CN209162249U - A kind of single crystal growing furnace cooling system - Google Patents
A kind of single crystal growing furnace cooling system Download PDFInfo
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- CN209162249U CN209162249U CN201821482965.9U CN201821482965U CN209162249U CN 209162249 U CN209162249 U CN 209162249U CN 201821482965 U CN201821482965 U CN 201821482965U CN 209162249 U CN209162249 U CN 209162249U
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- exhaust pipe
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Abstract
A kind of single crystal growing furnace cooling system disclosed by the utility model, including air extractor, exhaust pipe and cooling pipe.Air extractor one end connects exhaust pipe, and exhaust pipe is connected to monocrystalline furnace body, and the air extractor other end connects cooling pipe, and cooling pipe is connected to monocrystalline furnace body；Air extractor is extracted high-temperature gas out by exhaust pipe out of single crystal growing furnace body and is flowed into monocrystalline furnace body 1 from cooling pipe.I.e. the air extractor of the utility model is used to extract high-temperature gas out out of single crystal growing furnace body by exhaust pipe and flow into single crystal growing furnace body from cooling pipe, cools down high-temperature gas in vitro in single crystal growing furnace.Blowing out cooling time is shortened, unit production capacity is increased to reach rapid cooling thermal field component purpose by cooperating exhaust pipe and cooling pipe to carry out interior circulation heat exchange to hot-air in single crystal growing furnace using air extractor, and then achievees the effect that mention and produces synergy.
Description
Technical field
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of single crystal growing furnace cooling system.
Background technique
In czochralski silicon monocrystal preparation process, thermal field of single crystal furnace is in high temperature (1420 DEG C ± 4 DEG C), low pressure (1-3kPa) atmosphere
In, after the completion of crystal pulling, temperature of thermal field need to be down to 300 DEG C or less ensures that thermal field component is not carried out tearing furnace open again by oxidation.But due to
It is limited by high vacuum condition, after single crystal growing furnace blowing out, can only passively be cooled down using recirculated water in monocrystalline furnace sandwich, due to
Single crystal growing furnace heat insulating ability is preferable, and thermal field heat dissipation is slower, causes the blowing out cooling work step used time longer, working hour waste is more serious.
Utility model content
The purpose of this utility model is to provide a kind of single crystal growing furnace cooling systems, and it is cooling to solve existing single crystal growing furnace blowing out
When the slow problem of existing radiating rate.
The technical scheme adopted by the utility model is a kind of single crystal growing furnace cooling system, which is characterized in that the system
Including air extractor, exhaust pipe and cooling pipe；
One end of the air extractor is connected to the exhaust pipe, and the exhaust pipe is connected to monocrystalline furnace body, described
The other end of air extractor is connected to the cooling pipe, and the cooling pipe is connected to the monocrystalline furnace body；
The air extractor is used to extract high-temperature gas out out of described single crystal growing furnace body by the exhaust pipe and from described
Cooling pipe flows into the single crystal growing furnace body, cools down the high-temperature gas in vitro in the single crystal growing furnace.By utilizing pumping dress
It sets cooperation exhaust pipe and cooling pipe and interior circulation heat exchange is carried out to hot-air in single crystal growing furnace, to reach rapid cooling thermal
Field component purpose, shortens blowing out cooling time, increases unit production capacity, and then achievees the effect that mention and produce synergy.
Further, the system also includes first cooling jackets；First cooling jacket is set in the cooling tube
On road.Heat exchange is carried out using the cold water in cooling jacket, further improves the cooling efficiency to high-temperature gas.
Preferably, the exhaust pipe is provided with a plurality of, one end of a plurality of exhaust pipe with the monocrystalline furnace body
Connection, the other end of a plurality of exhaust pipe are connected to the air extractor.Do not changing other component structure, only need by
Exhaust pipe setting is a plurality of, and the corresponding multiplication of cooling efficiency can be realized.
Further, the system also includes second cooling jackets；Second cooling jacket is set in the exhaust pipe
On road.By the way that cooling jacket is arranged on exhaust pipe, so that high-temperature gas increases in the external heat exchanger time of single crystal growing furnace
Add, further improves the cooling efficiency of high-temperature gas.
Further, the system also includes cooling ball valves；One end of the cooling ball valve and the air extractor connect
Logical, the other end of the cooling ball valve is connected to the cooling pipe.
Example, the air extractor is dry screw vacuum pump.
Further, the system also includes vacuum evacuation devices；The vacuum evacuation device is connected to the exhaust pipe.
In this way vacuum evacuation device and exhaust pipe can common pall, reduce the improvement cost to original structure.
Further, the system also includes: vacuumize ball valve；Described one end for vacuumizing ball valve and the exhaust pipe
Connection, the other end for vacuumizing ball valve are connected to the vacuum evacuation device.
Example, the vacuum means are set to wet type slide valve pump.
Further, the vacuum evacuation device, air extractor and exhaust pipe are connected by three-way connector.Utilize threeway
Connector realizes the easy connection of vacuum evacuation device, air extractor and exhaust pipe.
The beneficial effects of the utility model are: a kind of single crystal growing furnace cooling system of the utility model, solves existing list
Existing radiating rate slow problem when brilliant furnace blowing out is cooling.Specifically have the advantage that
1, after blowing out its using air extractor cooperate exhaust pipe and cooling pipe to hot-air in single crystal growing furnace carry out in follow
Ring heat exchange reaches and is quickly cooled down thermal field component purpose, shortens blowing out cooling time, increases unit production capacity, reaches and propose production synergy
Effect；
2, the heat exchanger effectiveness external in single crystal growing furnace of hot-air in single crystal growing furnace is further improved using cooling jacket, shortened
Blowing out cooling time；
3, exhaust pipe and the vacuum evacuation device common pall during normal crystal pulling, further reduced improvement cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the single crystal growing furnace cooling system of the utility model embodiment 1；
Fig. 2 is the structural schematic diagram of the single crystal growing furnace cooling system of the utility model embodiment 2.
In figure, 1. monocrystalline furnace bodies, 2. exhaust pipes, 3. cooling pipes, 4. air extractors, 5. cooling ball valves, 6. are vacuumized
Device, 7. vacuumize ball valve.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawings and detailed description.
Embodiment 1
The present embodiment provides a kind of single crystal growing furnace cooling system, structure is as shown in Figure 1, include air extractor 4, exhaust pipe
Road 2 and cooling pipe 3.4 one end of air extractor connects exhaust pipe 2, and exhaust pipe 2 is connected to monocrystalline furnace body 1, air extractor
4 other ends connect cooling pipe 3, and cooling pipe 3 is connected to monocrystalline furnace body 1；Air extractor 4 passes through exhaust pipe 2 from single crystal growing furnace
It extracts high-temperature gas in body 1 out and is flowed into monocrystalline furnace body 1 from cooling pipe 3.I.e. the air extractor 4 of the utility model is for passing through
Exhaust pipe 2 is extracted high-temperature gas out out of monocrystalline furnace body 1 and is flowed into monocrystalline furnace body 1 from cooling pipe 3, makes high-temperature gas in list
It is cooling outside brilliant furnace body 1.By cooperating exhaust pipe 2 and cooling pipe 3 to carry out hot-air in single crystal growing furnace 1 using air extractor 4
Interior circulation heat exchange shortens blowing out cooling time to reach rapid cooling thermal field component purpose, increases unit production
Can, and then achieve the effect that mention and produce synergy.
The exhaust pipe 2 of the utility model is at least arranged one, also can be set two, it is even more；In a plurality of feelings
Under condition, one end of a plurality of exhaust pipe 2 is connected to monocrystalline furnace body 1, the other end of a plurality of exhaust pipe 2 with air extractor 4
Connection.And the exhaust pipe 2 in the present embodiment is arranged two, one end of this two exhaust pipes 2 is connected with monocrystalline furnace body 1
The logical, other end is connected after being connected with air extractor 4.
In the present embodiment, air extractor 4 is dry screw vacuum pump.Dry screw vacuum pump gas outlet discharge gas does not mix
Miscellaneous any impurity gas and oiliness gas, with its pumping speed range, wide, compact-sized, pumping chamber original part is without abrasion, service life length, energy consumption
The features such as low, without oily pollution, ensure that the gas for being sent back to monocrystalline furnace body 1 without the gas of the pollution thermal field such as greasy dirt.
Preferably, the present embodiment is arranged with the first cooling jacket to enhance cooling effect on cooling pipe 3.Into one
Step, the present embodiment is still arranged with the second cooling jacket on exhaust pipe 2.
Embodiment 2
Cooling system of single crystal furnace provided in this embodiment, structure as shown in Fig. 2, the present embodiment embodiment 1 structure
On the basis of, further include cooling ball valve 5, vacuum evacuation device 6 and vacuumizes ball valve 7.One end of cooling ball valve 5 and air extractor 4 connect
Logical, the other end of cooling ball valve 5 is connected to cooling pipe 3.Vacuum evacuation device 6 is also connected to exhaust pipe 2.Vacuumize ball valve 7
One end be connected to exhaust pipe 2, the other end for vacuumizing ball valve 7 is connected to vacuum evacuation device 6, i.e., vacuum evacuation device 6 is close
The side of exhaust pipe 2, which is provided with, vacuumizes ball valve 7.In the present embodiment, vacuum evacuation device 6 is wet type slide valve pump.
Example, the vacuum evacuation device 6, air extractor 4 and exhaust pipe 2 of the present embodiment pass through three-way connector phase
Even.
In the present embodiment, in normal crystal pulling operational process, the cooling ball valve 5 of 4 place pipeline of air extractor is closed, by wet
Formula slide valve pump makes to keep constant negative pressure in furnace to vacuumizing in monocrystalline furnace body 1, and the volatile matter generated during crystal pulling passes through slide valve
It pumped oil strain to be filtered, and after crystal pulling blowing out, closed wet type slide valve pump and its vacuumize ball valve 7.Open air extractor 4 and institute
In the cooling ball valve 5 of pipeline, the remaining high-temperature gas of thermal field in monocrystalline furnace body 1 is extracted out by air extractor 4, in high-temperature gas
When by exhaust pipe 2, using the cooling water that included cooling jacket is passed through above of exhaust pipe 2 and the high-temperature gas that passes through into
Row heat exchange achievees the effect that cooling gas, and gas after cooling is after the filtering of air extractor 4 through cold on supercooling pipeline 3
But water jacket carries out secondary heat exchange, is further sent back in furnace body after cooling again and carries out hot friendship with high-temperature gas remaining in thermal field
It changes, is thusly-formed closed inner circulation structure, high-temperature gas is cooled down, achieve the effect that be quickly cooled down single crystal growing furnace.
Claims (10)
1. a kind of single crystal growing furnace cooling system, which is characterized in that the system comprises air extractor, exhaust pipe and cooling tubes
Road；
One end of the air extractor is connected to the exhaust pipe, and the exhaust pipe is connected to monocrystalline furnace body, the pumping
The other end of device is connected to the cooling pipe, and the cooling pipe is connected to the monocrystalline furnace body；
The air extractor out of described single crystal growing furnace body for extracting high-temperature gas out by the exhaust pipe and from the cooling
Pipeline flows into the single crystal growing furnace body, cools down the high-temperature gas in vitro in the single crystal growing furnace.
2. a kind of single crystal growing furnace cooling system as described in claim 1, which is characterized in that the system also includes: first is cold
But water jacket；
First cooling jacket is set on the cooling pipe.
3. a kind of single crystal growing furnace cooling system as described in claim 1, which is characterized in that the exhaust pipe is provided with more
Item, one end of a plurality of exhaust pipe are connected to the monocrystalline furnace body, and the other end of a plurality of exhaust pipe is and institute
State air extractor connection.
4. a kind of single crystal growing furnace cooling system as claimed in claim 1 or 3, which is characterized in that the system also includes: second
Cooling jacket；
Second cooling jacket is set on the exhaust pipe.
5. a kind of single crystal growing furnace cooling system as described in claim 1, which is characterized in that the system also includes: cooling ball
Valve；
One end of the cooling ball valve is connected to the air extractor, and the other end and the cooling pipe of the cooling ball valve connect
It is logical.
6. a kind of single crystal growing furnace cooling system as claimed in claim 1 or 5, which is characterized in that the air extractor is dry type
Screw vacuum pump.
7. a kind of single crystal growing furnace cooling system as described in claim 1, which is characterized in that the system also includes: it vacuumizes
Device；
The vacuum evacuation device is connected to the exhaust pipe.
8. a kind of single crystal growing furnace cooling system as claimed in claim 7, which is characterized in that the system also includes: it vacuumizes
Ball valve；
Described one end for vacuumizing ball valve is connected to the exhaust pipe, and the other end for vacuumizing ball valve is vacuumized with described
Device connection.
9. a kind of single crystal growing furnace cooling system as claimed in claim 7, which is characterized in that it is sliding that the vacuum means are set to wet type
Valve pump.
10. such as a kind of described in any item single crystal growing furnace cooling systems of claim 7 to 9, which is characterized in that the vacuum means
It sets, air extractor is connected with exhaust pipe by three-way connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821482965.9U CN209162249U (en) | 2018-09-11 | 2018-09-11 | A kind of single crystal growing furnace cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821482965.9U CN209162249U (en) | 2018-09-11 | 2018-09-11 | A kind of single crystal growing furnace cooling system |
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| Publication Number | Publication Date |
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| CN209162249U true CN209162249U (en) | 2019-07-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821482965.9U Active CN209162249U (en) | 2018-09-11 | 2018-09-11 | A kind of single crystal growing furnace cooling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
-
2018
- 2018-09-11 CN CN201821482965.9U patent/CN209162249U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
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