CN209222817U - A kind of electronic grade chemicals bucket cleaning equipment - Google Patents

Abstract

The utility model relates to a kind of electronic grade chemicals bucket cleaning equipments, including bucket ontology, bucket bodies top is equipped with high efficiency particle air filter, bucket body interior is equipped with bucket cleaning chamber one, bucket cleaning chamber two, bucket cleaning chamber one, two rear of bucket cleaning chamber is equipped with air draft pipe, air draft pipe is connected to suction opening, bucket one internal upper part of cleaning chamber, which is equipped with outside bucket, cleans jet pipe one, lower part cleans bracket one by bucket and is equipped with bucket one in bucket cleaning chamber one, one bottom of bucket is equipped with cleaning sprayer one in bucket, bucket two internal upper part of cleaning chamber, which is equipped with outside bucket, cleans jet pipe two, lower part cleans bracket two by bucket and is equipped with bucket two in bucket cleaning chamber two, two bottoms of bucket are equipped with cleaning sprayer two in bucket, cleaning sprayer one in bucket, cleaning sprayer two is respectively protruding into bucket one in bucket, in bucket two；The utility model can prevent pollution of the space environment to electronic grade chemicals bucket, meet clean cleaning environment and improve production efficiency to meet the storage demand of electronic grade chemicals.

Description

A kind of electronic grade chemicals bucket cleaning equipment

[technical field]

The utility model relates to chemical cheaning technical field, specifically a kind of electronic grade chemicals bucket cleaning is set It is standby.

[background technique]

It is needed in large scale integrated circuit (IC) manufacture using a large amount of high-purity chemical product, such as RCA cleaning, wet etching Deng.With being constantly progressive for IC process technique, the particulate control in the packing of high pure electronic grade chemicals production is required also to get over Come higher.Most electronic grade chemicals much use the transport of 4L&20L standard drum, storage.Electronic grade chemicals are dispensed into 4L&20L It must be cleaned using high purity deionized water and high pure nitrogen before bucket.Currently used for 4L&20L used in electronic grade chemicals barrels For imported product, price is higher.And electronic grade chemicals production firm all can recycling and reusing, particle subconstiuent is multiple in recycling bin Miscellaneous, pollutant load is high.The particulate control ability of existing 4L&20L barrels of cleaning equipment is weak, and the degree of automation is low, trivial operations, Cleaning effect is poor, it is difficult to meet the recycling demand of the higher and higher high pure electronic grade chemical storage bucket of quality.

Therefore, electronic grade chemicals cleaning system is different from other cleaning systems, needs while improving the production efficiency Also need to meet the cleaning environment of ultra-clean, safer operability.So if new electronic grade chemicals 4L& can be developed 20L barrels of cleaning equipments will be had very important significance with meeting the demand.

[utility model content]

The purpose of this utility model seeks to solve above-mentioned deficiency and provide a kind of electronic grade chemicals bucket cleaning equipment, It can prevent pollution of the space environment to electronic grade chemicals bucket, meet clean cleaning environment, to meet electronic grade chemicals Storage demand, improve production efficiency.

A kind of electronic grade chemicals bucket cleaning equipment, including bucket ontology, bucket ontology top are designed to achieve the above object Portion is equipped with high efficiency particle air filter 1, and the bucket body interior is equipped with mutually isolated bucket cleaning chamber 1, bucket cleaning chamber 24, the high efficiency particle air filter 1 is connected to bucket cleaning chamber 1, bucket cleaning chamber 24 respectively, the bucket cleaning chamber one 3,24 rear of bucket cleaning chamber is equipped with air draft pipe 5, and the air draft pipe 5 is connected to the suction opening 2 at top, the exhausting Pipeline 5, suction opening 2, high efficiency particle air filter 1 form air circulation, and one 3 internal upper part of bucket cleaning chamber is equipped with clear outside bucket Jet pipe 1 is washed, lower part cleans bracket 1 by bucket and is equipped with bucket 1, one 17 bottom of bucket in the bucket cleaning chamber 1 Portion is equipped with cleaning sprayer 1 in bucket, and cleaning sprayer 1 protrudes into bucket 1 in the bucket, in the bucket cleaning chamber 24 Top, which is equipped with outside bucket, cleans jet pipe 2 19, and lower part cleans bracket 2 10 by bucket and is equipped with bucket in the bucket cleaning chamber 24 2 20,2 20 bottom of bucket is equipped with cleaning sprayer 2 24 in bucket, and cleaning sprayer 2 24 protrudes into bucket 2 20 in the bucket, institute Bucket 1, the equal upside down of bucket 2 20 are stated, jet pipe 1, bucket are cleaned outside the bucket, and cleaning jet pipe 2 19 is respectively used to cleaning barrel outside One 17, outside bucket 2 20, cleaning sprayer 1 in the bucket, in bucket cleaning sprayer 2 24 respectively to bucket 1, bucket 2 20 inside Cleaning.

Further, the bucket cleaning chamber 1,24 lower section of bucket cleaning chamber are equipped with drain cavity 6, the exhaust chamber Body 6 and 5 connection of air draft pipe.

Further, the bucket cleaning bracket 1 includes that bucket cleans trestle component 1, bucket cleans trestle component 2 12, The bucket cleaning trestle component 2 12 is annular base, and the bucket cleaning trestle component 1 is vertically arranged support frame, institute It states one 11 inside of bucket cleaning trestle component and is set as the arc matched with one 17 periphery of bucket, the bucket cleans trestle component 1 The angle for being used for fixing barrel one 17 middle and upper part and bung hole position is formed at top and lower part, and the bucket cleaning trestle component 1 is along week It is cleaned on trestle component 2 12 to bucket is distributed in.

Further, in the bucket cleaning spout on one 16 top of cleaning sprayer formed in enclose spray angles 1, periphery Spray angles 1, one 16 middle part of cleaning sprayer is disposed with drain and flows backwards protrusion 15 in the bucket, and protrusion 15 is flow backwards in the drain Higher than the bung hole of bucket 1.

Further, one 17 top of bucket is equipped with bucket and compresses bracket 8, and the bucket compresses bracket 8 for offsetting water spray shape At opposition, the bucket, which compresses, is equipped with cleaning barrel pressure gate 7 above bracket 8.

Further, bucket cleaning bracket 2 10 include bucket cleaning trestle component 3 21, bucket cleaning trestle component 4 22, Bucket cleaning bracket fixed rotating shaft 23, the bucket cleaning trestle component 3 21 are plate structure, and the bucket 2 20 is placed on bucket cleaning On trestle component 3 21, bucket cleaning 3 21 bottom side of trestle component is fixed with bucket cleaning bracket fixed rotating shaft 23, described On another inclined surface for being placed on bucket cleaning trestle component 4 22 in bucket cleaning 3 21 bottom of trestle component, the bucket cleans bracket zero Part 4 22 cleans trestle component 3 21 by being moved forward and backward jacking bucket.

Further, spray head amplification face 25 is installed on the cleaning spout on 2 24 top of cleaning sprayer in the bucket, it is described Spray angles 2 26 and peripheral spray angles 2 27 are enclosed in being formed in spray head amplification 2 24 top of cleaning sprayer in bucket of face 25.

The utility model compared with the existing technology, has the advantages that

(1) the utility model forms clean cleaning space by the environmental Kuznets Curves in internal environment space, can prevent sky Between pollution of the environment to electron level 4L&20L chemical barrel；

(2) for the utility model by specific 4L and 20L cleaning sprayer and 4L and 20 cleaning support assorteds, forming stabilization can The cleaning angle control leaned on can form the cleaning without dead angle to the cleaning in bucket, and cleanliness meets electricity inside the bucket after cleaning The storage demand of sub- grade chemicals；

(3) the utility model is inverted the scheme of cleaning by 4L and 20L and quick drain accelerates cleaning speed, improves life Efficiency is produced, high purity water and high pure nitrogen dosage reduce interests energy-saving and emission-reduction.

[Detailed description of the invention]

Fig. 1 is the positive structure schematic of the utility model；

Fig. 2 is the side structure schematic diagram of the utility model；

Fig. 3 is the structural schematic diagram of bucket one and bucket cleaning bracket one in the utility model；

Fig. 4 is the structural schematic diagram in Fig. 3 at bucket one；

Fig. 5 is the structural schematic diagram of bucket two and bucket cleaning bracket two in the utility model；

Fig. 6 is the structural schematic diagram in Fig. 5 at bucket two；

In figure: 1, high efficiency particle air filter 2, suction opening 3, bucket cleaning chamber 1, bucket cleaning chamber 25, exhaust column Road 6, drain cavity 7, cleaning barrel pressure gate 8, bucket compress bracket 9, bucket cleaning bracket 1, bucket and clean bracket 2 11, bucket Cleaning trestle component 1, interior encloses spray angles 1, peripheral spray angles 1, row at bucket cleaning trestle component 2 13 Liquid flow backwards protrusion 16, cleaning sprayer 1 in bucket, bucket 1, clean outside bucket jet pipe 1, clean outside bucket jet pipe 2 20, Bucket 2 21, bucket cleaning trestle component 3 22, bucket cleans trestle component 4 23, bucket cleans bracket fixed rotating shaft 24, clear in bucket It washes spray head 2 25, spray head amplification face 26, interior enclose spray angles 2 27, peripheral spray angles two.

[specific embodiment]

As shown in the picture, the utility model includes bucket ontology, and bucket bodies top is equipped with high efficiency particle air filter 1, bucket sheet Internal portion is equipped with mutually isolated bucket cleaning chamber 1, bucket cleaning chamber 24, and high efficiency particle air filter 1 cleans chamber with bucket respectively Body 1, bucket cleaning chamber 24 are connected to, and bucket cleaning chamber 1,24 rear of bucket cleaning chamber are equipped with air draft pipe 5, exhaust column Road 5 is connected to the suction opening 2 at top, and air draft pipe 5, suction opening 2, high efficiency particle air filter 1 form air circulation, and bucket cleans chamber One 3 internal upper part of body, which is equipped with outside bucket, cleans jet pipe 1, and lower part is cleaned bracket 1 by bucket and is equipped in bucket cleaning chamber 1 Bucket 1, one 17 bottom of bucket is equipped with cleaning sprayer 1 in bucket, and cleaning sprayer 1 protrudes into bucket 1 in bucket, and bucket cleans chamber 24 internal upper part of body, which is equipped with outside bucket, cleans jet pipe 2 19, and lower part is cleaned bracket 2 10 by bucket and is equipped in bucket cleaning chamber 24 Bucket 2 20,2 20 bottom of bucket is equipped with cleaning sprayer 2 24 in bucket, and cleaning sprayer 2 24 protrudes into bucket 2 20 in bucket, bucket 1, 2 20 equal upside downs of bucket clean jet pipe 1 outside bucket, jet pipe 2 19 is cleaned outside bucket are respectively used to cleaning barrel 1, outside bucket 2 20 Portion, cleaning sprayer 1 in bucket, in bucket cleaning sprayer 2 24 respectively to bucket 1,2 20 internal washing of bucket；Bucket cleaning chamber one 3,24 lower section of bucket cleaning chamber is equipped with drain cavity 6, drain cavity 6 and 5 connection of air draft pipe.

Wherein, bucket cleaning bracket 1 includes bucket cleaning trestle component 1, bucket cleaning trestle component 2 12, bucket cleaning branch Frame part 2 12 is annular base, and it is vertically arranged support frame that bucket, which cleans trestle component 1, and bucket cleans trestle component 1 Inside is set as the arc matched with one 17 periphery of bucket, and bucket cleans one 11 top of trestle component and lower part and formed and be used for fixing barrel The angle of one 17 middle and upper parts and bung hole position, bucket cleaning trestle component 1, which is evenly distributed, cleans trestle component 2 12 in bucket On；In bucket the cleaning spout on one 16 top of cleaning sprayer formed in enclose spray angles 1, peripheral spray angles 1, it is clear in bucket It washes one 16 middle part of spray head and is disposed with drain refluence protrusion 15, the bung holes that protrusion 15 is higher than bucket 1 are flow backwards in drain；One 17 tops of bucket Bracket 8 is compressed equipped with bucket, bucket compresses bracket 8 and forms opposition for offsetting water spray, and bucket, which compresses, is equipped with cleaning above bracket 8 Bucket pressure gate 7.

Bucket cleaning bracket 2 10 includes that bucket cleans trestle component 3 21, bucket cleans trestle component 4 22, bucket cleaning bracket is solid Determine shaft 23, it is plate structure that bucket, which cleans trestle component 3 21, and bucket 2 20 is placed on bucket cleaning trestle component 3 21, bucket cleaning 3 21 bottom side of trestle component is fixed with bucket cleaning bracket fixed rotating shaft 23, and bucket cleans another side in 3 21 bottom of trestle component In on the inclined surface of bucket cleaning trestle component 4 22, bucket cleans trestle component 4 22 and cleans bracket zero by being moved forward and backward jacking bucket Part 3 21；Spray head amplification face 25 is installed, spray head amplifies face 25 in bucket in bucket on the cleaning spout on 2 24 top of cleaning sprayer Spray angles 2 26 and peripheral spray angles 2 27 are enclosed in being formed in 2 24 top of cleaning sprayer.

The basic principle of the utility model are as follows: pure air is sent by high efficiency particle air filter 1 and enters 4L barrels of cleaning chambers Air is extracted out by suction opening 2 after body 1 and 20L barrels of cleaning chamber 24, forms clean cleaning space environment.Pass through 4L barrels The outer cleaning jet pipes 2 19 of outer cleaning jet pipe 1 and 20L barrels with 4L barrels in cleaning sprayer 2 24 in cleaning sprayer 1 and 20L barrels High purity water and high pure nitrogen are sprayed to clean and dry up bucket.Pass through 4L barrels of cleaning trestle components 1 and 4L barrels of cleaning trestle components 2 12 form specific 4L barrels of angles of cleaning.20L barrels of cleaning trestle components 3 21,20L barrels of cleaning trestle components 2 22,20L barrels it is clear It washes bracket fixed rotating shaft 23 and forms 20L barrels of angles of specific cleaning.By clear in cleaning sprayer 1 in 4L barrels specific and 20L barrels It washes spray head 2 24 and reaches cleaning without dead angle.

The utility model is made combined with specific embodiments below further explained below:

The utility model is sent into pure air to 4L barrels of cleaning chamber 1 and 20L barrels by high efficiency particle air filter 1 and is cleaned Cavity 24, then air circulation is formed by air draft pipe 5 and suction opening 2, keep 4L barrels of cleaning chamber 1 and 20L barrels of cleaning chambers 24 inside of body forms clean room environment, wherein air draft pipe 5 and 6 connection of drain cavity, and suction opening is formed in top raising and takes out Wind effect.It is installed outside 4L barrels of outer cleaning one 18 cleaning barrels of jet pipe 4L barrels of one 3 middle and upper parts of cleaning chamber, passes through 4L barrels of cleaning branch Frame part 1 and the fixed 4L bucket 1 of bucket cleaning bracket 1.One 17 upside down of 4L bucket, wherein 4L barrels of cleaning trestle components one 11 are evenly arranged on 4L barrels of cleaning trestle components 2 12, and 4L barrels of one 11 special designing upper and lower parts of cleaning trestle component form specific Fixed one 17 middle and upper part of 4L bucket of angle and bung hole position, cleaning angle vertical are fixed.Cleaning sprayer 1 is mounted on 4L in 4L barrels Bucket 1, which hits exactly bottom, to be goed deep into staving, and spray head top cleaning spout encloses spray angles 1 (13 °) and periphery spray by interior Cleaning is without dead angle in (32 °) the formation buckets of angle 1.Protrusion 15 is flow backwards in one 16 middle part arrangement drain of cleaning sprayer in 4L barrels, is higher by Bung hole 10mm, the high purity water and high pure nitrogen that spray head sprays can be discharged in time, while top cooperates 4L barrels of compression brackets 8, supports The water spray that disappears forms opposition, so that cleaning angle is always consistent.20L bucket 2 20 is placed on 20L barrels of cleaning brackets zero On part 3 21, bottom 20L barrels of cleaning trestle component 4 22, which can be moved forward and backward, jacks 20L barrels of cleaning trestle components 1, and 20L barrels 20L barrels of cleaning trestle components 1 are formed on the fixed 20L barrels of cleaning trestle components 1 of cleaning bracket fixed rotating shaft 23 Special angle allows 20L bucket 2 20 to be inverted to form required cleaning angle.Installation spray in 2 24 top of cleaning sprayer in 20L barrels Spray angles 2 26 (84 °) and peripheral spray angles 2 27 (40 °) are enclosed in head amplification face 25 in spray head top is formed, to 20L barrels 2 20 inside are formed to be cleaned without dead angle.Wherein, spray head amplification face 25 increases spray angle, cleaning effect more preferably, while 20L barrels Interior 2 24 lower part drain of cleaning sprayer is unaffected, and drain is quickly without dead angle.

The utility model is simultaneously not limited to the embodiments described above, and other any spirit without departing from the utility model are real Made changes, modifications, substitutions, combinations, simplifications under matter and principle, should be equivalent substitute mode, be included in practical Within novel protection scope.

Claims (7)

1. a kind of electronic grade chemicals bucket cleaning equipment, including bucket ontology, it is characterised in that: the bucket bodies top is equipped with height It imitates air filter (1), the bucket body interior is equipped with mutually isolated bucket cleaning chamber one (3), bucket cleaning chamber two (4), The high efficiency particle air filter (1) is connected to bucket cleaning chamber one (3), bucket cleaning chamber two (4) respectively, the bucket cleaning chamber One (3), bucket cleaning chamber two (4) rear are equipped with air draft pipe (5), and the suction opening (2) at the air draft pipe (5) and top is even Logical, the air draft pipe (5), suction opening (2), high efficiency particle air filter (1) form air circulation, the bucket cleaning chamber one (3) internal upper part is equipped with outside bucket and cleans jet pipe one (18), and bracket one is cleaned by bucket in the interior lower part of bucket cleaning chamber one (3) (9) bucket one (17) is installed, bucket one (17) bottom is equipped with cleaning sprayer one (16) in bucket, cleaning sprayer one in the bucket (16) it protrudes into bucket one (17), bucket cleaning chamber two (4) internal upper part is equipped with outside bucket and cleans jet pipe two (19), and the bucket is clear It washes cavity two (4) interior lower part and bucket two (20) is equipped with by bucket cleaning bracket two (10), bucket two (20) bottom is equipped with bucket Interior cleaning sprayer two (24), cleaning sprayer two (24) protrudes into bucket two (20) in the bucket, and the bucket one (17), bucket two (20) are equal Upside down, the bucket cleans jet pipe one (18), bucket outside, and cleaning jet pipe two (19) is respectively used to cleaning barrel one (17), bucket two outside (20) external, cleaning sprayer one (16) in the bucket, cleaning sprayer two (24) is internal to bucket one (17), bucket two (20) respectively in bucket Cleaning.

2. electronic grade chemicals bucket cleaning equipment as described in claim 1, it is characterised in that: the bucket cleaning chamber one (3), Drain cavity (6) are equipped with below bucket cleaning chamber two (4), the drain cavity (6) and air draft pipe (5) connection.

3. electronic grade chemicals bucket cleaning equipment as claimed in claim 1 or 2, it is characterised in that: the bucket cleans bracket one It (9) include bucket cleaning trestle component one (11), bucket cleaning trestle component two (12), bucket cleaning trestle component two (12) is ring Shape pedestal, bucket cleaning trestle component one (11) are vertically arranged support frame, in bucket cleaning trestle component one (11) Side is set as the arc matched with bucket one (17) periphery, and bucket cleaning trestle component one (11) top is formed with lower part to be used for The angle of fixing barrel one (17) middle and upper part and bung hole position, bucket cleaning trestle component one (11) is evenly distributed cleans in bucket On trestle component two (12).

4. electronic grade chemicals bucket cleaning equipment as claimed in claim 3, it is characterised in that: cleaning sprayer one in the bucket (16) the cleaning spout on top formed in enclose spray angles one (13), peripheral spray angles one (14), cleaning sprayer in the bucket It is disposed with drain in the middle part of one (16) to flow backwards raised (15), the bung hole that raised (15) are higher than bucket one (17) is flow backwards in the drain.

5. electronic grade chemicals bucket cleaning equipment as claimed in claim 3, it is characterised in that: bucket one (17) top is equipped with Bucket compression bracket (8), the bucket compress bracket (8) and form opposition for offsetting water spray, and the bucket compresses on bracket (8) Side is equipped with cleaning barrel pressure gate (7).

6. electronic grade chemicals bucket cleaning equipment as claimed in claim 1 or 2, it is characterised in that: the bucket cleans bracket two It (10) include that bucket cleans trestle component three (21), bucket cleaning trestle component four (22), bucket cleaning bracket fixed rotating shaft (23), it is described Bucket cleaning trestle component three (21) is plate structure, and the bucket two (20) is placed in bucket cleaning trestle component three (21), described Bucket cleaning trestle component three (21) bottom side is fixed with bucket cleaning bracket fixed rotating shaft (23), and the bucket cleans trestle component three (21) on another inclined surface for being placed on bucket cleaning trestle component four (22) in bottom, bucket cleaning trestle component four (22) passes through It is moved forward and backward jacking bucket cleaning trestle component three (21).

7. electronic grade chemicals bucket cleaning equipment as claimed in claim 6, it is characterised in that: cleaning sprayer two in the bucket (24) spray head amplification face (25) is installed, the spray head amplifies face (25) cleaning sprayer two in bucket on the cleaning spout on top (24) top formed in enclose spray angles two (26) and periphery spray angles two (27).