CN209243163U - Target cooling device - Google Patents
Target cooling device Download PDFInfo
- Publication number
- CN209243163U CN209243163U CN201822066979.9U CN201822066979U CN209243163U CN 209243163 U CN209243163 U CN 209243163U CN 201822066979 U CN201822066979 U CN 201822066979U CN 209243163 U CN209243163 U CN 209243163U
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- Prior art keywords
- confined space
- fluid
- target
- cooling device
- material substrate
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- Physical Vapour Deposition (AREA)
Abstract
The utility model is related to a kind of target cooling device, comprising: sealing cover, installation to target material substrate, for forming confined space on the target material substrate surface；Fluid pump is connected to the confined space, the fluid for being pumped into fluid, or the extraction confined space into the confined space, with the cooling target.The target cooling device of the utility model forms confined space on target material substrate surface, and is connected to the confined space using a fluid pump, fluid is passed through in confined space or pumps out fluid, is cooled down using fluid to target.Further, it is additionally provided with the water bag being in contact with the surface of the target material substrate, by the larger specific heat capacity of the water contained in water bag, certain cooling effect can be also played to target.Using the target cooling device, influence when cooling down using water-cooling pattern to target to target, magnet and pipeline can be avoided, can optimize the prouctiveness of physical vapour deposition (PVD) board.
Description
Technical field
The utility model relates to art of physical vapor deposition, and in particular to a kind of target cooling device.
Background technique
In the prior art, it when carrying out coating process to wafer, semiconductor devices using the mode of physical vapour deposition (PVD), can use
To target.Target is placed in the cavity of physical vapour deposition (PVD), and in sputtering process, the temperature of target material surface is very high, is needed not
Disconnected cools down target, to prevent high temperature from influencing.
In the prior art, usually using the mode of Water-cooling circulating, to realize the cooling to target.However use this method
When cooling target, since deionized water is directly directly contacted with magnet, pipeline, the motor etc. in physical vapour deposition (PVD) board, and
Deionized water is easy to cooperating microorganisms during recycling, therefore influences whether the normal use of target and pipeline,
And will affect the efficiency of magnet rotation, to influence the prouctiveness of physical vapour deposition (PVD) board.There is provided one kind can optimize
The target cooling means of the prouctiveness of physical vapour deposition (PVD) board is this field technical problem urgently to be resolved.
Utility model content
The purpose of this utility model is to provide a kind of target cooling devices, can optimize the life of physical vapour deposition (PVD) board
Produce efficiency.
In order to solve the above-mentioned technical problem, the utility model provides a kind of target cooling device, comprising: sealing cover, peace
It is filled to target material substrate, for forming confined space on the target material substrate surface；Fluid pump is connected to the confined space, uses
In the fluid being pumped into the confined space in fluid, or the extraction confined space, with the cooling target.
Optionally, further include water bag, be set between the sealing cover and the target material substrate.
Optionally, further include pressing plate, be set between the sealing cover and the water bag, be connected to by flexible connector
The sealing cover makes water bag be in contact with the target material substrate for pressing the water bag.
Optionally, the flexible connector includes Spring screws.
Optionally, further include sealing ring, be set to the position that the sealing cover is in contact with the target material substrate, to guarantee
The leakproofness of the confined space.
Optionally, further include fluid circuit, be set between the fluid pump and the confined space, it is described for being connected to
Fluid pump and the confined space.
Optionally, the fluid circuit includes: to be passed through pipeline, is set between the fluid pump and the confined space,
It is connected to the fluid pump and the confined space, for fluid to be pumped into the confined space for fluid pump；Pass-out pipeline, setting
Between the fluid pump and the confined space, it is connected to the fluid pump and the confined space, being used for will be close for fluid pump
The fluid closed in space extracts the confined space out.
Optionally, further include temperature monitor, be set on the pass-out pipeline, for flowing through the pass-out pipeline
The temperature of fluid is monitored.
Optionally, further include flow control valve, be set on the pass-out pipeline, for controlling the fluid pump described in
The amount of the fluid of confined space extraction.
Optionally, the fluid pump includes: compressor, is connected to the confined space, described close for fluid to be pumped into
Space is closed, and for extracting the fluid in confined space out.
The target cooling device of the utility model forms confined space on target material substrate surface, and is connected using a fluid pump
The confined space is passed to, fluid is passed through in confined space or pumps out fluid, target is cooled down using fluid.Further
, it is additionally provided with the water bag being in contact with the surface of the target material substrate, by the larger specific heat capacity of the water contained in water bag,
Certain cooling effect can be played to target.Using the target cooling device, it can be avoided and target is carried out using water-cooling pattern
Influence when cooling to target, magnet and pipeline, can optimize the prouctiveness of physical vapour deposition (PVD) board.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the target cooling device in a kind of specific embodiment of the utility model.
Fig. 2 is the elevational schematic view of the sealing cover of target cooling device in a kind of specific embodiment of the utility model.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes a kind of target cooling device make it is further
It is described in detail.
Referring to Fig. 1, for the structural schematic diagram of the target cooling device in a kind of specific embodiment of the utility model.
In this specific embodiment, the target cooling device includes: sealing cover 101, installation to target material substrate 102,
For forming confined space 103 on 102 surface of target material substrate；Fluid pump 104 is connected to the confined space 103, is used for
The fluid being pumped into the confined space 103 in fluid, or the extraction confined space 103, with cooling installation to the target
The target 116 of 102 another side of material substrate.
In a specific embodiment, the sealing cover 101 separates magnet 115, motor 114 with target, stream
Body only cools down to target, to have preferably cooling efficiency.And sealing cover 101 forms on 102 surface of target material substrate
Confined space 103 limits the fluid being passed through and only radiates in confined space 103 to target, prevents fluid and magnet
115, the efficiency that magnet 115 rotates is influenced when motor 114 is in contact, so that the production effect of physical vapour deposition (PVD) board is improved in side
Energy.
In a specific embodiment, the sealing cover 101 is made of heat-absorbing material, such as copper, aluminium have preferably
The metal of heat absorption capacity, or be made of the material for being coated with heat absorbing coating.In a specific embodiment, the heat absorption applies
Layer includes black nickel coating, black chrome coating etc..The sealing cover 101 includes bottom plate 1011 and side 1012, by side 1012 and target
Material substrate 102 is in contact.Since side 1012 has certain altitude, bottom plate 1011, side 1012 and target material substrate 102
The surface composition confined space 103.
In specific embodiment shown in Fig. 1, the side 1012 of the sealing cover 101 also extends one section of installation outward
Plate 1013.The mounting plate 1013 is contacted with target material substrate 102, increases the contact surface of sealing cover 101 Yu target material substrate 102
Product enables what the sealing cover 101 consolidated to be installed to the target material substrate 102.
Please refer to Fig. 1 and Fig. 2, wherein Fig. 2 is the cooling dress of target in a kind of specific embodiment of the utility model
The elevational schematic view for the sealing cover 101 set.In this specific embodiment, screw hole 202 is provided on the mounting plate 1013.Institute
It states and is also equipped with screw hole 202 in target material substrate 102.When sealing cover 101 is installed to target material substrate 102, screw 106 can be passed through
Screw hole 202 on the mounting plate 1013 and the target material substrate 102, screwing screw 106, which is realized, to be fixed.
In a specific embodiment, the target cooling device further includes water bag 107, is set to the sealing cover
Between 101 and the target material substrate 102.Water bag 107 is set herein, be in order to using the specific heat capacity of the water contained in water bag 107,
Come absorb target 116 release heat, cooling processing is carried out to target 116.
In a specific embodiment, the target cooling device further includes pressing plate 108, is set to the sealing cover
Between 101 and the water bag 107, the sealing cover 101 is connected to by flexible connector, for pressing the water bag 107, is made
Water bag 107 is in contact with the target material substrate 102.In a specific embodiment, the flexible connector includes spring spiral shell
Silk 109.When the length of the Spring screws 109 is slightly longer than the water bag 107 and is horizontally arranged 102 surface of target material substrate, water
The distance between the minimum point of bag 107 and sealing cover 101, so that 108 moment of the pressing plate presses to the water bag 107 1
Power suppresses the water bag 107, comes into full contact with water bag 107 with target material substrate 102.
In this specific embodiment, the flexible connector includes multiple Spring screws 109, this makes the pressing plate
108 when pressing the water bag 107, can from all directions to water bag 107 with pressure on top surface so that water bag 107 is at various locations all
It is close to target material substrate 102, to have better 116 cooling effect of target.
In a specific embodiment, the target cooling device further includes sealing ring 105, is set to the sealing cover
101 positions being in contact with the target material substrate 102, to guarantee the leakproofness of the confined space 103.Tool shown in Fig. 1
In body embodiment, the mounting plate 1013 is provided with inner groovy 201, for placing the sealing ring 105.In a kind of specific reality
It applies in mode, the inside edge of the side 1012 of the sealing cover 101 is provided with chamfering, and the inner groovy 201 is arranged described
On the fillet surface of the inside edge of the side 1012 of sealing cover 101.
In this specific embodiment, the size of the sealing ring 105 and the size of the inner groovy 201 match, just
It is placed into well in the inner groovy 201.When the sealing ring 105 to be put into the inner groovy 201 of the sealing cover 101, have
A little profit margin protrudes from 1013 surface of mounting plate, so that the sealing cover 101 is installed to the target material substrate 102
When, the sealing ring 105 can squeeze the target material substrate 102, to guarantee the airtightness of the confined space 103.
In a specific embodiment, the target cooling device further includes fluid circuit 110, is set to the fluid
Between pump 104 and the confined space 103, for being connected to the fluid pump 104 and the confined space 103.Shown in Fig. 1
In specific embodiment, the sealing cover 101 is provided with communicating pipe, is connected to the sealing cover 101 in the target material substrate 102
The confined space that the back side is formed.The fluid circuit 110 is connected to the communicating pipe by connecting flange, makes to be connected to the stream
The fluid pump 104 of 110 other end of body pipeline is communicated to the confined space 103.
In a specific embodiment, the fluid circuit 110 includes: to be passed through pipeline 1101, is set to the fluid
Between pump 104 and the confined space 103, it is connected to the fluid pump 104 and the confined space 103, for for fluid pump 104
Fluid is pumped into the confined space 103；Pass-out pipeline 1102, be set to the fluid pump 104 and the confined space 103 it
Between, it is connected to the fluid pump 104 and the confined space 103, for taking out the fluid in confined space 103 for fluid pump 104
The confined space 103 out.
In a specific embodiment, the target cooling device further includes temperature monitor 111, is set to described logical
Out on pipeline 1102, it is monitored for the temperature to the fluid for flowing through the pass-out pipeline 1102.In a kind of specific embodiment party
In formula, the target cooling device further includes flow control valve 112, is set on the pass-out pipeline 1102, for controlling
State the amount for the fluid that fluid pump 104 is extracted out from the confined space 103.
By the way that the temperature monitor 111 and the flow control valve 112 is arranged, allow user according to current stream
The temperature of fluid through the pass-out pipeline 1102, to the amount for the fluid that the fluid pump 104 is extracted out from the confined space 103
It is controlled.In a specific embodiment, when the fluid pump 104 is pumped into confined space 103 or pumps out fluid, the moment
The pressure that remain in confined space 103 is constant, if therefore the fluid extracted out from the confined space 103 of the fluid pump 104
Amount increase, then the amount that the fluid pump 104 is pumped into the fluid of the confined space 103 also increases.It is described close due to being newly pumped into
The temperature difference closed between the fluid in space 103 and target 116 is larger, therefore can accelerate the cooling rate to target 116.
In a specific embodiment, controller can be set in the target cooling device, and connects controller
It is connected to the temperature monitor 111 and the flow control valve 112, by the controller according to the temperature monitor 111
The temperature detected controls the flow control valve 112, to controlling the temperature of the target 116 in a certain preset range
It is interior.
In a specific embodiment, the fluid pump 104 includes: compressor 113, is connected to the confined space
103, for fluid to be pumped into the confined space 103, and for extracting the fluid in confined space 103 out.In a kind of tool
In body embodiment, the fluid is the stabilizing gas such as gaseous fluid, including carbon dioxide, helium.It is embodied in others
In mode, the fluid is liquid fluid, including Glycol Mixture etc..
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of target cooling device characterized by comprising
Sealing cover, installation to target material substrate, for forming confined space on the target material substrate surface；
Fluid pump is connected to the confined space, for being pumped into fluid, or the extraction confined space into the confined space
Interior fluid, with the cooling target.
2. target cooling device according to claim 1, which is characterized in that further include water bag, be set to the sealing cover
Between the target material substrate.
3. target cooling device according to claim 2, which is characterized in that further include pressing plate, be set to the sealing cover
Between the water bag, the sealing cover is connected to by flexible connector, for pressing the water bag, makes water bag and the target
Material substrate is in contact.
4. target cooling device according to claim 3, which is characterized in that the flexible connector includes Spring screws.
5. target cooling device according to claim 1, which is characterized in that further include sealing ring, be set to the sealing
The position being in contact with the target material substrate is covered, to guarantee the leakproofness of the confined space.
6. target cooling device according to claim 1, which is characterized in that further include fluid circuit, be set to the stream
Between body pump and the confined space, for being connected to the fluid pump and the confined space.
7. target cooling device according to claim 6, which is characterized in that the fluid circuit includes:
It is passed through pipeline, is set between the fluid pump and the confined space, the fluid pump and the confined space are connected to,
For fluid to be pumped into the confined space for fluid pump；
Pass-out pipeline is set between the fluid pump and the confined space, is connected to the fluid pump and the confined space,
For extracting the fluid in confined space out the confined space for fluid pump.
8. target cooling device according to claim 7, which is characterized in that further include temperature monitor, be set to described
On pass-out pipeline, it is monitored for the temperature to the fluid for flowing through the pass-out pipeline.
9. target cooling device according to claim 7, which is characterized in that further include flow control valve, be set to described
On pass-out pipeline, for controlling the amount for the fluid that the fluid pump is extracted out from the confined space.
10. target cooling device according to claim 1, which is characterized in that the fluid pump includes:
Compressor is connected to the confined space, for fluid to be pumped into the confined space, and for will be in confined space
Fluid extraction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822066979.9U CN209243163U (en) | 2018-12-10 | 2018-12-10 | Target cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822066979.9U CN209243163U (en) | 2018-12-10 | 2018-12-10 | Target cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209243163U true CN209243163U (en) | 2019-08-13 |
Family
ID=67532267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822066979.9U Active CN209243163U (en) | 2018-12-10 | 2018-12-10 | Target cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209243163U (en) |
-
2018
- 2018-12-10 CN CN201822066979.9U patent/CN209243163U/en active Active
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