CN209194037U - High-temperature vacuum coating equipment resistance heater - Google Patents
High-temperature vacuum coating equipment resistance heater Download PDFInfo
- Publication number
- CN209194037U CN209194037U CN201821303251.7U CN201821303251U CN209194037U CN 209194037 U CN209194037 U CN 209194037U CN 201821303251 U CN201821303251 U CN 201821303251U CN 209194037 U CN209194037 U CN 209194037U
- Authority
- CN
- China
- Prior art keywords
- heater
- temperature
- resistance
- primary
- coating equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Surface Heating Bodies (AREA)
Abstract
The utility model relates to heater technical fields, more particularly, to a kind of high-temperature vacuum coating equipment resistance heater.It includes primary heater and multiple from heater；It is described to be disposed on the same plane from heater and the primary heater.High-temperature vacuum coating equipment resistance heater provided by the utility model, by the way that heater is divided into primary heater and from heater, primary heater is heated, temperature compensation is carried out from heater, and then realizes uniformly heated purpose, meets the demand of technique, improve the quality of product, the life and reliability of heater is also improved simultaneously, maintenance cost is reduced, has the effect of energy-saving and emission-reduction.
Description
Technical field
The utility model relates to semiconductor and heater technical fields, more particularly, to a kind of high-temperature vacuum coating equipment
Use resistance heater.
Background technique
High-temperature vacuum coating equipment, especially large scale equipment, temperature is high, and heating surface (area) (HS is big.
Heat protocol generallys use monoblock type resistance heater inside high-temperature vacuum equipment at present, passes through temperature sensor
Feedback signal is to control circuit for heater, to implement closed-loop control to internal vacuum environment.
When using monoblock type resistance heater, resistance wire fever itself is there are certain temperature gradient, temperature in addition
The limited amount of sensor accurately can not be measured and be precisely controlled, and the temperature uniformity of inner vacuum environment is poor, be produced to plated film
The quality of forming film of product adversely affects, and there are certain thermal stress and deformation for glass substrate；Simultaneously influence heater life and
Reliability, once heater failure, can only influence plant maintenance and production duration by shutting down device for disassembling replacement.
Utility model content
The purpose of this utility model is to provide a kind of high-temperature vacuum coating equipment resistance heaters, to solve existing skill
Technical problem present in art.
High-temperature vacuum coating equipment resistance heater provided by the utility model, including primary heater and multiple from heating
Device；
It is described to be disposed on the same plane from heater and the primary heater.
Further, described from heater using the primary heater as center annular spread.
Further, the heating surface (area) (HS of the primary heater is greater than the heating surface (area) (HS from heater.
Further, the primary heater includes the resistance heating wire that cover and Duo Gen can individually control heating temperature；
The resistance heating wire is arranged in the cover.
Further, the more resistance heating wires are centered on a wherein resistance heating wire, annular spread.
Further, the resistance heating wire is linear type；
The more resistance heating wires are arranged in parallel.
Further, the adjacent spacing between heater adds from far from the primary heater to close to the master
The spacing in hot device direction is incremented by.
Further, it is described from heater further include angle heater；
The angle heater and the primary heater and it is described from heater in the same plane；
The corner of the resistance heater is arranged in the angle heater.
Further, the primary heater and described temperature sensor is provided with below heater.
Further, high-temperature vacuum coating equipment resistance heater further includes temperature controller；
The temperature controller respectively with the primary heater, described connect from heater and the temperature sensor.
High-temperature vacuum coating equipment resistance heater provided by the utility model, by the way that heater is divided into primary heater
With from heater, primary heater is heated, and is carried out temperature compensation from heater, and then realize uniformly heated purpose, is met
The demand of technique, improves the quality of product, while also improving the life and reliability of heater, reduce maintenance at
This, has the effect of energy-saving and emission-reduction.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of high-temperature vacuum coating equipment resistance heater in the prior art；
Fig. 2 is the structural schematic diagram of high-temperature vacuum coating equipment resistance heater provided by the embodiment of the utility model；
Fig. 3 is that the multiring structure of high-temperature vacuum coating equipment resistance heater provided by the embodiment of the utility model is illustrated
Figure；
Fig. 4 is that the circular ring structure of high-temperature vacuum coating equipment resistance heater provided by the embodiment of the utility model is illustrated
Figure；
Fig. 5 is the angle heater locations of high-temperature vacuum coating equipment resistance heater provided by the embodiment of the utility model
Schematic diagram；
Fig. 6 is that the slave heater of high-temperature vacuum coating equipment resistance heater provided by the embodiment of the utility model is parallel
Distributing position schematic diagram.
Appended drawing reference:
1: heater cartridges；2: sheet glass；3: primary heater；4: from heater；5: angle heater.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In addition, term " first ", " second ", " third " are used for description purposes only, it is not understood to indicate or imply phase
To importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
As shown in attached drawing 2- Fig. 5, the utility model provides a kind of high-temperature vacuum coating equipment resistance heater, including
Primary heater 3 and multiple from heater 4；
It is described to be disposed on the same plane from heater 4 and the primary heater 3.
As shown in Figure 1, heater in the prior art, when being heated to glass, the heater cartridges 1 of rectangle
Side and top are equipped with heat insulation structural, and bottom is heat release areas, and substrate, that is, sheet glass 2 is transported to heater by transmission shaft
Lower section, heater pass through heat radiation under vacuum conditions and heat to sheet glass 2.
Due to resistance wire adstante febre itself, there are certain temperature gradient, in addition the limited amount of temperature sensor, it can not
Accurate measurement is precisely controlled, so that the quality of forming film to coated product exerts a certain influence.
To solve the above problems, in the present embodiment, by by heater by being entirely divided into muti-piece region, each piece of area
Domain is provided with individual temperature controller, and then can carry out individual computer heating control to each piece of area distribution, and then make
The heating temperature for obtaining each piece of region is not identical, so that heater, during being heated, whole heating is more
Uniformly.
In the present embodiment, it primary heater 3 and is disposed on the same plane from heater 4, the distance apart from sheet glass 2
It is identical, and then can be convenient for controlling by primary heater 3 and from the temperature of heater 4 to realize the heating temperature to different zones
Control.
Preferred embodiment is, it is described from heater 4 with the primary heater 3 for center annular spread.
In the present embodiment, primary heater 3 and as shown in Figures 2 and 3, the overall structure from the structure distribution of heater 4
It is set as rectangular, so that sheet glass 2, when lower section passes through, the heating at each position is all relatively uniform.
In addition, Multi-layered wound setting will be carried out from heater 4, and when heating, the heating temperature of the primary heater 3 of internal layer
Spend relatively low, the heating temperature of the slave heater 4 of outer layer successively increases, so that whole heating effect is more uniform.
In the present embodiment, primary heater 3 and the distribution from heater 4 can be direction as shown in Figures 2 and 3,
It is also possible to circle as shown in Figure 4, that is to say, that as long as it can carry out not same district by primary heater 3 and from heater 4
The independent heating in domain, so that the whole homogeneous heating below heater.
It should be pointed out that being rectangle or circle in the present embodiment primary heater 3 and from the shape of heater 4, but it is not
It is limited only to rectangle or circular shape, can also be the shapes such as triangle, trapezoidal, that is to say, that as long as it is not by
With the arrangement of position, so that the product that the needs passed through below heater heat, can be heated evenly when heated.
Preferred embodiment is that the heating surface (area) (HS of the primary heater 3 is greater than the heating surface (area) (HS from heater 4.
In the present embodiment, major part of the primary heater 3 as heating, heating surface (area) (HS are maximum, and from heater 4
Heating surface (area) (HS is relatively smaller, and then can carry out temperature benefit to the marginal position of primary heater 3 by realizing from heater 4
It repays, and then realizes the uniformity of temperature.
Preferred embodiment is that the primary heater 3 includes the electricity that cover and Duo Gen can individually control heating temperature
Hinder heater strip；
The resistance heating wire is arranged in the cover.
In the present embodiment, primary heater 3 and it is provided with more out of heater 4 can individually carry out heating temperature control
The resistance heating wire of system allows every resistance heating wire's heating temperature not identical, and then can be in the lower section of primary heater 3
Realize that different zones carry out different temperature heating, so that the production that the heater of monolithic can also heat the needs of lower section
Product, as sheet glass 2 is uniformly heated.
The mode individually controlled, which can be, controls every different resistance heating wire using different temperature controllers
System, i.e., be provided with temperature controller on each resistance heating wire, by the temperature requirements of different zones, to different electricity
Resistance heater strip carries out different temperature control, to reach uniformly heated purpose.
The mode individually controlled is also possible to through its heating of switch setting and does not heat two states progress temperature control,
That is, after upper resistance heating wire is arranged in different regions, when which reaches set temperature, the resistance in the region
Heater strip is not turned on, and when set temperature is not achieved in the temperature when the region, opens the resistance heating wire in the region, to reach uniform
The purpose of heating.
The mode individually controlled can also be to be controlled by the heating power of different resistance heating wires, i.e., will be different
Resistance heating wire uses the adding thermal resistance of different capacity, and the power that intermediate resistance heating wire is such as arranged in is relatively low, only
It is required to reach set temperature, the heating power of relatively outer resistance heating wire is relatively high, needs in slightly above
Between resistance heating wire and then reach uniformly heated purpose so that the temperature leak in outside can be supplemented.
It should be pointed out that there are many kinds of the modes individually controlled resistance heating wire, can be above-mentioned several
Kind mode, but it is not limited solely to above-mentioned several ways, can also be other independent control modes, that is,
It says, different resistance heating wires is individually controlled as long as can be realized, and then reach uniformly heated purpose.
Preferred embodiment is that the more resistance heating wires are centered on a wherein resistance heating wire, ring
Shape distribution.
The set-up mode of resistance heating wire in primary heater 3 is similar to the setting structure from heater 4, and with main heating
Device 3 and similar from the set-up mode between heater 4.
As Figure 2-Figure 5, primary heater can be interpreted as to a resistance heating wire, it is centrally-disposed, other
Resistance heating wire be interpreted as from heater, that root resistance heating wire around center carries out annular spread, and it can basis
Need to carry out the annular spread of multilayer, to guarantee the uniformity of heating, and it is also possible to rectangle difference or circular distribution, only
The sheet glass 2 for enabling to lower section to heat is heated evenly when heating.
Preferred embodiment is that the resistance heating wire is linear type；
The more resistance heating wires are arranged in parallel.
From the resistance heating wire in heater 4 be to be arranged in parallel, from close to primary heater 3 to far from primary heater 3
Directional spreding.
More resistance heating wires disposed in parallel, the high-temperature vacuum coating equipment resistance close to 3 direction of primary heater
The heating temperature of heater is relatively low, and the heating temperature of the resistance heating wire far from 3 direction of primary heater is relatively high, into
And it ensure that the heating uniformity from 4 lower section of heater.
Further, in the present embodiment, as shown in fig. 6, the adjacent spacing between heater 4 is from far from institute
The spacing that primary heater 3 is arrived close to 3 direction of primary heater is stated to be incremented by.
In the present embodiment, as can be seen that being incited somebody to action when being also possible to being arranged in parallel from heater from the present embodiment
The spacing of adjacent slave heater carries out different adjustment, and then the temperature of the lower zone to the center far from primary heater
Degree compensates, to realize uniformly heated purpose.
Primary heater 3 and be to be arranged in parallel, and its interval is not identical from the resistance heating wire in heater 4, further away from
The distribution density at the center of primary heater 3, resistance heating wire is higher, and then can guarantee the center far from primary heater 3
Position below heating temperature.
Preferred embodiment is, it is described from heater 4 further include angle heater 5；
The angle heater 5 and the primary heater 3 and it is described from heater 4 in the same plane；
The corner of the resistance heater is arranged in the angle heater 5.
In the present embodiment, it is provided with angle heater 6 on resistance heater, the corner position of primary heater 3 is set
It sets, so that corner is able to carry out individual heating, ensure that the uniformity of heating.
In the present embodiment, the heating temperature of angle heater is individually controlled also by modes such as individual temperature controllers
It makes, and then guarantees the heating uniformity of lower zone by the heating temperature of increase angle heater.
Preferred embodiment is that the primary heater 3 and the lower section from heater 4 are provided with temperature sensing
Device.
In the present embodiment, it is provided with temperature sensor in primary heater 3 and from the lower section of heater 4, passes through temperature
Sensor is measured to primary heater 3 and from the heating temperature of 4 lower section of heater, and then can be shown according to temperature sensor
Temperature be adjusted to primary heater 3 and from the heating temperature of heater 4, to guarantee that the product heated is needed to be heated evenly
Property.
Preferred embodiment is that high-temperature vacuum coating equipment resistance heater further includes temperature controller；
The temperature controller respectively with the primary heater 3, described connect from heater 4 and the temperature sensor.
In the present embodiment, primary heater 3, be attached with temperature controller from heater 4 and temperature sensor, when
Temperature controller is set when needing heating temperature to be achieved, and temperature sensor carries out temperature monitoring to the product that lower section passes through,
When temperature when some region is inadequate, after temperature sensor monitors, by temperature feedback to temperature controller, temperature controller is again
It heats up to the corresponding primary heater in the region 3 or from heater 4, when the heating temperature until the region reaches set temperature
Until.
Such setting, realizes the automatic adjustment to heating temperature, has both avoided the artificial error for adjusting and occurring, has also protected
Card will not have any injury, also, temperature automatic adjustment is timely to operating personnel, ensure that sheet glass 2 when adjusting
The heating quality of equal products.
High-temperature vacuum coating equipment resistance heater provided by the utility model, by the way that heater is divided into primary heater
3 and from heater 4, primary heater 3 is heated, and carries out temperature compensation from heater 4, and then realize uniformly heated purpose,
The demand for meeting technique, improves the quality of product, while also improving the life and reliability of heater, reduces maintenance
Cost has the effect of energy-saving and emission-reduction.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
In addition, it will be appreciated by those of skill in the art that although some embodiments in this include institute in other embodiments
Including certain features rather than other feature, but the combination of the feature of different embodiment means to be in the utility model
Within the scope of and form different embodiments.For example, embodiment claimed is appointed in claims above
Meaning one of can in any combination mode come using.The information disclosed in the background technology section is intended only to deepen to this
The understanding of the general background technology of utility model, and be not construed as recognizing or implying in any form that information composition has been
The prior art known in those skilled in the art.
Claims (6)
1. a kind of high-temperature vacuum coating equipment resistance heater, which is characterized in that including primary heater and multiple from heater；
It is described to be disposed on the same plane from heater and the primary heater；
It is described from heater using the primary heater as center annular spread；
The heating surface (area) (HS of the primary heater is greater than the heating surface (area) (HS from heater；
The primary heater includes the resistance heating wire that cover and Duo Gen can individually control heating temperature；
The resistance heating wire is arranged in the cover；
The primary heater and described temperature sensor is provided with below heater.
2. high-temperature vacuum coating equipment resistance heater according to claim 1, which is characterized in that the more resistance
Heater strip is centered on a wherein resistance heating wire, annular spread.
3. high-temperature vacuum coating equipment resistance heater according to claim 1, which is characterized in that the resistance heating
Silk is linear type；
The more resistance heating wires are arranged in parallel.
4. high-temperature vacuum coating equipment resistance heater according to claim 1, which is characterized in that it is adjacent it is described from
Spacing of the spacing from far from the primary heater to close to the primary heater direction between heater is incremented by.
5. high-temperature vacuum coating equipment resistance heater according to claim 1, which is characterized in that further include angle heating
Device；
The angle heater and the primary heater and it is described from heater in the same plane；
The corner of the resistance heater is arranged in the angle heater.
6. high-temperature vacuum coating equipment resistance heater according to claim 1, which is characterized in that further include temperature control
Device processed；
The temperature controller respectively with the primary heater, described connect from heater and the temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821303251.7U CN209194037U (en) | 2018-08-13 | 2018-08-13 | High-temperature vacuum coating equipment resistance heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821303251.7U CN209194037U (en) | 2018-08-13 | 2018-08-13 | High-temperature vacuum coating equipment resistance heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209194037U true CN209194037U (en) | 2019-08-02 |
Family
ID=67403587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821303251.7U Active CN209194037U (en) | 2018-08-13 | 2018-08-13 | High-temperature vacuum coating equipment resistance heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209194037U (en) |
-
2018
- 2018-08-13 CN CN201821303251.7U patent/CN209194037U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202430352U (en) | High-temperature spinning manifold | |
| JP3232568U (en) | Vacuum sintering furnace capable of heating body and multi-region temperature control | |
| CN107013967B (en) | A kind of high-precision multi-zone temperature control system and method | |
| CN209194037U (en) | High-temperature vacuum coating equipment resistance heater | |
| CN102335741A (en) | Multi-area heating device for SLS (Selective Laser Sintering) | |
| CN109613062A (en) | Normal pressure infrared lamp arrays and its control method | |
| CN108444284A (en) | A kind of intermediate frequency (IF) smelting furnace device based on multi-stage, energy-saving regulation and control | |
| WO2019128206A1 (en) | Electrical heating-based lamination heating plate and electrical heating system for lamination heating plate | |
| CN208872002U (en) | It is dried in vacuo heating furnace | |
| WO2018045903A1 (en) | Electromagnetic cooker | |
| CN208475958U (en) | A kind of calandria and the vacuum sintering furnace for realizing multizone temperature control | |
| CN208745131U (en) | A kind of PE steel wire tube production line automatic temperature-control baking oven device | |
| CN107515637A (en) | A kind of glass plate steel process course control method for use | |
| CN109392201B (en) | Multi-section controllable heating platform device and heating control method | |
| CN103696002B (en) | The ingot furnace thermal field structure of electromagnetism and resistance Hybrid Heating and using method | |
| CN206531107U (en) | A kind of accurate temperature controller electromagnetic oven | |
| CN211720759U (en) | Heating device for evaporation | |
| CN209496293U (en) | A kind of dust collector ash hopper electric heating control device | |
| CN115835438A (en) | Electromagnetic heating flat plate device | |
| CN206963796U (en) | A kind of baking oven and curer | |
| CN110471318A (en) | A kind of intelligence control system of pharmacy heating cooking stove | |
| CN209091685U (en) | A kind of wax pattern device for artificial tooth waxing | |
| CN219137006U (en) | Substrate bearing table and epitaxial growth equipment | |
| CN212322137U (en) | Light chamber mixed heating refrigeration constant temperature system | |
| CN206706249U (en) | Crystal heater and heater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100176 room 3001, 6 building, 7 East Street, Rongchang economic and Technological Development Zone, Beijing. Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 room 3001, 6 building, 7 East Street, Rongchang economic and Technological Development Zone, Beijing. Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210329 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100176 room 3001, 6 building, 7 East Street, Rongchang economic and Technological Development Zone, Beijing. Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210908 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
|
| TR01 | Transfer of patent right |