CN209188476U - The purification system of toxic harmful exhaust gas in process chamber - Google Patents

The purification system of toxic harmful exhaust gas in process chamber Download PDF

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Publication number
CN209188476U
CN209188476U CN201820759477.1U CN201820759477U CN209188476U CN 209188476 U CN209188476 U CN 209188476U CN 201820759477 U CN201820759477 U CN 201820759477U CN 209188476 U CN209188476 U CN 209188476U
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China
Prior art keywords
tower
function
blower
exhaust gas
process chamber
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Expired - Fee Related
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CN201820759477.1U
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Chinese (zh)
Inventor
莫愁
卢新佳
唐焱
张应红
唐亮
高成
王岩
黄伟
胡清钟
甘勇
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN201820759477.1U priority Critical patent/CN209188476U/en
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Publication of CN209188476U publication Critical patent/CN209188476U/en
Expired - Fee Related legal-status Critical Current
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Abstract

The utility model discloses a kind of purification systems for forming toxic harmful exhaust gas in the simple and process chamber of good purification.The purification system of toxic harmful exhaust gas includes air exchange system, the first blower of water-soluble reaction system, the second blower and micro particle filtering case in the process chamber;The air exchange system includes the collection port being arranged at the top of exhaust air chamber;The exhaust air chamber is provided with the air supply tube being in communication with the outside;The collection port, the first blower, water-soluble reaction system, micro particle filtering case, the second blower are sequentially communicated;Purification system structure using toxic harmful exhaust gas in the process chamber is simple, the good purification of exhaust gas, and exhaust quality meets national legislation requirement.

Description

The purification system of toxic harmful exhaust gas in process chamber
Technical field
The utility model relates to waste gas purification fields, and in particular to the purification system of toxic harmful exhaust gas in a kind of process chamber System.
Background technique
Well-known: some warehouses and laboratory, poisonous and harmful gas can be discharged or generate by storing article and experimentation Body generates toxic action to office work personnel and article, and common chemical industry, pesticide producing workshop and storage repository are cell performance Laboratory etc. is especially abused in energy laboratory, all there is this phenomenon.According to national environmental protection regulation, these gases need purified treatment Outdoor could be discharged by meeting emission limit.Be currently used for this kind of place toxic gas cleaning treatment system structure is complicated, purification Effect is bad.Cope with these deficiencies, need to develop a kind of structure is simple but clean-up effect reach national emission request exhaust gas it is net Change system.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of composition in the simple and process chamber of good purification The purification system of toxic harmful exhaust gas.
The technical scheme adopted by the utility model to solve the technical problem is as follows: in process chamber toxic harmful exhaust gas purification System, including air exchange system, water-soluble reaction system, the first blower, the second blower and micro particle filtering case;
The air exchange system includes the collection port being arranged at the top of exhaust air chamber;The exhaust air chamber, which is provided with, to be in communication with the outside Air supply tube;
The water-soluble reaction system includes function tower;Function tower includes function tower tower body, purification liquid supplementing device;The function Energy tower tower body has inner cavity;Function tower tower body bottom is provided with air inlet;The interior of the function tower tower body intracavitary is provided with At least two layers of purifying area;It is provided with spray equipment in the purifying area, is arranged with laminated multi-layer below the spray equipment Georama;
The purification liquid supplementing device includes header tank, booster pump and scavenging solution supplement case;Function tower tower body bottom Portion is provided with inlet, and the inlet is connected to header tank;The header tank is after booster pump is pressurized and in purifying area Spray equipment connection;The scavenging solution supplement case is connected to header tank by valve;It is provided with out at the top of the function tower tower body Port;
The collection port is connected to by connecting pipe with the first blower, the gas outlet of first blower and function tower into Port connection, gas outlet and micro particle filtering case, the second blower of function tower are sequentially communicated.
Further, the water-soluble reaction system includes two function towers, i.e. the first function tower and the second function tower;And two A function tower structure is identical, and the collection port is connected to by connecting pipe with the first blower, the gas outlet of first blower and The air inlet of first function tower is connected to, and the air inlet of the gas outlet of the first function tower and the second function tower is connected by connecting pipe It is logical;The gas outlet of second function tower is sequentially communicated by connecting pipe and micro particle filtering case, the second blower.
Further, first function tower scavenging solution supplement case be acid solution supplement case, second function tower it is net Changing liquid supplement case is that lye supplements case.
Further, the purifying area is intracavitary in function tower tower body is uniformly distributed from the bottom to top.
Further, the georama is plastic hollow ball.
Further, the center at the top of exhaust air chamber is arranged in the collection port;The air supply tube is arranged in exhaust air chamber Lower part, and exhaust air chamber is provided with air supply tube on the four direction of horizontal plane.
Further, active carbon or efficient absorption film are provided in the micro particle filtering case.
The beneficial effects of the utility model are: in process chamber described in the utility model toxic harmful exhaust gas purification system In the course of work, after exhaust gas enters exhaust passage from collection port, initially enter function tower by water mist and waterwall carry out it is water-soluble and Reaction is then passed through micro particle filtering case and removes fine particle, so that exhaust be made to meet national environmental standard.Due to by it is water-soluble, The multi task process such as the purification and filtering of scavenging solution make exhaust quality meet national legislation requirement;By water-soluble and response function collection In in a tower, keep structure simple, and each function tower in be provided with the molten reaction unit of 2 heavy water, to the clean-up effect of exhaust gas It is good.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the purification system of toxic harmful exhaust gas in process chamber in the utility model embodiment;
Fig. 2 is that there are two structural schematic diagrams when function tower for water-soluble reaction system tool in the utility model embodiment;
It is indicated in figure: 1- exhaust air chamber, 2- collection port, 3- air supply tube, the first blower of 4-, the water-soluble reaction system of 5-, 510- function Energy tower tower body, 51- header tank 52- booster pump, 53- water inlet pipe, 54- spray equipment, 55- water mist, 56- georama, 57- air inlet Mouthful, the gas outlet 58-, 59- scavenging solution supplements case, 6- micro particle filtering case, the second blower of 7-, 8- offgas outlet, 9- connecting pipe.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As illustrated in fig. 1 and 2, in process chamber described in the utility model toxic harmful exhaust gas purification system, including ventilation System, water-soluble reaction system 5, the first blower 4, the second blower 7 and micro particle filtering case 6;
The air exchange system includes the collection port 2 that 1 top of exhaust air chamber is arranged in;The exhaust air chamber 1 is provided with to be connected with extraneous Logical air supply tube 3;
The water-soluble reaction system 5 includes function tower;Function tower includes function tower tower body 510, purification liquid supplementing device;Institute Function tower tower body 510 is stated with inner cavity;510 bottom of function tower tower body is provided with air inlet 57;The function tower tower body 510 Interior intracavitary be provided at least two layers of purifying area;Spray equipment 54,54 lower section of spray equipment are provided in the purifying area It is arranged with the georama 56 of laminated multi-layer;
The purification liquid supplementing device includes header tank 51, booster pump 52 and scavenging solution supplement case 59;The function tower 510 bottom of tower body is provided with inlet, and the inlet is connected to header tank 51;The header tank 51 increases by booster pump 52 It is connected to after pressure with the spray equipment 54 in purifying area;The scavenging solution supplement case 59 is connected to header tank 51 by valve;It is described Gas outlet 58 is provided at the top of function tower tower body 510;
The collection port 2 is connected to by connecting pipe 9 with the first blower 4, the gas outlet of first blower 4 and function tower Air inlet 57 be connected to, gas outlet 58 and micro particle filtering case 6, the second blower 7 of function tower be sequentially communicated.
In the process of work:
Specifically, being evacuated first by the first blower 4, so that the exhaust gas in exhaust air chamber 1 is entered by the collection port 2 at top In water-soluble reaction system 5, the air supply tube on exhaust air chamber 1 is sent into ambient atmos into exhaust air chamber 1 at this time.Exhaust gas enters water-soluble anti- The lower part for being first into function tower tower body 510 in system 5 is answered, then in turn through the purifying area in function tower tower body 510, is led to After the scavenging solution that the spray equipment 54 crossed in purifying area sprays is purified, it is discharged by the top of tower body, then passes through connecting tube Road enters micro particle filtering case 6 and is further filtered.Filtered gas pressurizeed by the second blower 7 after from offgas outlet 8 Discharge.
Specifically, the air exchange system includes 2 of air supply duct, collection port, gas outlet, pipeline and increase air velocity Blower;The water-soluble reaction system is distributed in air exchange system pipeline prior to micro particle filtering case, is completed together with air exchange system useless Gas purification function.
Outside 3 communication chamber of air supply duct of the air exchange system, the first blower 4 is arranged in the rear of collection port 2, the fanman Enter purge pipe after indoor toxic harmful exhaust gas can be pooled to collection port 2 when making, simultaneously as indoor generation negative pressure, outdoor Air can rapidly enter interior, be replaced room air quickly;Second blower 7 is mounted on the tail end of air exchange system, outlet Mouthful front, when work can make pipeline generate negative pressure, make airflow smooth.
Specifically, being arranged with the georama 56 of laminated multi-layer, these georamas in 54 lower part of two-stage spray equipment 56 are limited in certain space by upper and lower two bands abortive haul plate, are avoided air-flow from moving ball and are stacked uneven, the water of spray Spray crosses these intersecting georamas 56 and forms waterwall, make waste gas stream and water flow time of contact is longer and contact area more Greatly, water-soluble effect is more preferable;Two function towers spray the alkaline matter or acid in acid and alkaline aqueous solution and exhaust gas respectively Matter chemically reacts, to remove these harmful substances.
Specifically, water-soluble reaction system, micro particle filtering case, blower are arranged in abuse in addition to air supply duct sum aggregate port Outside laboratory, different location can be arranged according to the exterior space, use suitable piping connection.
In conclusion giving up in process chamber described in the utility model in the purification system course of work of toxic harmful exhaust gas After gas enters exhaust passage from collection port, function tower is initially entered by water mist and waterwall and carries out water-soluble and reaction, is then passed through Micro particle filtering case removes fine particle, so that exhaust be made to meet national environmental standard.Due to by water-soluble, scavenging solution purification with And the multi task process such as filtering, so that exhaust quality is met national legislation requirement;Water-soluble and response function is concentrated in a tower, is made Structure is simple, and the molten reaction unit of 2 heavy water is provided in each function tower, to the good purification of exhaust gas.It further, can be with In the quadrangle arranged beneath air supply pipeline for the exhaust air chamber 1 for generating exhaust gas, and the arrangement collection port 2 above middle part, optimize in this way The geometric position of 3 sum aggregate port 2 of air supply duct, enable the exhaust gas of indoor any position by Rapid replacement be fresh air;Water Molten reaction system be arranged in collection port after, before micro particle filtering case, be washed with water the biggish particle of particle in exhaust gas first, And avoid enter into the areola that micro particle filtering case 6 blocks up adsorbent.
The water-soluble reaction system 5 includes two function towers, i.e. the first function tower and the second function tower;And two function towers Structure is identical, and the collection port 2 is connected to by connecting pipe 9 with the first blower 4, the gas outlet and first of first blower 4 The air inlet 57 of function tower is connected to, and the gas outlet 58 of the first function tower and the air inlet 57 of the second function tower pass through connecting pipe 9 Connection;The gas outlet 58 of second function tower is sequentially communicated by connecting pipe 9 with micro particle filtering case 6, the second blower 7.
Specifically, water-soluble reaction system is made of 2 function towers, the first function tower is for spraying acidic aqueous solution, second Function tower is for spraying alkaline aqueous solution;Each function tower includes header tank, booster pump, sprinkler head, vapour lock ball heap, disengaging gas Mouth and scavenging solution supplement case, and header tank, booster pump and scavenging solution supplement case are arranged in the outside of function tower, 2 groups of arrangement in tower Spray equipment 54 uses sprinkler head, sprinkler head and 2 groups of vapour lock ball heaps, arranges vapour lock ball heap under sprinkler head, 1 group of sprinkler head and 1 group Vapour lock ball heap forms 1 group of water-soluble reaction unit, and 2 groups of water-soluble reaction units are formed in tower, once press pump by header tank acidity or Alkaline water is sprayed water by sprinkler head by water pipe pressurization and forms water mist, and water mist, which passes through, flows to tower bottom after vapour lock ball heap, and exhaust gas is from tower bottom The air inlet in portion, which is passed into, to be discharged with after pickling or alkali cleaning from the gas outlet of top of tower.
This 3 aseptic key function components of acid function tower, alkaline functional tower and micro particle filtering case 6, can be with According to the component of exhaust gas, degree of purification requirement are used alone, combination of two uses or three use simultaneously.
Further, the scavenging solution supplement case 59 of first function tower is that acid solution supplements case, second function tower It is that lye supplements case that scavenging solution, which supplements case 59,.Exhaust gas from the air inlet of tower bottom pass into pickling and alkali cleaning after from top of tower Gas outlet discharge.
In order to improve the cleaning efficiency to exhaust gas, further, the purifying area is intracavitary under in function tower tower body It is supreme to be uniformly distributed.
In order to reduce manufacturing cost, it is preferred that the georama 56 is plastic hollow ball.
For the ease of the collection of exhaust gas, further, the center at 1 top of exhaust air chamber is arranged in the collection port 2;Institute The lower part that exhaust air chamber 1 is arranged in air supply tube 3 is stated, and exhaust air chamber 1 is provided with air supply tube 3 on the four direction of horizontal plane.
In order to improve the purifying rate of exhaust gas, specifically, being provided with active carbon or efficient absorption in the micro particle filtering case 6 Film.

Claims (7)

1. the purification system of toxic harmful exhaust gas in process chamber, it is characterised in that: including air exchange system, water-soluble reaction system (5) First blower (4), the second blower (7) and micro particle filtering case (6);
The air exchange system includes the collection port (2) being arranged at the top of exhaust air chamber (1);The exhaust air chamber (1) is provided with and the external world The air supply tube (3) of connection;
The water-soluble reaction system (5) includes function tower;Function tower includes function tower tower body (510), purification liquid supplementing device;Institute Function tower tower body (510) are stated with inner cavity;Function tower tower body (510) bottom is provided with air inlet (57);The function tower The interior of tower body (510) intracavitary is provided at least two layers of purifying area;Spray equipment (54), the spray are provided in the purifying area The georama (56) of laminated multi-layer is arranged with below device (54);
The purification liquid supplementing device includes header tank (51), booster pump (52) and scavenging solution supplement case (59);The function Tower tower body (510) bottom is provided with inlet, and the inlet is connected to header tank (51);The header tank (51) is by pressurization It is connected to after pump (52) pressurization with the spray equipment (54) in purifying area;Scavenging solution supplement case (59) passes through with header tank (51) Valve connection;Gas outlet (58) are provided at the top of the function tower tower body (510);
The collection port (2) is connected to by connecting pipe (9) with the first blower (4), the gas outlet of first blower (4) and function Air inlet (57) connection of energy tower, gas outlet (58) and micro particle filtering case (6), the second blower (7) of function tower are sequentially communicated.
2. the purification system of toxic harmful exhaust gas in process chamber as described in claim 1, it is characterised in that: the water-soluble reaction System (5) includes two function towers, i.e. the first function tower and the second function tower;And two function tower structures are identical, described first The gas outlet of blower (4) is connected to the air inlet (57) of the first function tower, the gas outlet (58) of the first function tower and the second function The air inlet (57) of tower is connected to by connecting pipe (9);The gas outlet (58) of second function tower passes through connecting pipe (9) and particle Rose Box (6), the second blower (7) are sequentially communicated.
3. the purification system of toxic harmful exhaust gas in process chamber as claimed in claim 2, it is characterised in that: first function Scavenging solution supplement case (59) of tower is that acid solution supplements case, and scavenging solution supplement case (59) of second function tower is lye supplement Case.
4. the purification system of toxic harmful exhaust gas in process chamber as described in claim 1, it is characterised in that: the purifying area exists The interior of function tower tower body intracavitary is uniformly distributed from the bottom to top.
5. the purification system of toxic harmful exhaust gas in process chamber as described in claim 1, it is characterised in that: the georama It (56) is plastic hollow ball.
6. the purification system of toxic harmful exhaust gas in process chamber as described in claim 1, it is characterised in that: the collection port (2) center being arranged at the top of exhaust air chamber (1);The air supply tube (3) is arranged in the lower part of exhaust air chamber (1), and exhaust air chamber (1) air supply tube (3) are provided on the four direction of horizontal plane.
7. the purification system of toxic harmful exhaust gas in process chamber as described in claim 1, it is characterised in that: the micro particle filtering Active carbon or efficient absorption film are provided in case (6).
CN201820759477.1U 2018-05-21 2018-05-21 The purification system of toxic harmful exhaust gas in process chamber Expired - Fee Related CN209188476U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110694358A (en) * 2019-09-04 2020-01-17 徐州易尔环保科技有限公司 Workshop exhaust treatment system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110694358A (en) * 2019-09-04 2020-01-17 徐州易尔环保科技有限公司 Workshop exhaust treatment system

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20190802

Termination date: 20210521