CN209310518U - Heating mechanism built in box type vacuum furnace - Google Patents
Heating mechanism built in box type vacuum furnace Download PDFInfo
- Publication number
- CN209310518U CN209310518U CN201821844207.7U CN201821844207U CN209310518U CN 209310518 U CN209310518 U CN 209310518U CN 201821844207 U CN201821844207 U CN 201821844207U CN 209310518 U CN209310518 U CN 209310518U
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- top deck
- vacuum chamber
- liner plate
- box type
- lower liner
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Abstract
The utility model discloses heating mechanisms built in a kind of box type vacuum furnace, it include furnace body and vacuum chamber, multiple calandrias are sequentially installed in vacuum chamber from top to bottom, multiple calandrias include the top deck being mutually fixedly connected and lower liner plate, it is arranged between top deck and lower liner plate and in the multiple heat-conducting blocks and heating tube being spaced apart, multiple heat-conducting blocks are close to top deck respectively, heating tube is introduced from outside into vacuum chamber, and it is introduced from the side of top deck and lower liner plate, and it is S-shaped successively around after multiple heat-conducting blocks, it is drawn from the other side of top deck and lower liner plate, and it is drawn out of vacuum chamber.The utility model structure is simple, calandria is built in vacuum chamber, and by the way of sticking type heat transfer, product (workpiece) is directly placed on calandria, product (workpiece) is quickly heated, heating rate is improved, temperature uniformity is improved, improves the consistency of product (workpiece) realization.
Description
Technical field
The utility model relates to box type vacuum furnace field, heating mechanism built in specifically a kind of box type vacuum furnace.
Background technique
Box type vacuum furnace is production of semiconductor products one of used common device in the process.Under vacuum conditions, hot
Source (calandria) and product (workpiece) temperature difference are larger, lead to slower, the poor temperature uniformity that heats up, and due to the temperature difference in furnace
Greatly, the consistency for causing product to be realized is poor.
Utility model content
The purpose of the utility model is to provide heating mechanisms built in a kind of box type vacuum furnace, and calandria is built in vacuum chamber
Product (workpiece) is quickly heated by the way of sticking type heat transfer interior.
The technical solution of the utility model is as follows:
Heating mechanism built in a kind of box type vacuum furnace, includes furnace body and vacuum chamber, it is characterised in that: the vacuum
Multiple calandrias are sequentially installed in chamber from top to bottom, multiple calandrias include the top deck being mutually fixedly connected and lower lining
Plate is arranged between top deck and lower liner plate and in the multiple heat-conducting blocks and heating tube being spaced apart, and described is multiple thermally conductive
Block is close to the top deck respectively, and the heating tube is introduced from outside into the vacuum chamber, and from the top deck under
The side of liner plate introduces, and S-shaped successively around after multiple heat-conducting blocks, from the other side of the top deck and lower liner plate
It draws, and is drawn out of described vacuum chamber.
Heating mechanism built in the box type vacuum furnace, it is characterised in that: the top deck and lower liner plate pass through distribution
It is mutually fixedly connected in the link block of its surrounding.
Heating mechanism built in the box type vacuum furnace, it is characterised in that: the heating tube is held on described introducing, draw
The position of plate and lower liner plate is respectively equipped with sealing ring.
Heating mechanism built in the box type vacuum furnace, it is characterised in that: the heating tube is introducing, drawing the vacuum
The position of chamber is respectively equipped with sealing-plug, and by being threadedly engaged the nut being equipped with for lock sealing plug.
The utility model has the beneficial effects that
The utility model structure is simple, and calandria is built in vacuum chamber, and by the way of sticking type heat transfer,
Product (workpiece) is directly placed on calandria, product (workpiece) is quickly heated, heating rate is improved, is improved
Temperature uniformity improves the consistency of product (workpiece) realization.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
Fig. 2 be in Fig. 1 A-A to structural schematic diagram.
Fig. 3 is the structural schematic diagram of calandria in the utility model.
Fig. 4 is the Structure explosion diagram of Fig. 3.
Fig. 5 is the sealed structural schematic diagram that heating tube introduced, drew vacuum chamber in the utility model.
Specific embodiment
Referring to attached drawing, heating mechanism built in a kind of box type vacuum furnace, includes furnace body 1 and vacuum chamber 2, vacuum chamber 2
Inside be sequentially installed with multiple calandrias 3 from top to bottom, multiple calandrias 3 include the top deck 3-1 being mutually fixedly connected and under
Liner plate 3-2, it is arranged between top deck 3-1 and lower liner plate 3-2 and in the multiple heat-conducting block 3-3 and heating tube 3- being spaced apart
4, multiple heat-conducting block 3-3 are close to top deck 3-1 respectively, and heating tube 3-4 is introduced from outside into vacuum chamber 2, and from top deck 3-1
It is introduced with the side of lower liner plate 3-2, and S-shaped successively around after multiple heat-conducting block 3-3, from top deck 3-1's and lower liner plate 3-2
The other side is drawn, and is drawn out of vacuum chamber 2.
In the utility model, top deck 3-1 connects with lower liner plate 3-2 by the way that the link block 3-5 phase for being distributed in its surrounding is fixed
It connects.
Heating tube 3-4 is respectively equipped with sealing ring at the position for introducing, drawing top deck 3-1 and lower liner plate 3-2.
Heating tube 3-4 is respectively equipped with sealing-plug 4 at the position for introducing, drawing vacuum chamber 2, and by being threadedly engaged installation
There is the nut 5 for lock sealing plug 4.
The utility model is further described below in conjunction with attached drawing:
Workpiece is individually positioned on multiple calandrias 3, that is, is individually positioned on top deck 3-1, what heating tube 3-4 was generated
Heat is transferred to top deck 3-1 by multiple heat-conducting block 3-3, adds to be realized by way of sticking type heat transfer to workpiece
Heat.
Above embodiment is only that the preferred embodiment of the utility model is described, not to the utility model
Protection scope be defined, under the premise of not departing from the spirit of the design of the utility model, those of ordinary skill in the art to this
The modification and improvement that the technical solution of utility model is made should all be fallen into the protection scope of the utility model.
Claims (4)
1. heating mechanism built in a kind of box type vacuum furnace, includes furnace body and vacuum chamber, it is characterised in that: the vacuum chamber
Interior is sequentially installed with multiple calandrias from top to bottom, and multiple calandrias include the top deck being mutually fixedly connected and lower lining
Plate is arranged between top deck and lower liner plate and in the multiple heat-conducting blocks and heating tube being spaced apart, and described is multiple thermally conductive
Block is close to the top deck respectively, and the heating tube is introduced from outside into the vacuum chamber, and from the top deck under
The side of liner plate introduces, and S-shaped successively around after multiple heat-conducting blocks, from the other side of the top deck and lower liner plate
It draws, and is drawn out of described vacuum chamber.
2. heating mechanism built in box type vacuum furnace according to claim 1, it is characterised in that: the top deck and lower lining
Plate is mutually fixedly connected by being distributed in the link block of its surrounding.
3. heating mechanism built in box type vacuum furnace according to claim 1, it is characterised in that: the heating tube introduce,
The position for drawing the top deck and lower liner plate is respectively equipped with sealing ring.
4. heating mechanism built in box type vacuum furnace according to claim 1, it is characterised in that: the heating tube introduce,
The position for drawing the vacuum chamber is respectively equipped with sealing-plug, and by being threadedly engaged the spiral shell being equipped with for lock sealing plug
Cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821844207.7U CN209310518U (en) | 2018-11-09 | 2018-11-09 | Heating mechanism built in box type vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821844207.7U CN209310518U (en) | 2018-11-09 | 2018-11-09 | Heating mechanism built in box type vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209310518U true CN209310518U (en) | 2019-08-27 |
Family
ID=67672686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821844207.7U Active CN209310518U (en) | 2018-11-09 | 2018-11-09 | Heating mechanism built in box type vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209310518U (en) |
-
2018
- 2018-11-09 CN CN201821844207.7U patent/CN209310518U/en active Active
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