A kind of crystal self-checking device
Technical field
The utility model belongs to crystal self-checking device field, more particularly, to a kind of crystal self-checking device.
Background technique
Workshop whole flow process is to form whole crystal bar after the completion of crystal growth at present, according to complete crystal bar
Crystal bar is cut into length not equal crystal bar by specific form.After entire testing process uses artificial mode, and needs are to cutting
Crystal bar is detected to obtain relevant form information and electric parameter information.
It in existing technology, is carried and detection using artificial, is easy to produce that detection accuracy is low, while with boule diameter
Increase and the increase of monomer length, manual operation difficulty increase, there are security risks;Using test equipment integrated optimization, use
The mode that stationary machines people, crystal bar pallet and profile sensor combine relies on industrial control system and MES system etc. to realize respectively
The carrying of crystal bar, boule length detection and boule diameter detection between the automatic loading/unloading of crystal bar, various processes, in combination with electricity
Resistance rate and minority carrier life time detection data carry out data processing and arrangement.The self-checking device can realize the real-time of detection data
And accuracy, while cost of labor is reduced, manpower is saved, the production efficiency in workshop is improved.
Summary of the invention
In view of this, the utility model is directed to a kind of crystal self-checking device, detection data can be achieved to reach
Real-time and accuracy, while cost of labor is reduced, manpower is saved, the production efficiency in workshop is improved.
In order to achieve the above objectives, the technical solution of the utility model is achieved in that
A kind of crystal self-checking device, including conveying robot, W type take discharging device, test platform, length detection dress
It sets, apparatus for detecting diameter, resistivity detecting device and minority carrier life time detection device, it includes crystalline substance to be measured that the W type, which takes discharging device,
Body bracket, unqualified crystal bracket and qualified crystal bracket, the crystal bracket to be measured, unqualified crystal bracket, qualified crystal
Bracket and test platform are placed in the conveying robot surrounding in a ring, and at a distance from the conveying robot without departing from
The clamping working range of the conveying robot, the device for detecting length, apparatus for detecting diameter, resistivity detecting device and few
Sub- life detecting device is sequentially arranged on the test platform.
Further, the conveying robot includes pedestal, and the pedestal is connected with pedestal by vertical turntable shaft and turns
Disk, the base rotary-disc realize rotation by the turntable shaft, guarantee the rotation on the conveying robot horizontal plane, the bottom
Seat turntable has link arm by horizontal link arm axis connection, and the link arm realizes rotation by the connecting rod arm axle, guarantees
Rotation on the conveying robot vertical plane, the link arm have mechanical arm, the machine by horizontal mechanical arm axis connection
Tool arm passes through mechanical arm axle and realizes rotation, guarantees lifting and declining for mechanical arm, the mechanical arm end passes through wrist connecting shaft
It is connected with wrist, the wrist passes through central axis rotation of the wrist connecting shaft along the mechanical arm, the wrist end
There is crawl hand by the wrist axis connection vertical with the wrist, the crawl hand is realized by the mechanical wrist axis to be turned
It is dynamic, guarantee lifting and declining for the crawl hand.
Further, the device for detecting length includes the support baseboard connecting with the test platform and the first mould group,
The support baseboard is equipped with two symmetrical slideways, and two slideways are respectively in the first mould group two sides, two levels
The carrying roller platform of setting is connect by two slideways with the support baseboard, and the carrying roller platform and the slideway hang down
Directly, U-shaped length detection is connect with the first mould group to penetrating bracket by sliding block, and the length detection is to penetrating bracket
Frame body is parallel with the support baseboard, and the length detection is connected with laser range sensor to two endpoints of bracket are penetrated.
Further, the apparatus for detecting diameter, including connect with the test platform diameter detection rotating platform and
Second mould group, the second mould group include the vertical second mould group being connect with the test platform and with the vertical second mould group
Level the second mould group connected by sliding block, the second mould of level group lower section are connected with locating rack, and the locating rack center has
Circular open, by sliding block connection, there are two symmetrical diameter scans frame, the diameter scans for the second mould of level group top
Frame end point is equipped with the symmetrical diameter sensor in position.
Further, the resistivity detecting device, including the Resistivity testing rotary flat being connect with the test platform
Platform and three coordinate mould groups, the X of the three coordinates mould group are connect to mould group with the test platform, and Y-direction mould group passes through sliding block and institute
It states X to connect to mould group, Z-direction mould group is connect by sliding block with the Y-direction mould group, and Z-direction mould group one end is connected with probe, the probe
On set there are four measuring resistance rate probe be connected.
Further, the minority carrier life time detection device includes the measurement bracket connecting with the test platform and fixed branch
Frame, the fixed bracket are equipped with cylinder, and the cylinder is connected with the lower level frame of the mobile bracket in " Z " type, the fixation
Bracket is equipped with shifting sledge, and the lower level frame of the mobile bracket is connect by sliding block with the shifting sledge, the cylinder
Can control the mobile bracket to slide on the shifting sledge, the upper level frame of the mobile bracket be two it is symmetrical and to
Inclined two frame bodies in inside, each frame body are equipped with a bull pump, and the measurement bracket is equipped with detection zone, described
Symmetrical contact there are two being set on detection zone.
Further, the conveying robot, W type take discharging device, device for detecting length, apparatus for detecting diameter, resistance
Rate detection device and minority carrier life time detection device, are completely integrated in the integral platform of automated test device.
Compared with the existing technology, a kind of crystal self-checking device described in the utility model has the advantage that
A kind of crystal self-checking device described in the utility model, automatic measurement crystal length, diameter, resistivity and
The test equipment of minority carrier life time can be realized the test of each influence factor of different size crystal quality, efficiently avoid test position
It sets and is not fixed, error rate height, acquires the drawbacks such as uncertainty, avoid artificial test bring test error, improve and test standard
Exactness saves the working time, solves cost of labor.
Detailed description of the invention
The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new
The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.?
In attached drawing:
Fig. 1 is crystal self-checking device general assembly schematic diagram described in the utility model embodiment
Fig. 2 is crystal length structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 3 is crystal diameter structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 4 is crystal resistivity structure of the detecting device schematic diagram described in the utility model embodiment
Fig. 5 is crystal minority carrier life time structure of the detecting device schematic diagram described in the utility model embodiment
Description of symbols:
1- conveying robot;11- pedestal;12- base rotary-disc;13- link arm;14- mechanical arm;15- wrist;16- is grabbed
Take hand;17- turntable shaft;18- connecting rod arm axle;19- machinery arm axle;110- wrist connecting shaft;111- machinery wrist axis;2-W type picks and places
Expect device;21- crystal bracket to be measured;The unqualified crystal bracket of 22-;23- qualification crystal bracket;3- test platform;The inspection of 4- length
Survey device;41- support baseboard;42- the first mould group;43- slideway;44- carrying roller platform;45- length detection is to penetrating bracket;46- swashs
Ligh-ranging sensor;5- apparatus for detecting diameter;51- diameter detects rotating platform;52- the second mould group;The vertical second mould group of 521-;
522- level the second mould group;53- locating rack;54- diameter scans frame;55- diameter sensor;6- resistivity detecting device;61- electricity
Resistance rate detects rotating platform;Tri- coordinate mould group of 62-;621-X is to mould group;622-Y is to mould group;623-Z is to mould group;63- probe;
Tetra- measuring resistance rate probes of 64-;7- minority carrier life time detection device;71- measures bracket;72- fixes bracket;73- cylinder;74- is moved
Dynamic sliding rail;75- moves bracket;76- bull pump;The contact 77-;78- detection zone.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection;It can be mechanical connection, be also possible to be electrically connected;Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
A kind of crystal self-checking device as shown in Figure 1, including conveying robot 1, W type take discharging device 2, test platform
3, device for detecting length 4, apparatus for detecting diameter 5, resistivity detecting device 6 and minority carrier life time detection device 7, the W type pick and place
Expect that device 2 includes crystal bracket 21 to be measured, unqualified crystal bracket 22 and qualified crystal bracket 23, the crystal bracket to be measured
21, unqualified crystal bracket 22, qualified crystal bracket 23 and test platform 3 are placed in 1 surrounding of conveying robot in a ring,
And without departing from the clamping working range of the conveying robot 1, the length detection dress at a distance from the conveying robot 1
4, apparatus for detecting diameter 5, resistivity detecting device 6 and minority carrier life time detection device 7 is set to be sequentially arranged on the test platform 3.
Wherein, the conveying robot 1 includes pedestal 11, and the pedestal 11 is connected with pedestal by vertical turntable shaft 17
Turntable 12, the base rotary-disc 12 realize rotation by the turntable shaft 17, guarantee to turn on 1 horizontal plane of conveying robot
Dynamic, the base rotary-disc 12 is connected with link arm 13 by horizontal connecting rod arm axle 18, and the link arm 13 passes through the connecting rod
Arm axle 18 realizes rotation, guarantees the rotation on 1 vertical plane of conveying robot, and the link arm 13 passes through horizontal mechanical arm
Axis 19 is connected with mechanical arm 14, and the mechanical arm 14 passes through mechanical arm axle 19 and realizes rotation, guarantee mechanical arm 14 lift and under
Drop, 14 end of mechanical arm are connected with wrist 15 by wrist connecting shaft 110, and the wrist 15 passes through wrist connecting shaft
110 along the mechanical arm 14 central axis rotation, 15 end of wrist passes through the wrist vertical with the wrist 15
Axis 111 is connected with crawl hand 16, and the crawl hand 16 realizes rotation by the mechanical wrist axis 111, guarantees the crawl hand 16
Lift and decline.
Wherein, as shown in Figure 2 the device for detecting length 4 include the support baseboard 41 being connect with the test platform 3 and
First mould group 42, the support baseboard 41 are equipped with two symmetrical slideways 43, and two slideways 43 are respectively described first
42 two sides of mould group, two horizontally disposed carrying roller platforms 44 are connect by two slideways 43 with the support baseboard 41, and
The carrying roller platform 44 is vertical with the slideway 43, and U-shaped length detection passes through sliding block and first mould to bracket 45 is penetrated
42 connection of group, and the length detection is parallel with the support baseboard 41 to the frame body for penetrating bracket 45, and the length detection is to penetrating
45 two endpoints of bracket are connected with laser range sensor 46.
Wherein, the apparatus for detecting diameter 5, the diameter detection including connecting with the test platform 3 rotate as shown in Figure 3
Platform 51 and the second mould group 52, the second mould group include the vertical second mould group 521 being connect with the test platform 3 and with institute
The second mould of level group 522 that vertical second mould group 521 is connected by sliding block is stated, is connected with below the second mould of level group 522
There is a circular open at locating rack 53,53 center of locating rack, by there are two sliding block connections above the second mould of level group 522
Symmetrical diameter scans frame 54,54 endpoint of diameter scans frame is equipped with the symmetrical diameter sensor 55 in position.
Wherein, the resistivity detecting device 6 as shown in Figure 4, including the Resistivity testing being connect with the test platform 3
The X of rotating platform 61 and three coordinate mould groups 62, the three coordinates mould group is connect to mould group 621 with the test platform 3, Y-direction mould
Group 622 is connect with the X to mould group 621 by sliding block, and Z-direction mould group 623 is connect by sliding block with the Y-direction mould group 622, Z-direction
623 one end of mould group 63 is connected with probe, and it is connected to set that there are four measuring resistance rate probes 64 on the probe 63.
Wherein, the minority carrier life time detection device 7 includes the measurement bracket connecting with the test platform 3 as shown in Figure 5
71 and fixed bracket 72, the fixed bracket 72 is equipped with cylinder 73, the cylinder 73 under the mobile bracket 75 of " Z " type
Level frame is connected, and the fixed bracket 72 is equipped with shifting sledge 74, the lower level frame of the mobile bracket 75 by sliding block with
The shifting sledge 74 connects, and the cylinder 73 can control the mobile bracket 75 to slide on the shifting sledge 74, described
The upper level frame of mobile bracket 75 is that two symmetrical and inclined two frame bodies, each frame body are equipped with one inwardly
Bull pump 76, the measurement bracket 71 are equipped with detection zone 78, set that there are two symmetrical contacts 77 on the detection zone 78.
Wherein, the conveying robot 1, W type take discharging device 2, device for detecting length 4, apparatus for detecting diameter 5, resistance
Rate detection device 6 and minority carrier life time detection device 7, are completely integrated in the integral platform of automated test device.
Specific embodiment of the present utility model:
1. by automation control, base rotary-disc 12 is driven in the horizontal plane by the turntable shaft 17 of conveying robot 1
Conveying robot 1 is turned to 21 position of crystal bracket to be measured by rotation, and connecting rod arm axle 18 drives link arm 13 on vertical plane
Rotation is visited before making link arm 13 so that mechanical arm 14 is moved to 21 position of crystal bracket to be measured, and mechanical arm 14 passes through mechanical arm axle
Lower general who has surrendered's wrist 15 of 19 drive mechanical arms 14 moves to the crawl appropriate location of crystal to be measured, wrist connecting shaft 110 and machinery
Wrist axis 111 adjusts wrist 15 and grabs the crawl position of hand 16, treats side crystal and realizes crawl.
2. crystal to be measured is transported on device for detecting length 4 by conveying robot 1, two carrying roller platforms 44 pass through slideway 43
Distance between two carrying roller platforms 44 is adjusted according to crystalline size, crystal is horizontally arranged on carrying roller platform 44, utilizes the first mould group
The detection of 42 adjustment lengths controls length detection to the laser range sensor 46 and crystal penetrated on bracket 45 to 45 height of bracket is penetrated
Centering measures crystal length.
3. the crystal of device for detecting length 4 is transported on apparatus for detecting diameter 5 using conveying robot 1, crystal is vertical
It is placed on diameter detection rotating platform 51, using between the diameter sensor 55 on the second mould group 52 adjusting diameter scans frame 54
Away from and adjustable height, measure crystal diameter.
4. the crystal on apparatus for detecting diameter 5 is transported on resistivity detecting device 6 using conveying robot 1, crystal
It is placed on Resistivity testing rotating platform 61, is gone up and down using the position that three coordinate mould groups 62 adjust probe 63 and mobile vertically,
Using four measuring resistance rate probes 64 on probe 63, crystal resistivity is detected in crystal predeterminated position.
5. controlling mobile bracket 75 by cylinder 73 to slide on shifting sledge 74, the position of mobile bracket 75 is adjusted, is led to
It crosses bull pump 76 to drip according to predeterminated frequency onto two contacts 77, then the crystal on resistivity detecting device 6 is utilized and is removed
Fortune manipulator 1 is transported in minority carrier life time detection device 7, and crystal is placed on vertically on two contacts 77 on measurement bracket 71,
Measure crystal minority carrier life time.
6. whether qualified according to testing result, conveying robot 1 will test after crystal, be transported to unqualified crystal bracket
22 or qualified crystal bracket 23 on.
7. host computer exports the data of test according to the form of control diagram over the display.
The automatic measurement crystal length of the utility model, diameter, resistivity and minority carrier life time test equipment can be real
The test of existing each influence factor of different size crystal quality efficiently avoids test position and is not fixed, error rate height, acquires not
The drawbacks such as certainty avoid artificial test bring test error, improve test accuracy, save the working time, solve people
Work cost.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.