CN209169119U - A kind of automatic material transport device - Google Patents
A kind of automatic material transport device Download PDFInfo
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- CN209169119U CN209169119U CN201821936052.XU CN201821936052U CN209169119U CN 209169119 U CN209169119 U CN 209169119U CN 201821936052 U CN201821936052 U CN 201821936052U CN 209169119 U CN209169119 U CN 209169119U
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- transport device
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Abstract
A kind of automatic material transport device, including overhead traveling crane, loading plate, photoelectricity sensing mechanism and reflecting mechanism.Photoelectricity sensing mechanism is installed on overhead traveling crane.Reflecting mechanism includes trigger unit, reflecting plate and driving section, reflecting plate and transmission portion are in the lower section of loading plate, trigger unit is connect with reflecting plate by driving section, trigger unit can be up and down relative to loading plate, when first surface is without material, one end of trigger unit protrudes from the first surface of loading plate, and reflecting plate is in first position；There are when material, one end of trigger unit is pushed and is moved downward by material loading plate first surface, drives reflecting plate activity to the second position by driving section；When reflecting plate is in first position, reflecting plate can receive the light from photoelectricity sensing mechanism, and photoelectricity sensing mechanism generates the first signal；When reflecting plate is in the second position, reflecting plate cannot receive the light from photoelectricity sensing mechanism, and photoelectricity sensing mechanism generates second signal.
Description
Technical field
The utility model relates to field of semiconductor manufacture, in particular to remove automatically used in semiconductor integrated circuit manufacture
Fortune system.
Background technique
It in manufacture of semiconductor, needs to shift wafer between different processes, to avoid wafer contaminated or damage, usually
It is to place the wafer in wafer cassette, wafer is carried with wafer cassette, realizes the transfer of wafer.
In general, real by automatic material conveyer (AMHS, Automated Material Handling System)
The transfer of existing wafer.
Automatic material conveyer includes automation overhead traveling crane (OHT, overhead hoist transfer) and loading plate.
Overhead traveling crane can be moved along track, and loading plate is located at wafer cassette storage position.
Wafer cassette is placed into loading plate and goes forward by automation overhead traveling crane, need first on loading plate with the presence or absence of there is wafer cassette
Confirmed, to avoid appearing on loading plate in the case where existing wafer cassette, places the situation of wafer cassette again, that is, two
It moves in again.
Utility model content
Based on the above issues, the utility model provides a kind of automatic material transport device and method, can accurately feel
Surveying wafer cassette whether there is, even if non-wafer in wafer cassette, will not generate erroneous judgement situation.
To reach above-mentioned purpose, the utility model provides a kind of automatic material transport device, including overhead traveling crane, loading plate, light
Electrical sensing mechanism and reflecting mechanism.
Overhead traveling crane is movably installed on overhead crane orbit.Loading plate is located at below overhead traveling crane, with opposite first surface and the
Two surfaces, first surface is for carrying material.Photoelectricity sensing mechanism is installed on overhead traveling crane.Reflecting mechanism includes trigger unit, reflection
Plate and driving section, reflecting plate and transmission portion are connect with reflecting plate by driving section in the lower section of loading plate, trigger unit, trigger unit
Can be up and down relative to loading plate, when first surface is without material, one end of trigger unit protrudes from the first surface of loading plate,
Reflecting plate is in first position；There are when material, one end of trigger unit is pushed and is moved downward by material loading plate first surface,
Drive reflecting plate activity to the second position by driving section；When reflecting plate is in first position, reflecting plate can be received from light
The light of electrical sensing mechanism, and photoelectricity sensing mechanism is reflected light back into, photoelectricity sensing mechanism generates the first signal；At reflecting plate
When the second position, reflecting plate cannot receive the light from photoelectricity sensing mechanism, and photoelectricity sensing mechanism generates second signal.
According to an embodiment, driving section includes the first engaging section and the second engaging section, and the first engaging section is fixed with trigger unit
Connection, the second engaging section connect with reflecting plate, and the first engaging section and the second engaging section engage, can be through in trigger unit motion process
By the transmission of the first engaging section and the second engaging section so that reflecting plate is movable between the first location and the second location.
According to an embodiment, the first engaging section is rack gear, and the second engaging section is gear.
According to an embodiment, reflecting mechanism further includes mounting base, interlocking lever and bearing, and bearing is assemblied in interlocking lever, reflection
For plate by interlocking lever and the rotatable connection of mounting base, mounting base 44 is set to the second surface of loading plate, the second engaging section with
Interlocking lever is fixedly connected, and is able to drive reflecting plate in the second engaging section rotary course and is revolved between the first location and the second location
Turn.
According to an embodiment, one end of the first engaging section is fixedly connected with the other end of trigger unit, and coaxial with trigger unit,
Reflecting mechanism further includes stopper section, and one end of the first engaging section is fixed in stopper section, when reflecting plate is in first position, stopper section
It is resisted against second surface.
According to an embodiment, reflecting mechanism further includes elastic portion, is connect with trigger unit, and trigger unit is not pressed down by external force
When, reflecting plate is in first position, and elastic portion is in free state；When trigger unit is pressed down by external force, reflecting plate is in second
Position, deformation occurs for elastic portion；After external force revocation, trigger unit is risen by the elastic restoring force of elastic portion, so that reflecting plate is extensive
It is in first position again.According to an embodiment, the quantity of mounting base is a pair, is symmetrically set to opposite the two of reflecting plate
Side, the neighbouring wherein mounting base in driving section.
According to an embodiment, when reflecting plate is in first position, reflecting plate is parallel to each other with loading plate；Reflecting plate is in the
When two positions, the angle of reflecting plate and loading plate is 80 ° to 100 °.
According to an embodiment, when reflecting plate is in first position, reflecting plate is in a horizontal position；Reflecting plate is in second
When setting, reflecting plate is mutually perpendicular to horizontal position.
According to an embodiment, when reflecting plate is in the second position, reflecting plate is in a vertical position.
According to an embodiment, the quantity of reflecting mechanism is one or more.
According to an embodiment, the quantity of reflecting mechanism is one, is located at the lower section at the middle part of loading plate.
According to an embodiment, the quantity of reflecting mechanism be it is multiple, be uniformly distributed below the middle part of loading plate.
According to an embodiment, the surface of reflecting plate has reflectorized material.
It further include control mechanism according to an embodiment, the control mechanism, which is able to respond, controls institute in first signal
The grasping mechanism decentralization material of overhead traveling crane is stated, and is able to respond and moves to next decentralization in the second signal control overhead traveling crane
Station.
The beneficial effect of the utility model compared to the prior art is: the reflecting plate of the utility model can based on whether
There is the case where wafer cassette and change self-position, so that photoelectricity sensing mechanism generates corresponding sensing signal.Compared to related skill
The fixed automatic material conveyer of reflecting plate in art, the automatic material transport device of the utility model can be sensed accurately
Wafer cassette whether there is, even if non-wafer in wafer cassette, will not generate erroneous judgement situation.Also, the structure letter of the utility model
It is single, it is easy to implement.
Detailed description of the invention
Fig. 1 is the schematic diagram of automatic material conveyer in the related technology.
Fig. 2 is the loading plate of automatic material conveyer in the related technology and reflecting plate top view.
Fig. 3 is the loading plate of automatic material conveyer in the related technology and reflecting plate side view.
Fig. 4 is the double signal moved in sensor and detect wafer cassette of automatic material conveyer in the related technology
Figure.
Fig. 5 is the double schematic diagram moved in sensor and erroneous detection occurs of automatic material conveyer in the related technology.
Fig. 6 is the schematic diagram of the automatic material transport device of one embodiment of the disclosure.
Fig. 7 is the schematic diagram of the automatic material transport device of one embodiment of the disclosure, wherein reflecting plate is in first
It sets.
Fig. 8 is the schematic diagram of the automatic material transport device of one embodiment of the disclosure, wherein reflecting plate is in second
It sets.
Fig. 9 is the loading plate of the automatic material transport device of one embodiment of the disclosure and the top view of reflecting plate, wherein anti-
It penetrates plate and is in first position.
Figure 10 is the loading plate of the automatic material transport device of one embodiment of the disclosure and the side view of reflecting plate, wherein
Reflecting plate is in first position.
Figure 11 is the loading plate of the automatic material transport device of one embodiment of the disclosure and the side view of reflecting plate, wherein
Reflecting plate is in the second position.
Figure 12 is the partial enlarged view of part A in Figure 10.
Figure 13 is the partial enlarged view of part B in Figure 11.
Figure 14 is the flow chart of automatic material transport method.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that this is practical new
The design of example embodiment more comprehensively and completely, and is comprehensively communicated to those skilled in the art by type.In the figure in order to
Clearly, it may be exaggerated the thickness of region and layer.Identical appended drawing reference indicates same or similar structure in figure, thus will
Omit their detailed description.
In addition, described feature, structure or characteristic can be incorporated in one or more implementations in any suitable manner
In example.In the following description, many details are provided to provide and fully understand to the embodiments of the present invention.So
And it will be appreciated by persons skilled in the art that the technical solution of the utility model can be practiced without in the specific detail
It is one or more, or can be using other methods, constituent element, material etc..In other cases, it is not shown in detail or describes public affairs
Know structure, material or operation to avoid the major technique intention of fuzzy the utility model.
In the related technology, it is moved in order to avoid appearance is double, proposes following automatic material conveyer:
Referring to figs. 1 to Fig. 4, automatic material conveyer includes automation overhead traveling crane 1, loading plate 2, double moves in sensor 3
And reflecting plate 4.The double top moved in sensor 3 and be installed on automation overhead traveling crane 1, reflecting plate 4 are located at the bottom of loading plate 2.Two
Moving in sensor 3 again is photoelectric sensor.
When not being placed with wafer cassette 100 on loading plate 2, the double light for moving in the sending of sensor 3 can be by reflecting plate 4
Receive, and be reflected off back it is double move in sensor 3, thereby confirm that on loading plate 2 without wafer cassette.
When being placed with wafer cassette 100 on loading plate 2, the double light for moving in the sending of sensor 3 is blocked, can not be anti-
It penetrates plate 4 to receive and reflect, thereby confirms that on loading plate 2 there is wafer cassette.
Wafer cassette is generally transparent, and internal chip is black or colour, therefore the chip of black or colour can hinder
It keeps off and exposes to reflecting plate from the double light for moving in sensor sending.
However, as shown in figure 5, when non-wafer 200 in wafer cassette 100, the wafer cassette 100 being placed on loading plate 2 is
Transparent, the double light for moving in the sending of sensor 3 can pass through wafer cassette 100 and expose to reflecting plate 4, and be reflected off back double
Move in sensor 3, thereby confirm that on loading plate 2 without wafer cassette, to cause to judge by accident, cause it is subsequent occur it is double move in ask
Topic.
The utility model provides a kind of automatic material transport device, as shown in fig. 6, including overhead traveling crane 10, loading plate 20, photoelectricity
Sensing mechanism 30 and reflecting mechanism 40.
Overhead traveling crane 10 is movably installed on overhead crane orbit.Loading plate 20 is located at 10 lower section of overhead traveling crane, has the first opposite table
Face S1 and second surface S2, first surface S1 are for carrying material.Photoelectricity sensing mechanism 30 is installed on overhead traveling crane 10.Such as Fig. 9 and
Shown in Figure 12, reflecting mechanism 40 includes trigger unit 41, reflecting plate 42 and driving section 43, and reflecting plate 42 and driving section 43 are located at carrying
The lower section of plate 20, trigger unit 41 are connect with reflecting plate 42 by driving section 43, and trigger unit 41 can be relative to about 20 loading plate
Activity, when first surface S1 is without material, one end of trigger unit 41 protrudes from the first surface S1 of loading plate, and reflecting plate 42 is in the
One position, as shown in figures 7 and 12；There are when material, one end of trigger unit 41 is pushed 20 first surface S1 of loading plate by material
And move downward, by 42 activity of the drive of driving section 43 reflecting plate to the second position, as shown in figure 8 and 13；At reflecting plate 42
When first position, reflecting plate 42 can receive the light from photoelectricity sensing mechanism 30, and reflect light back into photoelectricity sensing
Mechanism 30, photoelectricity sensing mechanism 30 generate the first signal；When reflecting plate 42 is in the second position, reflecting plate 42 cannot be received and be come from
The light of photoelectricity sensing mechanism 30, photoelectricity sensing mechanism 30 generate second signal.
In the present embodiment, automatic material transport device is applied to field of semiconductor manufacture, for shifting wafer cassette 100, object
Material is wafer cassette 100, and the first surface S1 of loading plate 20 is convexly equipped with the positioning column 110 for positioning wafer cassette 100, trigger unit 41
When not pushed by wafer cassette 100, that is, when being in original state, the height that trigger unit 41 protrudes from loading plate 20 is greater than positioning column
110 height.
In the present embodiment, the surface of reflecting plate 42 has reflectorized material.
In application process, due to pushing trigger unit 41 without wafer cassette 100 on loading plate 20, so that reflecting plate 42 is in first
When position, photoelectricity sensing mechanism 30 generates the first signal, confirms on loading plate 20 without wafer cassette 100.
There are when wafer cassette 100 on loading plate 20, since wafer cassette 100 pushes trigger unit 41, so that 42 activity of reflecting plate
To the second position, this position cannot receive the light from photoelectricity sensing mechanism 30, and photoelectricity sensing mechanism 30 generates second signal,
Confirm that there are wafer cassettes 100 on loading plate 20.
Therefore, the reflecting plate 42 of the utility model can based on whether have the case where wafer cassette 100 and change self-position,
So that photoelectricity sensing mechanism 30 generates corresponding sensing signal.It is fixed from animal compared to reflecting plate 42 in the related technology
Expect conveyer, the automatic material transport device of the utility model, which can accurately sense wafer cassette 100, whether there is, even if wafer
Non-wafer in box 100 will not generate erroneous judgement situation.Also, the utility model has the advantages of simple structure, is easy to implement.
In the present embodiment, as shown in Figure 10 to Figure 13, driving section 43 includes the first engaging section 431 and the second engaging section 432,
First engaging section 431 is fixedly connected with trigger unit 41, and the second engaging section 432 is connect with reflecting plate 42, the first engaging section 431 and
Two engaging sections 432 engagement, wherein the first engaging section 431 is rack gear, and the second engaging section 432 is gear, 41 motion process of trigger unit
In can via the first engaging section 431 and the second engaging section 432 transmission so that reflecting plate 42 in first position and the second position
Between activity.
It should be appreciated that the form of the first engaging section 431 and the second engaging section 432 is without being limited thereto, for example, the first engaging section
431 be gear, and the second engaging section 432 is rack gear.
In the present embodiment, as shown in Figure 10 to Figure 13, one end of the first engaging section 431 and the other end of trigger unit 41 are fixed
Connection, and it is coaxial with trigger unit 41, and reflecting mechanism 40 further includes stopper section 46, and the first engaging section 431 is fixed in stopper section 46
One end, when reflecting plate 42 is in first position, stopper section 46 is resisted against second surface S2, as shown in figure 12.Therefore, pass through setting
Stopper section 46, so that trigger unit 41, when not pushed by external force, position can be limited by stopper section 46.
In the present embodiment, reflecting mechanism 40 further includes elastic portion (not shown), is connect with trigger unit 41, such as Figure 12 institute
Show, when trigger unit 41 is not pressed down by external force, reflecting plate 42 is in first position, and elastic portion is in free state；Trigger unit 41
When being pressed down by external force, reflecting plate 42 is in the second position, and deformation occurs for elastic portion, as shown in figure 13；After external force revocation, triggering
Portion 41 is risen by the elastic restoring force of elastic portion, so that reflecting plate 42 restores to be in first position.
Elastic portion is, for example, spring, position can be arranged according to it and select type appropriate.
For example, elastic portion is compressed spring, that is, free state is elongation, is able to bear inward pressure.Trigger unit 41
When being pressed down by external force, elastic portion is compressed, and reflecting plate 42 is in the second position, and after external force revocation, trigger unit 41 passes through elasticity
The elastic restoring force in portion rises, so that reflecting plate 42 is in first position.
Alternatively, elastic portion is extension spring, that is, free state is compression, is able to bear outside pulling force.Trigger unit 41
When being pressed down by external force, elastic portion is stretched, and reflecting plate 42 is in the second position, and after external force revocation, trigger unit 41 passes through elasticity
The elastic restoring force in portion rises, so that reflecting plate 42 is in first position.
Therefore, by the way that elastic portion is arranged, so that after external force revocation, that is, when without wafer cassette 100, trigger unit 41 can be quick
Rise, restore to initial position, correspondingly, reflecting plate 42 restores to first position, to avoid photoelectricity sensing mechanism 30 is influenced
Sensing.
When reflecting plate 42 is in first position, wherein at first position, reflecting plate 42 is parallel to each other with loading plate 20,
In the present embodiment, at first position, reflecting plate 42 is in a horizontal position；When reflecting plate 42 is in the second position, wherein
When two positions, reflecting plate 42 is generally perpendicular to each other with loading plate 20, in the present embodiment, at the second position, and reflecting plate 42 and water
The angle that prosposition is set is 80 ° to 100 °.In the present embodiment, when reflecting plate 42 is in the second position, reflecting plate 42 is in vertical position
It sets, that is, the angle of reflecting plate 42 and horizontal position is 90 °.In the present embodiment, reflecting plate 42 is in horizontal position and vertical position
Between change.
It should be appreciated that the position of reflecting plate 42 is without being limited thereto, it can position according to photoelectricity sensing mechanism 30, photosignal sense
Path etc. is answered, it is corresponding to change.
In the present embodiment, as shown in Figures 9 and 10, reflecting mechanism 40 further includes that mounting base 44, interlocking lever 45 and bearing (do not show
Out), bearing is assemblied in interlocking lever 45, and reflecting plate 42 is set by interlocking lever 45 and the rotatable connection of mounting base 44, mounting base 44
It is placed in the second surface S2 of loading plate 20, the second engaging section 432 is fixedly connected with interlocking lever 45, and the second engaging section 432 rotates through
Reflecting plate 42 is able to drive in journey to rotate between the first location and the second location.Wherein, the quantity of mounting base 44 can be a pair,
Its opposite sides for being symmetrically set to reflecting plate 42, driving section 43 can a neighbouring wherein mounting bases 44.
It should be appreciated that the mounting means of reflecting plate 42 is without being limited thereto, it is any to can be realized reflecting plate 42 and loading plate, transmission
The mechanical connection manner that portion 43 connects is applicable.
In addition, the quantity of reflecting mechanism 40 is one or more.
In the present embodiment, the quantity of reflecting mechanism 40 is one, can be located at the lower section at the middle part of loading plate 20.
In other embodiments, the quantity of reflecting mechanism 40 can be multiple, and the lower section at the middle part of loading plate 20 is uniform
Distribution.Multiple reflecting mechanisms 40 can also share a driving section 43 by corresponding 43 separate transmission of driving section.
In the present embodiment, automatic material transport device may also include control mechanism (not shown), can receive from light
The signal of electrical sensing mechanism 30.
Specifically, as shown in figure 14, when reflecting plate can be received from the light of photoelectricity sensing mechanism, photoelectricity sensing
Mechanism generates the first signal, and the first signal indicates on loading plate without material, and control mechanism, which is able to respond, controls day in the first signal
The grasping mechanism of vehicle transfers material in this station.
When reflecting plate does not receive from the light of photoelectricity sensing mechanism, photoelectricity sensing mechanism generates second signal, the
Binary signal indicates there is material on loading plate, and control mechanism, which is able to respond, moves to next decentralization work in second signal control overhead traveling crane
Position.When to next decentralization station, the above method is repeated, is judged on the station with the presence or absence of material.The utility model provides one
Kind automatic material transport method, is executed using above-mentioned automatic material transport device, comprising:
Overhead traveling crane moves to above the loading plate of a station, according to the signal that photoelectricity sensing mechanism issues, control overhead traveling crane movement；
Wherein, when photoelectricity sensing mechanism generates the first signal, the grasping mechanism for controlling overhead traveling crane transfers material in this station；
When photoelectricity sensing mechanism generates second signal, control overhead traveling crane moves to next decentralization station.To next decentralization
When station, the above method is repeated, is judged on the station with the presence or absence of material.
Therefore, by the automatic material carrying device and method of the utility model, can be accurately judged to each station is
No existing material, such as wafer cassette, so that it is guaranteed that accurately transferring wafer cassette in each station.Even if non-wafer in wafer cassette,
Erroneous judgement situation will not be generated.Also, the utility model has the advantages of simple structure, is easy to implement, and does not influence to transfer efficiency.
In conclusion the reflecting plate of the utility model can based on whether have the case where wafer cassette and change self-position,
So that photoelectricity sensing mechanism generates corresponding sensing signal.It is removed compared to the fixed automatic material of reflecting plate in the related technology
System is sent, the automatic material transport device of the utility model, which can accurately sense wafer cassette, whether there is, even if nothing in wafer cassette
Chip will not generate erroneous judgement situation.Also, the utility model has the advantages of simple structure, is easy to implement.
Although exemplary embodiment describes the utility model with reference to several, it is to be understood that, term used is explanation
With term exemplary, and not restrictive.Since the utility model can be embodied in a variety of forms without departing from practical new
The spirit or essence of type, it should therefore be appreciated that above-described embodiment is not limited to any of the foregoing details, and should be in appended claims
Defined by widely explain in spirit and scope, therefore fall into whole change and modification in claim or its equivalent scope
It all should be appended claims to be covered.
Claims (15)
1. a kind of automatic material transport device characterized by comprising
Overhead traveling crane is movably installed on overhead crane orbit；
Loading plate is located at below the overhead traveling crane, has opposite first surface and second surface, the first surface is for carrying
Material；
Photoelectricity sensing mechanism is installed on the overhead traveling crane；And
Reflecting mechanism, including trigger unit, reflecting plate and driving section, the reflecting plate and the transmission portion are in the loading plate
Lower section, the trigger unit are connect with the reflecting plate by the driving section, and the trigger unit can be relative to the loading plate
Up and down, when the first surface is without material, one end of the trigger unit protrudes from the first surface of the loading plate,
The reflecting plate is in first position；The first surface of the loading plate is there are when the material, and the one of the trigger unit
End is pushed and is moved downward by the material, drives the reflecting plate activity to the second position by the driving section；It is described anti-
When penetrating plate and being in the first position, the reflecting plate can receive the light from the photoelectricity sensing mechanism, and by light
It is reflected back the photoelectricity sensing mechanism, the photoelectricity sensing mechanism generates the first signal；The reflecting plate is in the second
When setting, the reflecting plate cannot receive the light from the photoelectricity sensing mechanism, and the photoelectricity sensing mechanism generates the second letter
Number.
2. automatic material transport device according to claim 1, which is characterized in that the driving section includes the first engaging section
With the second engaging section, first engaging section is fixedly connected with the trigger unit, and second engaging section and the reflecting plate connect
It connects, first engaging section and second engaging section engagement, can be nibbled via described first in the trigger unit motion process
The transmission of conjunction portion and second engaging section is so that the reflecting plate is movable between the first position and the second position.
3. automatic material transport device according to claim 2, which is characterized in that first engaging section is rack gear, institute
Stating the second engaging section is gear.
4. automatic material transport device according to claim 3, which is characterized in that the reflecting mechanism further includes installation
Seat, interlocking lever and bearing, the bearing are assemblied in the interlocking lever, and the reflecting plate passes through the interlocking lever and the mounting base
Rotatable connection, the mounting base are set to the second surface of the loading plate, second engaging section and the company
Lever is fixedly connected, and the reflecting plate is able to drive in the second engaging section rotary course in the first position and described the
It is rotated between two positions.
5. automatic material transport device according to claim 4, which is characterized in that one end of first engaging section and institute
The other end for stating trigger unit is fixedly connected, and coaxial with the trigger unit, and the reflecting mechanism further includes stopper section, the backstop
One end of first engaging section is fixed in portion, and when the reflecting plate is in the first position, the stopper section is resisted against institute
State second surface.
6. automatic material transport device according to claim 4, which is characterized in that the reflecting mechanism further includes elasticity
Portion is connect with the trigger unit, and when the trigger unit is not pressed down by external force, the reflecting plate is in the first position,
The elastic portion is in free state；When the trigger unit is pressed down by external force, the reflecting plate is in the second position, institute
Stating elastic portion, deformation occurs；After external force revocation, the trigger unit is risen by the elastic restoring force of the elastic portion, so that described
Reflecting plate restores to be in the first position.
7. automatic material transport device according to claim 4, which is characterized in that the quantity of the mounting base is a pair,
Its opposite sides for being symmetrically set to the reflecting plate, the neighbouring wherein mounting base in the driving section.
8. automatic material transport device according to claim 4, which is characterized in that the reflecting plate is in described first
When setting, the reflecting plate is parallel to each other with the loading plate；When the reflecting plate is in the second position, the reflecting plate with
The angle of the loading plate is 80 ° to 100 °.
9. automatic material transport device according to claim 8, which is characterized in that the reflecting plate is in described first
When setting, the reflecting plate is in a horizontal position；When the reflecting plate is in the second position, the reflecting plate and the level
Position is mutually perpendicular to.
10. automatic material transport device according to claim 9, which is characterized in that the reflecting plate is in described second
When position, the reflecting plate is in a vertical position.
11. automatic material transport device according to claim 1, which is characterized in that the quantity of the reflecting mechanism is one
It is a or multiple.
12. automatic material transport device according to claim 11, which is characterized in that the quantity of the reflecting mechanism is one
It is a, it is located at the lower section at the middle part of the loading plate.
13. automatic material transport device according to claim 11, which is characterized in that the quantity of the reflecting mechanism is more
It is a, it is uniformly distributed below the middle part of loading plate.
14. automatic material transport device according to claim 1, which is characterized in that the surface of the reflecting plate has anti-
Luminescent material.
15. automatic material transport device according to claim 1, which is characterized in that the automatic material transport device is also
Including control mechanism, the control mechanism, which is able to respond, transfers object in the grasping mechanism that first signal controls the overhead traveling crane
Material, and be able to respond and move to next decentralization station in the second signal control overhead traveling crane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821936052.XU CN209169119U (en) | 2018-11-22 | 2018-11-22 | A kind of automatic material transport device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821936052.XU CN209169119U (en) | 2018-11-22 | 2018-11-22 | A kind of automatic material transport device |
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| Publication Number | Publication Date |
|---|---|
| CN209169119U true CN209169119U (en) | 2019-07-26 |
Family
ID=67339660
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821936052.XU Active CN209169119U (en) | 2018-11-22 | 2018-11-22 | A kind of automatic material transport device |
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| Country | Link |
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| CN (1) | CN209169119U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021175182A1 (en) * | 2020-03-02 | 2021-09-10 | 长鑫存储技术有限公司 | Material transportation system, and overhead hoist transfer traveling region particle monitoring system and monitoring method |
-
2018
- 2018-11-22 CN CN201821936052.XU patent/CN209169119U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021175182A1 (en) * | 2020-03-02 | 2021-09-10 | 长鑫存储技术有限公司 | Material transportation system, and overhead hoist transfer traveling region particle monitoring system and monitoring method |
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