CN209227044U - A kind of vacuum coating hydrogen purification device - Google Patents
A kind of vacuum coating hydrogen purification device Download PDFInfo
- Publication number
- CN209227044U CN209227044U CN201822004513.6U CN201822004513U CN209227044U CN 209227044 U CN209227044 U CN 209227044U CN 201822004513 U CN201822004513 U CN 201822004513U CN 209227044 U CN209227044 U CN 209227044U
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- Prior art keywords
- hydrogen
- water
- pipeline
- drying device
- water removal
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
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- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The utility model relates to technology for hydrogen purification fields, especially a kind of vacuum coating hydrogen purification device, it is characterized by: being also provided with moisture ingress in the coating chamber, there is heater in the water removal drying device, pass through independent pipeline connection between the water removal drying device and the hydrogen inlet and the moisture ingress respectively；The control valve of control piper connected state is respectively provided on pipeline and its pipeline between the moisture ingress between the water removal drying device and the hydrogen inlet.The utility model has the advantages that: easy to operate, high degree of automation；The hydrogen purity produced is high；The regeneration cost for removing water drying device is low, favorable regeneration effect；Leakproofness is strong.
Description
Technical field
The utility model relates to technology for hydrogen purification field, especially a kind of vacuum coating hydrogen purification device.
Background technique
To realize that the physical deposition process of accurate film uses hydrogen as reaction gas, technique requires pole to gas purity
Height produces the advantages that being use, safety and environmental protection, can be recycled using water electrolysis hydrogen producing, but water electrolysis hydrogen producing output impurity is main
For aqueous vapor.
The removal common technological means of aqueous vapor has at present: being manually operated and is automatically brought into operation.
Manual operation, this method carry out aqueous vapor absorption using related adsorbent, need replacing when adsorbent saturation
Adsorbent, to guarantee the hydrogen purity of output.But manual operation has the following disadvantages: 1, needs periodically visually inspection silica gel
Color, confirmation adsorbent whether adsorption saturation, the degree of automation is low；2, corrective maintenance or it is standby when, hydrogen in pipeline
Purity can decline, and will affect next Product Process.
Be automatically brought into operation, this method realizes the automatic switchover of two groups of clarifiers by PSA pressure-variable adsorption mode: 1, this method needs
Two groups of clarifiers are installed to switch over, No. 1 clarifier works, and No. 1 clarifier is regenerated, and system is complex.2,
The multiple groups valve and switching circuit for needing to install switching clarifier are also easy to produce sealing leak problem, and system cost is high；3, it needs
Consider the type and emptying design problem of purge gas.
Summary of the invention
The purpose of this utility model is to provide a kind of vacuum coating hydrogen purification according to above-mentioned the deficiencies in the prior art
Device guarantees the hydrogen degree of purity being passed through in coating chamber by removing water the automatic regeneration of drying device.
The utility model aim realization is completed by following technical scheme:
A kind of vacuum coating hydrogen purification device, for being passed through the hydrogen to coating chamber, in the coating chamber
Hydrogen inlet is offered, the hydrogen inlet is connected with a hydrogen formation apparatus, and the hydrogen formation apparatus includes at least hydrogen
Supply unit and water removal drying device, it is characterised in that: moisture ingress is also provided in the coating chamber, the water removal is dry
There is heater in dry device, pass through respectively between the water removal drying device and the hydrogen inlet and the moisture ingress
Independent pipeline connection；It is described water removal drying device and the hydrogen inlet between pipeline and itself and the moisture ingress it
Between pipeline on be respectively provided with the control valve of control piper connected state.
The hydrogen supply unit is electrolysis generating unit；The hydrogen formation apparatus further includes moisture trap and deoxygenation
Device；Wherein water receiving and its outlet and the moisture trap pass through pipeline connection, the air water outside the electrolysis generating unit
By pipeline connection, the outlet of the deaerating plant and the water removal drying device are logical for the outlet of separator and the deaerating plant
Cross pipeline connection.
The electrolysis generating unit further includes small pump, water tank, liquidometer, pressure controller, wherein the small pump connects
Enter in the water tank, by pipeline connection, the moisture trap bottom is begun with for the water tank and the electrolysis generating unit
One water outlet, the water outlet are connected with the water tank, and the liquidometer is used to monitor the liquid level in the water tank, the pressure
Force controller is used to control the pressure of the moisture trap.
Mass flowmenter is additionally provided on pipeline between the water removal drying device and the hydrogen inlet.
The coating chamber refers to the coating chamber for being connected with molecular pump.
The utility model has the advantages that: easy to operate, high degree of automation；The hydrogen purity produced is high；The dry dress of water removal
The regeneration cost set is low, favorable regeneration effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Specific embodiment
The utility model feature and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing,
In order to the understanding of technical staff of the same trade:
As shown in Figure 1, in figure mark 1-17 respectively indicate are as follows: small pump 1, liquidometer 2, water tank 3, electrolysis generating unit 4,
Moisture trap 5, pressure controller 6, deaerating plant 7, flow controlling unit 8, water removal drying device 9, control valve 10, control
Valve 11, mass flowmenter 12, control valve 13, coating chamber 14, molecular pump 15, Hydrogen Line 16, steam pipeline 17.
Embodiment: as shown in Figure 1, the vacuum coating in the present embodiment is used for hydrogen purification device into coating chamber 14
Feed is used as the hydrogen of process gas, including hydrogen formation apparatus, the hydrogen formation apparatus include hydrogen supply unit and water removal
Drying device, wherein hydrogen supply unit generates hydrogen by the method for electrolysis water, and removes water drying device and be then used for electrolysis
Gas caused by water carries out water removal drying, is passed through the gas in coating chamber 14 as the hydrogen of high cleanliness to guarantee.
Hydrogen formation apparatus further includes a deaerating plant 7, and deaerating plant 7 is the intracorporal oxygen of gas caused by removal electrolysis water
The device of gas, to improve the degree of purity of hydrogen.It is provided with molecular pump 15 at coating chamber 14, is used under 15 conventional sense of molecular pump
The process gas included when aspirating coating chamber 14 in plated film.
As shown in Figure 1, hydrogen formation apparatus further includes small pump 1, water tank 3, electrolysis generating unit 4, moisture trap 5.
Small pump 1 is connected with water tank 3 by a pipeline, and small pump 1 can inject water into automatically in water tank 3.Liquid is equipped in the side of water tank 3
Position meter 2, the liquidometer 2 is for the water level in real-time monitoring water tank 3, to be mended according to the water control small pump 1 in water tank 3
Water.The water outlet of water tank 3 is connected by pipeline with electrolysis generating unit 4, and water tank 3 injects water into electrolysis generating unit 4.Electrolysis hair
It is equipped with anode and cathode in raw unit 4, after energization, water is electrolysed as hydrogen and oxygen.It is electrolysed generating unit 4 and moisture trap
5 are connected, and are electrolysed generating unit 4 for hydrogen and oxygen and are fed to moisture trap 5 by pipeline.By being electrolysed 4 institute of generating unit
The hydrogen and oxygen for for sending contain moisture, and moisture trap 5 is for separating and passing through this partial moisture out of gas
The water outlet and respective line that its bottom is opened up are recycled in water tank 3, to realize the reuse of raw material.Moisture trap 5
Top begin with gas vent, the hydrogen outlet by pipeline access deaerating plant 7 in, moisture trap 5 will be removed water tentatively
Hydrogen and oxygen afterwards is passed through in deaerating plant 7, and deaerating plant 7 spends removal oxygen fraction therein.The bottom of deaerating plant 7
Equipped with gas outlet, which is accessed in water removal drying device 9 by pipeline, and hydrogen injection is removed water dry dress by deaerating plant 7
It sets in 9, water removal drying device 9 is further removed water and dried to hydrogen, so that the high hydrogen of degree of purity be made.Deoxygenation dress
It sets the pipeline between 7 and water removal drying device 9 and is equipped with a flow controlling unit 8, deoxygenation in control injection water removal drying device 9
The flow of hydrogen afterwards.
It removes water and is equipped with gas outlet at the top of drying device 9, coating chamber 14 is equipped with hydrogen inlet and moisture ingress, and hydrogen enters
Mouth is located at the top of moisture ingress.The gas outlet and the hydrogen inlet of coating chamber 14 are connected by Hydrogen Line 16, be used for
High cleanliness hydrogen is passed through in coating chamber 14.The gas outlet and the moisture ingress of coating chamber 14 pass through 17 phase of steam pipeline
Even, for being passed through steam into coating chamber 14.Hydrogen Line 16 is equipped with control valve 10, mass flowmenter 12, control valve
Door 13, control valve 10 and control valve 13 are used to control the opening and closing of Hydrogen Line 16, and mass flowmenter 12 is used to control to be passed through
The flow of high-purity hydrogen in coating chamber 14.Steam pipeline 17 is equipped with control valve 11, for controlling steam pipeline 17
Opening and closing.Mass flowmenter 12 is interacted with control system configuration information, reaches specified value to hydrogen flowing quantity, control system issues
Stop plated film and produces the instruction of hydrogen.The bottom of coating chamber 14 is equipped with the molecular pump 15 as vacuumizing part, for purging out
Steam into coating chamber 15.
The upper end of moisture trap 5 is equipped with pressure controller 6, for controlling the stability of hydrogen transmission.
The specific operation method is as follows:
1) when plated film, start small pump 1, molecular pump 15；Open flow controlling unit 8, control valve 10, control valve
13, mass flowmenter 12；Closing control valve 11.
Small pump 1 is injected water into automatically in water tank 3；Water tank 3 injects water into electrolysis generating unit 4 by pipeline；Electrolysis hair
Hydrogen obtained is passed through moisture trap 5 by raw unit 4；Moisture trap 5 tentatively removes water hydrogen, and will separate
Water be back in water tank 3 through pipeline, realization recycles；Moisture trap 5 fills the hydrogen injection deoxygenation after preliminary water removal
7 are set, deaerating plant 7 removes water the hydrogen injection after deoxygenation to the hydrogen progress deoxygenation processing after preliminary water removal and by pipeline dry
Dry device 9, water removal drying device 9 carry out strength water removal to the hydrogen after deoxygenation, so that high-purity hydrogen be made；Molecular pump 5 is taken out
Suction makes coating chamber 14 be in vacuum state, and high-purity hydrogen injects in coating chamber 14 through Hydrogen Line 16, as Vacuum Deposition
Reaction gas when film.
2) mass flowmenter 12 records the flow information for the high-purity hydrogen being passed through in coating chamber 14 in real time, and by the letter
Breath passes to control system, reaches specified value to high-purity hydrogen throughput, control system issues the finger for stopping plated film and producing hydrogen
It enables.
3) when regeneration water removal drying device 9, heating regeneration is carried out using the heating device built in water removal drying device 9.Tool
Gymnastics is made: closing flow controlling unit 8, control valve 10, control valve 13；Open control valve 11.
The built-in heating device of water removal drying device 9 is heated, and the steam in water removal drying device 9 is removed, at this point, removing
Air pressure decline in water drying device 9.Flow controlling unit 8 is slightly opened, at this point, the air pressure in water removal drying device 9 is lower than
Air pressure in deaerating plant 7, therefore, hydrogen in deaerating plant 7 by flow controlling unit 8 enter water removal drying device 9 it
In and with steam pipeline 17 enter coating chamber 14, then siphoned away by the molecular pump 15 that coating chamber 14 is connected, it is ensured that plated film
The environment of chamber 14 is clean.
The present embodiment is in the specific implementation: other than the electrolysis generating unit in the present embodiment, steel cylinder hydrogen also can be used
Gas as hydrogen supply unit, at this point, by the outlet of steel cylinder hydrogen connection deaerating plant 7 with accessed to purifying plant it
In, improve the degree of purity of the hydrogen in its be fed to coating chamber 14.
Although above embodiments are elaborated referring to conception and embodiment of the attached drawing to the utility model aim,
But those skilled in the art will realize that still may be used in the case where no disengaging claim limits the precondition of range
To make various modifications and variations to the utility model, therefore will not repeat them here.
Claims (5)
1. a kind of vacuum coating hydrogen purification device is opened in the coating chamber for being passed through the hydrogen to coating chamber
Equipped with hydrogen inlet, the hydrogen inlet is connected with a hydrogen formation apparatus, and the hydrogen formation apparatus is supplied including at least hydrogen
Answer unit and water removal drying device, it is characterised in that: moisture ingress, the water removal drying are also provided in the coating chamber
There is heater, respectively by only between the water removal drying device and the hydrogen inlet and the moisture ingress in device
Vertical pipeline connection；It is described water removal drying device and the hydrogen inlet between pipeline and its between the moisture ingress
Pipeline on be respectively provided with the control valve of control piper connected state.
2. a kind of vacuum coating hydrogen purification device according to claim 1, it is characterised in that: the hydrogen supply is single
Member is electrolysis generating unit；The hydrogen formation apparatus further includes moisture trap and deaerating plant；Wherein the electrolysis occurs
The outer water receiving of unit and its outlet and the moisture trap pass through pipeline connection, the outlet of the moisture trap and the deoxygenation
Device passes through pipeline connection by pipeline connection, the outlet of the deaerating plant and the water removal drying device.
3. a kind of vacuum coating hydrogen purification device according to claim 2, it is characterised in that: the electrolysis occurs single
Member further includes small pump, water tank, liquidometer, pressure controller, wherein the small pump accesses in the water tank, the water tank with
For the electrolysis generating unit by pipeline connection, the moisture trap bottom begins with a water outlet, the water outlet and institute
It states water tank to be connected, the liquidometer is used to monitor the liquid level in the water tank, and the pressure controller is for controlling the gas
The pressure of separator.
4. a kind of vacuum coating hydrogen purification device according to claim 1, it is characterised in that: the dry dress of the water removal
It sets and is additionally provided with mass flowmenter on the pipeline between the hydrogen inlet.
5. a kind of vacuum coating hydrogen purification device according to claim 1, it is characterised in that: the coating chamber refers to
Be the coating chamber for being connected with molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822004513.6U CN209227044U (en) | 2018-12-02 | 2018-12-02 | A kind of vacuum coating hydrogen purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822004513.6U CN209227044U (en) | 2018-12-02 | 2018-12-02 | A kind of vacuum coating hydrogen purification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209227044U true CN209227044U (en) | 2019-08-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822004513.6U Active CN209227044U (en) | 2018-12-02 | 2018-12-02 | A kind of vacuum coating hydrogen purification device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209227044U (en) |
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2018
- 2018-12-02 CN CN201822004513.6U patent/CN209227044U/en active Active
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