mercury vapour when the quick-fried lamp of high-pressure sodium lamp by sensor and alarming, prompting personnel withdraw.However,
Before alarm, existing part mercury vapour is distributed rapidly, to increase the probability of mercury vapour injury.
Utility model content
Based on this, it is necessary to which the mercury vapour distributed when high-pressure sodium lamp quick-fried lamp can lead to the problem of injury to human body, mention
For a kind of exposure components and exposure device.
A kind of exposure components, comprising:
Support frame；
Reflective mirror is set on support frame as described above, and the reflective mirror includes for light-ray condensing is anti-in what is focused in advance
Light curved surface；
Exposing Lamp, be set to the reflective surface and it is described it is pre- focus between, include mercury vapour in the Exposing Lamp；
Extract system, including at least one air exhaust head, at least one described air exhaust head are set to the Exposing Lamp far from institute
The side of reflective mirror is stated, and is movably arranged inside and outside the optically focused path of the reflective surface.
The extract system includes multiple air exhaust heads in one of the embodiments, and multiple air exhaust heads are arranged same
One horizontal plane.
The extract system includes multiple air exhaust heads in one of the embodiments, wherein each air exhaust head has
Arcuate structure, and annular is formed when arc air exhaust head head and the tail contact.
The extract system further includes pump-line in one of the embodiments, and the pump-line includes total pipeline
And at least one lateral being connected with the total pipeline, the air exhaust head and the lateral correspond, and can
Telescopically it is arranged in the corresponding lateral.
The extract system further includes gas-handling configurations in one of the embodiments, and the gas-handling configurations
It is arranged in the pump-line, for absorbing and/or adsorbing the mercury vapour.
The gas-handling configurations are in netted in one of the embodiments,.
The extract system further includes aspiration pump and holding vessel in one of the embodiments, and the aspiration pump is set to
On the pump-line, the holding vessel connects the pump-line；
What the holding vessel was provided with cooling structure and/or the holding vessel is internally provided with gas-handling configurations, is used for
Absorb and/or adsorb the mercury vapour.
The gas-handling configurations include gas treating material in one of the embodiments, the gas treating material
Including active carbon and/or sulphur simple substance.
A kind of exposure device, including aforementioned exposure components.
Above-mentioned exposure components and exposure device, including at least one air exhaust head, can inside and outside the optically focused path of reflective surface
With mobile setting.When quick-fried lamp occurs for the Exposing Lamp in reflective mirror, before harmful mercury vapour spilling, mercury vapour is taken away,
It prevents mercury vapour from overflowing and injury is generated to human body.When Exposing Lamp normal exposure, air exhaust head is movable to outside optically focused path, not shadow
Ring the normal use of exposure components.
Detailed description of the invention
Fig. 1 is the exposure components schematic diagram that one embodiment of the application provides；
Fig. 2 is the exposure components optic path schematic diagram that one embodiment of the application provides；
Fig. 3 is the exposure components top view that one embodiment of the application provides；
Fig. 4 is the exposure components top view that the another embodiment of the application provides.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.Many details are explained in the following description in order to abundant
Understand the utility model.But the utility model can be implemented with being much different from other way described herein, this field
Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by following public affairs
The limitation for the specific embodiment opened.
It should be noted that it can directly on the other element when element is referred to as " being set to " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side " and similar statement for illustrative purposes only, are not meant to be the only embodiment.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specifically embodiment, is not to be to limit the utility model.
Referring to Figure 1, one embodiment of the application provides a kind of exposure components 100, including support frame 110, reflective mirror
120, Exposing Lamp 130 and extract system.Wherein, reflective mirror 120 is set on support frame 110, and reflective mirror 120 includes reflective song
Face, reflective surface is for focusing light-ray condensing in advance.Exposing Lamp 130 exposes between being set to reflective surface and focusing in advance
It include mercury vapour in light lamp.Extract system includes at least one air exhaust head 140, at least one air exhaust head 140 is set to Exposing Lamp
130 sides far from reflective mirror 120, and be movably arranged inside and outside the optically focused path of reflective surface.
Specifically, in embodiments herein, reflective mirror 120 is upper end opening for circle, and inside is the bowl-shape of cambered surface
Hemispherical device, the cambered surface inside reflective mirror 120 is reflective surface, for concentrating light source to move towards.And by light-ray condensing in pre-
It focuses.Exposing Lamp 130 is set to 120 center of reflective mirror, and internal full of mercury vapour.It include two electrodes in Exposing Lamp 130,
Two electrodes discharge under voltage effect, so that the mercury vapour between two electrodes is breakdown, and then glow discharge occur.Reflective mirror
120 reflective surface can concentrate the light generated after electric discharge.
As shown in Fig. 2, Fig. 2 shows the light trends inside exposure components.After glow discharge occurs for Exposing Lamp 130, light
Line is reflected by the reflective surface of reflective mirror 120.It is provided in the top of reflective mirror 120 and tilted-putted takes optical assembly 150.Reflection
After light arrival takes optical assembly 150,150 secondary reflection of optical assembly is taken, and then can optical path be transmitted in the horizontal direction.?
On the optical circuit path of horizontal direction, it is provided with the optical filter 160 being intervally arranged.Light of the optical filter 160 to produced different wave length
Line is filtered, and certainly, is also provided with other groups and is taken optical assembly, for changing optical circuit path, so that optical path, which reaches this, takes light
It is reflected after component, and predetermined direction transmits, and eventually arrives at and is set to mask plate to be exposed.In the present embodiment, optical assembly is taken
It can be reflecting mirror, be used for reflection light, change the transmission direction of light.
Mercury lamp brightness is high, and luminous efficiency is also high, can be used for being exposed technique, but since mercury vapour is toxic, work as Exposing Lamp
When quick-fried lamp occurs, mercury vapour overflows rapidly, and the injury of lifelong participation may be generated to staff.Therefore, it is necessary to overflow in mercury vapour
Mercury vapour is handled before out.The present embodiment is handled mercury vapour by air exhaust head.Extract system includes at least one
A air exhaust head 140, the aspirating hole of air exhaust head 140 is towards in reflective mirror 120.When quick-fried lamp occurs for Exposing Lamp 130, mercury vapour overflows
Out, air exhaust head 140 is movable in the exposure passages of Exposing Lamp 130, for taking the mercury vapour in reflective mirror 120 away, and is located
Manage mercury vapour.When 130 normal exposure of Exposing Lamp, air exhaust head 140 is movable to outside exposure passages, does not influence Exposing Lamp 130
Exposure passages.
Exposure components provided by the above embodiment, including at least one air exhaust head 140, air exhaust head 140 towards in reflective mirror,
And setting can be moved inside and outside the optically focused path of reflective surface.When quick-fried lamp occurs for the Exposing Lamp 130 in reflective mirror 120, take out
Gas head 140 is movable in optically focused path, before harmful mercury vapour spilling, mercury vapour is taken away, prevents mercury vapour from overflowing
Injury is generated to human body.When 130 normal exposure of Exposing Lamp, air exhaust head 140 is movable to outside optically focused path, does not influence exposure group
The normal use of part.
Extract system includes multiple air exhaust heads 140 in one of the embodiments, and multiple air exhaust heads 140 are spaced reciprocally
It is set in same level.Specifically, as shown in figure 3, the present embodiment is said so that extract system includes 4 air exhaust heads as an example
Bright, 4 air exhaust heads can be uniformly distributed in the same plane of 120 top of reflective mirror, non-uniform can also be distributed.Air exhaust head 140
Air exhaust nozzle towards reflective mirror 120 be arranged, when quick-fried lamp occurs for Exposing Lamp 130, air exhaust head 140 can mercury vapour spilling before
Harmful mercury vapour is extracted out, prevents from generating injury to staff.It is understood that air exhaust head 140 can in practical application
It is set as needed multiple, however it is not limited to illustrated case.
Further, the air exhaust nozzle of each air exhaust head 140 has planar structure in one of the embodiments, and each
Air exhaust nozzle is arranged towards reflective mirror 120.When quick-fried lamp occurs for Exposing Lamp 130, multiple air exhaust nozzles contact with each other to form annular.
Specifically, Fig. 4 is referred to, each air exhaust head 140 includes the air exhaust nozzle 141 in planar, and multiple air exhaust nozzles 141 are set
It is placed in the top of reflective mirror 120, and is in the same plane.Air exhaust nozzle 141 can be in cambered surface or in plane.Each pumping
Downwardly reflective mirror 120 is arranged mouth 141.When quick-fried lamp occurs for Exposing Lamp 130, air exhaust nozzle 141 is moved in exposure passages,
And contact with each other and to form annular, and then can be evacuated in the annular region of 120 top of entire reflective mirror, it increases and mercury is steamed
The pumping area of gas.The present embodiment can increase the contact area of air exhaust head and mercury vapour using air exhaust nozzle 141, and air exhaust nozzle to
It is lower to be arranged towards reflective mirror 120, and then pumping efficiency can be improved, it prevents mercury vapour from overflowing and injury is generated to staff.
Extract system further includes pump-line in one of the embodiments,.Pump-line includes total pipeline and and general pipeline
At least one lateral of road connection.Air exhaust head is arranged correspondingly with lateral, and air exhaust head is telescopically arranged
In lateral.When 130 normal exposure of Exposing Lamp, air exhaust head is retracted in lateral, prevents the normal biography for influencing optical path
It is defeated.When quick-fried lamp, which occurs, for Exposing Lamp 130 reveals mercury vapour, air exhaust head stretches out outside lateral, and takes out to mercury vapour
Gas disposal.
Specifically, exposure components further include at least one drive rod and at least one driving device.Drive rod connection pumping
Head, for driving air exhaust head to move reciprocatingly inside and outside lateral.Driving device is by driving drive rod to drive pumping
Head puts in lateral or stretches out outside lateral.In the present embodiment, driving device can be micromotor or motor.Motor
It can be rotated by sliding tooth wheel, gear drives drive rod movement.Wherein, gear can be eccentric gear, and drive rod connection is inclined
The axle center of heart gear, and junction is provided with limiting device, can limit drive rod can only move reciprocatingly in one direction,
And it does not rotate in the other direction.Function bar is passed since air exhaust head 140 connects, in turn, it is past that motor can drive air exhaust head 140 to carry out
Multiple movement, achievees the effect that flexible.Certainly, other transmission devices, such as slider-crank mechanism, snail can also be used in the present embodiment
Worm and gear mechanism etc., above structure are known structure, and details are not described herein.
Exposure components further include sensing device and control device in one of the embodiments,.Wherein, sensing device can be with
It is set at least one of support frame 110, Exposing Lamp 120 and extract system.
Specifically, sensing device can be gas detection sensor.When the leakage of quick-fried lamp gas occurs for Exposing Lamp, gas inspection
It surveys sensor and detects the gas of leakage, and send inductive signal to control device.Control device receives inductive signal, concurrently
Send control signal to driving device to start driving device, driving device drives air exhaust head to stretch out the outer mercury to leakage of lateral
Steam carries out pumping process.Further, in this embodiment control device can also be according to gas leakage flow to the gas of air exhaust head
Body flow is controlled.It is understood that sensing device transmits inductive signal to control device and control dress in the present embodiment
Setting the method for sending a control signal to driving device is known method.
Exposure components provided by the above embodiment can sense whether gas leaks by sensing device, if gas leaks,
Sensing device can send a signal to control device after detecting gas in time, and control device receives the signal of sensing device
Control air exhaust head works, and improves the intelligence degree of device.
Extract system further includes gas-handling configurations in one of the embodiments, is arranged in pump-line, for inhaling
Receipts or absorption or simultaneously absorption and sorption mercury vapour.
Specifically, gas-handling configurations can be set in total pipeline, and can be arranged at least one along airflow direction.When
So, gas-handling configurations may also set up in lateral, be respectively provided at one in each lateral.Or total pipeline and branched pipe
It also can be respectively provided in road, gas treatment is more efficient at this time, and effect is more preferable.
In the present embodiment, gas-handling configurations include gas treating material, and gas treating material can be active carbon, sulphur list
Matter or both has.Wherein, active carbon can be used for adsorbing mercury vapour, and sulphur simple substance can absorb mercury vapour, i.e., occurs with mercury vapour anti-
Mercuric sulphide should be generated, mercuric sulphide is solid product, not volatile and harmless.
Further, gas-handling configurations can be netted, and active carbon or sulphur simple substance are attached on reticular structure.When mercury steams
When air-flow passes through, it is possible to increase the contact area of mercury vapour and active carbon or sulphur simple substance improves treatment effeciency, prevents mercury vapour from overflowing
Injury is generated to human body.
In another embodiment, extract system includes aspiration pump and holding vessel, and aspiration pump is set on pump-line, storage
Deposit tank connection pump-line.Settable cooling structure or gas-handling configurations or both are arranged simultaneously in holding vessel.Aspiration pump is used
Pass through in pump-line suction holding vessel in by mercury vapour.When cooling structure is arranged in holding vessel, mercury vapour encounters cooling knot
Structure becomes liquid mercury, is stored in holding vessel.Meanwhile may also set up gas-handling configurations in holding vessel, gas-handling configurations can
Handle the mercury vapour of liquid mercury and portion of residual.In the present embodiment, gas-handling configurations include gas treating material, gas treatment
Material can be the mixture of active carbon or sulphur simple substance or both.Gas treating material handles the principle and above-mentioned implementation of mercury vapour
Example is identical, and details are not described herein.
The another embodiment of the application provides a kind of exposure device, the exposure components provided including aforementioned any embodiment.
Above-mentioned exposure device, exposure components include at least one air exhaust head, and air exhaust head is towards in reflective mirror, and reflective
Setting can be moved inside and outside the optically focused path of curved surface.When quick-fried lamp occurs for the Exposing Lamp in reflective mirror, air exhaust head is movable to poly-
In light path, before harmful mercury vapour spilling, mercury vapour is taken away, prevents mercury vapour from overflowing and injury is generated to human body.When
When Exposing Lamp normal exposure, air exhaust head is movable to outside optically focused path, does not influence the normal use of exposure components.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of exposure components characterized by comprising
Support frame；
Reflective mirror is set on support frame as described above, the reflective mirror include for by light-ray condensing in the reflective song to focus in advance
Face；
Exposing Lamp, be set to the reflective surface and it is described it is pre- focus between, include mercury vapour in the Exposing Lamp；
Extract system, including at least one air exhaust head, at least one described air exhaust head are set to the Exposing Lamp far from described anti-
The side of light microscopic, and be movably arranged inside and outside the optically focused path of the reflective surface.
2. exposure components according to claim 1, which is characterized in that the extract system includes multiple air exhaust heads, multiple
The air exhaust head is arranged in same level.
3. exposure components according to claim 1, which is characterized in that the extract system includes multiple air exhaust heads, wherein
Each air exhaust head has arcuate structure, and forms annular when arc air exhaust head head and the tail contact.
4. exposure components according to any one of claim 1-3, which is characterized in that the extract system further includes pumping
Pipeline, the pump-line include total pipeline and at least one lateral for being connected with the total pipeline, the air exhaust head
It corresponds, and is telescopically disposed in the corresponding lateral with the lateral.
5. exposure components according to claim 4, which is characterized in that the extract system further includes gas-handling configurations,
And the gas-handling configurations are arranged in the pump-line, for absorbing and/or adsorbing the mercury vapour.
6. exposure components according to claim 5, which is characterized in that the gas-handling configurations are in netted.
7. exposure components according to claim 4, which is characterized in that the extract system further includes aspiration pump and storage
Tank, the aspiration pump are set on the pump-line, and the holding vessel connects the pump-line；
Wherein, the holding vessel is provided with the gas-handling configurations that are internally provided with of cooling structure and/or the holding vessel, uses
In absorbing and/or adsorb the mercury vapour.
8. the exposure components according to any one of claim 5-7, which is characterized in that the gas-handling configurations include gas
Body handles material, and the gas treating material includes active carbon and/or sulphur simple substance.
9. exposure components according to claim 1, which is characterized in that it further include sensing device, the sensing device setting
On at least one of support frame as described above, the Exposing Lamp, the extract system.
10. a kind of exposure device, which is characterized in that including exposure components as claimed in any one of claims 1-9 wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920180119.XU CN209311854U (en) | 2019-02-01 | 2019-02-01 | Exposure components and exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920180119.XU CN209311854U (en) | 2019-02-01 | 2019-02-01 | Exposure components and exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209311854U true CN209311854U (en) | 2019-08-27 |
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ID=67681512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920180119.XU Active CN209311854U (en) | 2019-02-01 | 2019-02-01 | Exposure components and exposure device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209311854U (en) |
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2019
- 2019-02-01 CN CN201920180119.XU patent/CN209311854U/en active Active
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