CN209270882U - A kind of dry pump filtering cold-trap - Google Patents
A kind of dry pump filtering cold-trap Download PDFInfo
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- CN209270882U CN209270882U CN201821446306.XU CN201821446306U CN209270882U CN 209270882 U CN209270882 U CN 209270882U CN 201821446306 U CN201821446306 U CN 201821446306U CN 209270882 U CN209270882 U CN 209270882U
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- main body
- shell
- inner casing
- dry pump
- protrusion
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Abstract
The utility model discloses a kind of dry pump filtering cold-traps, including water cooled housing, water cooling inner casing and filter screen, the water cooled housing includes housing main body, shell is protruded by the fixed shell that is communicated in the position of close in the side of the housing main body, the water cooling inner casing includes inner casing main body, the inner casing main body is located at the inside of housing main body, and the top and bottom of inner casing main body both pass through the upper and lower surface of housing main body, the inner casing main body protrudes shell close to the fixed inner casing that is communicated in the side of shell protrusion shell, and inner casing protrusion shell is located at the inside of shell protrusion shell, cooling water cavity is set as between the inner casing main body and housing main body, cooling water cavity is set as between the inner casing protrusion shell and shell protrusion shell, filter screen and cooling water cavity are set, the tail gas for entering dry pump from inlet exhaust gas is not only purified, and reduce temperature, to dry Pump has carried out double shielding, not only extends the service life of dry pump, and substantially increase the property of dry pump.
Description
Technical field
The utility model relates to cooling technology field, specifically a kind of dry pump filtering cold-trap.
Background technique
PECVD technique principle is silicon wafer to be put under low pressure using low temperature plasma as energy source, and carry out aura
Electricity using glow discharge and heats, so that chip is warming up to scheduled temperature, then passes through suitable reaction gas, gas warp
Chemical reaction and plasma reaction are crossed, so that sample surfaces form solid film.Its chemical equation are as follows: 3SiH4+4NH3
→SiN4+12H2.In technical process, the by-product for having silicon nitride is generated, and shows as white powder particle, these particles
It will do it condensation in the cold state.The dry pump that pecvd process uses is dry pump, its working principle is that being revolved by metallic rotator high speed
Turn, gas extrusion exhaust mouth.Due to the presence of dust particles in pecvd process tail gas, so that the service ability of dry pump, i.e.,
The ability vacuumized has received obstruction, so needing stop work and production, repairs operation to pump.
Utility model content
The purpose of this utility model is to provide a kind of dry pump filtering cold-traps, to solve the problems of the prior art.
To achieve the above object, the utility model provides the following technical solutions: a kind of dry pump filtering cold-trap, including water cooling
Shell, water cooling inner casing and filter screen, the water cooled housing include housing main body, and the position of close over is leaned in the side of the housing main body
It sets the fixed shell that is communicated with and protrudes shell, the water cooling inner casing includes inner casing main body, and the inner casing main body is located at the interior of housing main body
Portion, and the top and bottom of inner casing main body both pass through the upper and lower surface of housing main body, the inner casing main body protrudes shell close to shell
Side it is fixed be communicated with inner casing protrusion shell, and inner casing protrusion shell is located at the inside of shell protrusion shell, the inner casing main body with outside
It is set as cooling water cavity between shell main body, cooling water cavity is set as between the inner casing protrusion shell and shell protrusion shell, it is described interior
The end of shell protrusion shell is provided with inlet exhaust gas, and the lower end of the inner casing main body is provided with clean gas outlet, the filter screen
Including net cylinder main body and installing ring, the net cylinder main body is eccentrically set on the inside of inner casing main body, and the upper end of net cylinder main body is solid
Surely there is upper plug head, the lower end eccentric setting of the net cylinder main body has circular flat screen, and flat screen is solid by installing ring
It is scheduled on the lower inside of inner casing main body.
Preferably, the lower surface of the housing main body is communicated with cooling water inlet far from the side fixation of shell protrusion shell,
And the upper surface of housing main body is communicated with cooling water outlet close to the side fixation of shell protrusion shell.
Preferably, the end of the inner casing protrusion shell is fixed with gas feed mounting flange, and gas feed connection method
Second flange disk hole is provided on blue disk.
Preferably, the lower end of the clean gas outlet is fixed with gas vent mounting flange, and gas vent connects
First flange disk hole is provided on ring flange.
Preferably, the lower section two sides of the installing ring are respectively and fixedly provided with connecting column, and the lower end of connecting column is fixed in water cooling
On the inner wall of shell.
Preferably, the housing main body and shell protrusion shell are integrally formed, the inner casing main body and inner casing protrusion shell one
Molding.
Compared with prior art, the utility model has the beneficial effects that the utility model is provided with the circulation of bottom in and top out
The cooling water inlet of cooling water from below is pumped into the inside of cooling water cavity by cooling water, when the height of cooling water reaches cooling water
When outlet, the water for carrying heat is discharged from cooling water outlet, and cooling water inlet is constantly pumped into cooling water, so that cooling water is to follow
Ring status, bottom in and top out can make have recirculated cooling water inside cooling water cavity, with the cooling effect being optimal；
Provided with filter screen and cooling water cavity, the tail gas with dust particles enters this cold-trap from inlet exhaust gas, recycles cold
But water reduces the temperature of internal cavity, therefore dust particles are attached to net cylinder body outer surface, achieve the purpose that cleaning of off-gas,
The tail gas for entering dry pump from inlet exhaust gas is not only purified, and reduces temperature, has carried out double shielding to dry pump, no
But the service life of dry pump is extended, and substantially increases the performance of dry pump；
Provided with eccentric net cylinder main body, net cylinder main body is eccentrically set on the inside of inner casing main body, makes to enter inner casing main body
Tail gas can cross net cylinder main body peripheral motor as far as possible so that dust particles maximum area is attached to net cylinder main body week
Enclose, extend the maintenance time of net cylinder main body, while reducing plant maintenance workload, greatly reduce the operation of enterprise at
This, greatly enhances the production efficiency of enterprise.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the cross-sectional view of the utility model.
Fig. 3 is the eccentric position figure of the utility model net cylinder main body.
Fig. 4 is the structural schematic diagram of the utility model filter screen.
In figure: 1, water cooled housing；11, housing main body；12, cooling water inlet；13, cooling water outlet；14, shell protrudes
Shell；2, gas vent mounting flange；21, first flange disk hole；3, water cooling inner casing；31, inner casing main body；32, inner casing protrudes shell；
33, clean gas exports；34, inlet exhaust gas；4, gas feed mounting flange；41, second flange disk hole；5, filter screen；51,
Net cylinder main body；511, upper plug head；52, installing ring；53, connecting column；54, flat screen；6, cooling water cavity.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1~4, in the utility model embodiment, a kind of dry pump filtering cold-trap, including water cooled housing 1, water cooling
Inner casing 3 and filter screen 5, water cooled housing 1 include housing main body 11, and the side of housing main body 11 is by the fixed connection in the position of close over
There is shell to protrude shell 14, housing main body 11 forms cooling water cavity 6, shell protrusion shell 14 is for wrapping for wrapping up inner casing main body 31
Inner casing protrusion shell 32 is wrapped up in, forms cooling water cavity 6, housing main body 11 and shell protrusion shell 14 are integrally formed, under housing main body 11
Side of the surface far from shell protrusion shell 14 is fixed to be communicated with cooling water inlet 12, and cooling water inlet 12 is used for the entrance of cold water,
And the upper surface of housing main body 11 is communicated with cooling water outlet 13, cooling water outlet 13 close to the side fixation of shell protrusion shell 14
It discharges for hot water, water cooling inner casing 3 includes inner casing main body 31, and the inside of inner casing main body 31 is for installing filter screen 5, inner casing main body
31 are located at the inside of housing main body 11, and the top and bottom of inner casing main body 31 both pass through the upper and lower surface of housing main body 11, interior
Shell main body 31 protrudes shell 32 close to the fixed inner casing that is communicated in the side of shell protrusion shell 14, and inner casing protrusion shell 32 is used to form tail gas
Channel allows tail gas to enter the inside of inner casing main body 31, and inner casing main body 31 and inner casing protrusion shell 32 are integrally formed, and inner casing
Protrusion shell 32 is located at the inside of shell protrusion shell 14, and the end of inner casing protrusion shell 32 is fixed with gas feed mounting flange 4, gas
Body import mounting flange 4 protrudes shell 32 for connecting gas emission device and inner casing, and sets on gas feed mounting flange 4
It is equipped with second flange disk hole 41, is set as cooling water cavity 6 between inner casing main body 31 and housing main body 11, inner casing protrudes shell 32 and outer
Cooling water cavity 6 is set as between shell protrusion shell 14, cooling water cavity 6 protrudes the end setting of shell 32 for keeping in cooling water, inner casing
There is inlet exhaust gas 34, inlet exhaust gas 34 enters the inside of inner casing protrusion shell 32 for tail gas, and the lower end of inner casing main body 31 is provided with
Clean gas outlet 33, clean gas outlet 33 discharge for pure air, and the lower end of clean gas outlet 33 is fixed with gas
Mounting flange 2 is exported, gas vent mounting flange 2 is for connecting dry pump and clean gas outlet 33, and gas vent connects
First flange disk hole 21 is provided on acting flange disk 2, filter screen 5 includes net cylinder main body 51 and installing ring 52, and net cylinder main body 51 is used
In impurity screening, after the tail gas with dust particles enters 31 inside of inner casing main body, due to the cooling water of circulation, so that inner casing master
Temperature inside body 31 reduces, therefore dust particles are attached to the outer surface of net cylinder main body 51, achievees the purpose that cleaning of off-gas, net
Cylinder main body 51 is eccentrically set on the inside of inner casing main body 31, and eccentric setting net cylinder main body 51 enables the tail gas into inner casing main body 31
It is enough to cross 51 peripheral motor of net cylinder main body as far as possible, so that dust particles maximum area is attached to around net cylinder main body 51,
Extend the maintenance time of net cylinder main body 51, and the upper end of net cylinder main body 51 is fixed with upper plug head 511, upper plug head 511 is for closing
The upper end of net cylinder main body 51, the lower end eccentric setting of net cylinder main body 51 have circular flat screen 54, and flat screen 54 is for holding
The dust fallen from net cylinder main body 51 is connect, dust is avoided to enter inside dry pump, flat screen 54 is fixed on by installing ring 52
The lower inside of inner casing main body 31, the lower section two sides of installing ring 52 are respectively and fixedly provided with connecting column 53, and the lower end of connecting column 53 is fixed
On the inner wall of water cooling inner casing 3, connecting column 53 can make net cylinder main body 51 more consolidate with inside water cooling inner casing 3.
The working principle of the utility model is: cooling water to be pumped into the inside of cooling water cavity 6 from cooling water inlet 12, when cold
But when the height of water reaches cooling water outlet 13, the water for carrying heat is discharged from cooling water outlet 13, and cooling water inlet 12 is not
Disconnected to be pumped into cooling water, so that cooling water is recurrent state, bottom in and top out is in order to enable having circulating cooling inside cooling water cavity 6
Water, with the cooling effect being optimal, the cooling water inside cooling water cavity 6 can protrude inner casing main body 31 in shell 32 with inner casing
The temperature in portion reduces, and is connected the present apparatus and external tail gas outlet by gas feed mounting flange 4, tail gas passes through
Inlet exhaust gas 34 enters the inside of inner casing protrusion shell 32, enters back into the inside of inner casing main body 31, due to the cooling water of circulation, so that
Temperature inside inner casing main body 31 reduces, therefore dust particles are attached to the outer surface of net cylinder main body 51, reaches cleaning of off-gas
Purpose, clean air escape into inside dry pump after passing through flat screen 54 from clean gas outlet 33；Net cylinder main body 51 is inclined
The heart is arranged in the inside of inner casing main body 31, eccentric setting net cylinder main body 51 enable into inner casing main body 31 tail gas as far as possible
51 peripheral motor of net cylinder main body is being crossed, so that dust particles maximum area is attached to around net cylinder main body 51, is extending net cylinder master
The maintenance time of body 51.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (6)
1. a kind of dry pump filtering cold-trap, including water cooled housing (1), water cooling inner casing (3) and filter screen (5), it is characterised in that: institute
Stating water cooled housing (1) includes housing main body (11), and by the position of close over, fixation is communicated with for the side of the housing main body (11)
Shell protrudes shell (14), and the water cooling inner casing (3) includes inner casing main body (31), and the inner casing main body (31) is located at housing main body
(11) inside, and the top and bottom of inner casing main body (31) both pass through the upper and lower surface of housing main body (11), the inner casing master
The side of close shell protrusion shell (14) of body (31) is fixed to be communicated with inner casing protrusion shell (32), and inner casing protrusion shell (32) is positioned at outer
Shell protrudes the inside of shell (14), is set as cooling water cavity (6) between the inner casing main body (31) and housing main body (11), described interior
It is set as cooling water cavity (6) between shell protrusion shell (32) and shell protrusion shell (14), the end of inner casing protrusion shell (32) is set
It is equipped with inlet exhaust gas (34), the lower end of the inner casing main body (31) is provided with clean gas outlet (33), filter screen (5) packet
Net cylinder main body (51) and installing ring (52) are included, the net cylinder main body (51) is eccentrically set on the inside of inner casing main body (31), and net
The upper end of cylinder main body (51) is fixed with upper plug head (511), and the lower end eccentric setting of the net cylinder main body (51) has circular plane
Strainer (54), and flat screen (54) is fixed on the lower inside of inner casing main body (31) by installing ring (52).
2. a kind of dry pump according to claim 1 filtering cold-trap, it is characterised in that: the following table of the housing main body (11)
Face is communicated with cooling water inlet (12) far from the side fixation of shell protrusion shell (14), and the upper surface of housing main body (11) is close
The side fixation of shell protrusion shell (14) is communicated with cooling water outlet (13).
3. a kind of dry pump according to claim 1 filtering cold-trap, it is characterised in that: the end of inner casing protrusion shell (32)
End is fixed with gas feed mounting flange (4), and is provided with second flange disk hole on gas feed mounting flange (4)
(41).
4. a kind of dry pump according to claim 1 filtering cold-trap, it is characterised in that: the clean gas outlet (33)
Lower end is fixed with gas vent mounting flange (2), and is provided with first flange disk hole on gas vent mounting flange (2)
(21).
5. a kind of dry pump according to claim 1 filtering cold-trap, it is characterised in that: the lower section two of the installing ring (52)
Side is respectively and fixedly provided with connecting column (53), and the lower end of connecting column (53) is fixed on the inner wall of water cooling inner casing (3).
6. a kind of dry pump according to claim 1 filtering cold-trap, it is characterised in that: the housing main body (11) and shell
It protrudes shell (14) to be integrally formed, the inner casing main body (31) and inner casing protrusion shell (32) are integrally formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821446306.XU CN209270882U (en) | 2018-09-05 | 2018-09-05 | A kind of dry pump filtering cold-trap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821446306.XU CN209270882U (en) | 2018-09-05 | 2018-09-05 | A kind of dry pump filtering cold-trap |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209270882U true CN209270882U (en) | 2019-08-20 |
Family
ID=67603055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821446306.XU Active CN209270882U (en) | 2018-09-05 | 2018-09-05 | A kind of dry pump filtering cold-trap |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209270882U (en) |
-
2018
- 2018-09-05 CN CN201821446306.XU patent/CN209270882U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210609 Address after: Room 402, building 3, 3255 Sixian Road, Songjiang District, Shanghai Patentee after: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Address before: 214000 rooms 101 and 201, building 12 (B3), Wuxi Zhongguancun Software Park, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI HUAYUAN JIANDIAN TECHNOLOGY Co.,Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A filter cold trap for dry pump Effective date of registration: 20230209 Granted publication date: 20190820 Pledgee: Agricultural Bank of China Limited Shanghai Songjiang Sub-branch Pledgor: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Registration number: Y2023310000023 |