CN209306104U - A kind of dedicated reading quarter device of wafer - Google Patents
A kind of dedicated reading quarter device of wafer Download PDFInfo
- Publication number
- CN209306104U CN209306104U CN201822048157.8U CN201822048157U CN209306104U CN 209306104 U CN209306104 U CN 209306104U CN 201822048157 U CN201822048157 U CN 201822048157U CN 209306104 U CN209306104 U CN 209306104U
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- wafer
- rear deflector
- side plate
- support
- front apron
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The utility model discloses the dedicated reading quarter devices of a kind of wafer in wafer bumps manufacturing field, including two blocks of side plates, front apron and rear deflector are equipped between both side plate, front apron is obliquely installed, rear deflector is obliquely installed, position at the top of rear deflector in the vertical direction is higher than at the top of front apron, gib block is equipped at left and right sides of the rear deflector, it is horizontal between two pieces of side plate lower parts to be equipped at least two support rods, at least two pieces of support plates are supported by support rod, support plate is parallel with side plate, the setting of support plate incline upward, it is arranged successively on the upside of support plate and is provided with several grooves, the section of groove is triangle, moveable headlamp is connected on rear deflector.The utility model can confirm wafer quarter number like clockwork, easy to operate to settle at one go, protect product.
Description
Technical field
The utility model belongs to wafer bumps manufacturing field, in particular to a kind of dedicated reading quarter device of wafer.
Background technique
In the prior art, wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle,
Therefore referred to as wafer；It can be processed on silicon and is fabricated to various circuit component structures, and becoming has the integrated of specific electrical functionality
Circuit product.
Wafer needs that wafer quarter number is confirmed and put in order during supplied materials and processing procedure, in order to which board can be quasi-
Wafer quarter number really is read in order.In the prior art, it generallys use and is tilted a certain angle the box equipped with wafer to distinguish
The wafer of product is carved number, disadvantage is that: if confirming that wafer is carved number by tilt angle, be merely able to see clearly front,
Subsequent a few wafer quarters number, intermediate wafer quarter number due to the influence of light problem, open-and-shut cannot quickly be confirmed
At quarter number, adept torch pounds the risk of wafer there is also falling.In the prior art, wafer monolithic is taken out one also by sucking pen
One confirmation, disadvantage is that: it can see clearly every wafer quarter number, but will need to be inserted into addition after the taking-up of wafer monolithic
In one empty horse, there is the risk for the slot position wrong plug for scratching wafer and wafer in operation, influence normal operating efficiency.
Utility model content
The purpose of the utility model is to provide a kind of dedicated reading quarter devices of wafer, can confirm wafer like clockwork
It is quarter number, easy to operate to settle at one go, product is protected, operation quality and operating efficiency are improved.
Purpose of the utility model is realized as follows: a kind of dedicated reading quarter device of wafer, including two pieces of bilateral symmetries
The side plate of setting is respectively equipped with front apron and rear deflector between both side plate, and front apron is obliquely installed, and the top of front apron is upward
The position above side plate is extended to, the left and right sides of front apron passes through fastener respectively and is fixedly connected with corresponding side plate, after described
Guide plate is obliquely installed, and the position at the top of rear deflector in the vertical direction is higher than at the top of front apron, the left and right two of rear deflector
Side passes through fastener respectively and is fixedly connected with corresponding side plate, and gib block, two pieces of institutes are equipped at left and right sides of the rear deflector
It states level between side plate lower part and is equipped at least two support rods, be supported by least two pieces of support plates, support plate and side on support rod
Plate is parallel, the setting of support plate incline upward, is arranged successively on the upside of support plate and is provided with several grooves, the section of groove is triangle
Shape is connected with moveable headlamp on the rear deflector.
When utility model works, first inclination moves out the wafer cassette for holding wafer, then leads wafer cassette inclination after
To plate, wafer cassette is slowly put into support plate between two gib blocks, along rear deflector, and wafer cassette is inclined after in place
State is adjusted to headlamp movement to adapt to position, so that the irradiating angle of light source is suitble to see the product quarter number of each wafer clearly；Really
Recognize to tilt wafer cassette against rear deflector after the quarter number for reading each wafer and slowly lift, until slot position it is last it is a piece of empty,
It can take out, when pick-and-place can not encounter the headlamp of top.Compared with prior art, the utility model has the beneficial effects that:
Wafer quarter number can be confirmed like clockwork, it is easy to operate to settle at one go, product is protected, operation quality and operation effect are improved
Rate avoids scratching wafer.
The spacing of the adjacent groove is 0 as a further improvement of the utility model, the bottom angle of triangular groove
For obtuse angle.The groove of obtuse triangle can guarantee that wafer cassette will not shake.
Wafer cassette is placed in the support plate as a further improvement of the utility model, wafer cassette is in cuboid, brilliant
It is equipped with handle on front side of circle box, several wafers being spacedly distributed are placed in wafer cassette, each wafer is set with each groove one-to-one correspondence
It sets.Each wafer and each groove correspond, and can be more convenient and be unambiguously read wafer quarter number.
In order to improve the intensity of support plate, reinforcing rod is equipped between the adjacent support plate.
The support plate is fixedly connected with support rod by fastener as a further improvement of the utility model,.
The headlamp is connected by direction flexible with rear deflector as a further improvement of the utility model,.Pass through
Headlamp can be adjusted to proper angle by bending direction flexible.
Detailed description of the invention
Fig. 1 is perspective view when the utility model is mounted with wafer cassette.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is the left view of the utility model.
Fig. 4 is the top view of the utility model.
Fig. 5 is the sectional view along AA in Fig. 4.
Fig. 6 is the B direction view of Fig. 5.
Fig. 7 is the top view of wafer cassette.
Wherein, 1 side plate, 2 front aprons, 3 rear deflectors, 4 gib blocks, 5 support rods, 6 support plates, 6a groove, 7 headlamps, 8
Direction flexible, 9 wafer cassettes, 10 handles, 11 wafers, 12 reinforcing rods.
Specific embodiment
It as shown in figs. 1-7, is a kind of dedicated reading quarter device of wafer, including two blocks of side plates being symmetrical set 1, two sides
Front apron 2 and rear deflector 3 are respectively equipped between plate 1, front apron 2 is obliquely installed, and the top of front apron 2 extends up to side plate
The position of 1 top, the left and right sides of front apron 2 pass through fastener respectively and are fixedly connected with corresponding side plate 1, and rear deflector 3 tilts
Setting, the position of 3 top of rear deflector in the vertical direction are higher than 2 top of front apron, and the left and right sides of rear deflector 3 leads to respectively
Fastener is crossed to be fixedly connected with corresponding side plate 1, the left and right sides of rear deflector 3 is equipped with gib block 4, two pieces of 1 lower parts of side plate it
Between it is horizontal be equipped at least two support rods 5, it is equal with side plate 1 to be supported by least two pieces of support plates 6, support plate 6 on support rod 5
Row, 6 incline upward of support plate are arranged, and are arranged successively on the upside of support plate 6 and are provided with several groove 6a, and the section of groove 6a is triangle
Shape is connected with moveable headlamp 7 on rear deflector 3.The spacing of adjacent grooves 6a is 0, and the bottom of triangular groove 6a presss from both sides
Angle is obtuse angle.Wafer cassette 9 is placed in support plate 6, wafer cassette 9 is in cuboid, is equipped with handle 10, wafer cassette 9 on front side of wafer cassette 9
Several wafers 11 being spacedly distributed inside are placed with, each wafer 11 is arranged in a one-to-one correspondence with each groove 6a.Adjacent support plate 6 it
Between be equipped with reinforcing rod 12.Support plate 6 is fixedly connected with support rod 5 by fastener.Headlamp 7 is led with after by direction flexible 8
It is connected to plate 3.
When the present apparatus works, first inclination moves out the wafer cassette 9 for holding wafer 11, then leads the inclination of wafer cassette 9 after
To plate 3, wafer cassette 9 is slowly put into support plate 6 between two gib blocks 4 along rear deflector 3, wafer cassette 9 in place after
It is inclined, it is adjusted to the movement of headlamp 7 to adapt to position, so that the irradiating angle of light source is suitble to see the production of each wafer 11 clearly
Product quarter number；Wafer cassette 9 is tilted against rear deflector 3 after the quarter number that confirmation reads each wafer 11 and is slowly lifted, until slot position
It is last it is a piece of empty, can take out, when pick-and-place can not encounter the headlamp 7 of top.The advantages of present apparatus, is: being capable of accurate nothing
Accidentally confirm wafer quarter number, it is easy to operate to settle at one go, product is protected, operation quality and operating efficiency is improved, avoids scratching
Wafer 11.
The utility model is not limited to above-described embodiment, on the basis of technical solution disclosed by the utility model, this
For the technical staff in field according to disclosed technology contents, not needing creative labor can be special to some of which technology
Sign makes some replacements and deformation, these replacements and deformation are within the protection scope of the present utility model.
Claims (6)
1. a kind of dedicated reading quarter device of wafer, which is characterized in that the side plate being symmetrical set including two pieces, between both side plate
It is respectively equipped with front apron and rear deflector, front apron is obliquely installed, the position above side plate is extended up at the top of front apron,
The left and right sides of front apron passes through fastener respectively and is fixedly connected with corresponding side plate, and the rear deflector is obliquely installed, rear to be oriented to
Position at the top of plate in the vertical direction is higher than at the top of front apron, the left and right sides of rear deflector pass through respectively fastener with it is corresponding
Side plate is fixedly connected, and gib block is equipped at left and right sides of the rear deflector, level is equipped between two pieces of side plate lower parts
At least two support rods are supported by least two pieces of support plates on support rod, and support plate is parallel with side plate, support plate incline upward
Setting, support plate upside, which is arranged successively, is provided with several grooves, and the section of groove is triangle, is connected on the rear deflector
Moveable headlamp.
2. the dedicated reading quarter device of a kind of wafer according to claim 1, which is characterized in that the spacing of the adjacent groove
It is 0, the bottom angle of triangular groove is obtuse angle.
3. the dedicated reading quarter device of a kind of wafer according to claim 1 or 2, which is characterized in that put in the support plate
It is equipped with wafer cassette, wafer cassette is in cuboid, and handle is equipped on front side of wafer cassette, is placed with several crystalline substances being spacedly distributed in wafer cassette
Circle, each wafer are arranged in a one-to-one correspondence with each groove.
4. the dedicated reading quarter device of a kind of wafer according to claim 1 or 2, which is characterized in that the adjacent support
Reinforcing rod is equipped between plate.
5. the dedicated reading quarter device of a kind of wafer according to claim 1 or 2, which is characterized in that the support plate and branch
Strut is fixedly connected by fastener.
6. the dedicated reading quarter device of a kind of wafer according to claim 1 or 2, which is characterized in that the headlamp passes through
Direction flexible is connected with rear deflector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822048157.8U CN209306104U (en) | 2018-12-07 | 2018-12-07 | A kind of dedicated reading quarter device of wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822048157.8U CN209306104U (en) | 2018-12-07 | 2018-12-07 | A kind of dedicated reading quarter device of wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209306104U true CN209306104U (en) | 2019-08-27 |
Family
ID=67675974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822048157.8U Active CN209306104U (en) | 2018-12-07 | 2018-12-07 | A kind of dedicated reading quarter device of wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209306104U (en) |
-
2018
- 2018-12-07 CN CN201822048157.8U patent/CN209306104U/en active Active
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