CN209183516U - A kind of etching groove of electroplating assembly line - Google Patents
A kind of etching groove of electroplating assembly line Download PDFInfo
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- CN209183516U CN209183516U CN201822236582.XU CN201822236582U CN209183516U CN 209183516 U CN209183516 U CN 209183516U CN 201822236582 U CN201822236582 U CN 201822236582U CN 209183516 U CN209183516 U CN 209183516U
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Abstract
The utility model relates to etching groove technical fields, in particular a kind of etching groove of electroplating assembly line, including etching chamber, the etching chamber top is fixedly connected with connecting plate, the connecting plate front end face is fixedly connected with the first mounting plate, worm screw is rotatably connected on the inside of first mounting plate, first mounting plate bottom end is fixedly connected with rack gear, the connecting plate front end face is fixedly connected with the second mounting plate, second mounting plate bottom end is fixedly connected with first motor, first motor main shaft end is fixedly connected with worm screw, second mounting plate top is fixedly connected with the first button, worm gear is engaged on the right side of the first motor, the worm gear front end face is fixedly connected with first gear, in the utility model, pass through the worm gear of setting, first gear, first motor and the second button, facilitate the workpiece taken out in etching chamber, behaviour Make it is simple and fast, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.
Description
Technical field
The utility model relates to etching groove technical field, specially a kind of etching groove of electroplating assembly line.
Background technique
Lithographic technique is covered according to mask graph or design requirement to semiconductor substrate surface or surface in semiconductor technology
Lid film carries out the technology of selective corrosion or removing, and lithographic technique is not only the basic manufacture of semiconductor devices and integrated circuit
Technique, but also be applied to thin film circuit, printed circuit and other Micropictures processing, etching can also be divided into wet etching and
Dry etching, common etching process is approximately as first in one layer of photoresist of surface coating, then through mask to against corrosion
Oxidant layer carries out selective exposure, since solution rate is not in developer solution for the exposed portion and unexposed portion of resist layer
Together, resist figure is left in substrate surface after development, it is rotten to carry out selectivity to substrate surface as mask
Erosion, if there are medium or metal layers for substrate surface, after selective etching, figure is transferred on medium or metal layer, because
This, the demand to a kind of etching groove of electroplating assembly line is growing.
Currently there are most of electroplating assembly line etching groove in perform etching operation using corrosive liquid,
Workpiece in the etching groove of traditional electroplating assembly line, it has not been convenient to take out, corrosive liquid has corrosivity, is easy to cause personnel
Injury, it is extremely dangerous, and etching groove internal cause corrosive liquid does not flow, and cause etching operation slow, working efficiency is lower, because
This, proposes a kind of etching groove of electroplating assembly line regarding to the issue above.
Utility model content
The purpose of this utility model is to provide a kind of etching grooves of electroplating assembly line, to solve in above-mentioned background technique
The problem of proposition.
To achieve the above object, the utility model provides the following technical solutions:
A kind of etching groove of electroplating assembly line, including etching chamber, the etching chamber top are fixedly connected with connecting plate, institute
It states connecting plate front end face and is fixedly connected with the first mounting plate, be rotatably connected to worm screw on the inside of first mounting plate, described first
Mounting plate bottom end is fixedly connected with rack gear, and the connecting plate front end face is fixedly connected with the second mounting plate, second mounting plate
Bottom end is fixedly connected with first motor, and first motor main shaft end is fixedly connected with worm screw, second mounting plate top
It is fixedly connected with the first button, is engaged with worm gear on the right side of the first motor, the worm gear front end face is fixedly connected with the first tooth
Wheel, the worm gear rear end face are rotatably connected to sliding block with shaft, offer sliding slot, the sliding block on the inside of the etching chamber rear end face
Rear end face is slidably connected with sliding slot, and the slip front face is fixedly connected with placement plate, and the placement plate top is fixedly connected with
Second motor, second electric machine main shaft end are fixedly connected with second gear, are engaged with ring gear on the outside of the second gear, institute
It states ring gear side and connecting rod is rotatably connected to by shaft, the connecting rod bottom end offers link slot, the link slot inside
Bull stick is slidably connected, the bull stick bottom end is connect with placement plate the lowest point, and the connecting rod other end is fixedly connected with stir plate.
It is engaged with rack on the right side of the first gear, the sliding block setting in the shape of an " I ", the sliding slot "convex" shaped is set
It sets, fits on the outside of the sliding block with sliding slot.
Preferably, the quantity of second motor is two, and two second motors are symmetrical set in placement plate
The left and right sides, the ring gear bottom end are slidably connected with placement plate bottom end.
Preferably, it is fixedly connected with the second button on the inside of the etching chamber left end, two second buttons are presented and divided into
Set, the motion profile of the placement plate be it is linear, second button is arranged on the motion profile of placement plate.
Preferably, the worm screw runs through the first mounting plate, and the worm screw is arranged below the second mounting plate, and the bull stick is in
"T"-shaped setting, the bull stick fit with link slot.
Compared with prior art, the utility model has the beneficial effects that
1, in the utility model, by the worm gear of setting, first gear, first motor and the second button, bottom end second is pressed
When button is pressed, the first button is pressed, first motor operation drives worm screw rotation to drive placement plate to move upwards by transmission, puts
The second button then first motor stop motion that plate presses top is set, the workpiece taken out in etching chamber is facilitated, it is easy to operate fast
Victory, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.
2, in the utility model, by the second motor, ring gear, bull stick and the stir plate of setting, the second motor operation is driven
Second gear rotation drives stir plate reciprocating rotation by transmission, so that the corrosive liquid in etching chamber be driven quickly to flow, improves
Corrosive liquid greatly improves work efficiency the reaction rate of workpiece, improves the etching effect of workpiece, improves workpiece
Processing quality.
Detailed description of the invention
Fig. 1 is the utility model overall structure diagram；
Fig. 2 is the mounting structure schematic diagram of the utility model worm gear；
Fig. 3 is the mounting structure schematic diagram of the utility model second gear.
In figure: 1- etching chamber, 2- connecting plate, the first mounting plate of 3-, 4- worm screw, 5- rack gear, the second mounting plate of 6-, 7- first
Motor, the first button of 8-, 9- worm gear, 10- first gear, 11- sliding block, 12- placement plate, the second motor of 13-, 14- second gear,
15- ring gear, 16- connecting rod, 17- bull stick, 18- stir plate, the second button of 19-, a- sliding slot, b- link slot.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-3 is please referred to, the utility model provides a kind of technical solution:
A kind of etching groove of electroplating assembly line, including etching chamber 1,1 top of etching chamber are fixedly connected with connecting plate
2,2 front end face of connecting plate is fixedly connected with the first mounting plate 3, is rotatably connected to worm screw 4 on the inside of first mounting plate 3,
First mounting plate, 3 bottom end is fixedly connected with rack gear 5, and 2 front end face of connecting plate is fixedly connected with the second mounting plate 6, institute
It states 6 bottom end of the second mounting plate and is fixedly connected with first motor 7, the 7 main shaft end of first motor is fixedly connected with worm screw 4, institute
It states 6 top of the second mounting plate and is fixedly connected with the first button 8, be engaged with worm gear 9 on the right side of the first motor 7, before the worm gear 9
End face is fixedly connected with first gear 10, and 9 rear end face of worm gear is rotatably connected to sliding block 11 with shaft, after the etching chamber 1
Sliding slot a is offered on the inside of end face, 11 rear end face of sliding block is slidably connected with sliding slot a, and 11 front end face of sliding block is fixedly connected
There is placement plate 12,12 top of placement plate is fixedly connected with the second motor 13, and the 13 main shaft end of the second motor is fixed to be connected
It is connected to second gear 14, ring gear 15 is engaged on the outside of the second gear 14,15 side of ring gear is rotatablely connected by shaft
There is connecting rod 16,16 bottom end of connecting rod offers link slot b, slidably connects bull stick 17 on the inside of the link slot b, described
17 bottom end of bull stick is connect with 12 the lowest point of placement plate, and 16 other end of connecting rod is fixedly connected with stir plate 18.
10 right side of first gear is engaged with rack gear 5, the sliding block 11 setting in the shape of an " I ", the sliding slot a " convex "
Font setting, 11 outside of sliding block fit with sliding slot a, and this set is conducive to facilitate the movement of placement plate 12, improves dress
Stability is set, taking-up workpiece is facilitated, the quantity of second motor 13 is two, and two second motors 13 are in symmetrically to set
It sets in the left and right sides of placement plate 12,15 bottom end of ring gear is slidably connected with 12 bottom end of placement plate, this set side of being conducive to
Civilian dress sets the flowing for accelerating the corrosive liquid in etching chamber 1, improves working efficiency, is fixedly connected on the inside of 1 left end of etching chamber
Second button 19, two second buttons 19 in setting up and down, the motion profile of the placement plate 12 be it is linear, described the
Two buttons 19 are arranged on the motion profile of placement plate 12, and this set is conducive to that device is facilitated to carry out crawl, are easy to use, behaviour
Make simply, the worm screw 4 runs through the first mounting plate 3, and the worm screw 4 is arranged below the second mounting plate 6, and the bull stick 17 is in
"T"-shaped setting, the bull stick 17 fit with link slot b, and this set is conducive to accelerate stream of the corrosive liquid in etching chamber 1
Speed improves working efficiency, improves production effect.
The model MSMA502D servo motor of first motor 7, the model MSMA502D servo motor of the second motor 13.
Workflow: the device is powered using external power supply, powers on running equipment, and workpiece is prevented from putting
It sets on plate 12, when placement plate 12 presses second button 19 on top, presses the first button 8, the operation reversion of first motor 7 drives the
Worm screw 4 on one mounting plate 3 rotates, and worm screw 4 drives worm gear 9 to rotate, and worm gear 9 drives first gear 10 to rotate, to make first
Gear 10 moves on rack gear 5, slides sliding block 11 in sliding slot a, and placement plate 12 moves downward, and placement plate 12, which moves to, to be pressed
When the second button 19 of bottom end, first motor 7 is out of service, and the movement of the second motor 13 drives second gear 14 to rotate, to drive
Ring gear 15 moves reciprocatingly, and the movement of ring gear 15 drives connecting rod 16 to do reciprocating rotation around bull stick 17, to drive stir plate 18 past
Multiple rotation, bull stick 17 slide in link slot b, and stir plate 18 drives the corrosive liquid in etching chamber 1 quickly to flow, and improve corrosive liquid
It to the reaction rate of workpiece, greatly improves work efficiency, improves the etching effect of workpiece, improve the processing matter of workpiece
It measures, after the completion of etching, because placement plate 12 presses the second button of bottom end 19, presses the first button 8, first motor 7, which rotates forward, to be driven
Placement plate 12 moves upwards, and placement plate 12 stops operating when pressing the second button 19 of top, facilitates the processing taken out in etching chamber 1
Part, it is simple and quick, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of etching groove of electroplating assembly line, including etching chamber (1), it is characterised in that: etching chamber (1) top is fixed
It is connected with connecting plate (2), connecting plate (2) front end face is fixedly connected with the first mounting plate (3), first mounting plate (3)
Inside is rotatably connected to worm screw (4), and the first mounting plate (3) bottom end is fixedly connected with rack gear (5), before the connecting plate (2)
End face is fixedly connected with the second mounting plate (6), and the second mounting plate (6) bottom end is fixedly connected with first motor (7), and described
One motor (7) main shaft end is fixedly connected with worm screw (4), and the second mounting plate (6) top is fixedly connected with the first button
(8), it being engaged with worm gear (9) on the right side of the first motor (7), worm gear (9) front end face is fixedly connected with first gear (10),
Worm gear (9) rear end face is rotatably connected to sliding block (11) with shaft, offers sliding slot on the inside of etching chamber (1) rear end face
(a), sliding block (11) rear end face is slidably connected with sliding slot (a), and sliding block (11) front end face is fixedly connected with placement plate
(12), placement plate (12) top is fixedly connected with the second motor (13), and the second motor (13) main shaft end is fixed to be connected
It is connected to second gear (14), is engaged with ring gear (15) on the outside of the second gear (14), ring gear (15) side passes through shaft
It is rotatably connected to connecting rod (16), connecting rod (16) bottom end offers link slot (b), Slideslip in the link slot (b)
It is connected with bull stick (17), bull stick (17) bottom end is connect with placement plate (12) the lowest point, and connecting rod (16) other end is fixed
It is connected with stir plate (18).
2. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the first gear (10)
Right side is engaged with rack gear (5), the sliding block (11) setting in the shape of an " I ", sliding slot (a) the "convex" shaped setting, the sliding block
(11) outside fits with sliding slot (a).
3. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: second motor (13)
Quantity be two, two second motors (13) are symmetrical set in the left and right sides of placement plate (12), the ring gear
(15) bottom end is slidably connected with placement plate (12) bottom end.
4. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the etching chamber (1) is left
End inside is fixedly connected with the second button (19), two second buttons (19) in setting up and down, the placement plate (12)
Motion profile be it is linear, second button (19) is arranged on the motion profile of placement plate (12).
5. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the worm screw (4) is run through
First mounting plate (3), below the second mounting plate (6), the " T " shape setting of the bull stick (17) is described for worm screw (4) setting
Bull stick (17) fits with link slot (b).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822236582.XU CN209183516U (en) | 2018-12-28 | 2018-12-28 | A kind of etching groove of electroplating assembly line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822236582.XU CN209183516U (en) | 2018-12-28 | 2018-12-28 | A kind of etching groove of electroplating assembly line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209183516U true CN209183516U (en) | 2019-07-30 |
Family
ID=67378107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822236582.XU Active CN209183516U (en) | 2018-12-28 | 2018-12-28 | A kind of etching groove of electroplating assembly line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209183516U (en) |
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2018
- 2018-12-28 CN CN201822236582.XU patent/CN209183516U/en active Active
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