CN209183516U - A kind of etching groove of electroplating assembly line - Google Patents

Abstract

The utility model relates to etching groove technical fields, in particular a kind of etching groove of electroplating assembly line, including etching chamber, the etching chamber top is fixedly connected with connecting plate, the connecting plate front end face is fixedly connected with the first mounting plate, worm screw is rotatably connected on the inside of first mounting plate, first mounting plate bottom end is fixedly connected with rack gear, the connecting plate front end face is fixedly connected with the second mounting plate, second mounting plate bottom end is fixedly connected with first motor, first motor main shaft end is fixedly connected with worm screw, second mounting plate top is fixedly connected with the first button, worm gear is engaged on the right side of the first motor, the worm gear front end face is fixedly connected with first gear, in the utility model, pass through the worm gear of setting, first gear, first motor and the second button, facilitate the workpiece taken out in etching chamber, behaviour Make it is simple and fast, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.

Description

A kind of etching groove of electroplating assembly line

Technical field

The utility model relates to etching groove technical field, specially a kind of etching groove of electroplating assembly line.

Background technique

Lithographic technique is covered according to mask graph or design requirement to semiconductor substrate surface or surface in semiconductor technology Lid film carries out the technology of selective corrosion or removing, and lithographic technique is not only the basic manufacture of semiconductor devices and integrated circuit Technique, but also be applied to thin film circuit, printed circuit and other Micropictures processing, etching can also be divided into wet etching and Dry etching, common etching process is approximately as first in one layer of photoresist of surface coating, then through mask to against corrosion Oxidant layer carries out selective exposure, since solution rate is not in developer solution for the exposed portion and unexposed portion of resist layer Together, resist figure is left in substrate surface after development, it is rotten to carry out selectivity to substrate surface as mask Erosion, if there are medium or metal layers for substrate surface, after selective etching, figure is transferred on medium or metal layer, because This, the demand to a kind of etching groove of electroplating assembly line is growing.

Currently there are most of electroplating assembly line etching groove in perform etching operation using corrosive liquid, Workpiece in the etching groove of traditional electroplating assembly line, it has not been convenient to take out, corrosive liquid has corrosivity, is easy to cause personnel Injury, it is extremely dangerous, and etching groove internal cause corrosive liquid does not flow, and cause etching operation slow, working efficiency is lower, because This, proposes a kind of etching groove of electroplating assembly line regarding to the issue above.

Utility model content

The purpose of this utility model is to provide a kind of etching grooves of electroplating assembly line, to solve in above-mentioned background technique The problem of proposition.

To achieve the above object, the utility model provides the following technical solutions:

A kind of etching groove of electroplating assembly line, including etching chamber, the etching chamber top are fixedly connected with connecting plate, institute It states connecting plate front end face and is fixedly connected with the first mounting plate, be rotatably connected to worm screw on the inside of first mounting plate, described first Mounting plate bottom end is fixedly connected with rack gear, and the connecting plate front end face is fixedly connected with the second mounting plate, second mounting plate Bottom end is fixedly connected with first motor, and first motor main shaft end is fixedly connected with worm screw, second mounting plate top It is fixedly connected with the first button, is engaged with worm gear on the right side of the first motor, the worm gear front end face is fixedly connected with the first tooth Wheel, the worm gear rear end face are rotatably connected to sliding block with shaft, offer sliding slot, the sliding block on the inside of the etching chamber rear end face Rear end face is slidably connected with sliding slot, and the slip front face is fixedly connected with placement plate, and the placement plate top is fixedly connected with Second motor, second electric machine main shaft end are fixedly connected with second gear, are engaged with ring gear on the outside of the second gear, institute It states ring gear side and connecting rod is rotatably connected to by shaft, the connecting rod bottom end offers link slot, the link slot inside Bull stick is slidably connected, the bull stick bottom end is connect with placement plate the lowest point, and the connecting rod other end is fixedly connected with stir plate.

It is engaged with rack on the right side of the first gear, the sliding block setting in the shape of an " I ", the sliding slot "convex" shaped is set It sets, fits on the outside of the sliding block with sliding slot.

Preferably, the quantity of second motor is two, and two second motors are symmetrical set in placement plate The left and right sides, the ring gear bottom end are slidably connected with placement plate bottom end.

Preferably, it is fixedly connected with the second button on the inside of the etching chamber left end, two second buttons are presented and divided into Set, the motion profile of the placement plate be it is linear, second button is arranged on the motion profile of placement plate.

Preferably, the worm screw runs through the first mounting plate, and the worm screw is arranged below the second mounting plate, and the bull stick is in "T"-shaped setting, the bull stick fit with link slot.

Compared with prior art, the utility model has the beneficial effects that

1, in the utility model, by the worm gear of setting, first gear, first motor and the second button, bottom end second is pressed When button is pressed, the first button is pressed, first motor operation drives worm screw rotation to drive placement plate to move upwards by transmission, puts The second button then first motor stop motion that plate presses top is set, the workpiece taken out in etching chamber is facilitated, it is easy to operate fast Victory, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.

2, in the utility model, by the second motor, ring gear, bull stick and the stir plate of setting, the second motor operation is driven Second gear rotation drives stir plate reciprocating rotation by transmission, so that the corrosive liquid in etching chamber be driven quickly to flow, improves Corrosive liquid greatly improves work efficiency the reaction rate of workpiece, improves the etching effect of workpiece, improves workpiece Processing quality.

Detailed description of the invention

Fig. 1 is the utility model overall structure diagram；

Fig. 2 is the mounting structure schematic diagram of the utility model worm gear；

Fig. 3 is the mounting structure schematic diagram of the utility model second gear.

In figure: 1- etching chamber, 2- connecting plate, the first mounting plate of 3-, 4- worm screw, 5- rack gear, the second mounting plate of 6-, 7- first Motor, the first button of 8-, 9- worm gear, 10- first gear, 11- sliding block, 12- placement plate, the second motor of 13-, 14- second gear, 15- ring gear, 16- connecting rod, 17- bull stick, 18- stir plate, the second button of 19-, a- sliding slot, b- link slot.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Fig. 1-3 is please referred to, the utility model provides a kind of technical solution:

A kind of etching groove of electroplating assembly line, including etching chamber 1,1 top of etching chamber are fixedly connected with connecting plate 2,2 front end face of connecting plate is fixedly connected with the first mounting plate 3, is rotatably connected to worm screw 4 on the inside of first mounting plate 3, First mounting plate, 3 bottom end is fixedly connected with rack gear 5, and 2 front end face of connecting plate is fixedly connected with the second mounting plate 6, institute It states 6 bottom end of the second mounting plate and is fixedly connected with first motor 7, the 7 main shaft end of first motor is fixedly connected with worm screw 4, institute It states 6 top of the second mounting plate and is fixedly connected with the first button 8, be engaged with worm gear 9 on the right side of the first motor 7, before the worm gear 9 End face is fixedly connected with first gear 10, and 9 rear end face of worm gear is rotatably connected to sliding block 11 with shaft, after the etching chamber 1 Sliding slot a is offered on the inside of end face, 11 rear end face of sliding block is slidably connected with sliding slot a, and 11 front end face of sliding block is fixedly connected There is placement plate 12,12 top of placement plate is fixedly connected with the second motor 13, and the 13 main shaft end of the second motor is fixed to be connected It is connected to second gear 14, ring gear 15 is engaged on the outside of the second gear 14,15 side of ring gear is rotatablely connected by shaft There is connecting rod 16,16 bottom end of connecting rod offers link slot b, slidably connects bull stick 17 on the inside of the link slot b, described 17 bottom end of bull stick is connect with 12 the lowest point of placement plate, and 16 other end of connecting rod is fixedly connected with stir plate 18.

10 right side of first gear is engaged with rack gear 5, the sliding block 11 setting in the shape of an " I ", the sliding slot a " convex " Font setting, 11 outside of sliding block fit with sliding slot a, and this set is conducive to facilitate the movement of placement plate 12, improves dress Stability is set, taking-up workpiece is facilitated, the quantity of second motor 13 is two, and two second motors 13 are in symmetrically to set It sets in the left and right sides of placement plate 12,15 bottom end of ring gear is slidably connected with 12 bottom end of placement plate, this set side of being conducive to Civilian dress sets the flowing for accelerating the corrosive liquid in etching chamber 1, improves working efficiency, is fixedly connected on the inside of 1 left end of etching chamber Second button 19, two second buttons 19 in setting up and down, the motion profile of the placement plate 12 be it is linear, described the Two buttons 19 are arranged on the motion profile of placement plate 12, and this set is conducive to that device is facilitated to carry out crawl, are easy to use, behaviour Make simply, the worm screw 4 runs through the first mounting plate 3, and the worm screw 4 is arranged below the second mounting plate 6, and the bull stick 17 is in "T"-shaped setting, the bull stick 17 fit with link slot b, and this set is conducive to accelerate stream of the corrosive liquid in etching chamber 1 Speed improves working efficiency, improves production effect.

The model MSMA502D servo motor of first motor 7, the model MSMA502D servo motor of the second motor 13.

Workflow: the device is powered using external power supply, powers on running equipment, and workpiece is prevented from putting It sets on plate 12, when placement plate 12 presses second button 19 on top, presses the first button 8, the operation reversion of first motor 7 drives the Worm screw 4 on one mounting plate 3 rotates, and worm screw 4 drives worm gear 9 to rotate, and worm gear 9 drives first gear 10 to rotate, to make first Gear 10 moves on rack gear 5, slides sliding block 11 in sliding slot a, and placement plate 12 moves downward, and placement plate 12, which moves to, to be pressed When the second button 19 of bottom end, first motor 7 is out of service, and the movement of the second motor 13 drives second gear 14 to rotate, to drive Ring gear 15 moves reciprocatingly, and the movement of ring gear 15 drives connecting rod 16 to do reciprocating rotation around bull stick 17, to drive stir plate 18 past Multiple rotation, bull stick 17 slide in link slot b, and stir plate 18 drives the corrosive liquid in etching chamber 1 quickly to flow, and improve corrosive liquid It to the reaction rate of workpiece, greatly improves work efficiency, improves the etching effect of workpiece, improve the processing matter of workpiece It measures, after the completion of etching, because placement plate 12 presses the second button of bottom end 19, presses the first button 8, first motor 7, which rotates forward, to be driven Placement plate 12 moves upwards, and placement plate 12 stops operating when pressing the second button 19 of top, facilitates the processing taken out in etching chamber 1 Part, it is simple and quick, it is safe and convenient to use, prevent corrosive liquid from surprisingly damaging to personnel, device is reliable and stable.

While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (5)

1. a kind of etching groove of electroplating assembly line, including etching chamber (1), it is characterised in that: etching chamber (1) top is fixed It is connected with connecting plate (2), connecting plate (2) front end face is fixedly connected with the first mounting plate (3), first mounting plate (3) Inside is rotatably connected to worm screw (4), and the first mounting plate (3) bottom end is fixedly connected with rack gear (5), before the connecting plate (2) End face is fixedly connected with the second mounting plate (6), and the second mounting plate (6) bottom end is fixedly connected with first motor (7), and described One motor (7) main shaft end is fixedly connected with worm screw (4), and the second mounting plate (6) top is fixedly connected with the first button (8), it being engaged with worm gear (9) on the right side of the first motor (7), worm gear (9) front end face is fixedly connected with first gear (10), Worm gear (9) rear end face is rotatably connected to sliding block (11) with shaft, offers sliding slot on the inside of etching chamber (1) rear end face (a), sliding block (11) rear end face is slidably connected with sliding slot (a), and sliding block (11) front end face is fixedly connected with placement plate (12), placement plate (12) top is fixedly connected with the second motor (13), and the second motor (13) main shaft end is fixed to be connected It is connected to second gear (14), is engaged with ring gear (15) on the outside of the second gear (14), ring gear (15) side passes through shaft It is rotatably connected to connecting rod (16), connecting rod (16) bottom end offers link slot (b), Slideslip in the link slot (b) It is connected with bull stick (17), bull stick (17) bottom end is connect with placement plate (12) the lowest point, and connecting rod (16) other end is fixed It is connected with stir plate (18).

2. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the first gear (10) Right side is engaged with rack gear (5), the sliding block (11) setting in the shape of an " I ", sliding slot (a) the "convex" shaped setting, the sliding block (11) outside fits with sliding slot (a).

3. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: second motor (13) Quantity be two, two second motors (13) are symmetrical set in the left and right sides of placement plate (12), the ring gear (15) bottom end is slidably connected with placement plate (12) bottom end.

4. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the etching chamber (1) is left End inside is fixedly connected with the second button (19), two second buttons (19) in setting up and down, the placement plate (12) Motion profile be it is linear, second button (19) is arranged on the motion profile of placement plate (12).

5. a kind of etching groove of electroplating assembly line according to claim 1, it is characterised in that: the worm screw (4) is run through First mounting plate (3), below the second mounting plate (6), the " T " shape setting of the bull stick (17) is described for worm screw (4) setting Bull stick (17) fits with link slot (b).