CN209181725U - A kind of crystal self-checking device - Google Patents

A kind of crystal self-checking device Download PDF

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Publication number
CN209181725U
CN209181725U CN201821827678.7U CN201821827678U CN209181725U CN 209181725 U CN209181725 U CN 209181725U CN 201821827678 U CN201821827678 U CN 201821827678U CN 209181725 U CN209181725 U CN 209181725U
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China
Prior art keywords
bracket
crystal
mould group
detecting
conveying robot
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CN201821827678.7U
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Chinese (zh)
Inventor
苗向春
管世同
李诺
李仕权
张淳
戴超
孙晨光
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Zhonghuan Leading Semiconductor Technology Co ltd
Tianjin Zhonghuan Advanced Material Technology Co Ltd
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Tianjin Zhonghuan Semiconductor Joint Stock Co Ltd
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Abstract

The utility model provides a kind of crystal self-checking device, including conveying robot, W type takes discharging device, test platform, device for detecting length, apparatus for detecting diameter, resistivity detecting device and minority carrier life time detection device, it includes crystal bracket to be measured that W type, which takes discharging device, unqualified crystal bracket and qualified crystal bracket, W type takes discharging device and test platform to be placed in conveying robot surrounding in a ring, and without departing from the clamping working range of conveying robot at a distance from conveying robot, device for detecting length, apparatus for detecting diameter, resistivity detecting device and minority carrier life time detection device are sequentially arranged on test platform.A kind of crystal self-checking device described in the utility model efficiently avoids the drawbacks such as test position is not fixed, error rate is high, acquisition uncertainty by automatic detection, avoid artificial test bring test error, test accuracy is improved, the working time is saved, solves cost of labor.

Description

A kind of crystal self-checking device
Technical field
The utility model belongs to crystal self-checking device field, more particularly, to a kind of crystal self-checking device.
Background technique
Workshop whole flow process is to form whole crystal bar after the completion of crystal growth at present, according to complete crystal bar Crystal bar is cut into length not equal crystal bar by specific form.After entire testing process uses artificial mode, and needs are to cutting Crystal bar is detected to obtain relevant form information and electric parameter information.
It in existing technology, is carried and detection using artificial, is easy to produce that detection accuracy is low, while with boule diameter Increase and the increase of monomer length, manual operation difficulty increase, there are security risks;Using test equipment integrated optimization, use The mode that stationary machines people, crystal bar pallet and profile sensor combine relies on industrial control system and MES system etc. to realize respectively The carrying of crystal bar, boule length detection and boule diameter detection between the automatic loading/unloading of crystal bar, various processes, in combination with electricity Resistance rate and minority carrier life time detection data carry out data processing and arrangement.The self-checking device can realize the real-time of detection data And accuracy, while cost of labor is reduced, manpower is saved, the production efficiency in workshop is improved.
Summary of the invention
In view of this, the utility model is directed to a kind of crystal self-checking device, detection data can be achieved to reach Real-time and accuracy, while cost of labor is reduced, manpower is saved, the production efficiency in workshop is improved.
In order to achieve the above objectives, the technical solution of the utility model is achieved in that
A kind of crystal self-checking device, including conveying robot, W type take discharging device, test platform, length detection dress It sets, apparatus for detecting diameter, resistivity detecting device and minority carrier life time detection device, it includes crystalline substance to be measured that the W type, which takes discharging device, Body bracket, unqualified crystal bracket and qualified crystal bracket, the crystal bracket to be measured, unqualified crystal bracket, qualified crystal Bracket and test platform are placed in the conveying robot surrounding in a ring, and at a distance from the conveying robot without departing from The clamping working range of the conveying robot, the device for detecting length, apparatus for detecting diameter, resistivity detecting device and few Sub- life detecting device is sequentially arranged on the test platform.
Further, the conveying robot includes pedestal, and the pedestal is connected with pedestal by vertical turntable shaft and turns Disk, the base rotary-disc realize rotation by the turntable shaft, guarantee the rotation on the conveying robot horizontal plane, the bottom Seat turntable has link arm by horizontal link arm axis connection, and the link arm realizes rotation by the connecting rod arm axle, guarantees Rotation on the conveying robot vertical plane, the link arm have mechanical arm, the machine by horizontal mechanical arm axis connection Tool arm passes through mechanical arm axle and realizes rotation, guarantees lifting and declining for mechanical arm, the mechanical arm end passes through wrist connecting shaft It is connected with wrist, the wrist passes through central axis rotation of the wrist connecting shaft along the mechanical arm, the wrist end There is crawl hand by the wrist axis connection vertical with the wrist, the crawl hand is realized by the mechanical wrist axis to be turned It is dynamic, guarantee lifting and declining for the crawl hand.
Further, the device for detecting length includes the support baseboard connecting with the test platform and the first mould group, The support baseboard is equipped with two symmetrical slideways, and two slideways are respectively in the first mould group two sides, two levels The carrying roller platform of setting is connect by two slideways with the support baseboard, and the carrying roller platform and the slideway hang down Directly, U-shaped length detection is connect with the first mould group to penetrating bracket by sliding block, and the length detection is to penetrating bracket Frame body is parallel with the support baseboard, and the length detection is connected with laser range sensor to two endpoints of bracket are penetrated.
Further, the apparatus for detecting diameter, including connect with the test platform diameter detection rotating platform and Second mould group, the second mould group include the vertical second mould group being connect with the test platform and with the vertical second mould group Level the second mould group connected by sliding block, the second mould of level group lower section are connected with locating rack, and the locating rack center has Circular open, by sliding block connection, there are two symmetrical diameter scans frame, the diameter scans for the second mould of level group top Frame end point is equipped with the symmetrical diameter sensor in position.
Further, the resistivity detecting device, including the Resistivity testing rotary flat being connect with the test platform Platform and three coordinate mould groups, the X of the three coordinates mould group are connect to mould group with the test platform, and Y-direction mould group passes through sliding block and institute It states X to connect to mould group, Z-direction mould group is connect by sliding block with the Y-direction mould group, and Z-direction mould group one end is connected with probe, the probe On set there are four measuring resistance rate probe be connected.
Further, the minority carrier life time detection device includes the measurement bracket connecting with the test platform and fixed branch Frame, the fixed bracket are equipped with cylinder, and the cylinder is connected with the lower level frame of the mobile bracket in " Z " type, the fixation Bracket is equipped with shifting sledge, and the lower level frame of the mobile bracket is connect by sliding block with the shifting sledge, the cylinder Can control the mobile bracket to slide on the shifting sledge, the upper level frame of the mobile bracket be two it is symmetrical and to Inclined two frame bodies in inside, each frame body are equipped with a bull pump, and the measurement bracket is equipped with detection zone, described Symmetrical contact there are two being set on detection zone.
Further, the conveying robot, W type take discharging device, device for detecting length, apparatus for detecting diameter, resistance Rate detection device and minority carrier life time detection device, are completely integrated in the integral platform of automated test device.
Compared with the existing technology, a kind of crystal self-checking device described in the utility model has the advantage that
A kind of crystal self-checking device described in the utility model, automatic measurement crystal length, diameter, resistivity and The test equipment of minority carrier life time can be realized the test of each influence factor of different size crystal quality, efficiently avoid test position It sets and is not fixed, error rate height, acquires the drawbacks such as uncertainty, avoid artificial test bring test error, improve and test standard Exactness saves the working time, solves cost of labor.
Detailed description of the invention
The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.? In attached drawing:
Fig. 1 is crystal self-checking device general assembly schematic diagram described in the utility model embodiment
Fig. 2 is crystal length structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 3 is crystal diameter structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 4 is crystal resistivity structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 5 is crystal minority carrier life time structure of the detecting device schematic diagram described in the utility model embodiment
Description of symbols:
1- conveying robot;11- pedestal;12- base rotary-disc;13- link arm;14- mechanical arm;15- wrist;16- is grabbed Take hand;17- turntable shaft;18- connecting rod arm axle;19- machinery arm axle;110- wrist connecting shaft;111- machinery wrist axis;2-W type picks and places Expect device;21- crystal bracket to be measured;The unqualified crystal bracket of 22-;23- qualification crystal bracket;3- test platform;The inspection of 4- length Survey device;41- support baseboard;42- the first mould group;43- slideway;44- carrying roller platform;45- length detection is to penetrating bracket;46- swashs Ligh-ranging sensor;5- apparatus for detecting diameter;51- diameter detects rotating platform;52- the second mould group;The vertical second mould group of 521-; 522- level the second mould group;53- locating rack;54- diameter scans frame;55- diameter sensor;6- resistivity detecting device;61- electricity Resistance rate detects rotating platform;Tri- coordinate mould group of 62-;621-X is to mould group;622-Y is to mould group;623-Z is to mould group;63- probe; Tetra- measuring resistance rate probes of 64-;7- minority carrier life time detection device;71- measures bracket;72- fixes bracket;73- cylinder;74- is moved Dynamic sliding rail;75- moves bracket;76- bull pump;The contact 77-;78- detection zone.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower", The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result, Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection;It can be mechanical connection, be also possible to be electrically connected;Can be directly connected, can also indirectly connected through an intermediary, It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
A kind of crystal self-checking device as shown in Figure 1, including conveying robot 1, W type take discharging device 2, test platform 3, device for detecting length 4, apparatus for detecting diameter 5, resistivity detecting device 6 and minority carrier life time detection device 7, the W type pick and place Expect that device 2 includes crystal bracket 21 to be measured, unqualified crystal bracket 22 and qualified crystal bracket 23, the crystal bracket to be measured 21, unqualified crystal bracket 22, qualified crystal bracket 23 and test platform 3 are placed in 1 surrounding of conveying robot in a ring, And without departing from the clamping working range of the conveying robot 1, the length detection dress at a distance from the conveying robot 1 4, apparatus for detecting diameter 5, resistivity detecting device 6 and minority carrier life time detection device 7 is set to be sequentially arranged on the test platform 3.
Wherein, the conveying robot 1 includes pedestal 11, and the pedestal 11 is connected with pedestal by vertical turntable shaft 17 Turntable 12, the base rotary-disc 12 realize rotation by the turntable shaft 17, guarantee to turn on 1 horizontal plane of conveying robot Dynamic, the base rotary-disc 12 is connected with link arm 13 by horizontal connecting rod arm axle 18, and the link arm 13 passes through the connecting rod Arm axle 18 realizes rotation, guarantees the rotation on 1 vertical plane of conveying robot, and the link arm 13 passes through horizontal mechanical arm Axis 19 is connected with mechanical arm 14, and the mechanical arm 14 passes through mechanical arm axle 19 and realizes rotation, guarantee mechanical arm 14 lift and under Drop, 14 end of mechanical arm are connected with wrist 15 by wrist connecting shaft 110, and the wrist 15 passes through wrist connecting shaft 110 along the mechanical arm 14 central axis rotation, 15 end of wrist passes through the wrist vertical with the wrist 15 Axis 111 is connected with crawl hand 16, and the crawl hand 16 realizes rotation by the mechanical wrist axis 111, guarantees the crawl hand 16 Lift and decline.
Wherein, as shown in Figure 2 the device for detecting length 4 include the support baseboard 41 being connect with the test platform 3 and First mould group 42, the support baseboard 41 are equipped with two symmetrical slideways 43, and two slideways 43 are respectively described first 42 two sides of mould group, two horizontally disposed carrying roller platforms 44 are connect by two slideways 43 with the support baseboard 41, and The carrying roller platform 44 is vertical with the slideway 43, and U-shaped length detection passes through sliding block and first mould to bracket 45 is penetrated 42 connection of group, and the length detection is parallel with the support baseboard 41 to the frame body for penetrating bracket 45, and the length detection is to penetrating 45 two endpoints of bracket are connected with laser range sensor 46.
Wherein, the apparatus for detecting diameter 5, the diameter detection including connecting with the test platform 3 rotate as shown in Figure 3 Platform 51 and the second mould group 52, the second mould group include the vertical second mould group 521 being connect with the test platform 3 and with institute The second mould of level group 522 that vertical second mould group 521 is connected by sliding block is stated, is connected with below the second mould of level group 522 There is a circular open at locating rack 53,53 center of locating rack, by there are two sliding block connections above the second mould of level group 522 Symmetrical diameter scans frame 54,54 endpoint of diameter scans frame is equipped with the symmetrical diameter sensor 55 in position.
Wherein, the resistivity detecting device 6 as shown in Figure 4, including the Resistivity testing being connect with the test platform 3 The X of rotating platform 61 and three coordinate mould groups 62, the three coordinates mould group is connect to mould group 621 with the test platform 3, Y-direction mould Group 622 is connect with the X to mould group 621 by sliding block, and Z-direction mould group 623 is connect by sliding block with the Y-direction mould group 622, Z-direction 623 one end of mould group 63 is connected with probe, and it is connected to set that there are four measuring resistance rate probes 64 on the probe 63.
Wherein, the minority carrier life time detection device 7 includes the measurement bracket connecting with the test platform 3 as shown in Figure 5 71 and fixed bracket 72, the fixed bracket 72 is equipped with cylinder 73, the cylinder 73 under the mobile bracket 75 of " Z " type Level frame is connected, and the fixed bracket 72 is equipped with shifting sledge 74, the lower level frame of the mobile bracket 75 by sliding block with The shifting sledge 74 connects, and the cylinder 73 can control the mobile bracket 75 to slide on the shifting sledge 74, described The upper level frame of mobile bracket 75 is that two symmetrical and inclined two frame bodies, each frame body are equipped with one inwardly Bull pump 76, the measurement bracket 71 are equipped with detection zone 78, set that there are two symmetrical contacts 77 on the detection zone 78.
Wherein, the conveying robot 1, W type take discharging device 2, device for detecting length 4, apparatus for detecting diameter 5, resistance Rate detection device 6 and minority carrier life time detection device 7, are completely integrated in the integral platform of automated test device.
Specific embodiment of the present utility model:
1. by automation control, base rotary-disc 12 is driven in the horizontal plane by the turntable shaft 17 of conveying robot 1 Conveying robot 1 is turned to 21 position of crystal bracket to be measured by rotation, and connecting rod arm axle 18 drives link arm 13 on vertical plane Rotation is visited before making link arm 13 so that mechanical arm 14 is moved to 21 position of crystal bracket to be measured, and mechanical arm 14 passes through mechanical arm axle Lower general who has surrendered's wrist 15 of 19 drive mechanical arms 14 moves to the crawl appropriate location of crystal to be measured, wrist connecting shaft 110 and machinery Wrist axis 111 adjusts wrist 15 and grabs the crawl position of hand 16, treats side crystal and realizes crawl.
2. crystal to be measured is transported on device for detecting length 4 by conveying robot 1, two carrying roller platforms 44 pass through slideway 43 Distance between two carrying roller platforms 44 is adjusted according to crystalline size, crystal is horizontally arranged on carrying roller platform 44, utilizes the first mould group The detection of 42 adjustment lengths controls length detection to the laser range sensor 46 and crystal penetrated on bracket 45 to 45 height of bracket is penetrated Centering measures crystal length.
3. the crystal of device for detecting length 4 is transported on apparatus for detecting diameter 5 using conveying robot 1, crystal is vertical It is placed on diameter detection rotating platform 51, using between the diameter sensor 55 on the second mould group 52 adjusting diameter scans frame 54 Away from and adjustable height, measure crystal diameter.
4. the crystal on apparatus for detecting diameter 5 is transported on resistivity detecting device 6 using conveying robot 1, crystal It is placed on Resistivity testing rotating platform 61, is gone up and down using the position that three coordinate mould groups 62 adjust probe 63 and mobile vertically, Using four measuring resistance rate probes 64 on probe 63, crystal resistivity is detected in crystal predeterminated position.
5. controlling mobile bracket 75 by cylinder 73 to slide on shifting sledge 74, the position of mobile bracket 75 is adjusted, is led to It crosses bull pump 76 to drip according to predeterminated frequency onto two contacts 77, then the crystal on resistivity detecting device 6 is utilized and is removed Fortune manipulator 1 is transported in minority carrier life time detection device 7, and crystal is placed on vertically on two contacts 77 on measurement bracket 71, Measure crystal minority carrier life time.
6. whether qualified according to testing result, conveying robot 1 will test after crystal, be transported to unqualified crystal bracket 22 or qualified crystal bracket 23 on.
7. host computer exports the data of test according to the form of control diagram over the display.
The automatic measurement crystal length of the utility model, diameter, resistivity and minority carrier life time test equipment can be real The test of existing each influence factor of different size crystal quality efficiently avoids test position and is not fixed, error rate height, acquires not The drawbacks such as certainty avoid artificial test bring test error, improve test accuracy, save the working time, solve people Work cost.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection scope within.

Claims (7)

1. a kind of crystal self-checking device, it is characterised in that: take discharging device (2), test including conveying robot (1), W type Platform (3), device for detecting length (4), apparatus for detecting diameter (5), resistivity detecting device (6) and minority carrier life time detection device (7), it includes crystal bracket (21) to be measured, unqualified crystal bracket (22) and qualified crystal bracket that the W type, which takes discharging device (2), (23), the crystal bracket (21) to be measured, unqualified crystal bracket (22), qualified crystal bracket (23) and test platform (3) are in Annular is placed in the conveying robot (1) surrounding, and without departing from the carrying implement at a distance from the conveying robot (1) The clamping working range of tool hand (1), the device for detecting length (4), apparatus for detecting diameter (5), resistivity detecting device (6) and Minority carrier life time detection device (7) is sequentially arranged on the test platform (3).
2. a kind of crystal self-checking device according to claim 1, it is characterised in that: conveying robot (1) packet It includes pedestal (11), the pedestal (11) is connected with base rotary-disc (12), the base rotary-disc by vertical turntable shaft (17) (12) rotation being realized by the turntable shaft (17), guaranteeing the rotation on the conveying robot (1) horizontal plane, the pedestal turns Disk (12) is connected with link arm (13) by horizontal connecting rod arm axle (18), and the link arm (13) passes through the connecting rod arm axle (18) it realizes rotation, guarantees the rotation on the conveying robot (1) vertical plane, the link arm (13) passes through horizontal machinery Arm axle (19) is connected with mechanical arm (14), and the mechanical arm (14) passes through mechanical arm axle (19) and realizes rotation, guarantees mechanical arm (14) lift and decline, mechanical arm (14) end is connected with wrist (15), the machine by wrist connecting shaft (110) For tool wrist (15) by wrist connecting shaft (110) along the central axis rotation of the mechanical arm (14), wrist (15) end is logical It crosses the mechanical wrist axis (111) vertical with the wrist (15) and is connected with crawl hand (16), the crawl hand (16) passes through described Mechanical wrist axis (111) realizes rotation, guarantees lifting and declining for crawl hand (16).
3. a kind of crystal self-checking device according to claim 2, it is characterised in that: the device for detecting length (4) Including the support baseboard (41) connecting with the test platform (3) and the first mould group (42), the support baseboard (41) is equipped with Two symmetrical slideways (43), for two slideways (43) respectively in the first mould group (42) two sides, two horizontally disposed Carrying roller platform (44) is connect by two slideways (43) with the support baseboard (41), and the carrying roller platform (44) and institute State slideway (43) vertically, U-shaped length detection is connect with the first mould group (42) to penetrating bracket (45) by sliding block, and institute It is parallel with the support baseboard (41) to the frame body for penetrating bracket (45) to state length detection, the length detection is to penetrating bracket (45) two A endpoint is connected with laser range sensor (46).
4. a kind of crystal self-checking device according to claim 3, it is characterised in that: the apparatus for detecting diameter (5), Including diameter detection rotating platform (51) being connect with the test platform (3) and the second mould group (52), the second mould group packet It includes the vertical second mould group (521) connecting with the test platform (3) and is connected with the vertical second mould group (521) by sliding block Level the second mould group (522) connect, the second mould of level group (522) lower section are connected with locating rack (53), the locating rack (53) there is circular open at center, and by sliding block connection, there are two symmetrical diameter scans for the second mould of level group (522) top Frame (54), diameter scans frame (54) endpoint are equipped with the symmetrical diameter sensor in position (55).
5. a kind of crystal self-checking device according to claim 4, it is characterised in that: the resistivity detecting device (6), including the Resistivity testing rotating platform (61) being connect with the test platform (3) and three coordinate mould groups (62), described three The X of coordinate mould group is connect to mould group (621) with the test platform (3), and Y-direction mould group (622) passes through sliding block and the X to mould group (621) it connects, Z-direction mould group (623) is connect by sliding block with the Y-direction mould group (622), Z-direction mould group (623) one end and probe (63) it is connected, sets that there are four measuring resistance rate probe (64) is connected on the probe (63).
6. a kind of crystal self-checking device according to claim 5, it is characterised in that: the minority carrier life time detection device (7) include the measurement bracket (71) being connect with the test platform (3) and fixation bracket (72), set on the fixed bracket (72) Have cylinder (73), the cylinder (73) is connected with the lower level frame of the mobile bracket (75) in " Z " type, the fixed bracket (72) It being equipped with shifting sledge (74), the lower level frame of the mobile bracket (75) is connect by sliding block with the shifting sledge (74), The cylinder (73) can control the mobile bracket (75) to slide on the shifting sledge (74), the mobile bracket (75) Upper level frame is that two are symmetrical and inclined two frame bodies, each frame body are equipped with a bull pump (76) inwardly, The measurement bracket (71) is equipped with detection zone (78), sets that there are two symmetrical contact (77) on the detection zone (78).
7. a kind of crystal self-checking device according to claim 6, it is characterised in that: the conveying robot (1), W Type takes discharging device (2), device for detecting length (4), apparatus for detecting diameter (5), resistivity detecting device (6) and minority carrier life time inspection It surveys device (7), is completely integrated in the integral platform of automated test device.
CN201821827678.7U 2018-11-07 2018-11-07 A kind of crystal self-checking device Active CN209181725U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821827678.7U CN209181725U (en) 2018-11-07 2018-11-07 A kind of crystal self-checking device

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Application Number Priority Date Filing Date Title
CN201821827678.7U CN209181725U (en) 2018-11-07 2018-11-07 A kind of crystal self-checking device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405748A (en) * 2018-11-07 2019-03-01 天津中环领先材料技术有限公司 A kind of crystal self-checking device and method
CN117288435A (en) * 2023-09-26 2023-12-26 杭州爱晶伦科技有限公司 Intraocular lens glare testing device and application method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405748A (en) * 2018-11-07 2019-03-01 天津中环领先材料技术有限公司 A kind of crystal self-checking device and method
CN117288435A (en) * 2023-09-26 2023-12-26 杭州爱晶伦科技有限公司 Intraocular lens glare testing device and application method thereof

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Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province

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Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

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