CN209230293U - Cu and Al combination type anti-deformation flue for high temperature furnace - Google Patents

Abstract

A kind of Cu and Al combination type anti-deformation flue for high temperature furnace is provided, flue splices the fabricated structure being fixed with one by flue ontology I, flue ontology II and wing furnace gallbladder ontology, and flue ontology I, flue ontology II and wing furnace gallbladder ontology are the double-deck plate structure convenient for heat transfer, and the heat-dissipating pipe convenient for flue heat transfer is equipped with inside the flue ontology I, flue ontology II and wing furnace gallbladder ontology or flue ontology I and flue ontology II.The utility model forms the flue of fabricated structure after being connected by using the splicing of the flue ontology I of the double-deck plate structure, flue ontology II and wing furnace gallbladder ontology, and the heat-dissipating pipe being equipped with inside gallbladder ontology I, flue ontology II and wing furnace gallbladder ontology or flue ontology I and flue ontology II convenient for flue heat transfer, eliminate the phenomenon that flue made of copper sheet material causes flue thermal conductivity and thermal diffusivity to substantially reduce because of easily oxidizable, guarantee the thermal stability of flue, the consistency of workpiece is good, improves flue integral strength.

Description

Cu and Al combination type anti-deformation flue for high temperature furnace

Technical field

The utility model belongs to high temperature furnace technical field, and in particular to a kind of Cu and Al combination type anti-deformation for high temperature furnace Flue.

Background technique

Sintering, crystal growth, annealing, soldering etc. are widely used in using the high temperature furnace of tungsten metallic insulation screen furnace lining Technological operation is especially applied in semiconductor field, refractory ceramics sintering art on a large scale.The furnace of traditional high temperature furnace The flue that gallbladder is made of stainless steel, and when high temperature furnace works at high temperature, furnace body temperature is higher, and stainless steel material Flue cooling and heat dissipation performance it is poor, and uneven heating and lead to whole furnace deformation, seriously affect the thermal stability of flue, make heat It is larger because of the next temperature difference of Zona transformans in, keep the consistency of workpiece poor, and at this stage, also have using furnace made of copper product Gallbladder, it is well known that the moment heat absorption capacity of system is better than aluminum or aluminum alloy, but the radiating rate of copper is wanted compared with aluminum or aluminum alloy Slowly, to influence the heat dissipation effect of flue made of copper product, in view of the above-mentioned problems, it is necessary to improve.

Utility model content

The technical problem solved by the utility model is:to provide a kind of Cu and Al combination type anti-deformation flues for high temperature furnace, lead to It crosses after being connected using the flue ontology I of the double-deck plate structure, flue ontology II and the splicing of wing furnace gallbladder ontology and forms fabricated structure Flue, and inside gallbladder ontology I, flue ontology II and wing furnace gallbladder ontology or flue ontology I and flue ontology II be equipped be convenient for The heat-dissipating pipe of flue heat transfer eliminates flue made of copper sheet material because easily oxidizable causes flue thermal conductivity and thermal diffusivity The phenomenon that substantially reducing guarantees the thermal stability of flue, and the consistency of workpiece is good, the double-deck plate structure flue equipped with heat-dissipating pipe Thermal diffusivity is good, and flue good integral strength, and can effectively avoid flue bring temperature difference due to poor radiation influences.

The technical solution adopted in the utility model: for the Cu and Al combination type anti-deformation flue of high temperature furnace, there is flue, institute It states to be equipped with inside flue on the inside of tungsten metallic insulation screen and tungsten metallic insulation screen and is equipped with heater, the flue is by flue sheet Body I, flue ontology II and wing furnace gallbladder ontology splice the fabricated structure being fixed with one, and flue ontology I, II and of flue ontology Wing furnace gallbladder ontology be convenient for heat transfer the double-deck plate structure, the flue ontology I, flue ontology II and wing furnace gallbladder ontology or The heat-dissipating pipe convenient for flue heat transfer is equipped with inside flue ontology I and flue ontology II.

Wherein, the flue ontology I, flue ontology II and wing furnace gallbladder ontology by be located at flue inside and outside copper sheet and Aluminium alloy plate composition, and wing furnace gallbladder ontology both ends are fixedly connected with flue ontology I and flue ontology II respectively, the copper sheet and aluminium Heat-dissipating pipe is equipped between alloy sheets and heat-dissipating pipe is fixedly welded between copper sheet and aluminium alloy plate.

Further, the heat-dissipating pipe is aluminum alloy coil.

Further, it is welded after the aluminium alloy plate at II both ends of the flue ontology I and flue ontology and copper sheet bending fitting It is integrated, is fixed with T-type connector between the aluminium alloy plate and copper sheet at the wing furnace gallbladder ontology both ends and flue ontology I and flue II both ends of ontology are fixedly connected with T-type connector.

Further, for horizontal-type high temperature furnace, the flue ontology I, flue ontology II and four sides wing furnace gallbladder body interior Equipped with the heat-dissipating pipe for being convenient for flue heat transfer；For vertical high-temperature furnace, flue ontology I and flue positioned at flue upper and lower position The heat-dissipating pipe convenient for flue heat transfer is equipped with inside ontology II.

The utility model compared with prior art the advantages of:

1, the technical program is spelled by using the flue ontology I of the double-deck plate structure, flue ontology II and wing furnace gallbladder ontology The flue that fabricated structure is formed after being connected is connect, and in gallbladder ontology I, flue ontology II and wing furnace gallbladder ontology or I and of flue ontology It is equipped with the heat-dissipating pipe convenient for flue heat transfer inside flue ontology II, optimizes flue tube structure, improves flue self-strength, Can effectively avoid flue bring temperature difference due to poor radiation influences；

2, the flue ontology I of the double-deck plate structure of the technical program, flue ontology II and wing furnace gallbladder ontology are by being located at Copper sheet and aluminium alloy plate composition inside and outside flue, and aluminum alloy coil is set between copper sheet and aluminium alloy plate, it eliminates The phenomenon that flue made of copper sheet material causes flue thermal conductivity and thermal diffusivity to substantially reduce because of easily oxidizable, guarantee the heat of flue Stability；

3, the technical program flue tube structure is novel in design, and flue non-deformability is strong, substantially increases the service life of flue, furnace Gallbladder thermal diffusivity is good, and workpiece consistency is good.

Detailed description of the invention

Fig. 1 is the utility model high temperature furnace structure diagram；

Fig. 2 is the utility model flue tube structure schematic diagram.

Specific embodiment

1-2 describes an embodiment of the present invention with reference to the accompanying drawing.

For the Cu and Al combination type anti-deformation flue of high temperature furnace, there is flue 1, as shown in Figure 1, pacifying inside the flue 1 Equipped on the inside of tungsten metallic insulation screen 5 and tungsten metallic insulation screen 5 be equipped with heater 6；As shown in Fig. 2, the flue 1 is by flue Ontology I 2, flue ontology II 3 and wing furnace gallbladder ontology 4 splice the fabricated structure being fixed with one, and flue ontology I 2, flue sheet Body II 3 and wing furnace gallbladder ontology 4 are the double-deck plate structure convenient for heat transfer, the flue ontology I 2, flue ontology II 3 and side Flue ontology 4 or II 3 inside of flue ontology I 2 and flue ontology are equipped with the heat-dissipating pipe 9 convenient for 1 heat transfer of flue, by using Flue ontology I 2, flue ontology II 3 and the splicing of wing furnace gallbladder ontology 4 of the double-deck plate structure form the furnace of fabricated structure after being connected Gallbladder 1, and be equipped with just inside gallbladder ontology I 2, flue ontology II 3 and wing furnace gallbladder ontology 4 or flue ontology I 2 and flue ontology II 3 In the heat-dissipating pipe 9 of flue heat transfer, optimize 1 structure of flue, improve 1 self-strength of flue, can effectively avoid flue 1 because Poor radiation and the bring temperature difference influence；

Specifically, the flue ontology I 2, flue ontology II 3 and wing furnace gallbladder ontology 4 are by inside and outside flue 1 Copper sheet 7 and aluminium alloy plate 8 form, and 4 both ends of wing furnace gallbladder ontology are fixedly connected with flue ontology I 2 and flue ontology II 3 respectively, Heat-dissipating pipe 9 is equipped between the copper sheet 7 and aluminium alloy plate 8 and heat-dissipating pipe 9 is fixedly welded between copper sheet 7 and aluminium alloy plate 8, institute Stating heat-dissipating pipe 9 is aluminum alloy coil, and flue ontology I 2, flue ontology II 3 and the wing furnace gallbladder ontology 4 of the double-deck plate structure are by position Copper sheet 7 and aluminium alloy plate 8 inside and outside flue 1 form, and aluminum alloy coil is set between copper sheet 7 and aluminium alloy plate 8, The phenomenon that flue 1 made of 7 material of copper sheet causes 1 thermal conductivity of flue and thermal diffusivity to substantially reduce because of easily oxidizable is eliminated, is protected Demonstrate,prove the thermal stability of flue 1；

Specifically, being welded after the aluminium alloy plate 8 at II 3 both ends of the flue ontology I 2 and flue ontology and 7 bending of copper sheet fitting It is connected in one, is fixed with T-type connector 10 and flue ontology between the aluminium alloy plate 8 and copper sheet 7 at 4 both ends of wing furnace gallbladder ontology I 2 and II 3 both ends of flue ontology be fixedly connected with T-type connector 10；Specifically, for horizontal-type high temperature furnace, the flue ontology I 2, the heat-dissipating pipe 9 for being convenient for 1 heat transfer of flue is equipped with inside flue ontology II 3 and four sides wing furnace gallbladder ontology 4；For vertical high-temperature Furnace is equipped with the heat dissipation convenient for 1 heat transfer of flue positioned at the flue ontology I 2 of 1 upper and lower position of flue and II 3 inside of flue ontology Pipe 9,1 novel in structural design of flue, 1 non-deformability of flue is strong, substantially increases the service life of flue 1；1 thermal diffusivity of flue is good, Workpiece consistency is good.

Above-described embodiment, the only preferred embodiment of the utility model are not used to limit the utility model practical range, Therefore all equivalence changes done with content described in the utility model claims, the utility model claims model should all be included in Within enclosing.

Claims (5)

1. being used for the Cu and Al combination type anti-deformation flue of high temperature furnace, have flue (1), tungsten is installed inside the flue (1) Heater (6) are equipped on the inside of metallic insulation screen (5) and tungsten metallic insulation screen (5), it is characterised in that: the flue (1) is by furnace Gallbladder ontology I (2), flue ontology II (3) and wing furnace gallbladder ontology (4) splice the fabricated structure being fixed with one, and flue ontology I (2), flue ontology II (3) and wing furnace gallbladder ontology (4) are the double-deck plate structure convenient for heat transfer, the flue ontology I (2), it is equipped with inside flue ontology II (3) and wing furnace gallbladder ontology (4) or flue ontology I (2) and flue ontology II (3) convenient for flue (1) heat-dissipating pipe (9) of heat transfer.

2. the Cu and Al combination type anti-deformation flue according to claim 1 for high temperature furnace, it is characterised in that: the flue Ontology I (2), flue ontology II (3) and wing furnace gallbladder ontology (4) are by the copper sheet (7) and aluminium alloy being located inside and outside flue (1) Plate (8) composition, and wing furnace gallbladder ontology (4) both ends are fixedly connected with flue ontology I (2) and flue ontology II (3) respectively, the copper Heat-dissipating pipe (9) are equipped between plate (7) and aluminium alloy plate (8) and heat-dissipating pipe (9) is fixedly welded on copper sheet (7) and aluminium alloy plate (8) Between.

3. the Cu and Al combination type anti-deformation flue according to claim 2 for high temperature furnace, it is characterised in that: the heat dissipation Managing (9) is aluminum alloy coil.

4. the Cu and Al combination type anti-deformation flue according to claim 3 for high temperature furnace, it is characterised in that: the flue It is welded as a whole after the aluminium alloy plate (8) and copper sheet (7) bending fitting at ontology I (2) and flue ontology II (3) both ends, the side Be fixed with T-type connector (10) between the aluminium alloy plate (8) and copper sheet (7) at flue ontology (4) both ends and flue ontology I (2) and Flue ontology II (3) both ends are fixedly connected with T-type connector (10).

5. the Cu and Al combination type anti-deformation flue according to claim 1 or 2 or 3 or 4 for high temperature furnace, feature exist In: for horizontal-type high temperature furnace, it is equipped with just inside the flue ontology I (2), flue ontology II (3) and four sides wing furnace gallbladder ontology (4) In the heat-dissipating pipe (9) of flue (1) heat transfer；For vertical high-temperature furnace, it is located at the flue ontology I (2) of flue (1) upper and lower position With the internal heat-dissipating pipe (9) being equipped with convenient for flue (1) heat transfer of flue ontology II (3).