CN209273123U - A kind of power electronic devices chip research and development wafer chamfer auxiliary device - Google Patents

Abstract

The utility model relates to the technical fields of wafer processing auxiliary equipment can be such that wafer chamfering efficiency improves more particularly to a kind of power electronic devices chip research and development wafer chamfer auxiliary device by simplifying wafer chamfering process；And the flatness of wafer two sides chamfering can be improved；Including station, motor and wafer；It further include two groups of support frames, left support ring, right support ring, left-hand thread bar, right-hand thread bar, connection ring, two groups of gag lever posts, two groups of sliding blocks, limit plate, left adjusting ring, right adjusting ring, left driven rod, right belt lever, left connecting rod, right connecting rod and two groups of sucker pawls, the left region inside of limit plate and the inside of right areas are respectively arranged with two groups of sliding grooves；It further include that two groups of stabilizing brackets, placement plate, adjusting rod, six rib bars, expansion ring, fixed link, hanging rod, cross bar, adjuster, limited block, control-rod, control ring, flexible threaded rod, mounting plate and emery cloth, adjuster are internally provided with sliding cavity.

Description

A kind of power electronic devices chip research and development wafer chamfer auxiliary device

Technical field

The utility model relates to the technical fields of wafer processing auxiliary equipment, more particularly to a kind of power electronics device Part chip research and development wafer chamfer auxiliary device.

Background technique

It is well known that wafer is to be got by silicon single crystal rod by slice, when wafer cuts down it from silicon single crystal rod After cannot be fed directly to next process because at this moment there are many burrs at the edge of wafer, thus we need to wafer Wafer can just be sent to next process after the burr processing at edge, wherein the process of above-mentioned removal crystal round fringes burr claims Be chamfering, power electronic devices chip research and development here are a kind of when wafer is cut from silicon single crystal rod with wafer chamfer auxiliary device After cutting off, the device of chamfering is carried out for the edge to wafer, has obtained widely making in the field of wafer processing With；Existing power electronic devices chip research and development wafer chamfer auxiliary device includes station, motor, grinding wheel, fixed frame And wafer, the bottom end of the fixed frame and the top middle portion region of station connect, the wafer and fixed frame fixing card Dress, the central region of the grinding wheel and the fixed clamping of the output end of motor, the bottom end of the station is provided with four groups of supporting legs； Existing power electronic devices chip research and development wafer chamfer auxiliary device in use, buy on the market first motor and Then grinding wheel is mounted on the output end of motor by grinding wheel according to the operation instructions of motor and grinding wheel, then will need to add The wafer of work is fixed on the fixed frame on station, the operation instruction of institute's band when then operator buys according to motor Book starts motor, and then operator polishes to wafer edge by Motor Control grinding wheel to remove wafer edge Burr；Existing power electronic devices chip research and development are found in wafer chamfer auxiliary device use, first when fixed frame is fixed Firmly when wafer, at this moment operator drives grinding wheel that can only carry out chamfering to the one side edge of wafer by motor, Then it needs by after overturning wafer and retightening and can just process another side, and needs repeated disassembled and assembled wafer Piece compares wafer two sides chamfer dimesion, thus the efficiency of wafer chamfering is lower, while existing fixed frame is to wafer Size it is more demanding, so as to cause using limitation higher；And operator drives grinding wheel to wafer by motor Chamfering keeps the flatness of wafer two sides chamfering poor, at the same cause the consistency of wafer both sides of the edge chamfer dimesion compared with Difference, it is poor so as to cause practicability.

Utility model content

In order to solve the above technical problems, the utility model, which provides one kind, can make wafer by simplifying wafer chamfering process Piece chamfering efficiency improves, while enhancing equipment and folding up ability to different size wafer pieces, to reduce using limitation；And The flatness of wafer two sides chamfering can be improved, while enhancing the consistency of wafer both sides of the edge chamfer dimesion, to increase The power electronic devices chip research and development wafer chamfer auxiliary device of strong practicability.

A kind of power electronic devices chip research and development the wafer chamfer auxiliary device, including station, electricity of the utility model Motivation and wafer, the bottom end of the station are provided with four groups of supporting legs；It further include two groups of support frames, left support ring, right support Ring, left-hand thread bar, right-hand thread bar, connection ring, two groups of gag lever posts, two groups of sliding blocks, limit plate, left adjusting ring, right adjusting ring, left band Lever, right belt lever, left connecting rod, right connecting rod and two groups of sucker pawls, the bottom end of two groups of support frames respectively with station The left side on top connected with middle part, the bottom end of the left support ring and right support ring connects with the top of two groups of support frames respectively It connects, the left end of the left-hand thread bar passes through screwed ring from the right side of left support ring and extend out to the right end of screwed ring, the left side The right end of threaded rod and the fixed suit of the left end central region of connection ring, right end and right support the ring rotation of the right-hand thread bar block Dress, the fixed suit in the central area of the right end of the left end and connection ring of the right-hand thread bar, the outer circumferential sides of the left-hand thread bar The excircle side wall of wall and right-hand thread bar is respectively arranged with two groups of opposite screw threads of lines, the left adjusting ring and right adjusting ring point It is not filled with left-hand thread bar and right-hand thread bar spiral shell, the bottom end of the limit plate and the top left hand of station connect, the limit plate Left region inside and the inside of right areas be respectively arranged with two groups of sliding grooves, two groups of sliding blocks respectively with two groups of slidings Slot sliding clamps, and the top of two groups of sliding grooves is respectively arranged with two groups of insertion holes, the bottom end difference of two groups of gag lever posts Two groups of insertion holes are passed through from the upside of two groups of sliding grooves and are respectively protruding into the inside of two groups of sliding grooves, two groups of gag lever posts Bottom end connect respectively with the top middle portion region of two groups of sliding blocks, the top of two groups of gag lever posts respectively with it is left adjust ring bottom End and the right bottom end for adjusting ring connects, and the bottom end of the left driven rod and right belt lever adjusts ring and right adjusting ring with left respectively It is connect on the upside of top connection, the left end of the left connecting rod and the right end of left driven rod, the upper area of the right belt lever is set It is equipped with ball bearing, the right end of the right connecting rod passes through ball bearing from the left side of right belt lever and extend out to right belt lever Right side, the inner circumferential side wall of the excircle side wall of the right connecting rod and ball bearing is fixed to be clamped, the left connecting rod and The inner end of right connecting rod is connect with the outer end central region of two groups of sucker pawls respectively, the inner end of two groups of sucker pawls respectively with crystalline substance The left end of disk and right end central area are close to；Further include two groups of stabilizing brackets, placement plate, adjusting rod, six rib bars, expansion ring, consolidate Fixed pole, hanging rod, cross bar, adjuster, limited block, control-rod, control ring, flexible threaded rod, mounting plate and emery cloth, described two groups steady Gu the bottom end of frame is connect with the top of station right side, the left and right side of the bottom end of the placement plate is firm with two groups respectively The top of frame connects, and the bottom end of the motor and the top of placement plate connect, the output end of the motor and adjusting rod Right end connects with one heart, and the adjusting rod is internally provided with hexagon telescopic cavity, and the left end connection of the hexagon telescopic cavity is set It is equipped with telescopic mouth, the left side of the right end self-regulated pole of the six ribs bar passes through telescopic mouth and stretches in hexagon telescopic cavity Right areas and hexagon the telescopic cavity sliding in portion, the six ribs bar clamp, and the six ribs bar and expansion ring sliding clamp, described The bottom end of the excircle side wall of expansion ring and the top of fixed link connect, and the bottom end of the fixed link and the top of right support ring connect Connect, the left end of the six ribs bar with the right end of right connecting rod is concentric connect, the bottom end of the hanging rod and the top of left support ring connect It connects, is connected on the right side of the top of the adjuster and the bottom end of cross bar, the adjuster is internally provided with sliding cavity, the sliding The inner end of chamber is provided with and respectively communicated with sliding mouth, and the limited block and sliding cavity sliding clamp, the left end self-regulated of the control-rod The inside of section device passes through sliding mouth and stretches to inside sliding cavity, the left end of the control-rod and the right end middle region of limited block Domain connection, the control-rod are internally provided with regulation chamber, and the right end of the regulation chamber is provided with and communicated with control mouth, described flexible The left end of threaded rod passes through control mouth from the right side of control-rod and stretches to the intracavitary portion of regulation, the left end of the flexible threaded rod It is provided with spacing head, the right end of the control-rod is provided with annular turn trough, and the left end of the control ring is provided with ring card, the ring Card is clamped with annular slot rotation, and the inner circumferential side wall of the control ring is provided with interior control screw thread, the control ring and flexible The left end central region of threaded rod spiral shell dress, the right end of the flexible threaded rod and mounting plate connects, the right end of the mounting plate with The left end of emery cloth connects.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes driving screw thread Bar, rotary head, lifting ring, elevating lever and limitation pallet, the left driven rod are internally provided with working chamber, the working chamber Top is provided with and communicated with rotating hole, and the right end of the working chamber is provided with and communicated with lift span, and the bottom end for driving threaded rod is certainly The upside of left driven rod passes through rotating hole and stretches to inside working chamber, the bottom of the bottom end for driving threaded rod and working chamber End, which rotates, to be clamped, and the bottom end of the rotary head is connect with the top of threaded rod is driven, and the lifting ring is filled with threaded rod spiral shell is driven, The left end of the elevating lever passes through lift span from the right side of left driven rod and stretches to inside working chamber, a left side for the elevating lever End is connect with the excircle side wall right end of lifting ring, and the left end central region of the limitation pallet and the right end of elevating lever connect, The top setting of the limitation pallet is fluted, and the circumferential side wall front end of the left driven rod is provided with scale.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes turning handle Hand, the right end of the swing handle and the circumferential side wall left end of rotary head connect.

The utility model a kind of power electronic devices chip research and development use wafer chamfer auxiliary device, further include carry ring and Limited screw, the actuating ring and hanging rod sliding are set with, and the left end for carrying ring is provided through limitation threaded hole, the limit The left side of the right end self-carry rotating ring of position screw, which passes through limitation threaded hole and stretches to, to be carried inside ring, the right side of the limited screw End is close to the circumferential side wall of hanging rod, and the left end of the cross bar is connect with the right end central region for the excircle side wall for carrying ring.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes handle, institute The central region for stating the bottom end of handle and the top of cross bar connects.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes spring pad, The spring pad and limited screw movable set, the right end of the spring pad are close to the left end for the excircle side wall for carrying ring, It is close to the screw cap end right side wall of limited screw the left end of the spring pad.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes rocking bar, institute The right end for stating the upper right quarter region of rocking bar is connect with the left end of left-hand thread bar.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes protection handle The handheld terminal of set, the protection grip and rocking bar, which rotates, to be set with.

It is first compared with prior art the utility model has the following beneficial effects: when wafer is placed between two groups of sucker pawls Left-hand thread bar is first rotated, at this moment left-hand thread bar drives right-hand thread bar to synchronize fellow villager together and turns in two groups of support rings by connection ring It is dynamic, while the opposite external screw thread of lines of two groups of threaded rods is engaged rotation with the internal screw thread of two groups of adjusting rings respectively, at this moment two groups It is synchronous with the occlusion rotation of two groups of lines opposite external screw thread mobile to close direction by internal screw thread respectively to adjust ring, simultaneously Two groups of adjusting rods pass through two groups of gag lever posts respectively and two groups of sliding blocks are driven to slide in limit plate, and at the same time two groups of adjusting rod difference Drive two groups of driven rods synchronizing moving inwardly, then two groups of driven rods pass through respectively two groups of connecting rods drive two groups of sucker pawls to At this moment close direction synchronizing moving stops until the central area of wafer is firmly grasped in the inner end central area of two groups of sucker pawls Rotation stop moves left-hand thread bar, chamfering can be carried out simultaneously to the two sides of wafer simultaneously in this way, thus by simplifying wafer Chamfering process improves wafer chamfering efficiency, while enhancing equipment to the ability that folds up of different size wafer pieces, reduces Use limitation；And after having folded up wafer, at this moment rotating control ring makes the internal screw thread and flexible threaded rod of control ring External screw thread occlusion, change the length that telescopic rod stretches out the regulation chamber of control-rod by the occlusion of internal and external threads, notice is flexible Bar will pass through mounting plate and emery cloth pushed, close to up to being adjusted to suitable chamfer dimesion, at this moment to stop operating with wafer edge Control ring, the operation instructions of institute's band start motor when then buying according to motor, and at this moment motor is driven by output shaft Adjusting rod rotation, while adjusting rod drives six rib bars to rotate under the limit of expansion ring, six rib bars drive right company again at the same time Extension bar is around the ball bearing rotational of right belt lever, and at this moment the sucker pawl on right side just drives wafer to rotate, while left side Sucker pawl by left connecting rod left driven rod upside rotate, emery cloth is just realized to wafer by the rotation of wafer The polishing at edge, and wafer and emery cloth are relatively motionless, to improve the flatness of wafer two sides chamfering, enhance simultaneously The consistency of wafer both sides of the edge chamfer dimesions, enhances practicability.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the partial enlargement structural representation of the A of the utility model；

Fig. 3 is the wafer of the utility model and the attachment structure schematic diagram of limitation pallet；

Fig. 4 is the partial enlargement structural representation of the B of the utility model；

It is attached marked in the figure: 1, station；2, motor；3, wafer；4, two groups of support frames；5, left support ring；6, left spiral shell Rasp bar；7, connection ring；8, right-hand thread bar；9, two groups of gag lever posts；10, two groups of sliding blocks；11, limit plate；12, left adjusting ring；13, right Adjust ring；14, right belt lever；15, left connecting rod；16, right connecting rod；17, two groups of sucker pawls；18, two groups of stabilizing brackets；19, it puts Set plate；20, adjusting rod；21, six rib bar；22, expansion ring；23, fixed link；24, hanging rod；25, cross bar；26, adjuster；27, it limits Position block；28, control-rod；29, control ring；30, stretch threaded rod；31, mounting plate；32, emery cloth；33, threaded rod is driven；34, Rotary head；35, lifting ring；36, elevating lever；37, pallet is limited；38, swing handle；39, ring is carried；40, limited screw；41, Handle；42, spring pad；43, rocking bar；44, grip is protected；45, left driven rod.

Specific embodiment

With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.

As shown in Figures 1 to 4, a kind of power electronic devices chip research and development of the utility model assist filling with wafer chamfer It sets, including station 1, motor 2 and wafer 3, the bottom end of station 1 is provided with four groups of supporting legs；It further include two groups of support frames 4, left support ring 5, right support ring, left-hand thread bar 6, right-hand thread bar 8,7, two groups of connection ring, 9, two groups of gag lever post sliding block 10, limit Plate 11, left adjusting ring 12, right adjusting ring 13, left driven rod 45, right belt lever 14, left connecting rod 15, right connecting rod 16 and two groups Sucker pawl 17, the bottom end of two groups of support frames 4 are connect with the left side on the top of station 1 and middle part respectively, left support ring 5 and right branch The bottom end of pushing out ring is connect with the top of two groups of support frames 4 respectively, and the left end of left-hand thread bar 6 passes through spiral shell from the right side of left support ring 5 Line ring and the right end for extending out to screwed ring, the right end of left-hand thread bar 6 and the fixed suit of the left end central region of connection ring 7, it is right Right end and right support the ring rotation of threaded rod 8 clamp, and the left end of right-hand thread bar 8 and the central area of the right end of connection ring 7 are fixed Suit, the excircle side wall of left-hand thread bar 6 and the excircle side wall of right-hand thread bar 8 are respectively arranged with two groups of opposite spiral shells of lines Line, left adjusting ring 12 and right adjusting ring 13 are filled with left-hand thread bar 6 and 8 spiral shell of right-hand thread bar respectively, the bottom end of limit plate 11 and operation The top left hand of platform 1 connects, and inside the left region of the limit plate 11 and inside of right areas is respectively arranged with two groups of sliding grooves, Two groups of sliding blocks 10 are clamped with the sliding of two groups of sliding grooves respectively, and the top of two groups of sliding grooves is respectively arranged with two groups of insertion holes, and two groups The bottom end of gag lever post 9 passes through two groups of insertion holes from the upside of two groups of sliding grooves respectively and is respectively protruding into two groups of sliding grooves Portion, the bottom end of two groups of gag lever posts 9 are connect with the top middle portion region of two groups of sliding blocks 10 respectively, the top difference of two groups of gag lever posts 9 With it is left adjust ring 12 bottom end and it is right adjust ring 13 bottom end connect, the bottom end of left driven rod 45 and right belt lever 14 respectively with a left side It adjusts ring 12 to connect with the right top for adjusting ring 13, be connect on the upside of the left end of left connecting rod 15 and the right end of left driven rod 45, it is right The upper area of driven rod 14 is provided with ball bearing, and the right end of right connecting rod 16 passes through ball axis from the left side of right belt lever 14 The right side of right belt lever 14 is held and extend out to, the excircle side wall of right connecting rod 16 and the inner circumferential side wall of ball bearing are fixed It clamps, the inner end of left connecting rod 15 and right connecting rod 16 is connect with the outer end central region of two groups of sucker pawls 17 respectively, two groups of suctions It is close to respectively with the left end of wafer 3 and right end central area the inner end of disk pawl 17；It further include two groups of stabilizing brackets 18, placement plates 19, adjusting rod 20, six rib bars 21, expansion ring 22, fixed link 23, hanging rod 24, cross bar 25, adjuster 26, limited block 27, control-rod 28, control ring 29, flexible threaded rod 30, mounting plate 31 and emery cloth 32, top of the bottom end of two groups of stabilizing brackets 18 with station 1 Right side connection, the left and right side of the bottom end of placement plate 19 are connect with the top of two groups of stabilizing brackets 18 respectively, the bottom of motor 2 End is connect with the top of placement plate 19, the output end of motor 2 with the right end of adjusting rod 20 is concentric connect, the inside of adjusting rod 20 It is provided with hexagon telescopic cavity, the left end of hexagon telescopic cavity is provided with and communicated with telescopic mouth, the right end self-regulated pole of six rib bars 21 20 left side passes through telescopic mouth and stretches to inside hexagon telescopic cavity, the right areas and hexagon telescopic cavity of six rib bars 21 Sliding clamps, and six rib bars 21 are clamped with the sliding of expansion ring 22, the bottom end of the excircle side wall of expansion ring 22 and the top of fixed link 23 End connection, the bottom end of fixed link 23 are connect with the top of right support ring, and the left end of six rib bars 21 and the right end of right connecting rod 16 are same Heart connection, the bottom end of hanging rod 24 are connect with the top of left support ring 5, are connected on the right side of the top of adjuster 26 and the bottom end of cross bar 25 It connects, adjuster 26 is internally provided with sliding cavity, and the inner end of sliding cavity is provided with and respectively communicated with sliding mouth, limited block 27 and sliding Chamber sliding clamps, and the inside of the left end self tuning regulator 26 of control-rod 28 passes through sliding mouth and stretches to inside sliding cavity, controls The left end of bar 28 is connect with the right end central region of limited block 27, and control-rod 28 is internally provided with regulation chamber, regulates and controls the right side of chamber End is provided with and communicated with control mouth, and the left end of flexible threaded rod 30 passes through control mouth from the right side of control-rod 28 and stretches to regulation The left end in intracavitary portion, flexible threaded rod 30 is provided with spacing head, and the right end of control-rod 28 is provided with annular turn trough, control ring 29 Left end is provided with ring card, and ring card and annular slot rotation clamp, and the inner circumferential side wall of control ring 29 is provided with interior control screw thread, controls Ring 29 processed is filled with flexible 30 spiral shell of threaded rod, and the right end of flexible threaded rod 30 is connect with the left end central region of mounting plate 31, is installed The right end of plate 31 is connect with the left end of emery cloth 32；When wafer is placed between two groups of sucker pawls, left-hand thread bar is rotated first, this When left-hand thread bar drive right-hand thread bar to synchronize fellow villager together by connection ring to rotate in two groups of support rings, while two groups of threaded rods The opposite external screw thread of lines be engaged rotation with the internal screw thread of two groups of adjusting rings respectively, at this moment two groups of adjusting rings pass through interior spiral shell respectively Line and the opposite external screw thread of two groups of lines be engaged rotation and it is synchronous moved to close direction, while two groups of adjusting rods pass through respectively Two groups of gag lever posts drive two groups of sliding blocks to slide in limit plate, and at the same time two groups of adjusting rods drive two groups of driven rods inside respectively Side synchronizing moving, then two groups of driven rods pass through two groups of connecting rods two groups of sucker pawls of drive respectively and move to close direction is synchronous Dynamic, until the central area of wafer is firmly grasped in the inner end central area of two groups of sucker pawls, at this moment stop operating left-hand thread bar, this Sample can carry out chamfering simultaneously to the two sides of wafer simultaneously, to make wafer fall by simplifying wafer chamfering process Angle efficiency improves, while enhancing equipment and folding up ability to different size wafer pieces, reduces using limitation；And it presss from both sides After putting wafer well, at this moment rotating control ring makes the external screw thread occlusion of internal screw thread and flexible threaded rod of control ring, by interior Externally threaded to be engaged to change the length that telescopic rod stretches out the regulation chamber of control-rod, notice telescopic rod will pass through mounting plate and push sand Cloth is with wafer edge close to until be adjusted to suitable chamfer dimesion, and at this moment stop operating control ring, then according to electronic The operation instructions that machine buys when institute band start motor, and at this moment motor drives adjusting rod rotation by output shaft, adjust simultaneously Bar drives six rib bars to rotate under the limit of expansion ring, and six rib bars drive right connecting rod around the rolling of right belt lever again at the same time The rotation of pearl bearing, at this moment the sucker pawl on right side just drives wafer to rotate, while the sucker pawl in left side passes through left connecting rod It is rotated in the upside of left driven rod, polishing of the emery cloth to wafer edge, and wafer is just realized by the rotation of wafer Piece and emery cloth are relatively motionless, to improve the flatness of wafer two sides chamfering, while enhancing wafer both sides of the edge and falling The consistency of angle square cun, enhances practicability.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes driving screw thread Bar 33, rotary head 34, lifting ring 35, elevating lever 36 and limitation pallet 37, left driven rod 45 are internally provided with working chamber, work The top of chamber is provided with and communicated with rotating hole, and the right end of working chamber is provided with and communicated with lift span, drives the bottom end of threaded rod 33 from a left side The upside of driven rod 45 passes through rotating hole and stretches to inside working chamber, drives the bottom end of threaded rod 33 and the bottom of working chamber Rotation is held to clamp, the bottom end of rotary head 34 is connect with the top of threaded rod 33 is driven, lifting ring 35 and drive 33 spiral shell of threaded rod The left end of dress, elevating lever 36 passes through lift span from the right side of left driven rod 45 and stretches to inside working chamber, elevating lever 36 Left end is connect with the excircle side wall right end of lifting ring 35, and the right end of the left end central region and elevating lever 36 that limit pallet 37 connects It connects, the top setting of limitation pallet 37 is fluted, and the circumferential side wall front end of left driven rod 45 is provided with scale；When wafer is taken When between two groups of sucker pawls, is at this moment rotated by rotary head and threaded rod is driven to make the external screw thread for rotating threaded rod in lifting ring Internal screw thread on rotate, by this threaded engagement rotation vertically move lifting ring, while lifting ring drive elevating lever along Lift span longitudinal movement, the drive limitation pallet longitudinal movement of elevating lever, then mentions according to the wafer processed at the same time The radius size of confession is moved to suitable position for pallet is limited, can be accurate by the distance that elevating lever moves on scale At this moment wafer is placed in the groove on limitation pallet top, just limits wafer center, Zhi Houbian in this way by positioning It can be by the center of the fixed wafer of two groups of sucker pawls, to reduce using limitation.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes swing handle 38, the right end of swing handle 38 is connect with the circumferential side wall left end of rotary head 34；It can be drive threaded rod by swing handle Adjusting provide convenience, to enhance convenience.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes carrying ring 39 With limited screw 40, carries ring 39 and the sliding of hanging rod 24 is set with, the left end for carrying ring 39 is provided through limitation threaded hole, limits The left side of the right end self-carry rotating ring 39 of screw 40, which passes through limitation threaded hole and stretches to, to be carried inside ring 39, limited screw 40 Right end be close to the circumferential side wall of hanging rod 24, the left end of cross bar 25 and carry ring 39 excircle side wall right end central region Connection；After limited screw is unscrewed, at this moment can height according to demand lift actuating ring, while carrying ring and can pass through cross bar Adjuster is driven to move up, device to be regulated is adjusted to after suitable height, at this moment stops lifting actuating ring, while by limited screw It screws, to enhance practicability.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes handle 41, The bottom end of handle 41 is connect with the central region on the top of cross bar 25；Convenience can be provided for the adjusting of cross bar by handle, from And enhance convenience.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes spring pad 42, spring pad 42 and 40 movable set of limited screw, the right end of spring pad 42 and the left end for the excircle side wall for carrying ring 39 are tight Patch, the left end of spring pad 42 is close to the screw cap end right side wall of limited screw 40；Spring pad can push limited screw to make to limit The biting pressure of the internal screw thread of the external screw thread and limitation threaded hole of screw increases, thus before increasing internal screw thread and external screw thread Frictional force, thus limited screw can be made to be not easy to loosen on carrying ring, to increase reliability.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes rocking bar 43, The right end in the upper right quarter region of rocking bar 43 is connect with the left end of left-hand thread bar 6；It can make the rotation of left-hand thread bar more by rocking bar The convenience added, to enhance practicability.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, further includes protection grip 44, the handheld terminal rotation of protection grip 44 and rocking bar 43 is set with；When can be with the hand rotating rocker of operator by protection grip Safety enhancing, be not easy to be frayed, to enhance practicability.

A kind of power electronic devices chip research and development wafer chamfer auxiliary device of the utility model, it is at work, first Motor is first bought on the market, and then motor is mounted in placement plate according to the operation instructions of motor, and Equipment group is installed it is complete, at this moment by swing handle drive rotary head rotation drive threaded rod make rotate threaded rod external screw thread exist It is rotated on the internal screw thread of lifting ring, vertically moves lifting ring by the rotation of this threaded engagement, while lifting ring drives lifting Bar is vertically moved along lift span, at the same time the drive limitation pallet longitudinal movement of elevating lever, then according to the crystalline substance processed The radius size that disk provides is moved to suitable position for pallet is limited, and the distance moved on scale by elevating lever can be with Wafer, is at this moment placed in the groove on limitation pallet top by accurate positioning, then rotates left-hand thread bar by rocking bar, this When left-hand thread bar drive right-hand thread bar to synchronize fellow villager together by connection ring to rotate in two groups of support rings, while two groups of threaded rods The opposite external screw thread of lines be engaged rotation with the internal screw thread of two groups of adjusting rings respectively, at this moment two groups of adjusting rings pass through interior spiral shell respectively Line and the opposite external screw thread of two groups of lines be engaged rotation and it is synchronous moved to close direction, while two groups of adjusting rods pass through respectively Two groups of gag lever posts drive two groups of sliding blocks to slide in limit plate, and at the same time two groups of adjusting rods drive two groups of driven rods inside respectively Side synchronizing moving, then two groups of driven rods pass through two groups of connecting rods two groups of sucker pawls of drive respectively and move to close direction is synchronous Dynamic, until the central area of wafer is firmly grasped in the inner end central area of two groups of sucker pawls, at this moment stop operating left-hand thread bar, so After limited screw is unscrewed afterwards, at this moment can height according to demand actuating ring lifted by handle actuating, while carrying ring Adjuster can be driven to move up by cross bar, device to be regulated is adjusted to after suitable height, at this moment stops lifting actuating ring, simultaneously Limited screw is screwed, spring pad tightly pushes away limited screw between limited screw and actuating ring at this time, then rotates control ring The external screw thread occlusion for making the internal screw thread and flexible threaded rod of control ring, is changed telescopic rod by the occlusion of internal and external threads and stretches out control The length of the regulation chamber of bar processed, notice telescopic rod will pass through mounting plate and push emery cloth with wafer edge close to until being adjusted to Suitable chamfer dimesion, at this moment stop operating control ring, and the operation instructions of institute's band start electricity when then buying according to motor Machine, at this moment motor drives adjusting rod rotation by output shaft, while adjusting rod drives six rib bars to turn under the limit of expansion ring Dynamic, six rib bars drive right connecting rod around the ball bearing rotational of right belt lever again at the same time, and at this moment the sucker pawl on right side is just Wafer is driven to rotate, while the sucker pawl in left side is rotated by left connecting rod in the upside of left driven rod, and wafer is passed through The rotation of piece just realizes polishing of the emery cloth to wafer edge.

Term as used herein " longitudinal direction ", " transverse direction ", "left", "right" and similar statement simply to illustrate that mesh 's.

The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change It also should be regarded as the protection scope of the utility model into modification.

Claims (8)

1. a kind of research and development of power electronic devices chip wafer chamfer auxiliary device, including station (1), motor (2) and crystalline substance The bottom end of disk (3), the station (1) is provided with four groups of supporting legs；It is characterized in that, further including two groups of support frames (4), left branch Pushing out ring (5), right support ring, left-hand thread bar (6), right-hand thread bar (8), connection ring (7), two groups of gag lever posts (9), two groups of sliding blocks (10), limit plate (11), left adjusting ring (12), right adjusting ring (13), left driven rod (45), right belt lever (14), left connecting rod (15), right connecting rod (16) and two groups of sucker pawls (17), the bottom end of two groups of support frames (4) top with station (1) respectively The left side at end is connected with middle part, and the bottom end of the left support ring (5) and right support ring connects with the top of two groups of support frames (4) respectively It connecing, the left end of the left-hand thread bar (6) passes through screwed ring from the right side of left support ring (5) and extend out to the right end of screwed ring, The right end of the left-hand thread bar (6) and the fixed suit of the left end central region of connection ring (7), the right end of the right-hand thread bar (8) It rotates and clamps with right support ring, the fixed suit in the central area of the right end of the left end and connection ring (7) of the right-hand thread bar (8), It is opposite that the excircle side wall of the left-hand thread bar (6) and the excircle side wall of right-hand thread bar (8) are respectively arranged with two groups of lines Screw thread, the left adjusting ring (12) and right adjusting ring (13) fill with left-hand thread bar (6) and right-hand thread bar (8) spiral shell respectively, the limit The bottom end of position plate (11) is connect with the top left hand of station (1), inside the left region of the limit plate (11) and right part area The inside in domain is respectively arranged with two groups of sliding grooves, and two groups of sliding blocks (10) clamp with two groups of sliding groove slidings respectively, and described two The top of group sliding groove is respectively arranged with two groups of insertion holes, and the bottom end of two groups of gag lever posts (9) is respectively from two groups of sliding grooves Upside passes through two groups of insertion holes and is respectively protruding into the inside of two groups of sliding grooves, and the bottom end of two groups of gag lever posts (9) is distinguished It is connect with the top middle portion region of two groups of sliding blocks (10), the tops of two groups of gag lever posts (9) adjusts ring (12) with left respectively Bottom end with it is right adjust ring (13) bottom end connect, the bottom end of the left driven rod (45) and right belt lever (14) respectively with left adjusting Ring (12) is connected with the right top for adjusting ring (13), on the upside of the left end of the left connecting rod (15) and the right end of left driven rod (45) Connection, the upper area of the right belt lever (14) are provided with ball bearing, and the right end of the right connecting rod (16) is dynamic from right belt The left side of bar (14) passes through ball bearing and extend out to the right side of right belt lever (14), the excircle of the right connecting rod (16) The inner circumferential side wall of side wall and ball bearing is fixed to be clamped, the inner end of the left connecting rod (15) and right connecting rod (16) respectively with The outer end central region connection of two groups of sucker pawls (17), the inner end of two groups of sucker pawls (17) left side with wafer (3) respectively End and right end central area are close to；Further include two groups of stabilizing brackets (18), placement plate (19), adjusting rod (20), six rib bars (21), stretch Contracting ring (22), fixed link (23), hanging rod (24), cross bar (25), adjuster (26), limited block (27), control-rod (28), control ring (29), stretch threaded rod (30), mounting plate (31) and emery cloth (32), and the bottom end of two groups of stabilizing brackets (18) is and station (1) connection on the right side of top, the left and right side of the bottom end of the placement plate (19) top with two groups of stabilizing brackets (18) respectively Connection, the bottom end of the motor (2) are connect with the top of placement plate (19), the output end and adjusting rod of the motor (2) (20) right end connects with one heart, and the adjusting rod (20) is internally provided with hexagon telescopic cavity, the hexagon telescopic cavity Left end is provided with and communicated with telescopic mouth, and the left side of the right end self-regulated pole (20) of the six ribs bar (21) passes through telescopic mouth and protrudes into To hexagon telescopic cavity, right areas and hexagon the telescopic cavity sliding of the six ribs bar (21) are clamped, the six ribs bar (21) it is clamped with expansion ring (22) sliding, the bottom end of the excircle side wall of the expansion ring (22) and the top of fixed link (23) connect It connects, the bottom end of the fixed link (23) is connect with the top of right support ring, the left end of the six ribs bar (21) and right connecting rod (16) right end connects with one heart, and the bottom end of the hanging rod (24) is connect with the top of left support ring (5), the adjuster (26) Connect on the right side of the bottom end of top and cross bar (25), the adjuster (26) is internally provided with sliding cavity, the sliding cavity it is interior End is provided with and respectively communicated with sliding mouth, and the limited block (27) and sliding cavity sliding clamp, and the left end of the control-rod (28) is certainly The inside of adjuster (26) passes through sliding mouth and stretches to inside sliding cavity, the left end of the control-rod (28) and limited block (27) right end central region connection, the control-rod (28) are internally provided with regulation chamber, the right end connection of the regulation chamber It is provided with control mouth, the left end of the flexible threaded rod (30) passes through control mouth from the right side of control-rod (28) and stretches to tune Intracavitary portion is controlled, the left end of the flexible threaded rod (30) is provided with spacing head, and the right end of the control-rod (28) is provided with annular Turn trough, the left end of the control ring (29) are provided with ring card, and the ring card and annular slot rotation clamp, the control ring (29) Inner circumferential side wall be provided with interior control screw thread, the control ring (29) and flexible threaded rod (30) spiral shell fill, the flexible screw thread The right end of bar (30) is connect with the left end central region of mounting plate (31), the right end of the mounting plate (31) and the left side of emery cloth (32) End connection.

2. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as described in claim 1, which is characterized in that It further include driving threaded rod (33), rotary head (34), lifting ring (35), elevating lever (36) and limitation pallet (37), the left band Lever (45) is internally provided with working chamber, and the top of the working chamber is provided with and communicated with rotating hole, the right end of the working chamber It is provided with and communicated with lift span, the bottom end for driving threaded rod (33) passes through rotating hole from the upside of left driven rod (45) and stretches Enter to working chamber, the bottom end of the bottom end for driving threaded rod (33) and working chamber, which rotates, to be clamped, the rotary head (34) Bottom end with drive threaded rod (33) top connect, the lifting ring (35) and drive threaded rod (33) spiral shell fill, the lifting The left end of bar (36) passes through lift span from the right side of left driven rod (45) and stretches to inside working chamber, the elevating lever (36) Left end connect with the excircle side wall right end of lifting ring (35), it is described limitation pallet (37) left end central region and elevating lever (36) the top setting of right end connection, limitation pallet (37) is fluted, before the circumferential side wall of the left driven rod (45) End is provided with scale.

3. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 2, which is characterized in that It further include swing handle (38), the right end of the swing handle (38) is connect with the circumferential side wall left end of rotary head (34).

4. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 3, which is characterized in that It further include carrying ring (39) and limited screw (40), the actuating ring (39) and hanging rod (24) sliding are set with, the actuating ring (39) left end is provided through limitation threaded hole, and the left side of right end self-carry rotating ring (39) of the limited screw (40) passes through limit Threaded hole processed and stretching to carries that ring (39) are internal, the right end of the limited screw (40) and the circumferential side wall of hanging rod (24) It is close to, the left end of the cross bar (25) is connect with the right end central region for the excircle side wall for carrying ring (39).

5. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 4, which is characterized in that It further include handle (41), the bottom end of the handle (41) is connect with the central region on the top of cross bar (25).

6. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 5, which is characterized in that Further include spring pad (42), the spring pad (42) and limited screw (40) movable set, the right end of the spring pad (42) with The left end for carrying the excircle side wall of ring (39) is close to, and the left end of the spring pad (42) and the screw cap end of limited screw (40) are right Side wall is close to.

7. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 6, which is characterized in that It further include rocking bar (43), the right end in the upper right quarter region of the rocking bar (43) is connect with the left end of left-hand thread bar (6).

8. a kind of power electronic devices chip research and development wafer chamfer auxiliary device as claimed in claim 7, which is characterized in that It further include protection grip (44), the handheld terminal of protection grip (44) and rocking bar (43), which rotates, to be set with.