CN209282195U - A kind of encapsulating structure of silicon carbide device - Google Patents

A kind of encapsulating structure of silicon carbide device Download PDF

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Publication number
CN209282195U
CN209282195U CN201920254717.7U CN201920254717U CN209282195U CN 209282195 U CN209282195 U CN 209282195U CN 201920254717 U CN201920254717 U CN 201920254717U CN 209282195 U CN209282195 U CN 209282195U
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CN
China
Prior art keywords
silicon carbide
carbide device
copper sheet
encapsulating structure
layer material
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Active
Application number
CN201920254717.7U
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Chinese (zh)
Inventor
朱继红
蔺增金
张志文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING YANDONG MICROELECTRONIC Co Ltd
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BEIJING YANDONG MICROELECTRONIC Co Ltd
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Priority to CN201920254717.7U priority Critical patent/CN209282195U/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Abstract

The utility model discloses a kind of encapsulating structure of silicon carbide device, and including being disposed with the mold of the cooling fin of silicon carbide device, cladding silicon carbide device and cooling fin thereon and including the lead frame of pin, silicon carbide device is connect by copper sheet with lead frame.

Description

A kind of encapsulating structure of silicon carbide device
Technical field
The utility model relates to semiconductor device packaging technique fields.More particularly, to a kind of envelope of silicon carbide device Assembling structure.
Background technique
Carbofrax material has that forbidden bandwidth is wide, thermal conductivity is high, saturation drift velocity is big and critical breakdown electric field is high etc. solely Special advantage, because of excellent physically and electrically characteristic, carbofrax material becomes production high power, high-frequency, high temperature resistant, anti-radiation The ideal semiconductor material of device.It is the mostly important development of power electronic technique with power electronic devices prepared by SiC material Direction, it is with important application prospects in military and civil field.
However, same, because of it, physically and electrically characteristic, silicon carbide power device are generally operational in high current high power item Under part, a limitation realizes that the principal element of silicon carbide and this potential of other semiconductor material with wide forbidden band is that electric current can be improved The occasion of demand high current and high-pressure work in the application of the encapsulating structure of transport capability, especially those energy conversions.
Traditional discrete power device packaging technique usually uses lead or Pb-free solder alloy that one end face of device is pasted It closes on heat sink substrate, end face in addition is bonded together with aluminum steel or gold thread.Because of the advantage of simple process and low cost.But Since used bond wire line (aluminum steel or gold thread) is very thin (typical diameter is 2-5mils), referring to Fig.1 shown in it is existing The encapsulating structure of technology, this encapsulation technology are limited in device under rather low electric current to work, in low frequency power converter, and Perhaps, the current handling capability of system can be improved but in high-energy density and high performance power in the device for joining these packing forms In electronic system, due to inevitably big spurious impedance, this method is often infeasible.
Accordingly, it is desirable to provide a kind of encapsulating structure of silicon carbide device, can effectively promote electric current by the encapsulating structure Transmittability improves product whole efficiency.
Utility model content
The purpose of this utility model is to provide a kind of encapsulating structures of silicon carbide device.
In order to achieve the above objectives, the utility model adopts the following technical solutions:
A kind of encapsulating structure of silicon carbide device, cooling fin, cladding silicon carbide including being disposed with silicon carbide device thereon The mold of device and cooling fin and lead frame including pin, silicon carbide device are connect by copper sheet with lead frame.
Preferably, silicon carbide device is bonded by copper sheet and is connect with nead frame.
Preferably, copper sheet is formed by corrosion or Sheet Metal Forming Technology.
Preferably, the shape of copper sheet is according to the window size of silicon carbide device, the thickness of silicon carbide device, silicon carbide device The size of the welding section of the thickness and pin of welding layer material between copper sheet is set.
Preferably, the width and thickness of copper sheet is set according to the load current value of silicon carbide device.
Preferably, the layer material between the welding layer material and copper sheet and silicon carbide device between cooling fin and silicon carbide device Expect identical.
Preferably, the layer material between the welding layer material and copper sheet and silicon carbide device between cooling fin and silicon carbide device Material is tin-lead solder.
Preferably, welding layer material Sn10Pb88Ag2Or Sn5Pb92.5Ag2.5
Preferably, which is characterized in that mold is prepared by the thermoplastic polymeric material of 200 DEG C of heatproof or more high temperature.
The beneficial effects of the utility model are as follows:
Technical solution described in the utility model provides a kind of encapsulating structure suitable for silicon carbide device, is tied by the encapsulation Structure can effectively promote current carrying capacities, improve product whole efficiency.
Detailed description of the invention
Specific embodiment of the present utility model is described in further detail with reference to the accompanying drawing;
Fig. 1 shows the silicon carbide device encapsulating structure of the prior art;
Fig. 2 shows silicon carbide device encapsulating structures a kind of in the utility model embodiment;And
Fig. 3 shows the encapsulation process of the silicon carbide device encapsulating structure according to the application.
Specific embodiment
In order to illustrate more clearly of the utility model, the utility model is done into one below with reference to preferred embodiments and drawings The explanation of step.Similar component is indicated in attached drawing with identical appended drawing reference.It will be appreciated by those skilled in the art that below Specifically described content is illustrative and be not restrictive, and should not be limited the protection scope of the present invention.
It should be understood that including, including in application documents, with being open type, expression includes but is not limited to.In specification Described ordinal number first, second etc. is intended merely to the clear of description, rather than suitable for restriction element, component or component etc. Sequence, that is, second element, portion can also be expressed as by being described as first element, component and component and second element, component or component Part and component and first element, component or component.
As shown in Fig. 2, showing the silicon carbide device encapsulating structure 20 according to the embodiment of the present application in figure.As shown, In the present embodiment, silicon carbide device encapsulating structure 20 includes cooling fin 203, lead frame 205 and mold including pin 207, wherein silicon carbide device to be packaged is arranged on cooling fin 203.In the present embodiment, by copper sheet 209 by silicon carbide Device is connect with lead frame 205.Preferably, it connect silicon carbide device with lead frame 205 by copper sheet bonding.
In embodiments herein, copper sheet 209 can be the copper sheet for passing through corrosion or Sheet Metal Forming Technology formation.Copper sheet is not It is limited to specific shape, depends on the specific design parameter of silicon carbide device, specifically, the shape of copper sheet depends on silicon carbide The welding of the thickness and pin of welding layer material between the window size of device, thickness of detector, silicon carbide device and copper sheet 209 The size in area.
In addition, the width of copper sheet 209 and thickness are also not limited to specific specific size, those skilled in the art should be managed Solution, can be required to the size of current born according to designed silicon carbide device to design the width and thickness of copper sheet 209, Increase the width and thickness of copper sheet 209, correspondingly when required carrying more high current to reduce conducting resistance, reduce thermal resistance.
Preferably, in the present embodiment, silicon carbide device is welded on cooling fin 203 by welding layer material 201.Heat dissipation The welding layer material between welding layer material and copper sheet and silicon carbide device between piece 203 and silicon carbide device is identical, can be with For tin-lead material solder, the firmness welded with increase.
In embodiments herein, by copper sheet 209 rather than wire connects silicon carbide device and lead frame 205 It connects, interconnection conducting resistance can be reduced, under identical voltage and current output condition, reduce the conduction loss of device, in addition, because It is much larger than wire or other banded structures for the area of copper sheet 209, so that the encapsulating structure 20 of the application is dissipated than traditional handicraft Heat area is bigger, can effectively conduct the heat that device generates by copper sheet, to reduce the heat of silicon carbide device Resistance, advantageously reduces device temperature rise, promotes the service life of device.In addition, by copper sheet rather than other shapes can enable increase Silicon carbide is easier to be formed, and increases the stability of device.
The structure of the silicon carbide encapsulation of the application is further described below with reference to the encapsulation flow chart shown in Fig. 3 description.
In this embodiment, silicon carbide device with a thickness of 375 μm or so, in step 301, the point on cooling fin 203 Welding layer material, and silicon carbide device is mounted on cooling fin 203 by welding layer material in step 303.In step 305, Copper sheet 209 is mounted on silicon carbide device copper sheet.Preferably, the welding layer material between cooling fin 203 and silicon carbide device with And the welding layer material between copper sheet and silicon carbide device is identical, all can be tin-lead material solder, with increase welding firmness. It is identical as chip welding layer material, it can be tin-lead solder, optional material has Sn10Pb88Ag2Or Sn5Pb92.5Ag2.5
Next in step 307, the mode of the electrode reflow soldering of silicon carbide device is welded in by copper sheet 209 and is drawn On wire frame 205, bonding (step 309) is completed, solder flux is cleaned after welding.
In step 311, capsulation material heating is turned into liquid, the thermoplasticity which is 200 DEG C of heatproof or more The materials such as polymeric material, such as polyether-ether-ketone, polyphenylene sulfide, polybutylene terephthalate.Specifically, liquid is made by pressurization Capsulation material injects in mold, by capsulation material curing molding in a mold, forms mold 207.
Obviously, the above embodiments of the present invention is merely examples for clearly illustrating the present invention, and It is not limitations of the embodiments of the present invention, for those of ordinary skill in the art, in above description On the basis of can also make other variations or changes in different ways, all embodiments can not be exhaustive here, It is all to belong to obvious changes or variations that the technical solution of the utility model is extended out still in the utility model The column of protection scope.

Claims (9)

1. a kind of encapsulating structure of silicon carbide device, cooling fin, the cladding carbonization including being disposed with silicon carbide device thereon The mold of silicon device and the cooling fin and lead frame including pin, it is characterised in that:
The silicon carbide device is connect by copper sheet with the lead frame.
2. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the silicon carbide device passes through copper sheet Bonding is connect with nead frame.
3. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the copper sheet passes through corrosion or punching Pressure technique is formed.
4. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the shape of the copper sheet is according to Welding layer material between the window size of silicon carbide device, the thickness of silicon carbide device, the silicon carbide device and the copper sheet Thickness and the pin welding section size setting.
5. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the width and thickness root of the copper sheet It is set according to the load current value of the silicon carbide device.
6. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the cooling fin and the silicon carbide Welding layer material between device is identical as the welding layer material between the copper sheet and the silicon carbide device.
7. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the cooling fin and the silicon carbide The welding layer material between welding layer material and the copper sheet and the silicon carbide device between device is tin-lead solder.
8. the encapsulating structure of silicon carbide device as claimed in claim 6, which is characterized in that the welding layer material is Sn10Pb88Ag2Or Sn5Pb92.5Ag2.5
9. the encapsulating structure of silicon carbide device as described in claim 1, which is characterized in that the mold by 200 DEG C of heatproof with It is prepared by the thermoplastic polymeric material of upper high temperature.
CN201920254717.7U 2019-02-28 2019-02-28 A kind of encapsulating structure of silicon carbide device Active CN209282195U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920254717.7U CN209282195U (en) 2019-02-28 2019-02-28 A kind of encapsulating structure of silicon carbide device

Applications Claiming Priority (1)

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Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109904135A (en) * 2019-02-28 2019-06-18 北京燕东微电子有限公司 A kind of encapsulating structure of silicon carbide device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109904135A (en) * 2019-02-28 2019-06-18 北京燕东微电子有限公司 A kind of encapsulating structure of silicon carbide device

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