CN209199885U - A kind of semiconductor production workshop sink table - Google Patents
A kind of semiconductor production workshop sink table Download PDFInfo
- Publication number
- CN209199885U CN209199885U CN201822084704.8U CN201822084704U CN209199885U CN 209199885 U CN209199885 U CN 209199885U CN 201822084704 U CN201822084704 U CN 201822084704U CN 209199885 U CN209199885 U CN 209199885U
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- Prior art keywords
- sink
- support frame
- shaft
- semiconductor production
- production workshop
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 230000003014 reinforcing effect Effects 0.000 claims description 8
- 238000010276 construction Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 17
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to shop supplies technical fields, in particular a kind of semiconductor production workshop sink table, sink including support frame and above support frame, edge at the top of the rear and front end of support frame is provided with fixing seat, top of support frame is provided with top plate, empty avoiding mouth is offered at the leftward position of top plate top surface, sink is overlapped on the top surface of top plate, jack up unit is provided at the top of support frame, jack up unit includes shaft, corner block and connecting rod, several idler wheels are installed on corner block, the semiconductor production workshop sink table, pass through the overhead guard of setting, prevent cleaning solution from sputtering everywhere, staff is facilitated by the way that the jack up unit at the top of support frame is arranged in move sink.
Description
Technical field
The utility model relates to shop supplies technical field, specially a kind of semiconductor production workshop sink table.
Background technique
Semiconductor technology refers to the various technologies of semiconductor machining, growing technology, film deposition, photoetching including wafer,
The technologies such as etching, doping techniques and process integration generally require the semiconductor device to processing in the workshop of semiconductor
It is cleared up, to remove the various spots of process generation, mostly semiconductor device is cleared up using sink table at present, water
Slot table is the desk for being equipped with sink, and when cleaning in sink table to semiconductor device, cleaning solution can sputter everywhere, is influenced
Working environment, while the cleaning solution for cleaning semiconductor device concentrate when arranging that need will be clear in the related sink of sink
Washing lotion carries out integral replacing, and the sink heavier-weight of cleaning solution is housed, and staff is not easy to move, in consideration of it, we
It is proposed a kind of semiconductor production workshop sink table.
Utility model content
The purpose of this utility model is to provide a kind of semiconductor production workshop sink tables, to solve above-mentioned background technique
When cleaning to semiconductor device of middle proposition, cleaning solution can sputter everywhere, influence working environment and equipped with cleaning solution
Sink heavier-weight, makes staff be not easy the problem of moving.
To achieve the above object, the utility model provides the following technical solutions:
A kind of semiconductor production workshop sink table, the sink including support frame and above support frame as described above, institute
It states the edge at the top of the rear and front end of support frame and is provided with fixing seat, support frame as described above top is provided with top plate, the top
Empty avoiding mouth is offered at the leftward position of plate top surface, the sink is overlapped on the top surface of the top plate, the top of support frame as described above
Portion is provided with jack up unit;
The jack up unit include with the fixing seat rotation connection shaft, be socketed in the shaft and with described turn
Several corner blocks that axis is fixedly connected and the connecting rod for being installed on the shaft front end, if being equipped with dry milling on the corner block
Wheel.
Preferably, the top of support frame as described above is closely welded with reinforcing rod, and the reinforcing rod is that two stocks closely weld
Made of cross-shaped structure.
Preferably, the top plate is in rectangular plate-like structure, and four edges on the top plate top are closely welded with gear
Side.
Preferably, the top of the top plate is provided with overhead guard, and the overhead guard is in oblong hollow-core construction, a left side for the overhead guard
It is hinged with a pair of of cover door at end position, handle is installed on the cover door, the top of the overhead guard offers through-hole.
Preferably, the tip of the axis that turns successively is passed through from two fixing seats, the rear end of the shaft and is leaned on
Be socketed with retaining ring at the position of the nearly shaft front end, the retaining ring is closely welded with the shaft, two retaining rings it
Between minimum range be greater than the maximum distance between two fixing seats.
Preferably, the corner block is closely welded with the shaft, offers mounting groove on the side end face of the corner block,
The idler wheel is installed in the mounting groove and is rotatablely connected with the mounting groove.
Preferably, the edge of the connecting rod front end face is closely welded with cross bar.
Compared with prior art, the utility model has the beneficial effects that
1. the semiconductor production workshop sink table, covers on inside for sink by the overhead guard being arranged on top plate, make half
Conductor part can avoid cleaning solution in cleaning and sputter everywhere, solve that when cleaning to semiconductor device, cleaning solution can be arrived
The problem of place sputters, and influences working environment;
2. the semiconductor production workshop sink table makes walking bar rod by the way that the jack up unit at the top of support frame is arranged in
Idler wheel can be made to lift the bottom of sink side, and facilitate staff to take out sink from top plate under the rolling of idler wheel
Out, and then sink is carried out entirety to remove, solves the sink heavier-weight equipped with cleaning solution, staff is made to be not easy to move
Dynamic problem.
Detailed description of the invention
Fig. 1 is the overall structure diagram of embodiment 1 in the utility model;
Fig. 2 is another structural schematic diagram of embodiment 1 in the utility model;
Fig. 3 is the overall structure diagram of embodiment 2 in the utility model;
Fig. 4 is the scheme of installation of jack up unit in the utility model;
Fig. 5 is the structural schematic diagram of jack up unit in the utility model;
Status diagram when Fig. 6 is jack up unit rotation in the utility model;
Fig. 7 is status diagram when jack up unit starts sink in the utility model.
In figure: 1, support frame;11, reinforcing rod;12, fixing seat;2, top plate;21, rib;22, empty avoiding mouth;3, sink;4,
Overhead guard;41, cover door;411, handle;42, through-hole;5, jack up unit;51, shaft;511, retaining ring;52, corner block;521, it installs
Slot;522, idler wheel;53, connecting rod;531, cross bar.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside",
The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for
Convenient for description the utility model and simplify description, rather than the equipment of indication or suggestion meaning or element must have specifically
Orientation is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
Embodiment 1
A kind of semiconductor production workshop sink table, as depicted in figs. 1 and 2, including support frame 1 and be located at support frame 1
The sink 3 of top, 1 top of support frame are provided with top plate 2, and sink 3 is overlapped on the top surface of top plate 2.
In the present embodiment, support frame 1 is welded by the stainless steel square tube of 40*40*1.5mm, and stainless steel has excellent
The chemical etchings dielectric corrosion performance such as the weak corrosive medium such as resistance to air, steam, water and acid, alkali, salt, the top of support frame 1 are tight
Close to be welded with reinforcing rod 11, reinforcing rod 11 is the cross-shaped structure that two stocks are closely welded, in the support of reinforcing rod 11
Under, so that top plate 2 is carried more weight.
Further, top plate 2 is the rectangular plate-like structure that thickness is 1mm, and top plate 2 and the top of support frame 1 are closely welded,
Four edges on 2 top of top plate are closely welded with rib 21, and sink 3 closely welds system by the stainless steel plate that wall thickness is 1mm
At when sink 3 is overlapped on top plate 2, rib 21 surrounds the bottom of sink 3, and anti-water stopping trough 3 slides from top plate 2.
Specifically, the top of top plate 2 is provided with overhead guard 4, overhead guard 4 is closely bonded by the acrylic board of 3mm thickness, overhead guard
4 be in oblong hollow-core construction, is hinged with a pair of of cover door 41 at the left position of overhead guard 4, is equipped with handle 411 on cover door 41, can
Easily cover door 41 is opened by handle 411, the top of overhead guard 4 offers through-hole 42, makes cover door 41 when closed, through-hole 42
Play ventilative effect.
Embodiment 2
In concrete operations, due to being equipped with 3 heavier-weight of sink of cleaning solution, staff is not easy to move, therefore,
Support frame 1 and top plate 2 are made improvements on the basis of embodiment 1, as a kind of preferred embodiment, as shown in Fig. 3 to Fig. 7,
Edge at the top of the rear and front end of support frame 1 is provided with fixing seat 12, offers empty avoiding at the leftward position of 2 top surface of top plate
Mouthfuls 22, the top of support frame 1 is provided with jack up unit 5, jack up unit 5 includes and fixing seat 12 is rotatablely connected shaft 51, set
It is connected in shaft 51 and several corner blocks 52 being fixedly connected with shaft 51 and the connecting rod 53 for being installed on 51 front end of shaft, triangle
Several idler wheels 522 are installed on block 52.
In the present embodiment, the end of shaft 51 is successively passed through from two fixing seats 12, the rear end of shaft 51 and close
Retaining ring 511 is socketed at the position of 51 front end of shaft, retaining ring 511 and shaft 51 are closely welded, between two retaining rings 511 most
Small distance is greater than the maximum distance between two fixing seats 12, is limited in shaft 51 between two fixing seats 12, anti-rotation stop
Axis 51 falls off from fixing seat 12.
Further, corner block 52 is in triangular prism structure, and shaft 51 passes through from a corner of corner block 52 and with three
Hornblock 52 closely welds, and offers mounting groove 521 on the side end face on corner block 52 far from shaft 51, idler wheel 522 is installed on
It is rotatablely connected in tankage 521 and with mounting groove 521, when shaft 51 rotates, shaft 51 drives corner block 52 to rotate, to make to roll
Wheel 522 is passed through from empty avoiding mouth 22 and is fitted with the bottom surface of sink 3, and with the rotation of corner block 52, corner block 52 drives rolling
Take turns 522 pairs of sinks 3 and generate and squeeze and start the side of 3 bottom of sink, keep sink 3 oblique, in order to sink 3 into
Row moves, and when moving sink 3, by the rolling of idler wheel 522, keeps the process moved more laborsaving.
Specifically, connecting rod 53 is closely welded on the front end of shaft 51, the edge far from shaft 51 on 53 front end face of connecting rod
It closely is welded with cross bar 531, shaft 51 can be shaken under the action of connecting rod 53 by holding cross bar 531, and make shaft
51 are rotated.
Be worth explanation when, after sink 3 is oblique, can push height with 21 height of rib identical cart to supporting
The left end of frame 1 can ride on cart after sink 3 moves out from top plate 2, and finally 3 entirety of sink is carried on cart.
The semiconductor production workshop of the utility model when in use, is initially grasped by with sink table and pull handle 411 will cover
Door 41 is opened, and then the semiconductor device cleaned is put into sink 3 and is cleaned, finally by half after the completion of cleaning
Conductor part takes out, and then catches handle 411 and closes cover door 41, completes the cleaning of semiconductor device.
When needing to carry out sink 3 whole move, cross bar 531 is held first and 51 pairs of cross bars 531 shake around the shaft
It is dynamic, rotate shaft 51 under the action of connecting rod 53 with the shake of cross bar 531, then as the rotation of shaft 51,
Shaft 51 drives corner block 52 to rotate, and under the rotation of corner block 52, the idler wheel 522 on corner block 52 is passed through from empty avoiding mouth 22
And fit with the bottom surface of sink 3, with the rotation of corner block 52, corner block 52 drives idler wheel 522 to generate sink 3 and squeezes simultaneously
The side of 3 bottom of sink is started, keeps sink 3 oblique, facilitates staff to move sink 3, finally make water
Slot 3 is skidded off from top plate 2.
Basic principles, main features, and advantages of the present invention has been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Be only the utility model preference, be not intended to limit the utility model, do not departing from the spirit and scope of the utility model
Under the premise of, the utility model also has various changes and improvements, these changes and improvements both fall within claimed it is practical
In novel range.The protection scope of the present invention is defined by the appended claims and their equivalents.
Claims (7)
1. a kind of semiconductor production workshop sink table, including support frame (1) and the sink being located above support frame as described above (1)
(3), it is characterised in that: the edge at the top of the rear and front end of support frame as described above (1) is provided with fixing seat (12), the support
Frame (1) top is provided with top plate (2), offers empty avoiding mouth (22), the sink at the leftward position of top plate (2) top surface
(3) it is overlapped on the top surface of the top plate (2), jack up unit (5) is provided at the top of support frame as described above (1);
The jack up unit (5) includes the shaft (51) being rotatablely connected with the fixing seat (12), is socketed on the shaft (51)
The upper and several corner blocks (52) being fixedly connected with the shaft (51) and the connecting rod for being installed on the shaft (51) front end
(53), several idler wheels (522) are installed on the corner block (52).
2. semiconductor production workshop sink table according to claim 1, it is characterised in that: the top of support frame as described above (1)
End is closely welded with reinforcing rod (11), and the reinforcing rod (11) is the cross-shaped structure that two stocks are closely welded.
3. semiconductor production workshop sink table according to claim 1, it is characterised in that: the top plate (2) is in rectangle
Four edges of plate structure, top plate (2) top are closely welded with rib (21).
4. semiconductor production workshop sink table according to claim 1, it is characterised in that: the top of the top plate (2)
It is provided with overhead guard (4), the overhead guard (4) is in oblong hollow-core construction, is hinged with a pair of of cover at the left position of the overhead guard (4)
Door (41) is equipped with handle (411) on the cover door (41), and the top of the overhead guard (4) offers through-hole (42).
5. semiconductor production workshop sink table according to claim 1, it is characterised in that: the end of the shaft (51)
It is successively passed through from two fixing seats (12), the rear end of the shaft (51) and the position close to the shaft (51) front end
The place of setting is socketed with retaining ring (511), and the retaining ring (511) and the shaft (51) are closely welded, two retaining rings (511) it
Between minimum range be greater than the maximum distance between two fixing seats (12).
6. semiconductor production workshop sink table according to claim 1, it is characterised in that: the corner block (52) and institute
It states shaft (51) closely to weld, be offered mounting groove (521) on the side end face of the corner block (52), idler wheel (522) peace
Loaded on being rotatablely connected in the mounting groove (521) and with the mounting groove (521).
7. semiconductor production workshop sink table according to claim 1, it is characterised in that: connecting rod (53) front end face
Edge be closely welded with cross bar (531).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822084704.8U CN209199885U (en) | 2018-12-12 | 2018-12-12 | A kind of semiconductor production workshop sink table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201822084704.8U CN209199885U (en) | 2018-12-12 | 2018-12-12 | A kind of semiconductor production workshop sink table |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209199885U true CN209199885U (en) | 2019-08-02 |
Family
ID=67428912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201822084704.8U Active CN209199885U (en) | 2018-12-12 | 2018-12-12 | A kind of semiconductor production workshop sink table |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN209199885U (en) |
-
2018
- 2018-12-12 CN CN201822084704.8U patent/CN209199885U/en active Active
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231230 Address after: 212400 Building 8, 102 Chongming West Road, Jurong Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Jingdu Semiconductor Technology Co.,Ltd. Address before: No. 102 Chongming West Road, Jurong Economic Development Zone, Zhenjiang City, Jiangsu Province, 212400 Patentee before: JIANGSU YIDU TECHNOLOGY Co.,Ltd. |