CN209299589U - A kind of jig plate for DBC substrate automatic exposure - Google Patents
A kind of jig plate for DBC substrate automatic exposure Download PDFInfo
- Publication number
- CN209299589U CN209299589U CN201821433016.1U CN201821433016U CN209299589U CN 209299589 U CN209299589 U CN 209299589U CN 201821433016 U CN201821433016 U CN 201821433016U CN 209299589 U CN209299589 U CN 209299589U
- Authority
- CN
- China
- Prior art keywords
- jig plate
- main body
- dbc substrate
- plate main
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The utility model relates to semiconductor processing technology fields.A kind of jig plate for DBC substrate automatic exposure, including jig plate main body, the putting hole for placing DBC substrate is offered in jig plate main body, for being inserted into the location hole of pin there are two being opened up in jig plate main body, the internal diameter of location hole is greater than the outer diameter of pin, which is characterized in that two are also provided in jig plate main body for assisting the registration holes of the film Yu lower film aligning, the internal diameter of registration holes is less than the internal diameter of location hole, and the internal diameter of registration holes and the outer diameter of pin match；Each location hole is adjacent to be provided with a registration holes；The notch for being symmetricly set on putting hole two sides is offered in jig plate main body, and notch is connected with putting hole.The improvement point of this patent is: (1) being the combination of 2 apertures (registration holes) and 2 macropores (location hole) by traditional two location holes improvement, convenient for improving the upper film and lower film aligning precision.
Description
Technical field
The utility model relates to semiconductor processing technology fields, and in particular to jig plate.
Background technique
Gradually switched to automatically by Manual exposure to improve production efficiency and aligning accuracy, present DBC base plate exposure process
Exposure.But many problems are encountered in exposure process:
1) DBC substrate plate is small, and DBC substrate is more difficult when being put into jig plate and taking out.
2) up and down film aligning when, aligning accuracy goes beyond the scope often, and equipment can not work.Two pins in equipment when contraposition
Nail corresponding two circular holes on jig plate, pin drive jig plate mobile to realize the upper film and lower film aligning.But by
It is big in the aperture on existing jig plate, cause pin and jig plate interporal lacuna excessive, pin accurately can not drive jig plate to make
The upper film and lower film aligning.
3) its insulating layer of DBC substrate is ceramics, and ceramic corner is easy to be pressurized and damaged in exposure process.
4) DBC substrate plate thickness and thickness range distribution are big, be easy to cause when vacuumizing upper glass plates be only pressed onto jig plate and
It is not pressed onto product, product can walk when upper glass plates are mobile, and exposure figure is caused to misplace.
Utility model content
In view of the problems of the existing technology, the utility model provides a kind of jig for DBC substrate automatic exposure
Plate, to solve at least one above-mentioned technical problem.
The technical solution of the utility model is: a kind of jig plate for DBC substrate automatic exposure, including jig plate master
Body offers the putting hole for placing DBC substrate in the jig plate main body, opens up that there are two use in the jig plate main body
In the location hole of insertion pin, the internal diameter of the location hole is greater than the outer diameter of pin, which is characterized in that in the jig plate main body
Two are also provided with for assisting the registration holes of the film Yu lower film aligning, the internal diameter of the registration holes is less than the location hole
Internal diameter, and the internal diameter of the registration holes and the outer diameter of the pin match；
Each location hole is adjacent to be provided with a registration holes；
The notch for being symmetricly set on putting hole two sides is offered in the jig plate main body, and notch is led with the putting hole
It is logical.
The improvement point of this patent is: (1) being 2 apertures (registration holes) and 2 by traditional two location holes improvement
The combination of macropore (location hole), convenient for improving the upper film and lower film aligning precision.
The alignment method of the upper film and the lower film is that respectively there are two macropores with the lower film due to the upper film.Registration holes are used as and control
Have the aperture on plate, location hole is used as the macropore on jig plate, it is each on jig plate there are two macropore and two apertures.
Lower film macropore passes through pin and is placed in lower glass plate and is fixed by negative pressure, and jig plate aperture is placed on across pin
On the lower film, upper film macropore passes through pin and is placed on jig plate, and upper glass plates are pressed on the film.
The aperture of pin and jig plate is tight fit, and it is mobile to will drive jig plate when pin is mobile.Not due to the upper film
It is completely fixed, frictionally will drive the film movement when jig plate is mobile, to realize the contraposition of the film up and down, contraposition is completed
The upper film is fixed in upper glass plates by negative pressure again afterwards.
After the completion of upper and lower film aligning, jig plate is taken out, then macropore is covered on pin.Due to pin and jig plate
Big interporal lacuna is larger, when exposure operation, jig plate easily can be moved on to the fixed position of the lower film, it is ensured that when DBC base plate exposure
Figure will not misplace.
(2) jagged by being opened up at left and right sides of putting hole, convenient for the DBC substrate in putting hole is taken out.
The internal diameter of the location hole is 5mm-10mm.Convenient for the space of the movement of guarantee jig plate, with lower film aligning.
The cross section of the putting hole is rectangle, and the four corners of the putting hole offer corner notches.
After being put into jig convenient for DBC substrate, the tile corner of DBC substrate is just at fillet, DBC substrate right angle when compression
Jig plate will not be encountered.
The corner notches are the circular arc that cross section is 200 ° -280 ° in central angle；
The radius of the circular arc is greater than 4mm.
Realize the protection to DBC substrate corners.
The jig plate main body is epoxy resin board, epoxy copperplate, any one in stainless steel book plate.
The thickness of the jig plate main body is less than the thickness of DBC substrate, and the thickness of the jig plate main body and DBC substrate
Thickness difference be 0.1mm-0.2mm.
Upper glass plates will not be pressed onto jig plate when ensuring to vacuumize, and only compress DBC substrate, when upper glass plates are mobile, produce
Product will not walk.
The four corners of the jig plate main body are equipped with the auxiliary square hole for the lower film and the contraposition of jig plate main body.
Convenient for being easy to implement after the macropore on jig plate is set on pin, by auxiliary by having additional auxiliary square hole
The reference frame that square hole is mobile as jig plate is helped, guarantees the precision of lower relative position between the film and jig plate, guarantees
Exposure effect.
The length of the auxiliary square hole is greater than 15mm, and width is also greater than 15mm.
Putting hole in the jig plate main body is set there are four to eight.The positioning for being easy to implement multiple DBC substrates is fixed.
As a preferred embodiment, there are six the putting hole in the jig plate main body is set, six putting holes are in matrix form
Arrangement；
The cross section of the putting hole is the rectangle that length is greater than width；
The notch is provided with the long side of the cross section of the putting hole, and the notch of the long side of adjacent putting hole
Mutual conduction.
Convenient for guaranteeing the rational deployment of jig plate putting hole.
The utility model has the advantages that facilitate DBC substrate to be put into jig plate and take out when this patent can make DBC substrate automatic exposure, and on
Lower film exactitude position, while the compression of ceramic corner and the pattern dislocation of DBC substrate are prevented, improve product yield.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the utility model.
In figure: 1 is registration holes, and 2 be location hole, and 3 be auxiliary square hole, and 4 be putting hole, and 5 be corner notches, and 6 lack for edge
Mouthful.
Specific embodiment
The utility model is described further with reference to the accompanying drawing.
Referring to Fig. 1, a kind of jig plate for DBC substrate automatic exposure, including jig plate main body, in jig plate main body
It opens up there are two the location hole 2 for being inserted into pin, the internal diameter of location hole 2 is greater than the outer diameter of pin, and the internal diameter of location hole 2 is
5mm-10mm.Two are also provided in jig plate main body for assisting the registration holes 1 of the film Yu lower film aligning, registration holes 1
Internal diameter be less than the internal diameter of location hole 2, and the internal diameter of registration holes 1 and the outer diameter of pin match；Each location hole 2 is adjacent to be set
It is equipped with a registration holes 1；It is opened up in jig plate main body there are six the putting hole 4 for placing DBC substrate, six putting holes 4 are in
Matrix form arrangement；The cross section of putting hole 4 is the rectangle that length is greater than width；It offers to be symmetricly set in jig plate main body and put
The notch of 4 long side of hole is set, and notch and putting hole 4 are connected, and the notch mutual conduction of the long side of adjacent putting hole 4,
The notch of long side is edge notch 6.
The improvement point of this patent is: (1) being 2 apertures (registration holes 1) and 2 by traditional two location holes 2 improvement
The combination of a macropore (location hole 2), convenient for improving the upper film and lower film aligning precision.The alignment method of the upper film and the lower film
For due to the upper film, respectively there are two macropores with the lower film.Registration holes 1 are used as jig plate as the aperture on jig plate, location hole 2
On macropore, it is each on jig plate that there are two macropore and two apertures.Lower film macropore passes through pin and is placed in lower glass plate and leads to
It crosses negative pressure to fix, jig plate aperture passes through pin and is placed on the lower film, and upper film macropore passes through pin and is placed on jig plate, upper glass
Glass plate is pressed on the film.The aperture of pin and jig plate is tight fit, and it is mobile to will drive jig plate when pin is mobile.Due to
The upper film is not completely fixed, and frictionally will drive the film movement when jig plate is mobile, thus realize the contraposition of the film up and down,
The upper film is fixed in upper glass plates by negative pressure again after the completion of contraposition.After the completion of upper and lower film aligning, jig plate is taken out,
Big hole is covered on pin again.It, can be easily by jig when exposure operation since the big interporal lacuna of pin and jig plate is larger
Plate moves on to the fixed position of the lower film, it is ensured that figure will not misplace when DBC base plate exposure.By being opened in the left and right sides of putting hole 4
Equipped with notch, convenient for the DBC substrate in putting hole 4 is taken out.
The four corners of putting hole 4 offer corner notches 5.After being put into jig convenient for DBC substrate, the tile of DBC substrate
Corner is just at fillet, and DBC substrate right angle will not encounter jig plate when compression.Corner notches 5 are that cross section is in central angle
200 ° -280 ° of circular arc；The radius of circular arc is greater than 4mm.Realize the protection to DBC substrate corners.
Jig plate main body is any one in epoxy resin board, epoxy copperplate and stainless steel book plate.
The thickness of jig plate main body is less than the thickness of DBC substrate, and the thickness of jig plate main body and the thickness of DBC substrate
Difference is 0.1mm-0.2mm.Upper glass plates will not be pressed onto jig plate when ensuring to vacuumize, and only compress DBC substrate, work as upper glass plates
When mobile, product will not walk.
The four corners of jig plate main body are equipped with the auxiliary square hole 3 for the lower film and the contraposition of jig plate main body.Convenient for logical
It crosses and has additional auxiliary square hole 3, be easy to implement after the macropore on jig plate is set on pin, be used as and controlled by auxiliary square hole 3
Have the mobile reference frame of plate, guarantees the precision of lower relative position between the film and jig plate, guarantee exposure effect.Auxiliary
The length of square hole 3 is greater than 15mm, and width is also greater than 15mm.
The utility model has the advantages that facilitate DBC substrate to be put into jig plate and take out when this patent can make DBC substrate automatic exposure, and on
Lower film exactitude position, while the compression of ceramic corner and the pattern dislocation of DBC substrate are prevented, improve product yield.
Above are merely preferred embodiments of the utility model, it is noted that for the ordinary skill people of the art
For member, without departing from the principle of this utility model, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of jig plate for DBC substrate automatic exposure, including jig plate main body, offered in the jig plate main body
For placing the putting hole of DBC substrate, opened up in the jig plate main body there are two the location hole for being inserted into pin, it is described fixed
The internal diameter in position hole is greater than the outer diameter of pin, which is characterized in that two are also provided in the jig plate main body for assisting phenanthrene
The registration holes of woods and lower film aligning, the internal diameter of the registration holes is less than the internal diameter of the location hole, and the registration holes is interior
The outer diameter of diameter and the pin matches；
Each location hole is adjacent to be provided with a registration holes；
The notch for being symmetricly set on putting hole two sides is offered in the jig plate main body, and notch is connected with the putting hole.
2. a kind of jig plate for DBC substrate automatic exposure according to claim 1, it is characterised in that: described fixed
The internal diameter in position hole is 5mm-10mm.
3. a kind of jig plate for DBC substrate automatic exposure according to claim 1, it is characterised in that: described to put
The cross section for setting hole is rectangle, and the four corners of the putting hole offer corner notches.
4. a kind of jig plate for DBC substrate automatic exposure according to claim 3, it is characterised in that: the angle
Portion's notch is the circular arc that cross section is 200 ° -280 ° in central angle；
The radius of the circular arc is greater than 4mm.
5. a kind of jig plate for DBC substrate automatic exposure according to claim 1, it is characterised in that: described to control
Tool plate main body is epoxy resin board, epoxy copperplate, any one in stainless steel book plate.
6. a kind of jig plate for DBC substrate automatic exposure according to claim 1, it is characterised in that: described to control
The thickness for having plate main body is less than the thickness of DBC substrate, and the difference of the thickness and the thickness of DBC substrate of the jig plate main body is
0.1mm-0.2mm。
7. a kind of jig plate for DBC substrate automatic exposure according to claim 1, it is characterised in that: described to control
The four corners for having plate main body are equipped with the auxiliary square hole aligned for the lower film and jig plate main body.
8. a kind of jig plate for DBC substrate automatic exposure according to claim 7, it is characterised in that: described auxiliary
The length of square hole is helped to be greater than 15mm, width is also greater than 15mm.
9. according to claim 1 to a kind of jig plate for DBC substrate automatic exposure described in any one in 8,
Be characterized in that: the putting hole in the jig plate main body is set there are four to eight.
10. a kind of jig plate for DBC substrate automatic exposure according to claim 9, it is characterised in that: described to control
There are six putting hole in tool plate main body is set, six putting holes are arranged in matrix form；
The cross section of the putting hole is the rectangle that length is greater than width；
The notch is provided with the long side of the cross section of the putting hole, and the notch of the long side of adjacent putting hole is mutual
Conducting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821433016.1U CN209299589U (en) | 2018-09-03 | 2018-09-03 | A kind of jig plate for DBC substrate automatic exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821433016.1U CN209299589U (en) | 2018-09-03 | 2018-09-03 | A kind of jig plate for DBC substrate automatic exposure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209299589U true CN209299589U (en) | 2019-08-23 |
Family
ID=67652257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821433016.1U Active CN209299589U (en) | 2018-09-03 | 2018-09-03 | A kind of jig plate for DBC substrate automatic exposure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209299589U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114310498A (en) * | 2022-01-13 | 2022-04-12 | 江苏富乐华半导体科技股份有限公司 | Grinding method suitable for DPC product film-pasting pretreatment process |
| CN115500011B (en) * | 2022-11-03 | 2023-02-03 | 四川富乐华半导体科技有限公司 | Positioning method for DPC ceramic substrate processing |
-
2018
- 2018-09-03 CN CN201821433016.1U patent/CN209299589U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114310498A (en) * | 2022-01-13 | 2022-04-12 | 江苏富乐华半导体科技股份有限公司 | Grinding method suitable for DPC product film-pasting pretreatment process |
| CN114310498B (en) * | 2022-01-13 | 2023-01-24 | 江苏富乐华半导体科技股份有限公司 | Grinding method suitable for DPC product film-pasting pretreatment process |
| CN115500011B (en) * | 2022-11-03 | 2023-02-03 | 四川富乐华半导体科技有限公司 | Positioning method for DPC ceramic substrate processing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209299589U (en) | A kind of jig plate for DBC substrate automatic exposure | |
| CN109291000A (en) | A kind of reflexed FPC backlight module assembled fixture | |
| CN206084653U (en) | Adjustable glass chamfer workstation | |
| CN104084952A (en) | Product transferring mechanical arm fixture of thermoplastic moulding machine and product transferring method | |
| CN209453194U (en) | A kind of sheet aviation fixture | |
| CN208227469U (en) | A kind of printing patch jig | |
| KR20200005185A (en) | Packing film cutting apparatus for mlcc panel | |
| CN209182654U (en) | Chromium plate patch jig | |
| CN104526166B (en) | A kind of tool, the feed mechanism using this tool and radium-shine equipment | |
| CN209078843U (en) | A kind of jig for pcb board cutting processing | |
| CN207841245U (en) | A kind of clamping adsorbent equipment | |
| CN203580316U (en) | Printing machine capable of achieving automatic typesetting | |
| CN105792529A (en) | Loose-leaf type circuit board Pin nail counterpoint technology | |
| CN209748904U (en) | vacuum suction press fitting jig | |
| CN114274522B (en) | Hot-press forming feeding equipment for foot pads | |
| CN207606719U (en) | A kind of plate grip | |
| CN205765689U (en) | A kind of pot core mould processing precise vice of band correcting block | |
| CN207189527U (en) | A kind of middle plate assembling fixture | |
| CN206305291U (en) | A kind of panel hole position punch-forming mold | |
| CN204482152U (en) | Contraposition wiring board | |
| CN205997187U (en) | A kind of clamp for cutting silicon wafer | |
| CN213278105U (en) | Manual brush glue frock suitable for back of body contact solar cell | |
| CN106990572B (en) | Double-hot-pressing structure jig | |
| CN204222338U (en) | A kind of keyboard magnet is inhaled sheet and is pasted gum smelting tool | |
| CN217194964U (en) | Base plate fixing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201116 Address after: Building 3, 181 Shanlian Road, Baoshan District, Shanghai, 200444 Patentee after: Shanghai fulewa Semiconductor Technology Co., Ltd Address before: 200444 Baoshan District, Baoshan City Industrial Park Road, No., Hill Road, No. 181 Patentee before: SHANGHAI SHENHE THERMO-MAGNETICS ELECTRONICS Co.,Ltd. Patentee before: JIANGSU FULEDE SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |