CN209214768U - A kind of Fabry-Perot interference type imaging spectrometer - Google Patents
A kind of Fabry-Perot interference type imaging spectrometer Download PDFInfo
- Publication number
- CN209214768U CN209214768U CN201920154347.XU CN201920154347U CN209214768U CN 209214768 U CN209214768 U CN 209214768U CN 201920154347 U CN201920154347 U CN 201920154347U CN 209214768 U CN209214768 U CN 209214768U
- Authority
- CN
- China
- Prior art keywords
- microlens array
- imaging spectrometer
- resonant cavity
- light
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model discloses a kind of Fabry-Perot interference type imaging spectrometers, including condenser lens, the first microlens array, F-P resonant cavity, the second microlens array and the detection camera set gradually；Target object is placed on the condenser lens side, and the light that target object issues focuses on the front focal plane of first microlens array by the condenser lens；The detection camera is located at the back focal plane of second microlens array；The condenser lens focuses on incident light on the front focal plane of first microlens array, incident light is incident in parallel in the F-P resonant cavity by first microlens array again, the directional light being emitted from the F-P resonant cavity is again incident on the second microlens array, and the emergent light of last second microlens array focuses on the detection camera.Its structure is simple, high resolution, and accuracy is high, and imaging performance is good.
Description
Technical field
The utility model relates to optical image technology fields, and in particular to a kind of Fabry-Perot interference type imaging spectral
Instrument.
Background technique
Imaging spectral technology is a kind of novel multi-vitamin technology for information acquisition for combining imaging technique and spectral technique, institute
To utilize the function of both the technical application novel imaging spectrometer set camera and spectrometer.It can detect target
The spectral information of each point in the three-dimensional spectral cube of scene, the i.e. image information of target scene and image.What spectrometer used
Light splitting technology directly affects performance, the complexity of structure, weight and volume of entire imaging spectrometer.Using relatively broad
Imaging spectrometer be mainly color dispersion-type and interference-type, but the width of the spectral resolution of color dispersion-type imaging spectrometer and entrance slit
Degree is inversely proportional, and therefore, to obtain higher spectral resolution, just need to constantly reduce the width of slit, can thus make by whole
The energy of a system is very low, very low so as to cause detectivity.With the spatial resolution, spectrally resolved to imaging spectrometer
Rate and higher and higher to performance requirements such as the detectivities of weak signal, and the interference type imaging spectrometer of interference technique is utilized to exist
Have many advantages, such as high-resolution and high-energy utilization rate in principle, can satisfy higher and higher application demand.
Interference type imaging spectral technology can be divided into double beam interferometry and multiple beam interferometry, based on multiple beam interferometry compared with
To be typically exactly Fabry-Perot (Fabry-Perot) light splitting technology.The device of F-P interferometer is to be coated with height instead by two pieces
The plate composition of film is penetrated, light multiple reflections and refraction between two plates form multiple-beam interference, so it has high spectrum
Resolution ratio.Jarkko Antila et al. and Neelam Gupta et al. has developed a kind of based on micro electro mechanical system (MEMS) technology respectively
F-P interferometer, the F-P interferometer focus on controlling the airspace between two reflecting mirrors, and then control using micro-electromechanical technology
The size, weight and consumed power of hyperspectral imager can be effectively reduced in system filtering selection, this micro electromechanical structure,
It also can be reduced the cost of design and processing etc..Anbang Fu et al. proposes a kind of tunable fabry-perot EO-1 hyperion
Imaging interferometer, which is adjusted by the electric signal of low amplitude is filled in liquid crystal material in Fabry-Perot interference chamber
Refractive index recycles film matrix equation, can calculate the infrared spectral characteristic being emitted from F-P resonant cavity.Aalto
University promotion 3U-cubesat project, wherein being exactly to the structure for the imaging spectrometer that earth surface is detected
Based on a tunable fabry-perot interferometer and a RGB three-channel CMOS image sensor.Changed using piezoelectric ceramics
It is long to become chamber, to achieve the effect that filtering.
The key problem in technology of above-mentioned F-P interferometer is all how to improve reflectivity between parallel chamber and how more accurate must control
The depth of parallelism of two parallel chambers is made, to obtain higher resolution ratio and spectral region.But spectral resolution still only has 10nm
Left and right, the main reason is that any imaging point all corresponds to the incident ray of certain angle of divergence in the imaging system in single aperture, and
The spectral resolution of fabry perot interferometer is again extremely sensitive to the angle of divergence of incident light, therefore resolution ratio can decline.Such as Fig. 1
It is shown, it is traditional Fabry-Perot interference spectrometer architecture schematic diagram.The F- being made of the first hysteroscope G1 and the second hysteroscope G2
Respectively placed one piece of lens L, L before and after P resonant cavity ', lens L is used to incident light being incident on F-P resonant cavity, lens L ' in parallel
It is imaged for will be focused on detection camera from the multi-beam interference being emitted in F-P resonant cavity, this structure is incident on FP chamber
Light ray parallel it is preferable, thus available higher resolution ratio.But this structure is for when being imaged, different picture points are corresponding
Different incidence angles.Under certain chamber elongate member, received wavelength will be inconsistent in different picture points, this just will increase spectrogram
As the difficulty of post-processing.In addition, the control structure of the Fabry-Perot imaging spectrometer based on MEMS is more multiple
It is miscellaneous, various micro mechanical devices are required accurate.And also have very high requirement to the selection of reflectance coating, generally speaking, technology is complicated
It spends higher.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of Fabry-Perot interference type imaging spectrometer, knots
Structure is simple, high resolution, and accuracy is high, and imaging performance is good.
In order to solve the above-mentioned technical problem, the utility model provides a kind of Fabry-Perot interference type imaging spectrometer,
Including condenser lens, the first microlens array, F-P resonant cavity, the second microlens array and the detection camera set gradually；Target
Object is placed on the condenser lens side, and it is micro- that the light that target object issues by the condenser lens focuses on described first
On the front focal plane of lens array；The detection camera is located at the back focal plane of second microlens array；
Wherein, the condenser lens focuses on incident light on the front focal plane of first microlens array, then passes through institute
It states the first microlens array and incident light is incident in parallel in the F-P resonant cavity, the directional light being emitted from the F-P resonant cavity
It is again incident on the second microlens array, the emergent light of last second microlens array focuses on the detection camera.
Preferably, abacus is arranged on the front focal plane of first microlens array, the orifice plate to prime picture into
Row discrete sampling.
Preferably, second microlens array and the first microlens array are equipped with.
Preferably, the detection camera includes multiple pixels, the light focusing through second microlens array
On pixel.
Preferably, the detection camera is CCD or CMOS.
Preferably, first microlens array and the second microlens array are all one-dimensional microlens array.
Preferably, first microlens array and the second microlens array are all two-dimensional array of micro-lenses.
Preferably, the detection camera is that two-dimensional CCD detects camera or two-dimentional CMOS array detects camera.
Preferably, the F-P resonant cavity is tunable F-P resonant cavity.
The utility model has the beneficial effects that
1, it can be incident on F-P resonant cavity strictly parallelly by the directional light of the first microlens array in the utility model
On, by the multiple reflections in F-P resonant cavity and refraction, the directional light of outgoing focuses on spy using the second microlens array
It surveys at the corresponding pixel of camera, high resolution, accuracy is high, and spectrometer imaging characteristic is good.
2, the spectrometer of the utility model has the parallel angular being incident in F-P resonant cavity and strictly controls, can be with
It impinges perpendicularly on directional light in F-P resonant cavity, in this case, is more advantageous to F-P resonant cavity and plays its hyperfine light of acquisition
The performance of spectrum, so as to greatly improve the resolution ratio of this kind of F-P interference type imaging spectrometer.
3, the volume very little of the utility model microlens array, the complexity of device not will increase, and can but make entire light
The performance of spectrometer improves.
4, the spectrometer in the utility model due to its optical element it is less, added in F-P resonant cavity respectively convenient for the later period
Kind effectively control the F-P resonant cavity depth of parallelism and improve F-P resonant cavity reflectivity tunable devices, can repacking space it is big.
Detailed description of the invention
Fig. 1 is Fabry-Perot interference spectrometer architecture schematic diagram traditional in background technique；
Fig. 2 is the structural schematic diagram of the utility model；
Fig. 3 is the structural schematic diagram that orifice plate is arranged in the utility model on the front focal plane of the first microlens array.
Figure label explanation: 10, condenser lens；20, the first microlens array；21, front focal plane；22, orifice plate；30, F-P is humorous
Shake chamber；40, the second microlens array；50, camera is detected；51, pixel；60, target object.
Specific embodiment
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, so that those skilled in the art
The utility model may be better understood and can be practiced, but illustrated embodiment is not as the restriction to the utility model.
Referring to shown in Fig. 2-Fig. 3, the utility model discloses a kind of Fabry-Perot interference type imaging spectrometers, including
Condenser lens 10, the first microlens array 20, F-P resonant cavity 30, the second microlens array 40 and the detection camera set gradually
50.Target object 60 is placed on the side of condenser lens 10, and the light that target object 60 issues focuses on the by condenser lens 10
On the front focal plane 21 of one microlens array 20.Detection camera 50 is located at the back focal plane of the second microlens array 40.
The light that target object 60 issues is incident on condenser lens 10, and that incident light focused on first is micro- for condenser lens 10
On the front focal plane 21 of lens array 20.In this way, light, after the first microlens array, it is humorous that emergent light is incident on F-P in parallel
It shakes on chamber 30, the directional light being emitted from F-P resonant cavity 30 is again incident on the second microlens array 40, the second last lenticule battle array
The emergent light of column 40 focuses on detection camera 50.Detecting camera 50 includes multiple pixels 51, through the second microlens array 40
Light focusing on each corresponding pixel 51.
In the utility model, each lenticule in microlens array being a little converted into parallel light emergence as upper,
And as the exit direction of the light of upper each point is parallel.
Second microlens array 40 and the first microlens array 20 are equipped with.First microlens array 20 and second is micro-
There are the matched relationships of aligned in position and aperture between lens array 40.
In the present embodiment, CCD or COMS is can be selected in detection camera 50.F-P resonant cavity is tunable F-P resonant cavity.
In the utility model, the first microlens array 20 and the second microlens array 40 can be all one-dimensional microlens array,
It can also be all two-dimensional array of micro-lenses.When the first microlens array 20 and the second microlens array 40 are all two-dimensional array of micro-lenses
When, detection camera 50 is that two dimensional CCD array detects camera or two dimension COMS array detection camera, can so acquire two-dimension spectrum
Image.
In another embodiment, on the basis of the above embodiments, it is set on the front focal plane 21 of the first microlens array 20
It is equipped with orifice plate 22.As shown in figure 3, the spectrometer architecture schematic diagram of abacus 22 is arranged for the utility model.Orifice plate 22 is located at the
On the front focal plane 21 of one microlens array 20, multiple aperture diaphragms are provided on orifice plate 22, aperture diaphragm can carry out prime picture
Discrete sampling can so filter out some stray lights, improve spectrometer image quality.
In the utility model, F-P resonant cavity is the abbreviation of Fabry-Perot cavity.
Embodiment described above is only preferred embodiments for fully illustrating the utility model, the utility model
Protection scope it is without being limited thereto.Those skilled in the art made equivalent substitute or change on the basis of the utility model
It changes, both is within the protection scope of the present invention.The protection scope of the utility model is subject to claims.
Claims (9)
1. a kind of Fabry-Perot interference type imaging spectrometer, which is characterized in that including set gradually condenser lens, first
Microlens array, F-P resonant cavity, the second microlens array and detection camera；Target object is placed on the condenser lens side,
The light that target object issues focuses on the front focal plane of first microlens array by the condenser lens；The detection phase
Machine is located at the back focal plane of second microlens array；
Wherein, the condenser lens focuses on incident light on the front focal plane of first microlens array, then passes through described the
Incident light is incident in the F-P resonant cavity by one microlens array in parallel, and the directional light being emitted from the F-P resonant cavity reenters
It is mapped on the second microlens array, the emergent light of last second microlens array focuses on the detection camera.
2. imaging spectrometer as described in claim 1, which is characterized in that be arranged on the front focal plane of first microlens array
Abacus, the orifice plate carry out discrete sampling to prime picture.
3. imaging spectrometer as described in claim 1, which is characterized in that second microlens array and the first lenticule battle array
Column are equipped with.
4. imaging spectrometer as described in claim 1, which is characterized in that the detection camera includes multiple pixels, through institute
The light focusing of the second microlens array is stated on pixel.
5. imaging spectrometer as described in claim 1, which is characterized in that the detection camera is CCD or CMOS.
6. imaging spectrometer as described in claim 1, which is characterized in that first microlens array and the second lenticule battle array
Column are all one-dimensional microlens array.
7. imaging spectrometer as described in claim 1, which is characterized in that first microlens array and the second lenticule battle array
Column are all two-dimensional array of micro-lenses.
8. imaging spectrometer as claimed in claim 7, which is characterized in that the detection camera be two-dimensional CCD detect camera or
Two-dimentional CMOS array detects camera.
9. imaging spectrometer as described in claim 1, which is characterized in that the F-P resonant cavity is tunable F-P resonant cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920154347.XU CN209214768U (en) | 2019-01-29 | 2019-01-29 | A kind of Fabry-Perot interference type imaging spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920154347.XU CN209214768U (en) | 2019-01-29 | 2019-01-29 | A kind of Fabry-Perot interference type imaging spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209214768U true CN209214768U (en) | 2019-08-06 |
Family
ID=67467655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920154347.XU Active CN209214768U (en) | 2019-01-29 | 2019-01-29 | A kind of Fabry-Perot interference type imaging spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209214768U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632099A (en) * | 2019-01-29 | 2019-04-16 | 苏州大学 | A kind of Fabry-Perot interference type imaging spectrometer |
| CN111122510A (en) * | 2019-11-08 | 2020-05-08 | 桂林电子科技大学 | Transmission type orthogonal polarization phase microscopic imaging device based on F-P interferometer |
| WO2021196744A1 (en) * | 2020-03-31 | 2021-10-07 | 北京科益虹源光电技术有限公司 | Laser spectrum online measurement device and method |
-
2019
- 2019-01-29 CN CN201920154347.XU patent/CN209214768U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632099A (en) * | 2019-01-29 | 2019-04-16 | 苏州大学 | A kind of Fabry-Perot interference type imaging spectrometer |
| CN109632099B (en) * | 2019-01-29 | 2023-12-15 | 苏州大学 | Fabry-Perot interference imaging spectrometer |
| CN111122510A (en) * | 2019-11-08 | 2020-05-08 | 桂林电子科技大学 | Transmission type orthogonal polarization phase microscopic imaging device based on F-P interferometer |
| WO2021196744A1 (en) * | 2020-03-31 | 2021-10-07 | 北京科益虹源光电技术有限公司 | Laser spectrum online measurement device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209214768U (en) | A kind of Fabry-Perot interference type imaging spectrometer | |
| US11924396B2 (en) | Non-mechanical beam steering assembly | |
| US11209664B2 (en) | 3D imaging system and method | |
| CN109716176B (en) | Light field imaging device and method for depth acquisition and three-dimensional imaging | |
| US7796316B2 (en) | Micro-optic shutter | |
| Geelen et al. | A snapshot multispectral imager with integrated tiled filters and optical duplication | |
| KR102507365B1 (en) | Method and system for multiple f-number lens | |
| CN109632099A (en) | A kind of Fabry-Perot interference type imaging spectrometer | |
| CN103472592B (en) | A kind of fast high-throughout polarization imaging method of illuminated and polarization imager | |
| WO2016191367A1 (en) | Rapid and precise optically multiplexed imaging | |
| JP2013501930A (en) | Multispectral imaging | |
| KR100508846B1 (en) | Multicolor staring sensor system | |
| US9253420B2 (en) | Hyperspectral single pixel imager with fabry perot filter | |
| US20220141446A1 (en) | System and method for glint reduction | |
| WO2020015025A1 (en) | Compact spectrometer having reflective wedge structure | |
| RU2431876C2 (en) | Three-dimensional image camera with photomodulator | |
| US20200132277A1 (en) | Tunable spectral illuminator for camera | |
| NL2015804B1 (en) | Hyperspectral 2D imaging device. | |
| EP3874243A2 (en) | Hyper-spectral camera comprising tunable spectral illuminator | |
| CN114967165B (en) | Wavefront sensing system adopting dual-channel polarization coding and wavefront information decoding method | |
| EP4058762A1 (en) | Tunable spectral illuminator for camera | |
| US20220381961A1 (en) | Optical system with a filter element | |
| CN116183024B (en) | Spectrum imager based on fusion imaging is cut apart with spectral band to visual field | |
| Guérineau et al. | Micro-camera and micro-spectrometer designs adapted to large infrared focal plane arrays | |
| Drysdale | Plasmonic angle sensitive pixel for digital imagers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |